CN217586251U - Low-cost high-resolution single-point scanning laser beam quality measuring device - Google Patents
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Abstract
The utility model discloses a low-cost high-resolution single-point scanning laser beam quality measuring device, which comprises a focusing mirror, a light-passing plate and a single-tube detector; the light transmission plate is provided with a light transmission small hole, and the focusing mirror, the light transmission small hole and the single-tube detector are sequentially arranged along the propagation direction of the light path. The utility model realizes the image acquisition of the laser facula in the invisible light wave band, thereby realizing the measurement of the quality of the laser beam; furthermore, the whole spot pattern of the laser beam can be obtained through the arrangement of the XY moving platform, the obtained image of the laser spot is not deformed, the distribution condition of the intensity of the laser spot is directly reflected, and meanwhile, the precision of the image can be controlled through the selection of the precision of the XY moving platform; the light spots are subdivided and collected by the aid of the magnifying lens and the time sequence pulses in different directions, and high-precision light spots are collected by means of simple and low-cost means.
Description
Technical Field
The utility model relates to a laser beam quality measurement device of low-cost high resolution single-point scanning belongs to non-visible light wave band laser beam quality measurement technical field.
Background
As shown in fig. 1, the photoresponse spectrum of a commonly used CMOS camera shows that its cutoff wavelength in the long-wavelength direction is slightly larger than 1000nm (the cutoff position of photoresponse is set at 20%); the light response wavelength of a common CCD camera is slightly longer than that of a CMOS in the long-wave direction, but also extends to be slightly less than 1100nm; for lasers with wavelengths longer than 1000nm (for CMOS cameras) or 1080nm (for CCD cameras), the commonly used silicon-based digital cameras cannot detect them.
YAG (M represents various doped metals) laser with wavelength larger than 1064nm, and middle infrared laser, even infrared CO with long wavelength of 10.6um, which are very active in recent years 2 Most of the laser light exceeds the light response wave band of the silicon-based CMOS/CCD camera, and a digital image cannot be obtained. The inability to obtain digitized images of the laser beam makes it impossible to quantitatively measure the quality of the laser beam, which is a technical problem to be solved.
Aiming at the technical problems, an InGaAs-based near-infrared camera can be adopted to obtain a short-wave infrared laser spot image at present, the intrinsic spectral response of the InGaAs-based near-infrared camera can cover a 1.7um wave band, and the extensibility of the InGaAs-based near-infrared camera can even cover 2.5um; the image of the laser spot in the middle infrared band is obtained by using InSb-based and MCT-based middle infrared cameras (3 um-5 um); for spot detection of a 10.6um long-wavelength laser such as CO2, a silicon-based microbolometer (microbolometer) long-wavelength camera may be used to acquire an image of a laser beam. However, the prices of the above short-wave infrared, medium-wave infrared and long-wave infrared cameras are very high, and the scale and resolution of the area array are far inferior to those of silicon-based CMOS cameras, which is difficult to be widely popularized in industrial applications.
In the prior art, there are also a few reports related to analyzing the quality of a laser beam by using a photoelectric detector, for example, a patent with the application number of 201610215402.2 discloses a fiber laser beam quality measuring method based on a photoelectric detector and a CCD camera, and the patent adopts the CCD camera to acquire an image of a laser beam and is only suitable for quality evaluation of the laser beam of visible light; although the patent mentions a photoelectric detector, the outline of the laser spot is obtained only by a micrometer screw, and no attempt is made to obtain the image of the laser spot of the laser beam, and no image of the laser spot related to the invisible waveband is provided. Patent No. 201410665216.X discloses a pulse laser beam quality synchronous measurement system and a synchronous control method thereof, wherein a photoelectric detector in the patent is only used for acquiring a trigger signal appearing in a laser pulse and informing a CCD camera to take a picture to acquire an image, and the CCD camera is also impossible to acquire an image of a light spot of an invisible laser beam. The patent with the application number of 200520044252.0 discloses a device for measuring the parallelism of laser beams, which utilizes a 4-quadrant detector to acquire spot symmetry information, but not to acquire images; far from this application, there is no substantial comparability.
SUMMERY OF THE UTILITY MODEL
The utility model provides a laser beam quality measurement device of low-cost high resolution single-point scanning has realized the acquisition and the measurement of the laser facula low cost, high resolution, high reliability of non-visible light wave band, is convenient for extensively promote in industrial application.
In order to solve the technical problem, the utility model discloses the technical scheme who adopts as follows:
a low-cost high-resolution single-point scanning laser beam quality measuring device comprises a focusing mirror, a light-transmitting plate and a single-tube detector; the light transmission plate is provided with a light transmission small hole, and the focusing mirror, the light transmission small hole and the single-tube detector are sequentially arranged along the propagation direction of the light path.
Due to the specific frequency-selective characteristic of the laser, the laser can only stably radiate at a specific wavelength, so that the wavelength of the laser radiation can only exist at a plurality of discrete wavelength positions; similarly, the wavelength response of the detector has a certain range, and beyond the wavelength response range, the detector cannot detect the wavelength response. Therefore, in order to measure the optical signal of the laser, a detector with a proper response wavelength needs to be selected, and the detector is not limited to be silicon-based.
The wavelength of the laser beam beyond the detection imaging capability of silicon-based CCD and CMOS cameras may be in the ultraviolet band (short wavelength side of the optical response of silicon) or in the infrared band (long wavelength side of the optical response of silicon).
For laser with specific wavelength, such as infrared laser, silicon-based CCD and CMOS cannot detect and image, but because the single-tube detector is adopted in the method, the cost of the sensor is greatly reduced, the method is technically not limited by silicon-based CCD and CMOS area-array cameras, and the corresponding single-tube detector can be freely selected according to the wavelength of the laser. Taking the detection of infrared laser as an example, except for a bolometer detector, a quantum type detector, or a pyroelectric type detector, or even a vacuum electronic type detector can be selected, so that all possible laser spots can be detected.
The application creatively provides an imaging method for obtaining laser spots through a single tube scanning method. By adopting the single-tube detector, the price is low, and the freedom degree of the detector selection is greatly enhanced.
Generally, the photosurface of a single-tube detector is relatively large, in the order of several millimeters; while the laser spot diameter is also typically on the order of a few millimeters. Therefore, the optical response of the single-tube detector can be measured by directly applying laser to the single-tube detector, but the image of the laser spot and the intensity distribution thereof cannot be obtained. In order to utilize single tube detector to acquire the image of laser facula and intensity distribution thereof, this application has designed a non-light tight aperture, and the diameter is preferred between 2um ~ 20um. And the light-transmitting plate is arranged at the upstream of the single-tube detector or is directly arranged on a protective window of the single-tube detector.
The diameter of the light-transmitting small hole cannot be made very small, which cannot be technically done, but when the diameter of the light-transmitting small hole is too small, the light flux which is transmitted to the photosensitive surface of the single-tube detector through the light-transmitting small hole is too low, even lower than the detection threshold of the single-tube detector, and the detection fails.
The pixel size of a conventional silicon-based CMOS camera is taken as a reference, for example, 3um to 5um, as the diameter of the light-transmitting aperture. The selection of the engineering parameters accords with the principle of engineering design, can be implemented, has reasonable performance, maintains lower cost, or accords with the principle of optimal cost performance.
The method aims to obtain the laser facula of the non-visible light wave band, but can also be applied to the laser of the visible light wave band; meanwhile, the method is not limited to only acquiring the image of the laser spot, and can be applied to scanning imaging of general images.
By adopting the measuring method of the laser beam quality measuring device with low cost and high resolution, the laser to be measured passes through the light-transmitting small hole after being focused by the focusing lens, and is scanned and imaged by the single-tube detector to obtain the digital image of the laser spot, and each parameter of the laser spot is quantitatively analyzed, so that the quantitative measurement and evaluation of the infrared laser beam quality are realized.
Quantitative analysis of various parameters of the light spot can be directly carried out by referring to the prior art, and if parameters related to the quality of the laser beam, such as the size, the ovality, the intensity distribution, the full width at half maximum and the like of the light spot can be obtained through calculation, detection and evaluation of the laser output quality are realized.
In order to improve the resolution, the low-cost high-resolution single-point scanning laser beam quality measuring device further comprises an XY moving platform, and the single-tube detector is mounted on the XY moving platform.
The laser spot diameter is typically in the order of a few millimeters, and the diameter of the light-transmissive aperture and the precision of the movement of the XY stage together define the pixel resolution of the laser spot image to be obtained.
The positioning precision of the XY moving platform is more than 5um, and the price is low; as the positioning accuracy decreases from 5um to 1um, the price of the xy moving platform increases gradually. The cost of the device can be controlled by selecting XY platforms with different positioning accuracy.
During measurement, the single-tube detector is placed at a focal plane of laser to be measured, and light response data is collected from the single-tube detector on the assumption that the diameter of the light-transmitting small hole is 5um and the XY moving platform moves 5um each time. When the single-tube detector sweeps the whole laser focal plane one step by one step along with the XY platform, a digitized picture of a laser spot is obtained. Because XY is the linear moving platform, so the image of the laser facula that obtains does not have the deformation, has directly reflected the distribution situation of laser facula intensity.
For example, when the diameter of the light-transmitting small hole is 5um, if an XY stage with a positioning accuracy of 5um is selected, the resolution of the image is substantially equal to that of a CMOS camera, but higher than that of an infrared camera, however, the cost is much lower than that of the infrared camera.
At present, the size of a pixel of a mainstream infrared camera is about 15um, for example, the diameter of a light-transmitting small hole is selected to be 15um, and the positioning precision of an XY platform can be selected to be 10um, so that the resolution of an acquired image of a laser spot is basically equal to that of the mainstream infrared camera, but the cost is greatly reduced.
When the light spot is scanned, the scanning is performed along a circular arc, the scanning does not have linear property, and a large error is necessarily introduced in subsequent data processing. And this application is preferred to be installed the light-passing board on the protection window of single tube detector, compares in opening the thief hole on the rotatory flat board, has not only avoided the great error that the circular arc scanning brought, and energy sampling is efficient simultaneously, and resolution ratio is higher.
The XY moving platform is arranged, during measurement, the single-tube detector is placed at the focal plane of the laser to be measured, and the single-tube detector gradually sweeps the whole focal plane of the laser to be measured under the drive of the XY moving platform to obtain laser spots.
The scanning imaging technology of the infrared laser spot can measure the large spot of which the diameter of the laser spot is larger than the target surface of the infrared camera besides being cheap relative to the infrared camera, and the large spot cannot be realized by the infrared camera.
The XY moving platform is used for realizing two-dimensional imaging of the laser spot, however, a spot with a fixed size can only be decomposed into a certain number of pixels due to the position positioning accuracy of the XY moving platform, that is, the resolution and the scale of the image are limited by the positioning accuracy of the XY moving platform. In order to increase the resolution of an image and to increase the scale of the image, it is necessary to use a high-precision XY stage, but the high-precision XY stage is expensive, which is contrary to the low-cost object. The scheme can be further used for realizing the acquisition of low-cost and high-precision images.
As one of the implementation schemes, in order to further improve the accuracy of laser spot image acquisition, the low-cost high-resolution single-point scanning laser beam quality measurement device further comprises a magnifying lens, and the focusing lens, the magnifying lens, the light-transmitting small hole and the single-tube detector are sequentially arranged along the light path propagation direction.
For example, the diameter 15um of the light-transmitting small hole is kept unchanged, and the positioning accuracy of the XY moving platform is also kept unchanged at 10um. At the moment, the subdivision acquisition of the whole laser spot is equivalently improved by amplifying the laser spot, the whole laser spot is represented by more pixels, and the spot detection accuracy is improved.
The laser spot is amplified to obtain a spatial subdivision image with higher laser spot. As a general knowledge, the space division of the infrared camera on the infrared laser spot is determined by the pixel area of the camera, for example, 17umX um, and once the infrared camera is selected, how many pixels a laser spot is divided into is determined.
Set up above-mentioned magnifying glass, during the measurement, the laser that awaits measuring is by single tube detector scanning formation of image behind focusing mirror, magnifying glass and printing opacity aperture in proper order, obtains the laser facula, through the amplification to the laser facula, improves the subdivision collection to whole laser facula, shows whole laser facula with more picture elements, improves the precision that the facula detected.
Besides the above-mentioned amplifying and detecting the laser spots to increase the number of the spots, as another implementation scheme, further, the spatial subdivision of the spots can be further realized by adopting an electric control method.
As one of the electric control realization schemes, the method realizes the higher spatial subdivision acquisition of the laser facula in the X or Y direction by controlling the acquisition time sequence pulse in the X or Y direction, and comprises the following specific steps:
a. the XY moving platform drives the single-tube detector to move to the yi or xi position in the Y or X direction;
b. a pulse generator is utilized to drive uniform pulses into a driving motor in the X or Y direction, so that the single-tube detector moves at a uniform speed in the X or Y direction;
c. when the single-tube detector moves to the area of the laser spot, the single-tube detector is turned on, and light intensity responses of different positions of the laser spot are periodically collected; and adjusting the uniform motion speed of the single-tube detector, and adjusting the frequency of data acquired from the single-tube detector to realize the adjustment of the resolution of the light spot image.
In the step b, the single-tube detector can also be directly driven by a linear motor so as to enable the single-tube detector to move at a constant speed in the X or Y direction.
By adopting the scheme, even if the positioning accuracy of the X or Y moving platform is poor, high-resolution imaging can be realized on the light spot as long as uniform motion can be realized;
as another implementation scheme of electric control, the acquisition of higher spatial subdivision images in the two-dimensional direction of laser spots is realized by controlling acquisition time sequence pulses in the X and Y directions, and the specific steps comprise:
a. a pulse generator is used for driving uniform pulses into driving motors in the X direction and the Y direction, so that the single-tube detector moves at a uniform speed in the X direction and the Y direction;
b. when the single-tube detector moves to the area of the laser spot, the single-tube detector is turned on, and light intensity responses of different positions of the laser spot are periodically collected; and adjusting the uniform motion speed of the single-tube detector, and adjusting the frequency of data acquired from the single-tube detector to realize the adjustment of the resolution of the light spot image.
In the step a, as long as the X axis and the Y axis both form uniform motion, the single-tube detector also moves uniformly in the direction of the resultant motion of the X axis and the Y axis. The single-tube detector can realize high-resolution two-dimensional imaging of laser spots by controlling the motion pulses of the X axis and the Y axis.
The special infrared camera is adopted to obtain the spot image of the laser beam, which is too expensive and difficult to be widely popularized in industrial application; the single-tube detector with the response capability to the corresponding laser wave band is adopted (only the single-tube detector is directly selected from the existing products sold in the market), image acquisition of the laser light spots of the non-visible light wave band is realized through research and development of the optical scheme, the mechanical scheme and the electric control scheme, and after the images are acquired, various parameters of the laser light spots can be quantitatively analyzed by adopting the existing method, so that quantitative measurement and evaluation of the quality of the laser light beams are realized.
The method is also suitable for collecting the images of the laser spots in the visible light wave band, and the images of the laser spots in the visible light wave band can be directly obtained by using cheap CMOS and CCD.
The technology not mentioned in the present invention refers to the prior art.
The utility model discloses the low-cost high-resolution single-point scanning's laser beam quality measuring device has realized the image acquisition to non-visible light wave band laser facula, and then realizes the measurement of laser beam quality; furthermore, the whole spot pattern of the laser beam can be obtained through the arrangement of the XY moving platform, the obtained image of the laser spot is not deformed, the distribution condition of the intensity of the laser spot is directly reflected, and meanwhile, the precision of the image can be controlled through the selection of the precision of the XY moving platform; the light spots are subdivided and collected by the aid of the magnifying lens and the time sequence pulses in different directions, and high-precision light spots are collected by means of simple and low-cost means.
Drawings
FIG. 1 is a spectral response spectrum of a conventional CMOS/CCD camera;
FIG. 2 is a diagram of a wavelength distribution of a conventional laser source;
FIG. 3 is a light path diagram of a low-cost high-resolution single-point scanning laser beam quality measuring apparatus according to embodiment 1;
FIG. 4 is a schematic view of the structure of the light-transmitting plate of the present invention;
FIG. 5 is an optical path diagram of a low-cost high-resolution single-point scanning laser beam quality measuring apparatus according to embodiment 2;
FIG. 6 is a laser spot pattern obtained in example 2;
FIG. 7 is an optical path diagram of a low-cost high-resolution single-point scanning laser beam quality measuring apparatus according to embodiment 3;
FIG. 8 is a control diagram of the X-direction timing pulses in embodiment 4;
FIG. 9 is a control diagram of X and Y direction timing pulses in embodiment 5;
in the figure, 1 is a focusing lens, 2 is a light-transmitting plate, 21 is a light-transmitting small hole, 3 is a single-tube detector, 4 is an infrared laser to be detected, 5 is an XY moving platform, and 6 is a magnifying lens.
Detailed Description
For a better understanding of the present invention, the following examples are provided to further illustrate the present invention, but the present invention is not limited to the following examples.
Example 1
As shown in fig. 3, a low-cost high-resolution single-point scanning laser beam quality measuring device includes a focusing mirror, a light-transmitting plate, and a single-tube detector; as shown in fig. 4, a light-transmitting hole with a diameter of 2 um-20 um is arranged on the light-transmitting plate, and the focusing mirror, the light-transmitting hole and the single-tube detector are sequentially arranged along the propagation direction of the light path; the light-transmitting plate is arranged on the protective window of the single-tube detector.
Due to the special frequency selection characteristic of the laser, the laser can be stably radiated only at a specific wavelength; the wavelength response of the detector also has a certain range, and in order to measure the optical signal of the laser, the detector with proper response wavelength needs to be selected and is not limited to silicon-based. And the corresponding single tube detector can be freely selected according to the wavelength of the laser. Taking the detection of infrared laser as an example, besides the bolometer detector, a quantum type detector, or a pyroelectric type detector, or even a vacuum electronic type detector may be selected.
The wavelength of the laser beam beyond the detection imaging capability of silicon-based CCD and CMOS cameras may be in the ultraviolet band (short wavelength side of the optical response of silicon) or in the infrared band (long wavelength side of the optical response of silicon). For laser with specific wavelength, such as infrared laser, silicon-based CCDs and CMOSs cannot detect imaging, but because of the single-tube detector, the cost of the sensor is greatly reduced, and technically, the method is not limited to silicon-based CCDs and CMOSs area-array cameras.
According to the method for measuring the quality of the laser beam by adopting the device, as shown in figure 3, laser to be measured passes through the light-transmitting small hole after being focused by the focusing lens, and is scanned and imaged by the single-tube detector, so that a digital image of a laser spot is obtained, various parameters of the laser spot are quantitatively analyzed, and quantitative measurement and evaluation of the quality of the infrared laser beam are realized. Quantitative analysis of various parameters of the light spot can be directly carried out by referring to the prior art, and if parameters related to the quality of the laser beam, such as the size, the ovality, the intensity distribution, the full width at half maximum and the like of the light spot can be obtained through calculation, detection and evaluation of the laser output quality are realized.
Example 2
On the basis of the embodiment 1, the following improvements are further made: as shown in fig. 5, the low-cost high-resolution single-point scanning laser beam quality measuring device further includes an XY moving platform, and the single-tube detector is mounted on the XY moving platform.
The diameter of the light-transmissive aperture and the accuracy of the movement of the XY stage together define the pixel resolution of the laser spot image to be obtained. During measurement, a single-tube detector is placed at a focal plane of laser to be measured, the diameter of a light-transmitting small hole is 5um in the example, when an XY moving platform moves for 5um, light response data is collected from the single-tube detector, and when the single-tube detector scans the focal plane of the whole laser along with the XY platform one step by one step, a digitalized picture of a laser spot is obtained, as shown in figure 6. Because XY is the linear moving platform, the image of the laser facula that obtains does not have the deformation, has directly reflected the distribution situation of laser facula intensity. By adopting the device, the large light spot of which the laser spot diameter is larger than the target surface of the infrared camera can be measured, which cannot be realized by the infrared camera.
The diameter value of the light-transmitting small hole is 5um, the positioning precision of the XY moving platform is 5um, the resolution of the image is basically equal to that of a CMOS camera, but is higher than that of an infrared camera, and the cost is much lower than that of the infrared camera. When the diameter of the light-transmitting small hole is selected to be 15um and the positioning precision of the XY platform is selected to be 10um, the resolution of the acquired image of the laser spot is basically equal to that of the mainstream infrared camera, but the cost is greatly reduced.
The method for measuring the quality of the laser beam by adopting the device is as shown in figure 5, a single-tube detector is placed at the focal plane of the laser to be measured, the single-tube detector gradually sweeps the whole focal plane of the laser to be measured under the drive of an XY moving platform to obtain laser spots as shown in figure 6, parameters of the spot size, the ellipticity, the intensity distribution, the half-height width and the like related to the quality of the laser beam are obtained through calculation, and the detection and the evaluation of the laser output quality are realized.
Example 3
On the basis of the embodiment 2, the following improvements are further made: as shown in fig. 7, in order to further improve the accuracy of laser spot image acquisition, the laser spot image acquisition device further comprises a magnifying lens, and the focusing lens, the magnifying lens, the light-transmitting small hole and the single-tube detector are sequentially arranged along the light path propagation direction.
The diameter of the light-transmitting small hole in the example is 15um, and the positioning precision of the XY moving platform is 10um. At the moment, the subdivision acquisition of the whole laser spot is equivalently improved by amplifying the laser spot, the whole laser spot is represented by more pixels, and the spot detection accuracy is improved.
According to the method for measuring the quality of the laser beam by adopting the device, as shown in fig. 7, laser to be measured sequentially passes through the focusing lens, the magnifying lens and the light-transmitting small hole and is scanned and imaged by the single-tube detector to obtain laser spots, the subdivision collection of the whole laser spots is improved by amplifying the laser spots, the whole laser spots are represented by more pixels, and the accuracy of spot detection is improved.
Example 4
On the basis of the embodiment 3, the following improvements are further made: except that in the embodiment 3, the laser light spots are amplified and then detected to increase the number of the light spot spaces, in the embodiment, the space subdivision of the light spots is further realized by combining an electric control method. As shown in fig. 8, the method for obtaining higher spatial subdivision acquisition of the laser spot in the X direction by controlling the X-direction acquisition time sequence pulse includes the following steps:
a. the XY moving platform drives the single-tube detector to move to the yi position in the Y direction;
b. a pulse generator is utilized to drive a driving motor in the X direction into uniform pulses, so that the single-tube detector moves at a uniform speed in the X direction;
c. when the single-tube detector moves to the area of the laser spot, the single-tube detector is turned on, and light intensity responses of different positions of the laser spot are periodically collected; and adjusting the uniform motion speed of the single-tube detector and adjusting the frequency of data acquired from the single-tube detector to realize the adjustment of the resolution of the light spot image.
By adopting the scheme, even if the positioning accuracy of the X-ray moving platform is poor, the high-resolution imaging of the light spot can be realized as long as the uniform motion can be realized.
Example 5
On the basis of the embodiment 4, the following improvements are further made: as shown in fig. 9, the acquisition of higher spatial detail images in two-dimensional directions of laser spots is realized by controlling the acquisition of time sequence pulses in X and Y directions, and the XY scanning acquires the whole detail image, which includes the following steps:
a. a pulse generator is utilized to drive uniform pulses into driving motors in the X direction and the Y direction, so that the single-tube detector moves at a constant speed in the X direction and the Y direction; as shown in fig. 9, as long as both the X and Y axes form a uniform motion, the single-tube detector also moves at a uniform motion in the direction of the resultant motion of the X and Y axes;
b. when the single-tube detector moves to the area of the laser spot, the single-tube detector is turned on, and light intensity responses of different positions of the laser spot are periodically collected; and adjusting the uniform motion speed of the single-tube detector and adjusting the frequency of data acquired from the single-tube detector to realize the adjustment of the resolution of the light spot image.
By controlling the motion pulses of the X axis and the Y axis, the oblique solid line in the graph 9 can sweep rightwards along the X direction, so that the single-tube detector can realize high-resolution two-dimensional imaging of the laser spot.
Claims (8)
1. A low-cost high-resolution single-point scanning laser beam quality measuring device is characterized in that: comprises a focusing mirror (1), a light-transmitting plate (2) and a single-tube detector (3); the light-transmitting plate (2) is provided with a light-transmitting small hole (21), and the focusing mirror (1), the light-transmitting small hole (21) and the single-tube detector (3) are sequentially arranged along the propagation direction of the light path.
2. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1, wherein: the diameter of the light-transmitting small hole (21) is 2 um-20 um.
3. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1 or 2, characterized in that: the light-transmitting plate (2) is arranged on a protective window of the single-tube detector (3).
4. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1 or 2, characterized in that: the single-tube detector is characterized by further comprising an XY moving platform (5), and the single-tube detector (3) is installed on the XY moving platform (5).
5. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 4, wherein: the positioning precision of the XY moving platform (5) is 1-10 um.
6. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1 or 2, characterized in that: the device is characterized by further comprising a magnifying lens (6), and the focusing lens (1), the magnifying lens (6), the light-transmitting small hole (21) and the single-tube detector (3) are sequentially arranged along the propagation direction of the light path.
7. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1 or 2, characterized in that: the device also comprises a pulse generator which is connected with a driving motor of the XY moving platform (5) in the X or Y direction.
8. The low-cost high-resolution single-point scanning laser beam quality measuring device according to claim 1 or 2, characterized in that: the device also comprises a pulse generator which is connected with driving motors in X and Y directions of the XY moving platform (5).
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