CN217586071U - Pyrometer support and silicon carbide furnace - Google Patents
Pyrometer support and silicon carbide furnace Download PDFInfo
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- CN217586071U CN217586071U CN202220768118.9U CN202220768118U CN217586071U CN 217586071 U CN217586071 U CN 217586071U CN 202220768118 U CN202220768118 U CN 202220768118U CN 217586071 U CN217586071 U CN 217586071U
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- mounting assembly
- pyrometer
- mounting
- silicon carbide
- shaped groove
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Abstract
The utility model relates to the field of silicon carbide furnaces, and discloses a pyrometer bracket and a silicon carbide furnace, wherein the pyrometer bracket comprises a pressing plate used for being connected with the silicon carbide furnace; the mounting seat is used for mounting the pyrometer, the mounting seat is movably mounted on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove which penetrates through the mounting seat along the thickness direction of the mounting seat is formed in the mounting surface of the mounting seat in contact with the pressing plate, the mounting seat can move relative to the pressing plate along the length direction of the strip-shaped groove, and the mounting seat is relatively fixed with the pressing plate through a first connecting piece. The device is used for accurately adjusting the pyrometer to a required position and reading out the accurate temperature in the furnace.
Description
Technical Field
The utility model relates to a technical field of carborundum stove, in particular to pyrometer support and carborundum stove.
Background
In the operation process of the silicon carbide furnace, silicon carbide crystals grow in the furnace, the growing methods comprise a flame method, a pulling method, a crucible descending method and the like, no matter which crystal growing method is adopted, the requirement on the temperature in the furnace is high in the process, the temperature in the furnace needs to be known and controlled at any time, and then the silicon carbide crystals can grow stably.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a pyrometer support and carborundum stove for with the accurate required position of adjusting of pyrometer, read out accurate furnace temperature.
In order to achieve the above purpose, the utility model provides a following technical scheme:
in a first aspect, the present invention provides a pyrometer support for installation in a silicon carbide furnace, comprising:
a platen for connection to the silicon carbide furnace;
the mounting seat is used for mounting the pyrometer, the mounting seat is movably mounted on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove which penetrates through the mounting seat along the thickness direction of the mounting seat is formed in the mounting surface of the mounting seat in contact with the pressing plate, the mounting seat can move relative to the pressing plate along the length direction of the strip-shaped groove, and the mounting seat is relatively fixed with the pressing plate through a first connecting piece.
A strip-shaped groove with enough length is processed on the mounting seat, and the mounting seat and the pressing plate are fixed by adopting a first connecting piece. When the mounting seat and the pressure plate are locked, the first connecting piece is in a locking state, and the mounting seat and the pressure plate are locked through the first connecting piece; when the mounting seat and the pressing plate are unlocked, the first connecting piece is in a unlocking state, the mounting seat slides relative to the pressing plate along the length direction of the strip-shaped groove, the first connecting piece positioned in the strip-shaped groove plays a role in guiding, and when the pyrometer reaches a required position along with the mounting seat, the first connecting piece is locked to relatively fix the mounting seat and the pressing plate; because the mounting seat has the position control function for the carborundum stove for the mounting seat of installing the pyrometer is adjusted required position, reads out the stove temperature of carborundum stove different positions through the pyrometer is simple accurate swift, thereby guarantees the carborundum crystal in the carborundum stove and increases steadily.
Optionally, the mount includes:
the first mounting assembly is movably mounted on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in a mounting surface, which is in contact with the pressing plate, of the first mounting assembly, and the first connecting piece penetrates through the strip-shaped groove and relatively fixes the first mounting assembly and the pressing plate;
the second mounting assembly is movably mounted on the first mounting assembly and moves along a plane perpendicular to the height direction of the silicon carbide furnace, a first arc-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in a mounting surface, in contact with the second mounting assembly, of the first mounting assembly, the second mounting assembly can move relative to the first mounting assembly along the first arc-shaped groove, and the second mounting assembly is fixed relative to the first mounting assembly through a second connecting piece;
and the third mounting assembly is movably mounted on the second mounting assembly and moves along a plane parallel to the height direction of the silicon carbide furnace, a second arc-shaped groove penetrating along the thickness direction of the second mounting assembly is formed in a mounting surface, which is in contact with the third mounting assembly, of the second mounting assembly, the third mounting assembly can move relative to the second mounting assembly along the second arc-shaped groove, and the third mounting assembly is relatively fixed with the second mounting assembly through a third connecting piece.
Optionally, the first mounting assembly comprises a first connecting plate and a second connecting plate arranged perpendicular to the first connecting plate;
the first connecting plate is movably arranged on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in the mounting surface of the first mounting assembly, which is in contact with the pressing plate, and the first connecting piece penetrates through the strip-shaped groove and relatively fixes the first connecting plate and the pressing plate;
the second connecting plate is provided with a first arc-shaped groove penetrating along the thickness direction of the second connecting plate, the second connecting piece penetrates through the first arc-shaped groove, and the second connecting plate is relatively fixed with the second mounting assembly through the second connecting piece.
Optionally, the second mounting assembly comprises: the third connecting plate and a fourth connecting plate are vertically connected with the third connecting plate;
the third connecting plate is relatively fixed with the second connecting plate through the second connecting piece;
the fourth connecting plate is provided with a second arc-shaped groove penetrating along the thickness direction of the fourth connecting plate, the third connecting piece penetrates through the second arc-shaped groove, and the fourth connecting plate is relatively fixed with the third mounting assembly through the third connecting piece.
Optionally, the third mounting assembly comprises a fifth connecting plate having mounting holes for mounting the pyrometers;
the fifth connecting plate is relatively fixed with the fourth connecting plate through the third connecting plate.
Optionally, the number of the strip-shaped grooves is two, and the two strip-shaped grooves are symmetrically arranged relative to the pyrometer.
Optionally, the pyrometer bracket further comprises a pyrometer lens, the pyrometer lens is mounted on the mounting base, and an axial direction of the pyrometer lens coincides with an axial line of the pyrometer.
Optionally, the pyrometer bracket further comprises a bracket, the bracket being arranged perpendicular to the second connection plate;
the pyrometer lens is mounted to the support.
Optionally, the bracket has a see-through hole penetrating along the axis direction of the pyrometer lens, and an orthographic projection of the pyrometer lens on the bracket covers the see-through hole.
In a second aspect, the present invention provides a silicon carbide furnace comprising a silicon carbide furnace and the pyrometer support of any one of the first aspect;
the silicon carbide furnace is provided with an observation window, and the orthographic projection of the pyrometer on the silicon carbide furnace is superposed with the orthographic projection of the observation window on the silicon carbide furnace.
Drawings
Fig. 1 is a schematic perspective view of an angle of a pyrometer bracket according to an embodiment of the present invention;
fig. 2 is a schematic perspective view of another angle of a pyrometer bracket according to an embodiment of the present invention;
fig. 3 is a front view of a pyrometer bracket according to an embodiment of the present invention;
fig. 4 is a left side view of a pyrometer bracket according to an embodiment of the present invention;
fig. 5 is a right side view of a pyrometer bracket according to an embodiment of the present invention;
fig. 6 is a top view of a pyrometer bracket according to an embodiment of the present invention.
In the figure: a-a pyrometer; b-the furnace inner wall of the silicon carbide furnace; 1-pressing a plate; 2-mounting a base; 21-a first mounting assembly; 211-a first connection plate; 2111-strip groove; 212-a second connecting plate; 2121-a first arc-shaped groove; 22-a second mounting assembly; 221-a third connecting plate; 222-a fourth connecting plate; 2221-a second arcuate slot; 23-a third mounting assembly; 231-a fifth connecting plate; 2311-mounting holes; 3-a first connecting piece; 4-a second connector; 5-a third connector; 6-pyrometer lens; 7-a scaffold; 8-observation window.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1 to 6, the embodiment of the present invention provides a pyrometer bracket for being installed in a silicon carbide furnace, the pyrometer bracket comprising:
a pressing plate 1 used for connecting with the silicon carbide furnace;
a mount pad 2 for installing pyrometer A, mount pad 2 is installed at clamp plate 1 along the direction of height of carborundum stove is movably, has along its own thickness direction through-going bar groove 2111 on the installation face of mount pad 2 and clamp plate 1 contact, and mount pad 2 can move for clamp plate 1 along the length direction of bar groove 2111, and mount pad 2 is fixed relatively with clamp plate 1 through first connecting piece 3.
Note that, a strip-shaped groove 2111 with a sufficient length is formed in the mount 2, and the mount 2 and the platen 1 are fixed by the first connecting member 3. When the mounting base 2 and the pressure plate 1 are locked, the first connecting piece 3 is in a locking state, and the mounting base 2 and the pressure plate 1 are locked through the first connecting piece 3; when the mounting seat 2 and the pressure plate 1 are unlocked, the first connecting piece 3 is in a unlocking state, the mounting seat 2 slides relative to the pressure plate 1 along the length direction of the strip-shaped groove 2111, the first connecting piece 3 positioned in the strip-shaped groove 2111 plays a guiding role at the moment, and when the pyrometer A reaches a required position along with the mounting seat 2, the first connecting piece 3 is locked to relatively fix the mounting seat 2 and the pressure plate 1; because the mounting seat 2 has the position adjusting function relative to the silicon carbide furnace, the mounting seat 2 provided with the pyrometer A is adjusted to a required position, the furnace temperature of different positions of the silicon carbide furnace is simply, accurately and quickly read out through the pyrometer A, and the silicon carbide crystal in the silicon carbide furnace is ensured to be stably increased.
For example, the first connecting member 3 may be a bolt or a screw, the second connecting member 4 may be a bolt or a screw, and the third connecting member 5 may be a bolt or a screw. The first connecting piece 3, the second connecting piece 4 and the third connecting piece 5 which appear below can be selected to be connecting structures such as bolts or screws, and are not described again.
As for the specific outer shape of the mount 2 mounting the pyrometer a, it can be designed according to the size and specification of the actual pyrometer a.
Specifically, the mount 2 includes: first installation component 21, first installation component 21 is installed at clamp plate 1 along the direction of height of carborundum stove is removable, first installation component 21 has the bar groove 2111 that runs through along its thickness direction on the installation face that contacts with clamp plate 1, first connecting piece 3 runs through bar groove 2111, and with first installation component 21 and clamp plate 1 relatively fixed, the direction of height of carborundum stove is followed to the length direction of bar groove 2111, the length of bar groove 2111 is regarded as the standard with regard to the movement stroke of first installation component 21, that is to say, the length of bar groove 2111 is long then the movement distance of first installation component 21 is far away, the distance scope that also will drive pyrometer A motion is bigger, thereby the pyrometer A measuring scope has been improved. Of course, the width of the strip-shaped groove 2111 is dependent on the size of the first connector 3, as long as the first connector 3 can be placed in the strip-shaped groove 2111. In order to ensure the stability of the movement of the first mounting assembly 21 relative to the platen 1 along the height direction of the silicon carbide furnace, the two strip-shaped grooves 2111 may be designed, and the two strip-shaped grooves 2111 are symmetrically arranged relative to the pyrometer a, so that when the first mounting assembly 21 moves relative to the platen 1, the two first connecting members 3 are respectively located in the two strip-shaped grooves 2111, and the two first connecting members 3 simultaneously play a role in guiding to ensure the directionality and the stability of the movement of the first mounting assembly 21 relative to the platen 1.
As will be described later with respect to the second mounting assembly 22, the second mounting assembly 22 is movably mounted on the first mounting assembly 21, and the second mounting assembly 22 moves along a plane perpendicular to the height direction of the silicon carbide furnace, the mounting surface of the first mounting assembly 21, which contacts the second mounting assembly 22, has a first arc-shaped groove 2121 penetrating along its thickness direction, and the protruding direction of the first arc-shaped groove 2121 is not particularly limited as required, and the protruding direction of the first arc-shaped groove 2121 is based on the actual situation in the silicon carbide furnace, as long as the second mounting assembly 22 moves along the track of the first arc-shaped groove 2121 and does not affect other components in the furnace, the second mounting assembly 22 can move along the first arc-shaped groove 2121 relative to the first mounting assembly 21, the second mounting assembly 22 is fixed relative to the first mounting assembly 21 by the second connecting member 4, and the second connecting member 4 is disposed through the first arc-shaped groove 2121.
The third mounting assembly 23 is used for mounting the pyrometer a, the third mounting assembly 23 is movably mounted on the second mounting assembly 22, and the third mounting assembly 23 moves along a plane parallel to the height direction of the silicon carbide furnace, a second arc-shaped groove 2221 penetrating along the thickness direction of the mounting surface of the second mounting assembly 22, which is in contact with the third mounting assembly 23, is formed on the mounting surface, and the protruding direction of the second arc-shaped groove 2221 is not specifically limited as required, the protruding direction of the second arc-shaped groove 2221 is based on the actual situation in the actual silicon carbide furnace, as long as the third mounting assembly 23 moves along the track of the second arc-shaped groove 2221 and does not affect other components in the furnace, the third mounting assembly 23 can move along the second arc-shaped groove 2221 relative to the second mounting assembly 22, the third mounting assembly 23 is fixed relative to the second mounting assembly 22 through the third connecting member 5, and the third connecting member 5 is disposed through the second arc-shaped groove 2221.
The following description will be made with reference to specific structures of the first mounting assembly 21, for example, the first mounting assembly 21 includes a first connecting plate 211 and a second connecting plate 212 arranged perpendicular to the first connecting plate 211, for example, the first connecting plate 211 and the second connecting plate 212 may be an integral structure, such that the first connecting plate 211 and the second connecting plate 212 are connected more firmly;
the first connecting plate 211 is movably installed on the pressing plate 1 along the height direction of the silicon carbide furnace, and the installation surface of the first installation component 21, which is in contact with the pressing plate 1, is provided with a strip-shaped groove 2111 which penetrates along the thickness direction of the first installation component, for example, in order to ensure the stability of the movement of the first connecting plate 211 relative to the pressing plate 1 along the height direction of the silicon carbide furnace, the strip-shaped grooves 2111 can be designed into two, and the two strip-shaped grooves 2111 are symmetrically arranged relative to the pyrometer a, so that when the first connecting plate 211 moves relative to the pressing plate 1, the two first connecting pieces 3 are respectively positioned in the two strip-shaped grooves 2111, and the two first connecting pieces 3 simultaneously play a role in guiding to ensure the directionality and the stability of the movement of the first installation component 21 relative to the pressing plate 1. The first connecting piece 3 penetrates through the strip-shaped groove 2111 and relatively fixes the first connecting plate 211 and the pressing plate 1;
the second connecting plate 212 has a first arc-shaped slot 2121 penetrating along its thickness direction, the second connector 4 penetrates through the first arc-shaped slot 2121, and the second connecting plate 212 is fixed relative to the second mounting assembly 22 by the second connector 4.
For example, the second mounting assembly 22 includes: a third connection plate 221 and a fourth connection plate 222 vertically arranged to the third connection; for example, the third connecting plate 221 and the fourth connecting plate 222 may be a one-piece structure, which makes the connection between the third connecting plate 221 and the fourth connecting plate 222 more firm;
the third connecting plate 221 is fixed relative to the second connecting plate 212 through the second connecting piece 4;
the fourth connecting plate 222 has a second arc-shaped slot 2221 penetrating along the thickness direction thereof, the third connector 5 penetrates through the second arc-shaped slot 2221, and the fourth connecting plate 222 is fixed relative to the third mounting assembly by the third connector 5.
For example, the third mounting assembly 23 includes a fifth attachment plate 231, the fifth attachment plate 231 having a mounting hole 2311 for mounting the pyrometer a;
the fifth connection plate 231 is fixed to the fourth connection plate 222 via the third connection plate 221.
The embodiment of the utility model provides a pyrometer support still includes pyrometer camera lens 6, and pyrometer camera lens 6 is installed on mount pad 2, and the axis direction of pyrometer camera lens 6 and pyrometer A's dead in line. Specifically, the pyrometer bracket further comprises a bracket 7, the bracket 7 being arranged perpendicular to the second connection plate 212; the pyrometer lens 6 is mounted on a support 7. For example, the bracket 7 and the second connecting plate 212 may be detachably connected in a manner that facilitates installation and transportation, and reduces transportation cost, that is, the bracket 7 and the second connecting plate 212 are connected by a connecting member, specifically, the connecting member may be a bolt or a screw. As shown in fig. 2, the number of the connecting members for connecting the bracket 7 and the second connecting plate 212 is two, but the number of the connecting members is not particularly limited, and mainly the second connecting plate 212 and the bracket 7 can be stably fixed.
In some embodiments, the holder 7 has a see-through hole running through it in the direction of the axis of the pyrometer lens 6, the see-through hole being covered by an orthographic projection of the pyrometer lens 6 on the holder 7. And referring to fig. 2, the pyrometer lens 6 is fixed to the support 7 by means of bolts or screws or the like.
In a second aspect, embodiments of the present invention provide a silicon carbide furnace, including a silicon carbide furnace and the pyrometer support of any one of the first aspect;
the silicon carbide furnace is provided with an observation window 8, and the orthographic projection of the pyrometer A in the silicon carbide furnace is superposed with the orthographic projection of the observation window 8 in the silicon carbide furnace. The pressing plate 1 fixes the transparent plate on the furnace inner wall B of the silicon carbide furnace, specifically, the pressing plate 1 and the furnace inner wall of the silicon carbide furnace can be detachably connected through bolts or screws, so that the maintenance is convenient, through holes are formed in the pressing plate 1, and the transparent plate is fixed at the through holes to form an observation window 8 of the silicon carbide furnace, and the transparent plate is made of transparent materials such as glass.
It will be apparent to those skilled in the art that various modifications and variations can be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A pyrometer bracket for mounting in a silicon carbide furnace, comprising:
a platen for connection to the silicon carbide furnace;
the mounting seat is used for mounting the pyrometer, the mounting seat is movably mounted on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove which penetrates through the mounting seat along the thickness direction of the mounting seat is formed in the mounting surface of the mounting seat in contact with the pressing plate, the mounting seat can move relative to the pressing plate along the length direction of the strip-shaped groove, and the mounting seat is relatively fixed with the pressing plate through a first connecting piece.
2. The pyrometer bracket of claim 1, wherein the mount comprises:
the first mounting assembly is movably mounted on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in a mounting surface, which is in contact with the pressing plate, of the first mounting assembly, and the first connecting piece penetrates through the strip-shaped groove and relatively fixes the first mounting assembly and the pressing plate;
the second mounting assembly is movably mounted on the first mounting assembly and moves along a plane perpendicular to the height direction of the silicon carbide furnace, a first arc-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in a mounting surface, in contact with the second mounting assembly, of the first mounting assembly, the second mounting assembly can move relative to the first mounting assembly along the first arc-shaped groove, and the second mounting assembly is relatively fixed with the first mounting assembly through a second connecting piece;
and the third mounting assembly is movably mounted on the second mounting assembly and moves along a plane parallel to the height direction of the silicon carbide furnace, a second arc-shaped groove penetrating along the thickness direction of the second mounting assembly is formed in a mounting surface, which is in contact with the third mounting assembly, of the second mounting assembly, the third mounting assembly can move relative to the second mounting assembly along the second arc-shaped groove, and the third mounting assembly is relatively fixed to the second mounting assembly through a third connecting piece.
3. The pyrometer bracket of claim 2, wherein said first mounting assembly comprises a first attachment plate and a second attachment plate disposed perpendicular to said first attachment plate;
the first connecting plate is movably arranged on the pressing plate along the height direction of the silicon carbide furnace, a strip-shaped groove penetrating along the thickness direction of the first mounting assembly is formed in the mounting surface of the first mounting assembly, which is in contact with the pressing plate, and the first connecting piece penetrates through the strip-shaped groove and relatively fixes the first connecting plate and the pressing plate;
the second connecting plate is provided with a first arc-shaped groove penetrating along the thickness direction of the second connecting plate, the second connecting piece penetrates through the first arc-shaped groove, and the second connecting plate is relatively fixed with the second mounting assembly through the second connecting piece.
4. The pyrometer bracket of claim 3, wherein the second mounting assembly comprises: the third connecting plate and a fourth connecting plate are vertically connected with the third connecting plate;
the third connecting plate is relatively fixed with the second connecting plate through the second connecting piece;
the fourth connecting plate is provided with a second arc-shaped groove penetrating along the thickness direction of the fourth connecting plate, the third connecting piece penetrates through the second arc-shaped groove, and the fourth connecting plate is relatively fixed with the third mounting assembly through the third connecting piece.
5. The pyrometer bracket of claim 4, wherein the third mounting assembly comprises a fifth connecting plate having a mounting hole for mounting the pyrometer;
the fifth connecting plate is relatively fixed with the fourth connecting plate through the third connecting plate.
6. The pyrometer bracket of claim 1 or 3, wherein there are two of said strip slots and said two strip slots are symmetrically disposed relative to said pyrometer.
7. The pyrometer mount of claim 5, further comprising a pyrometer lens mounted on said mount, and wherein an axial direction of said pyrometer lens coincides with an axis of said pyrometer.
8. The pyrometer bracket of claim 7, further comprising a bracket disposed perpendicular to said second connecting plate;
the pyrometer lens is mounted to the support.
9. The pyrometer mount of claim 8, wherein said mount has a see-through hole therethrough in a direction along said pyrometer lens axis, an orthographic projection of said pyrometer lens on said mount covering said see-through hole.
10. A silicon carbide furnace comprising a silicon carbide furnace and the pyrometer support of any one of claims 1-9;
the silicon carbide furnace is provided with an observation window, and the orthographic projection of the pyrometer in the silicon carbide furnace is superposed with the orthographic projection of the observation window in the silicon carbide furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220768118.9U CN217586071U (en) | 2022-04-01 | 2022-04-01 | Pyrometer support and silicon carbide furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220768118.9U CN217586071U (en) | 2022-04-01 | 2022-04-01 | Pyrometer support and silicon carbide furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217586071U true CN217586071U (en) | 2022-10-14 |
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ID=83542009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220768118.9U Active CN217586071U (en) | 2022-04-01 | 2022-04-01 | Pyrometer support and silicon carbide furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217586071U (en) |
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2022
- 2022-04-01 CN CN202220768118.9U patent/CN217586071U/en active Active
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