CN217554935U

CN217554935U - Vacuum delivery system

Info

Publication number: CN217554935U
Application number: CN202220254035.8U
Authority: CN
Inventors: 赵嘉峰; 项辉; 陈飞; 季晨斌; 舒飞; 池彬
Original assignee: Fermi Instruments Shanghai Co ltd
Current assignee: Fermi Instruments Shanghai Co ltd
Priority date: 2022-02-08
Filing date: 2022-02-08
Publication date: 2022-10-11
Anticipated expiration: 2032-02-08

Abstract

The present disclosure provides a vacuum delivery system comprising: the first rail is arranged at the upper part in the vacuum pipeline; a first vacuum delivery device disposed on the first track; the first vacuum delivery device includes: a first body; the first sliding assembly is arranged on the first main body and used for enabling the first main body to slide along the first track; the first transmission assembly is arranged on the first main body and used for receiving and driving so as to drive the first main body to slide along the first track; and at least one first sample loading assembly arranged on the first main body, wherein the first sample loading assembly comprises at least one first sample loading frame, the first sample loading frame is used for bearing a sample on the reverse surface opposite to the first main body, and the sample conveying device is connected with the vacuum pipeline and is used for sampling from the first sample loading frame.

Description

Vacuum delivery system

Technical Field

The disclosure relates to the technical field of vacuum sample transfer, in particular to a vacuum delivery system.

Background

The vacuum sample transmission technology is commonly used for transmitting samples among various devices in the fields of vacuum, ultrahigh vacuum, surface science, aerospace, semiconductors and the like, so that the various devices are cooperatively matched to complete experiments or production. The fields generally have high requirements on the environmental vacuum degree, and repeated vacuum breaking sampling and vacuum pumping treatment of samples seriously slow down the experiment or production time, thereby reducing the efficiency. Therefore, in actual production or experiments, the devices are often connected through a vacuum interconnection system, and due to the large volume of the devices, the distance between the vacuum interconnection systems is often long, so that the delivery of samples between different devices is difficult.

The sample conveying device capable of sliding along the rail in the vacuum pipeline is often adopted to convey samples in the traditional technology, due to the gravity factor, the running rail of the sample conveying device is generally arranged below the vacuum pipeline, and therefore when the number of vacuum equipment needing to be matched in the system is too large, the vacuum pipeline can only be prolonged, the whole occupied area of the system is increased, the cost is increased, and in the traditional arrangement mode, the space utilization efficiency of the vacuum pipeline is low, and the conveying efficiency is low.

SUMMERY OF THE UTILITY MODEL

The present disclosure provides a vacuum delivery system comprising: the first rail is arranged at the upper part in the vacuum pipeline; a first vacuum delivery device disposed on the first track; the first vacuum delivery device comprises: a first body; the first sliding assembly is arranged on the first main body and used for enabling the first main body to slide along the first track; the first transmission assembly is arranged on the first main body and used for receiving and driving so as to drive the first main body to slide along the first track; and at least one first sample loading assembly arranged on the first main body, wherein the first sample loading assembly comprises at least one first sample loading frame, the first sample loading frame is used for bearing a sample on the reverse surface opposite to the first main body, and the sample conveying device is connected with the vacuum pipeline and is used for sampling from the first sample loading frame.

In some embodiments, the vacuum delivery system further comprises: the second rail is arranged at the lower part of the vacuum pipeline and is opposite to the first rail; a second vacuum delivery device disposed on the second track, the second vacuum delivery device comprising: a second body; the second sliding assembly is arranged on the second main body and used for enabling the second main body to slide along the second track; the second transmission assembly is arranged on the second main body and used for receiving drive so as to drive the second main body to slide along the second track; and at least one second sample loading assembly arranged on the second main body, wherein the second sample loading assembly comprises at least one second sample loading frame, and the second sample loading frame is used for bearing a sample on the front surface.

In some embodiments, the sample transfer device comprises: the sample transferring arm comprises an arm body and a grabbing piece arranged at the far end of the arm body, and the grabbing piece is used for grabbing a sample borne on the first sample carrying frame or the second sample carrying frame; and the driving device drives the sample transmission arm to move so that the grabbing piece grabs the sample borne on the first sample carrying frame or the second sample carrying frame.

In some embodiments, the sample transfer arm further comprises: and the lifting device is arranged at the far end of the arm body, the grabbing piece is arranged on the lifting device, and the driving device is used for driving the lifting device to lift so as to drive the grabbing piece to lift.

In some embodiments, the driving device comprises: driving the vacuum chamber; the transmission magnetic assembly is arranged in the driving vacuum cavity and is arranged at the near end of the sample transmission arm; and the driving magnetic assembly is arranged outside the driving vacuum cavity, is magnetically coupled with the transmission magnetic assembly and is used for driving the transmission magnetic assembly so as to drive the sample transmission arm to move, the driving magnetic assembly is used for driving the transmission magnetic assembly to drive the sample transmission arm to do linear motion or rotary motion, and the rotary motion is used for driving the lifting device to drive the grabbing piece to lift.

In some embodiments, the first cartridge or the second cartridge comprises: the sample carrying concave or the sample carrying support is arranged on the reverse side of the first sample carrying rack or the second sample carrying rack and/or the front side of the first sample carrying rack or the second sample carrying rack and is used for carrying a sample.

In some embodiments, the first or second cartridge comprises a plurality of cartridges, each cartridge comprising a respective portion of a cartridge recess or cartridge tray, the plurality of cartridges collectively carrying a sample.

In some embodiments, the plurality of frames includes a first frame and a second frame, which are oppositely disposed, the first frame includes a first circular arc-shaped recess or a sample-carrying tray, and the second frame includes a second circular arc-shaped recess or a sample-carrying tray matched with the first circular arc-shaped recess or the sample-carrying tray.

In some embodiments, the at least one first cartridge comprises a first array of cartridges arranged laterally and/or stacked longitudinally; and/or at least one second cartridge comprises an array of second cartridges arranged laterally and/or stacked longitudinally.

In some embodiments, the first slide assembly or the second slide assembly comprises: a plurality of movable pulleys, set up on first main part or second main part, first transmission assembly or second transmission assembly include: at least one mounting bracket disposed on the first body or the second body; and at least one transmission magnet disposed on the at least one mounting bracket for receiving the drive.

In some embodiments, the at least one driver magnet comprises: the first magnet is arranged on the mounting frame; and the second magnet is arranged on the mounting frame, and the polarities of the first magnet and the second magnet for receiving the drive are opposite.

A vacuum delivery system according to some embodiments of the present disclosure can bring about beneficial technical effects. For example, according to the vacuum delivery system of some embodiments of the present disclosure, the problems of large occupied area of the vacuum system, high equipment cost, low utilization efficiency of the vacuum pipeline space between the equipments, low transmission efficiency and the like in the conventional technology can be solved, and the occupied area of the vacuum sample transmission system can be reduced, so that the equipment cost is reduced, the arrangement between the equipments is more compact, the utilization rate of the vacuum pipeline space is improved, and the sample transmission efficiency is greatly improved.

Drawings

In order to more clearly illustrate the embodiments or technical solutions of the present disclosure, the drawings used in the embodiments or technical solutions of the present disclosure will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present disclosure, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 illustrates a schematic structural view of a vacuum delivery system according to some embodiments of the present disclosure;

fig. 2 illustrates a side view of a vacuum delivery system according to some embodiments of the present disclosure;

fig. 3 shows a schematic structural view of a sample transfer device according to some embodiments of the present disclosure;

figure 4 illustrates a cross-sectional view of a sample transfer device according to some embodiments of the present disclosure;

fig. 5 illustrates a schematic structural view of a first vacuum delivery device or a second vacuum delivery device according to some embodiments of the present disclosure;

fig. 6 illustrates a bottom view block diagram of the first or second vacuum delivery device according to some embodiments of the present disclosure;

fig. 7 illustrates a schematic structural view of a rack according to some embodiments of the present disclosure.

In the above drawings, the respective reference numerals denote: 100 vacuum delivery system

10 vacuum pipeline

20a first track

20b second track

30a first vacuum delivery device

31a first body

32a first slide assembly

33a first transmission assembly

34a first sample carrying assembly

341a first sample carrier

30b second vacuum delivery device

31b second body

32b second slide assembly

33b second sample transport assembly

34b second sample loading assembly

341b second sample carrier

341a-1/341b-1 sample loading recess

341a-2/341b-2 frame body

1a/1b first frame body

2a/2b second frame

321a/321b slide wheel

331a/331b mounting bracket

332a/332b driving magnet

3321a/3321b first magnet

3322a/3322b second magnet

40 sample transfer device

41 pass a kind arm

411 arm body

412 arm core bar

42 driving device

421 driving vacuum chamber

422 drive magnetic assembly

423 drive magnet assembly

43 lifting device

431 guide

4311 guide groove

432 connecting piece

433 sliding member

434. 434a, 434b, 434c, 434d limit bearing

Detailed Description

Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the disclosure and that not all embodiments are intended to be considered.

In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience of describing the present disclosure and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "coupled" are to be construed broadly and can include, for example, fixed and removable connections; can be mechanically or electrically connected; the connection can be direct connection or indirect connection through an intermediate medium; there may be communication between the interiors of the two elements. In the description of the present disclosure, distal end or side refers to an end or side that penetrates into a vacuum environment (e.g., a vacuum lumen), and proximal end or side is the end or side opposite the distal end or side (e.g., the end or side distal from the vacuum lumen, or the end or side within the vacuum lumen proximal to the vacuum lumen wall, etc.). The specific meaning of the above terms in the present disclosure can be understood as a specific case by a person of ordinary skill in the art.

Fig. 1 illustrates a schematic structural view of a vacuum delivery system 100 according to some embodiments of the present disclosure. Fig. 2 illustrates a side view of the vacuum delivery system 100 according to some embodiments of the present disclosure.

As shown in fig. 1 and 2, the vacuum delivery system 100 may include a vacuum pipe 10, a first rail 20a, a first vacuum delivery device 30a, and a sample transfer device 40. A first rail 20a is provided at an upper portion inside the vacuum duct 10, and a first vacuum delivery device 30a is provided on the first rail 20 a.

Fig. 5 illustrates a schematic structural view of a first vacuum delivery device 30a according to some embodiments of the present disclosure.

Fig. 6 illustrates a bottom view block diagram of a first vacuum delivery device 30a according to some embodiments of the present disclosure. As shown in fig. 5 and 6, the first vacuum delivery device 30a may include a first body 31a, a first slide assembly 32a, a first drive assembly 33a, and at least one first sample loading assembly 34a. The first sliding member 32a is provided on the first body 31a and can be used to slide the first body 31a along the first rail 20 a. The first transmission assembly 33a is disposed on the first body 31a and can be used for receiving driving to drive the first body 31a to slide along the first rail 20 a. The first loading member 34a is disposed on the first body 31a, and the first loading member 34a may include at least one first cartridge 341a. The first cartridge 341a can be used to carry a sample on the opposite surface to the first body 31 a. The sample transfer device 40 is connected to the vacuum line 10 and can be used to sample the first sample rack 341a.

It will be understood by those skilled in the art that although only one first loading member 34a is shown in fig. 5 and 6, the first vacuum delivery apparatus 30a may include a plurality of first loading members 34a disposed on the first body 31a, such as arranged or arrayed on the first body 31 a.

As shown in fig. 1 and 2, in some embodiments of the present disclosure, the vacuum delivery system 100 may further include a second track 20b and a second vacuum delivery device 30b. The second rail 20b is disposed at a lower portion of the vacuum duct 10, and is disposed opposite to the first rail 20 a. And a second vacuum delivery device 30b disposed on the second rail 20 b.

Fig. 5 illustrates a schematic structural view of a first vacuum delivery device 30b according to some embodiments of the present disclosure. Fig. 6 illustrates a bottom view of the first vacuum delivery device 30b according to some embodiments of the present disclosure. As shown in fig. 5 and 6, similar to the first vacuum delivery device 30a, the second vacuum delivery device 30b may include a second body 31b, a second slide assembly 32b, a second sample transfer assembly 33b, and at least one second sample loading assembly 34b. The second sliding assembly 32b is disposed on the second body 31b for sliding the second body 31b along the second rail 20 b. The second transmission assembly 33b is disposed on the second body 31b and can be used for receiving driving to drive the second body 31b to slide along the second rail 20 b. And a second sample loading member 34b provided on the second body 31 b. The second loading member 34b includes at least one second loading rack 341b, and the second loading rack 341b is used for carrying the sample on the front surface. The

second racks

341a and 341b have opposite surfaces facing the

first bodies

31a and 31b, respectively, and are directed toward the insides of the

second racks

341a and 341 b. The front and back surfaces of the

second racks

341a and 341b are opposite to each other, and face the outside of the

second racks

341a and 341 b.

It will be appreciated by those skilled in the art that although only one second loading member 34b is shown in fig. 2, the second vacuum delivery apparatus 30b may include a plurality of second loading members 34b disposed on the second body 31b, such as arranged or arrayed on the second body 31 b.

Fig. 3 illustrates a schematic structural view of a sample transfer device 40 according to some embodiments of the present disclosure. Figure 4 illustrates a cross-sectional view of a sample transfer device 40 according to some embodiments of the present disclosure.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, the sample transfer device 40 may include a sample transfer arm 41 and a drive device 42. The sample transfer arm 41 may include an arm body 411 and a grasping member (not shown) provided at a distal end of the arm body 411. The grasping member is used to grasp a sample carried on the first specimen carrier 341a or the second specimen carrier 341 b. For example, the grasping member may include a holder for holding the sample carried on the first cartridge 341a or the second cartridge 341b to transfer the sample. The driving device 42 may drive the sample transfer arm 41 to move so that the grasping member can grasp (e.g., lift, suck, etc.) the sample carried on the first sample carrier 341a or the second sample carrier 341 b.

As shown in fig. 3, in some embodiments of the present disclosure, the sample transfer arm 41 may further include a lifting device 43 disposed at the distal end of the arm body 411. The gripping member may be provided on the lifting device 43. The driving device 42 drives the lifting device 43 to lift so as to drive the grabbing piece to lift.

As shown in fig. 3, the lifting device 43 may include a driving gear (not shown), a driving rack (not shown), a guide 431, a connecting member 432, and a sliding member 433. The guide 431 is fixedly connected to the distal end of the arm 411 by a connecting member 432. The guide 431 may be square column shaped, and guide grooves 4311 are formed at both sides thereof. The sliding member 433 is sleeved on the guide member and has a guide screw (not shown) capable of cooperating with the guide groove 4311, so that the sliding member 433 is slidably connected with the guide member 431 and can slide along the guide groove 4311 on the guide member 431. An arm core bar 412 penetrates through the arm body 411, a transmission rack is fixed on the sliding piece 433 and meshed with a transmission gear fixed at the far end of the arm core bar 412, and the arm core bar 412 drives the transmission gear to rotate, so that the transmission rack can perform lifting motion, and the sliding piece 433 is driven to perform lifting motion along the guide piece 431. The grabbing piece is fixedly arranged on the sliding piece 433 and can move up and down along with the sliding of the sliding piece 433, so that sampling or sample sending is carried out. For example, in some embodiments, the gripper may comprise a bracket. The rotation of the arm core bar 412 can drive the transmission gear to rotate, so as to drive the transmission rack to perform lifting motion. Under the driving of the transmission rack, the sliding member 433 moves up and down along the guide 431, and drives the bracket of the grabbing member to move up and down. Thus, the holder can hold the sample carried on the first cartridge 341a or the second cartridge 341b for sample transfer.

As shown in fig. 3, the lifting device 43 further includes at least two sets of limit bearings 434 (e.g.,

limit bearings

434a, 434b, 434c, 434 d) disposed inside the slider 433 and contacting the guide 431. Each set of limit bearings, four in number, is provided on each side of the guide 431, for

example limit bearings

434a, 434b and two limit bearings 434 not shown in the figures.

Those skilled in the art will appreciate that although only two sets of limit bearings 434 are shown in fig. 3, the lift assembly 43 may also include more than two sets of limit bearings 434.

As shown in fig. 4, in some embodiments of the present disclosure, the driving device 42 may include a driving vacuum chamber 421, a transmission magnetic assembly 422, and a driving magnetic assembly 423. A drive magnet assembly 422 is disposed within the drive vacuum chamber 421 and at the proximal end of the sample transfer arm 41. The driving magnetic assembly 422 is disposed outside the driving vacuum chamber 421, magnetically coupled to the driving magnetic assembly 422, and can be used to drive the driving magnetic assembly 422 to move the sample transferring arm 41. The driving magnet assembly 423 drives the transmission magnet assembly 422 to drive the sample transmission arm 41 to perform linear motion or rotational motion. Wherein the lifting device 40 is driven by the rotary motion to lift the grabbing piece.

Fig. 5 illustrates a schematic structural view of a first vacuum delivery device 30a or a second vacuum delivery device 30b according to some embodiments of the present disclosure. Fig. 6 illustrates a bottom view of the first or second

vacuum delivery device

30a, 30b according to some embodiments of the present disclosure.

As shown in fig. 5 and 6, in some embodiments of the present disclosure, the first cartridge 341a or the second cartridge 341b may include a cartridge recess 341a-1/341b-1. The loading depressions 341a-1/341b-1 are provided on the reverse surface of the first cartridge 341a or the second cartridge 341b or the obverse surface of the first cartridge 341a or the second cartridge 341b, or the obverse and reverse surfaces. The shape of the loading recess 341a-1/341b-1 matches the sample to be used for carrying the sample.

It will be understood by those skilled in the art that although the first cartridge 341a or the second cartridge 341b shown in fig. 5 and 6 may include the cartridge recesses 341a-1/341b-1, this is merely exemplary and the first cartridge 341a or the second cartridge 341b may include the cartridge holders.

It will be appreciated by those skilled in the art that in some embodiments of the present disclosure, the at least one first cartridge 341a and/or the at least one second cartridge 341b may comprise a first array of cartridges or a second array of cartridges arranged laterally and/or stacked longitudinally.

Fig. 7 illustrates a structural schematic of a rack according to some embodiments of the present disclosure.

As shown in fig. 7, in some embodiments of the present disclosure, the first cartridge 341a or the second cartridge 341b includes a plurality of cartridges 341a-2/341b-2. Each shelf 341a-2/341b-2 includes a corresponding portion of the loading recess 341a-1/341b-1. The plurality of racks 341a-2/341b-2 collectively carry the sample.

As shown in fig. 7, in some embodiments of the present disclosure, the plurality of racks 341a-2/341b-2 includes a first rack 1a/1b and a second rack 2a/2b that are oppositely disposed. The first frame body 1a/1b comprises a first arc-shaped recess, and the second frame body 2a/2b comprises a second arc-shaped recess matched with the first arc-shaped recess.

As shown in fig. 5 and 6, in some embodiments of the present disclosure, the first slider assembly 32a or the second slider assembly 32b may include a plurality of slider wheels 321a/321b provided on the first body 31a or the second body 31 b. The first transmission assembly 33a or the second transmission assembly 33b may include at least one mounting bracket 331a/331b provided on the first body 31a or the second body 31 b. The first transmission assembly 33a or the second transmission assembly 33b may further include at least one transmission magnet 332a/332b disposed on the at least one mounting bracket 331a/331b for receiving the drive.

As shown in fig. 5 and 6, in some embodiments of the present disclosure, the at least one driver magnet 332a/332b may include a first magnet 3321a/3321b and a second magnet 3322a/3322b. First and second magnets 3321a/3321b and 3322a/3322b are provided on the mounting block 331a/331 b. The first magnet 3321a/3321b and the second magnet 3322a/3322b have opposite polarities for receiving driving. For example, the upwardly exposed poles of the first and second magnets 3321a/3321b and 3322a/3322b are used to receive drive, respectively the N and S poles. The combination of the opposite magnetic poles can make the transmission more stable.

It will be appreciated by those skilled in the art that although fig. 5 and 6 illustrate the mounting block 331a/331b having the first and second magnets 3321a/3321b and 3322a/3322b mounted thereon, the mounting block 331a/331b may each have one or more magnets of the same polarity, and the one or more magnets mounted on the mounting block 331a/331b may have the same or opposite polarity as the one or more magnets mounted on the mounting block 331a/331 b.

It will be appreciated by those skilled in the art that although fig. 5 and 6 show the mounting blocks 331a/331b as C-shaped mounting blocks, this is merely exemplary and the mounting blocks 331a/331b may be L-shaped. Similarly, one skilled in the art will appreciate that other N and S pole combinations may also be included in embodiments of the present disclosure, such as N poles, S poles, and N pole combinations, and so forth.

The first vacuum delivery device 30a moves on the first track 20a and the second vacuum delivery device 30b is disposed to move on the second track 20 b. The first vacuum delivery device 30a and the second vacuum delivery device 30b can simultaneously carry out sample feeding in the vacuum pipeline 10, so that the utilization efficiency of the vacuum pipeline 10 is improved, the whole structure of the system is more compact, and the floor area of the equipment is reduced. In addition, the positions of the first vacuum delivery device 30a and the second vacuum delivery device 30b can be exchanged, and the vacuum delivery system 100 is suitable for the first rail 20a located above the vacuum pipeline 10 and the second rail 20b located below the vacuum pipeline 10, is more flexible in application, can be replaced and used at any time when a component fails, and reduces equipment cost.

It should be understood that the above description is only exemplary of the disclosure and is not intended to limit the disclosure, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the disclosure should be included in the scope of the disclosure.

Claims

1. A vacuum delivery system, comprising:

a vacuum pipeline is arranged on the upper portion of the vacuum pipeline,

a first rail disposed at an upper portion in the vacuum duct;

a first vacuum delivery device disposed on the first rail;

the first vacuum delivery device comprises:

a first body;

the first sliding assembly is arranged on the first main body and used for enabling the first main body to slide along the first track;

the first transmission assembly is arranged on the first main body and used for receiving and driving so as to drive the first main body to slide along the first track; and

at least one first sample carrier assembly disposed on the first body, the first sample carrier assembly comprising at least one first sample carrier for carrying a sample on an opposite side to the first body,

and the sample transfer device is connected with the vacuum pipeline and is used for sampling from the first sample carrier.

2. The vacuum delivery system of claim 1, further comprising:

the second rail is arranged at the lower part of the vacuum pipeline and is opposite to the first rail;

a second vacuum delivery device disposed on the second track,

the second vacuum delivery device comprises:

a second body;

the second sliding assembly is arranged on the second main body and used for enabling the second main body to slide along the second track;

the second transmission assembly is arranged on the second main body and used for receiving and driving so as to drive the second main body to slide along the second track; and

at least one second sample loading assembly arranged on the second main body, wherein the second sample loading assembly comprises at least one second sample loading frame, and the second sample loading frame is used for bearing a sample on the front surface.

3. The vacuum delivery system of claim 1,

the sample transfer device comprises:

the sample transferring arm comprises an arm body and a grabbing piece arranged at the far end of the arm body, and the grabbing piece is used for grabbing a sample carried on the first sample carrying frame;

and the driving device drives the sample transferring arm to move so that the grabbing piece grabs the sample carried on the first sample carrying frame.

4. The vacuum delivery system of claim 2,

the sample transfer device comprises:

the sample transferring arm comprises an arm body and a grabbing piece arranged at the far end of the arm body, and the grabbing piece is used for grabbing the sample carried on the first sample carrying frame or the second sample carrying frame;

and the driving device drives the sample transferring arm to move so that the grabbing piece grabs the sample carried on the first sample carrying frame or the second sample carrying frame.

5. The vacuum delivery system of claim 3 or 4,

the pass appearance arm still includes:

the lifting device is arranged at the far end of the arm body, the grabbing piece is arranged on the lifting device,

the driving device is used for driving the lifting device to lift so as to drive the grabbing piece to lift.

6. The vacuum delivery system of claim 5,

the driving device includes:

driving the vacuum chamber;

the transmission magnetic assembly is arranged in the driving vacuum cavity and is arranged at the near end of the sample transmission arm;

the driving magnetic assembly is arranged outside the driving vacuum cavity, is magnetically coupled with the transmission magnetic assembly and is used for driving the transmission magnetic assembly so as to drive the sample transmission arm to move,

the driving magnetic component is used for driving the transmission magnetic component to drive the sample transmission arm to do linear motion or rotary motion,

wherein, rotary motion is used for driving elevating gear drives snatch the piece and go up and down.

7. The vacuum delivery system of claim 1,

the first sample carrier:

a sample-carrying recess or a sample-carrying holder,

the sample carrier is arranged on the reverse side of the first sample carrier and/or the front side of the first sample carrier and is used for carrying the sample.

8. The vacuum delivery system of claim 2,

the first cartridge or the second cartridge comprises:

a sample-carrying recess or a sample-carrying holder,

the sample carrier is arranged on the reverse side of the first sample carrier or the second sample carrier and/or the front side of the first sample carrier or the second sample carrier and is used for carrying the sample.

9. The vacuum delivery system of claim 7,

the first sample loading frame comprises a plurality of frame bodies,

each rack body comprises a corresponding part of the sample loading recess or the sample loading tray,

the plurality of racks collectively carry the sample.

10. The vacuum delivery system of claim 8,

the first sample loading frame or the second sample loading frame comprises a plurality of frame bodies,

the plurality of racks collectively carry the sample.

11. The vacuum delivery system of claim 9 or 10,

the plurality of shelf bodies comprise a first shelf body and a second shelf body which are oppositely arranged,

the first frame body comprises a first arc-shaped recess or a sample carrying support,

the second support body comprises a second arc-shaped recess or a sample carrying support matched with the first arc-shaped recess or the sample carrying support.

12. The vacuum delivery system of claim 1,

the at least one first cartridge comprises a first array of cartridges arranged laterally and/or stacked longitudinally.

13. The vacuum delivery system of claim 2,

the at least one first sample carrier comprises a first sample carrier array which is transversely arranged and/or longitudinally stacked; and/or

The at least one second cartridge comprises a second array of cartridges arranged laterally and/or stacked longitudinally.

14. The vacuum delivery system of claim 1,

the first slide assembly includes:

a plurality of sliding wheels provided on the first body,

the first transmission assembly includes:

at least one mounting bracket disposed on the first body; and

at least one transmission magnet disposed on the at least one mounting bracket for receiving a drive.

15. The vacuum delivery system of claim 2,

the first or second slide assembly comprises:

a plurality of sliding wheels provided on the first body or the second body,

the first transmission assembly or the second transmission assembly comprises:

at least one mounting bracket disposed on the first body or the second body; and

16. The vacuum delivery system of claim 14 or 15,

the at least one driver magnet comprises:

a first magnet disposed on the mounting bracket; and

the second magnet is arranged on the mounting frame, and the polarity of the first magnet and the polarity of the second magnet for receiving driving are opposite.