CN217544539U - Ion source high-voltage discharge phenomenon observation device - Google Patents

Abstract

The application discloses ion source high pressure discharge phenomenon viewing device, owing to include ion source vacuum chamber and rather than the air exhaust pipeline of being connected, at least one observation window has been seted up on ion source vacuum chamber's surface, consequently can observe the ion source discharge condition under vacuum environment through changing the observation window, is convenient for know the weak position of insulated column to carry out corresponding optimization improvement to the insulated column.

Description

Ion source high-voltage discharge phenomenon observation device

Technical Field

The utility model relates to an ion source equipment technical field, more specifically say, relate to an ion source high voltage discharge phenomenon viewing device.

Background

The matrix assisted laser desorption ionization time-of-flight mass spectrometer (mass spectrometer for short) is a commonly used soft ionization mass spectrometer, an ion source of the mass spectrometer is usually arranged in a vacuum chamber and is mainly used for providing an electric field for charged ions so as to enable the ions to have initial power, the ion source comprises at least two electrode plates which are parallel to each other, different power supplies are connected to the two adjacent electrode plates to form a potential difference, an accelerating electric field is generated, the ions are accelerated and fly into a mass analyzer to complete detection, and the potential difference between the two adjacent electrode plates is generally 20kV. In order to assemble the ion source, two adjacent electrode plates are generally separated by an insulating column, the voltage is larger, the ion source applies high voltage in a short time and then releases the high voltage quickly, so that a condition is provided for discharging, when the insulating material is slightly defective, the insulating column can be broken down to generate a discharging phenomenon, the insulating column can be a columnar connector made of a peek material, namely a peek column, the voltage of 20kV exists at two ends of the insulating column, when the insulating column is broken down by the voltage, the broken-down part of the peek column is 1 small point, specifically, how to generate the discharging, the position of the first discharging position cannot be determined, and meanwhile, the resistance and the discharging of the peek material under the vacuum state and the atmospheric pressure environment are different. However, there is no device capable of observing the ion source vacuum discharge phenomenon in the prior art.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides an ion source high voltage discharge phenomenon viewing device can observe the ion source condition of discharging under vacuum environment, is convenient for know the weak position of insulated column to carry out corresponding optimization improvement to the insulated column.

The utility model provides a pair of ion source high-voltage discharge phenomenon viewing device, including ion source vacuum cavity and the exhaust duct who is connected with it, at least one observation window has been seted up on ion source vacuum cavity's surface.

Preferably, in the device for observing the high-voltage discharge phenomenon of the ion source, a top observation window is formed in the top of the vacuum cavity of the ion source.

Preferably, in the above device for observing the high-voltage discharge phenomenon of the ion source, at least one side observation window is further opened on a side of the vacuum chamber of the ion source.

Preferably, in the above device for observing a high-voltage discharge phenomenon of an ion source, four side observation windows are provided on a side of the vacuum chamber of the ion source.

Preferably, in the above device for observing the ion source high-voltage discharge phenomenon, the top observation window includes a top glass pressing plate, a top glass plate and a top sealing plate stacked in sequence from outside to inside, the top sealing plate and the top glass plate are further sealed by an O-ring, and the top sealing plate is in sealed communication with the ion source vacuum cavity.

Preferably, in the above ion source high-voltage discharge phenomenon observation device, the side observation window includes a side glass plate, a side glass pressing plate, and a protective housing, which are stacked in sequence from inside to outside, the side glass plate covers the opening of the sidewall of the ion source vacuum cavity, and the side glass plate and the sidewall of the ion source vacuum cavity are sealed by an O-ring.

Preferably, in the device for observing the high-voltage discharge phenomenon of the ion source, the air exhaust pipeline is respectively connected with a vacuum gauge and a vacuum pumping device, and the vacuum pumping device is used for pumping vacuum to the vacuum cavity of the ion source.

Preferably, in the above observation apparatus for observing a high-voltage discharge phenomenon of an ion source, the vacuum pumping device includes a low-vacuum pumping device and a high-vacuum pumping device, the low-vacuum pumping device is communicated with the pumping duct, and the high-vacuum pumping device is communicated with the pumping duct through a vacuum valve.

Preferably, in the ion source high-voltage discharge phenomenon observation apparatus, the side glass pressing plate is a plastic pressing plate.

Preferably, in the ion source high-voltage discharge phenomenon observation apparatus, the observation window is a quartz glass observation window.

According to the above technical scheme, the utility model provides an above-mentioned ion source high pressure discharge phenomenon viewing device, owing to include ion source vacuum cavity and rather than the air exhaust pipeline of being connected, at least one observation window has been seted up on ion source vacuum cavity's surface, consequently can observe the ion source condition of discharging under vacuum environment through changing the observation window, is convenient for know the weak position of insulated column to carry out corresponding optimization improvement to the insulated column.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a schematic view of an embodiment of an apparatus for observing a high-voltage discharge phenomenon of an ion source according to the present invention;

FIG. 2 is an exploded view of a top viewing window of the high voltage discharge phenomenon viewing device of the ion source;

FIG. 3 is an exploded view of a side viewing window of the ion source high voltage discharge phenomenon observation apparatus;

FIG. 4 is a schematic diagram of the connection of the evacuation piping in the observation apparatus for high-voltage discharge phenomenon of ion source.

Detailed Description

The core of the utility model is to provide an ion source high voltage discharge phenomenon viewing device can observe the ion source and the circumstances of discharging under vacuum environment, is convenient for know the weak position of insulated column to carry out corresponding optimization improvement to the insulated column.

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

The utility model provides a pair of ion source high-voltage discharge phenomenon viewing device's embodiment is shown in figure 1, and figure 1 is the utility model provides a pair of the schematic diagram of ion source high-voltage discharge phenomenon viewing device's embodiment, this ion source high-voltage discharge phenomenon viewing device include ion source vacuum cavity 1 and rather than the exhaust duct 2 of being connected, and at least one observation window 3 has been seted up on ion source vacuum cavity 1's surface.

It should be noted that, in fig. 1, the ion source vacuum chamber 1 may be made of aluminum alloy, and an ion source module 4 is disposed at the upper portion thereof, and the lower portion thereof may be supported by a supporting frame 5 made of aluminum alloy, and parameters such as the size and height of the supporting frame 5 may be adjusted as required to be suitable for different application environments, the ion source vacuum chamber 1 is a main component for maintaining a vacuum environment, and an observation window 3 may be opened on any surface thereof so that people can see the inside of the chamber from the window, and the upper portion may be opened, or the side portion may be opened, or both the upper portion and the side portion may be opened simultaneously, which may be selected according to actual needs, and by using the observation window 3, an external person may observe the discharge condition of the ion source inside, so as to know the insulation weak point of the insulating column, thereby facilitating the optimization and improvement of the insulating column structure, and may observe the position of the ion source peek column, where the current is broken down in vacuum, and further determine the maximum breakdown voltage of the ion source in vacuum, and it should be noted that the function of the above-mentioned pipeline is to extract the gas pumped out to maintain the vacuum degree of the chamber.

According to the above technical scheme, the utility model provides an in the embodiment of above-mentioned ion source high pressure discharge phenomenon viewing device, owing to including ion source vacuum cavity and rather than the air exhaust pipeline of being connected, at least one observation window has been seted up on ion source vacuum cavity's surface, consequently can observe the ion source condition of discharging in vacuum environment through this observation window, is convenient for know the weak position of insulated column to carry out corresponding optimization improvement to the insulated column.

In one embodiment of the above apparatus for observing the ion source high voltage discharge phenomenon, with reference to fig. 1, a top observation window 301 is disposed on the top of the ion source vacuum chamber 1, in which case the internal condition of the ion source vacuum chamber 1 can be observed from the top, and in another embodiment, at least one side observation window 302 is disposed on the side of the ion source vacuum chamber 1, that is, one side observation window, two side observation windows, and three or four observation windows can be disposed, without limitation, so that the internal condition of the ion source vacuum chamber 1 can be observed from the side. There is provided another embodiment, wherein four side observation windows 302 are opened on the sides of the ion source vacuum chamber, so that the discharge condition inside the ion source vacuum chamber can be observed in all directions.

The top observation window in the ion source high-voltage discharge phenomenon observation device may be as shown in fig. 2, fig. 2 is an exploded view of the top observation window in the ion source high-voltage discharge phenomenon observation device, the top observation window 301 may include a top glass pressing plate 3011, a top glass plate 3012 and a top sealing plate 3013 stacked in sequence from outside to inside, the top sealing plate 3013 and the top glass plate 3012 are further sealed by an O-ring 3014, the top sealing plate 3014 is in sealed communication with the ion source vacuum cavity, specifically, the top sealing plate 3014 is in sealed communication with the ion source by the O-ring 3014. It should be noted that, this top closing plate 3013 can be but not limited to be aluminum alloy material, and top glass clamp plate 3011 is POM spare, utilizes O type sealing washer 3014 can seal the cavity effectively, guarantees to have enough high vacuum in the cavity, utilizes this kind of structure, can guarantee the security of top observation window, can not destroyed because of the vacuum is too high.

The side window of the ion source high voltage discharge phenomenon observation device may be as shown in fig. 3, and fig. 3 is an exploded view of one side window of the ion source high voltage discharge phenomenon observation device, and the side window may include a side glass plate 3021, a side glass pressing plate 3022, and a protective shell 3023 stacked in this order from inside to outside, the side glass plate 3021 covers the opening of the sidewall of the ion source vacuum chamber, and the side glass plate 3021 and the sidewall of the ion source vacuum chamber are sealed by an O-ring 3024. It should be noted that the side glass pressing plate 3022 may be a POM, and the protective shell 3023 may prevent the glass from being damaged by external objects, so that the side observation window may be safer, and the operator may not be hurt even if the glass plate is broken, and the side observation window may ensure that the operator can observe the ion source discharge more comprehensively, and find the discharge problem in time.

Fig. 4 is a schematic view of the connection between the pumping pipeline in the ion source high-voltage discharge phenomenon observation device and the related equipment, the pumping pipeline 2 can be respectively connected with a vacuum gauge 6 and a vacuum pumping device 7, and the vacuum pumping device 7 is used for pumping vacuum to the vacuum cavity of the ion source. It should be noted that the vacuum gauge 6 is used for measuring a numerical value of the vacuum degree, providing data support for related operators, showing whether the vacuum degree meets the requirement, and providing sufficient vacuum degree for the ion source vacuum cavity by using the vacuum pumping device 7, thereby realizing the high-voltage discharge observation of the ion source in the vacuum environment. Further, the vacuum-pumping device 7 may include a low-vacuum pumping device 701 and a high-vacuum pumping device 702, the low-vacuum pumping device 701 is communicated with the suction pipe 2, and the high-vacuum pumping device 702 is communicated with the suction pipe 2 through a vacuum valve 8. It should be noted that, a low vacuum pumping device, such as a mechanical pump, may be used to pump the vacuum for a period of time, and then the vacuum valve 8 is opened to connect the ion source vacuum cavity to a high vacuum, which may be a high vacuum cavity, and the high vacuum may be pumped to a high vacuum by the high vacuum device in advance, and after the ion source vacuum cavity is connected to the high vacuum cavity by the pumping pipeline, the ion source vacuum cavity may be pumped to a high vacuum state quickly, so as to meet the requirement of high vacuum for ion source discharge, and the vacuum gauge 6 may be used to monitor the current vacuum degree in the ion source vacuum cavity.

In addition, in the embodiment of the ion source high-voltage discharge phenomenon observation device, the side glass pressing plate can be preferably a plastic pressing plate, screws can be uniformly distributed on the periphery of the side glass pressing plate, so that the side glass plate can be conveniently and uniformly extruded, a better environment is provided for later stage air extraction and ultimate vacuum, the plastic pressing plate can prevent the risk of glass crushing caused by overlarge torsion of the screws in the installation process, in addition, the observation window can be preferably a quartz glass observation window, and the rigid quartz glass can be better suitable for the sealing environment of a high-vacuum cavity.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. The utility model provides an ion source high pressure discharge phenomenon viewing device which characterized in that, includes ion source vacuum chamber and rather than the exhaust duct of connection, at least one observation window has been seted up on the surface of ion source vacuum chamber.

2. The apparatus of claim 1, wherein a top window is disposed at the top of the vacuum chamber.

3. The apparatus of claim 2, wherein at least one side window is formed on a side of the vacuum chamber.

4. The apparatus according to claim 3, wherein four side observation windows are formed on a side of the vacuum chamber.

5. The ion source high voltage discharge phenomenon observation device according to claim 2, wherein the top observation window comprises a top glass pressing plate, a top glass plate and a top sealing plate stacked in sequence from outside to inside, wherein the top sealing plate and the top glass plate are further sealed by an O-ring, and the top sealing plate is in sealed communication with the ion source vacuum cavity.

6. The ion source high-voltage discharge phenomenon observation device according to claim 3, wherein the side observation window comprises a side glass plate, a side glass pressing plate and a protective shell which are stacked in sequence from inside to outside, the side glass plate covers the opening of the side wall of the ion source vacuum cavity, and the side glass plate and the side wall of the ion source vacuum cavity are sealed by an O-shaped sealing ring.

7. The observation apparatus of any one of claims 1 to 6, wherein the evacuation conduit is connected to a vacuum gauge and an evacuation device, respectively, and the evacuation device is configured to evacuate the vacuum chamber of the ion source.

8. The ion source high-voltage discharge phenomenon observation apparatus according to claim 7, wherein said evacuation device includes a low-vacuum extraction device and a high-vacuum extraction device, said low-vacuum extraction device being communicated with said evacuation pipe, said high-vacuum extraction device being communicated with said evacuation pipe through a vacuum valve.

9. The ion source high-voltage discharge phenomenon observation apparatus according to claim 6, wherein said side glass pressing plate is a plastic pressing plate.

10. The ion source high-voltage discharge phenomenon observation device according to any one of claims 1 to 6, wherein the observation window is a quartz glass observation window.

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