CN217541367U - Protective door of silicon wafer processing equipment - Google Patents
Protective door of silicon wafer processing equipment Download PDFInfo
- Publication number
- CN217541367U CN217541367U CN202221467680.4U CN202221467680U CN217541367U CN 217541367 U CN217541367 U CN 217541367U CN 202221467680 U CN202221467680 U CN 202221467680U CN 217541367 U CN217541367 U CN 217541367U
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- strip
- silicon wafer
- bolt
- processing equipment
- wafer processing
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Abstract
The utility model discloses a silicon wafer processing equipment guard gate, it includes: casing, lift drive, bolt drive and guard gate subassembly, the guard gate subassembly includes fixed strip and many lifting strip, one side of casing is provided with the opening, the fixed strip sets up the opening bottom at the casing, the lifting strip superposes from top to bottom in proper order and carries out the open-ended and seal on the fixed strip, the symmetry is provided with two guide bars that upwards run through the lifting strip on the fixed strip, lift drive's output is provided with the sliding seat, be provided with the uide bushing of directional lifting strip on the sliding seat, the bolt sets up and points to the lifting strip in the uide bushing. Silicon wafer processing equipment guard gate, insert the lift strip that corresponds through the bolt, utilize lift drive arrangement to drive bolt and lift strip shift up the segment distance can, shortened the guard gate subassembly and opened consuming time with closed operation, reduced the waste of heat energy.
Description
Technical Field
The utility model relates to a silicon wafer processing equipment field especially relates to a silicon wafer processing equipment guard gate.
Background
Many steps are required for processing silicon wafers, and the silicon wafers need to be transferred between apparatuses. Such as cleaning and drying, it is necessary to clean the silicon wafer first and then transfer the silicon wafer to a drying apparatus for drying. In order to improve the production efficiency, the cleaned silicon wafers can be placed into a drying device one by adopting a manipulator, and then taken out one by one after being dried.
In order to reduce energy consumption, a protective door of the drying equipment is not easy to be opened too much, but the silicon wafers are different in position height in the drying equipment, an ordinary protective door cannot be opened at a corresponding position according to the position height of the silicon wafers, the protective door is required to be opened completely every time, the speed is low, time consumption is long, heat energy waste is serious, and improvement is needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a silicon wafer processing equipment guard gate carries out the opening of guard gate optional position height, promotes the speed of switch door, reduces the waste of heat energy.
To achieve the purpose, the utility model adopts the following technical proposal:
a silicon wafer processing equipment guard door comprising: casing, lift drive, bolt drive and guard gate subassembly, the guard gate subassembly includes fixed strip and many liftings, one side of casing is provided with the opening, the fixed strip sets up the opening bottom at the casing, the liftings superposes from top to bottom in proper order and carries out the open-ended and seal on the fixed strip, the symmetry is provided with two guide bars that upwards run through the liftings on the fixed strip, lift drive vertical setting respectively is on the relative both sides wall adjacent with the opening of casing, lift drive's output is provided with the sliding seat, be provided with the uide bushing of directional liftings on the sliding seat, the bolt sets up in the uide bushing and points to the liftings, the back of liftings is provided with the pinhole that corresponds with the bolt, be provided with the baffle that is located the uide bushing rear on the sliding seat, bolt drive sets up on the baffle and is connected with the bolt.
The length of the fixing strip is larger than the width of the opening of the shell, and the guide rods are located on two sides of the opening of the shell.
The bottom of each lifting strip is provided with a sealing groove extending along the length direction, and the top of each lifting strip is provided with a first convex rib corresponding to the sealing groove.
And a second convex rib corresponding to the sealing groove is arranged at the top of the fixing strip.
Wherein, be provided with the guiding hole that corresponds with the guide bar on the lifter bar.
Wherein, the lifting driving device adopts an electric screw rod sliding table.
Wherein, bolt drive arrangement adopts the cylinder.
The utility model has the advantages that: the utility model provides a silicon wafer processing equipment guard gate, fixed strip and many lifting strip have been designed very much, form the guard gate subassembly that can the optional position height open through the stack of many lifting strip on the fixed strip, when the guard gate subassembly is opened, insert the lifting strip that corresponds through the bolt, utilize lift drive arrangement to drive bolt and lifting strip shift up the segment distance can, it is consuming time with closed operation to have shortened the guard gate subassembly greatly and opened, and the production efficiency is promoted, and the gap that the guard gate subassembly was opened is little, the waste of heat energy has been reduced.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
fig. 3 is a schematic view of the open protective door assembly of fig. 1.
Detailed Description
The technical solution of the present invention is further explained by the specific embodiment with reference to fig. 1 to 3.
The silicon wafer processing equipment protective door as shown in fig. 1 comprises: casing 1 (such as the casing of drying-machine), lift drive 2, bolt 11, bolt drive arrangement 13 and protection door subassembly, the protection door subassembly includes fixed strip 6 and many liftings 4, one side of casing 1 is provided with the opening, fixed strip 6 sets up in the opening bottom of casing 1, and in this embodiment, fixed strip 6 can weld or adopt the screw fixation to be in the opening bottom of casing 1, stable in structure.
In this embodiment, the length of the fixing strip 6 is greater than the width of the opening of the housing 1, the protection effect is good, and the guide rods 3 are located on two sides of the opening of the housing 1, so that the silicon wafer can not enter or exit the opening of the housing 1.
As shown in fig. 2, the bottom of each lifting bar 4 is provided with a sealing groove 5 extending along the length direction, and the top of each lifting bar 4 is provided with a first convex rib 8 corresponding to the sealing groove 5, so that the sealing performance of the adjacent lifting bars 4 is improved, and the heat loss is reduced. In addition, the top of the fixing strip 6 is provided with a second convex rib 10 corresponding to the sealing groove 5, so that the sealing performance of the fixing strip 6 and the lifting strip above the fixing strip is improved.
Lift drive 2 is vertical setting respectively on the relative both sides wall adjacent with the opening of casing 1, in this embodiment, lift drive 2 adopts electronic lead screw slip table, can carry out lifting control through the PLC controller.
The output end of the lifting driving device 2 is provided with a sliding seat 7, the sliding seat 7 is provided with a guide sleeve 9 pointing to the lifting strip 4, and the bolt 11 is arranged in the guide sleeve 9 and pointing to the lifting strip 4 to guide the bolt 11. In this embodiment, the back of lifting strip 4 is provided with the pinhole that corresponds with bolt 11, inserts the pinhole that corresponds the lifting strip 4 back through bolt 11, then moves up the small distance through lift drive 2 drive bolt 11 and lifting strip 4, opens a little gap on the protection door subassembly, makes things convenient for the business turn over of silicon wafer, through selecting the lifting strip 4 that corresponds the height, can change the position height in gap moreover, adapts to the position height of silicon wafer in casing 1.
In order to drive the bolt 11, a baffle plate 12 positioned behind the guide sleeve 9 is arranged on the sliding seat 7, the bolt driving device 13 is arranged on the baffle plate 12 and connected with the bolt 11, in the embodiment, the bolt driving device 13 adopts an air cylinder, and the telescopic control of the bolt driving device 13 is performed through a PLC and a corresponding electromagnetic valve, so that the action is flexible.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (7)
1. A protective door for silicon wafer processing equipment, comprising: casing, lift drive, bolt drive and guard gate subassembly, the guard gate subassembly includes fixed strip and many liftings, one side of casing is provided with the opening, the fixed strip sets up the opening bottom at the casing, the liftings superposes from top to bottom in proper order and carries out the open-ended and seal on the fixed strip, the symmetry is provided with two guide bars that upwards run through the liftings on the fixed strip, lift drive vertical setting respectively is on the relative both sides wall adjacent with the opening of casing, lift drive's output is provided with the sliding seat, be provided with the uide bushing of directional liftings on the sliding seat, the bolt sets up in the uide bushing and points to the liftings, the back of liftings is provided with the pinhole that corresponds with the bolt, be provided with the baffle that is located the uide bushing rear on the sliding seat, bolt drive sets up on the baffle and is connected with the bolt.
2. The silicon wafer processing equipment guard door of claim 1, wherein the length of the retaining strip is greater than the width of the opening of the housing, and the guide bar is positioned on both sides of the opening of the housing.
3. The protective door for silicon wafer processing equipment according to claim 1, wherein the bottom of each lifting strip is provided with a sealing groove extending along the length direction, and the top of each lifting strip is provided with a first rib corresponding to the sealing groove.
4. The silicon wafer processing equipment protective door of claim 3, wherein a second rib corresponding to the sealing groove is arranged at the top of the fixing strip.
5. The silicon wafer processing equipment protective door of claim 1, wherein the lifting strip is provided with guide holes corresponding to the guide rods.
6. The protective door for silicon wafer processing equipment according to claim 1, wherein the lifting drive device employs an electric screw rod sliding table.
7. The silicon wafer processing equipment guard door of claim 1, wherein the latch pin drive means employs an air cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221467680.4U CN217541367U (en) | 2022-06-14 | 2022-06-14 | Protective door of silicon wafer processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221467680.4U CN217541367U (en) | 2022-06-14 | 2022-06-14 | Protective door of silicon wafer processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217541367U true CN217541367U (en) | 2022-10-04 |
Family
ID=83442844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221467680.4U Active CN217541367U (en) | 2022-06-14 | 2022-06-14 | Protective door of silicon wafer processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217541367U (en) |
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2022
- 2022-06-14 CN CN202221467680.4U patent/CN217541367U/en active Active
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