CN217521957U

CN217521957U - Furnace tube equipment

Info

Publication number: CN217521957U
Application number: CN202221378489.2U
Authority: CN
Inventors: 徐亚平
Original assignee: Zhongxin Nanfang Integrated Circuit Manufacturing Co ltd
Current assignee: Zhongxin Nanfang Integrated Circuit Manufacturing Co ltd
Priority date: 2022-05-25
Filing date: 2022-05-25
Publication date: 2022-09-30
Anticipated expiration: 2032-05-25

Abstract

The application provides a furnace tube equipment includes: the reaction chamber, the first side of the said reaction chamber has radio frequency cavities, the said radio frequency cavity and said reaction chamber are communicated through several air vents; the flange base is arranged at the bottom of the reaction cavity and comprises an extension part arranged on the first side of the reaction cavity, and the extension part comprises a first mounting hole which penetrates through the extension part along the vertical direction and is communicated with the radio frequency cavity and a second mounting hole which is arranged along the horizontal direction and is communicated with the first mounting hole; the first air inlet pipe is hermetically arranged in the first mounting hole and extends into the radio frequency cavity, and the part of the first air inlet pipe, which is positioned in the radio frequency cavity, comprises a plurality of air inlet holes; and the second air inlet pipe is hermetically arranged in the second mounting hole, and the second air inlet pipe is not higher than the bottom of the first air inlet pipe in the vertical direction. The utility model provides a furnace tube equipment, the change maintenance problem of intake pipe in the furnace tube equipment can be improved.

Description

Furnace tube equipment

Technical Field

The application relates to the technical field of semiconductors, in particular to furnace tube equipment.

Background

With the development of semiconductor technology, in advanced process applications, in order to reduce the damage of unnecessary high temperature to wafers, various furnace apparatuses are actively researching methods for reducing the reaction temperature of compounds in the furnace. Among them, the most common method at present is to introduce an RF power supply (radio frequency power supply) into the furnace tubes for LPCVD and ALD processes, and to ionize the reaction gas in the chamber by the RF power supply, so as to enhance the activity of the reaction gas, thereby reducing the temperature required by the reaction of various gases, implementing various processes at a lower temperature, and reducing unnecessary damage of the temperature to the wafer.

In the advanced process furnace tube, the reaction gas firstly enters the RF cavity through the gas inlet tube, is ionized by the radio frequency power supply arranged on the RF electrode plates at two sides in the RF cavity and then enters the reaction cavity. Because the gas inlet tube is positioned between the RF electrodes, the gas inlet tube is easy to peel off quartz chips under the action of RF, and the granularity in the process is influenced, so the gas inlet tube needs to be frequently replaced or maintained.

However, in the structure of the existing furnace tube equipment, the problems of close matching of the gas inlet tube, the reaction cavity and the RF cavity, fragile joint of the gas inlet tube and the furnace tube equipment, high cost of the gas inlet tube and the like still exist in the maintenance and replacement of the gas inlet tube. Therefore, there is a need to provide a more effective and reliable technical solution to improve the replacement and maintenance of the gas inlet pipe in the furnace pipe equipment.

SUMMERY OF THE UTILITY MODEL

The application provides a furnace tube equipment, can improve the change maintenance problem of intake pipe in the furnace tube equipment.

The application provides a furnace tube equipment includes: the reaction chamber, the first side of the said reaction chamber has radio frequency cavities, the said radio frequency cavity and said reaction chamber are communicated through several air vents; the flange base is arranged at the bottom of the reaction cavity and comprises an extension part arranged on the first side of the reaction cavity, and the extension part comprises a first mounting hole which penetrates through the extension part along the vertical direction and is communicated with the radio frequency cavity and a second mounting hole which is arranged along the horizontal direction and is communicated with the first mounting hole; the first air inlet pipe is hermetically arranged in the first mounting hole and extends into the radio frequency cavity, and the part of the first air inlet pipe, which is positioned in the radio frequency cavity, comprises a plurality of air inlet holes; and the second air inlet pipe is hermetically arranged in the second mounting hole, and the second air inlet pipe is not higher than the bottom of the first air inlet pipe in the vertical direction.

In some embodiments of the present application, a first sealing rubber ring is disposed at a communication position of the first mounting hole and the radio frequency cavity, and the first sealing rubber ring is fixed by a jackscrew.

In some embodiments of the present application, the furnace tube apparatus further comprises: the first air inlet pipe mounting base is arranged in the first mounting hole and used for fixing the first air inlet pipe, and a communicating hole for communicating the first air inlet pipe and the second air inlet pipe is formed in the first air inlet pipe mounting base.

In some embodiments of the present application, an upper surface of the first intake pipe mounting base is provided with a second sealing rubber ring surrounding the first intake pipe.

In some embodiments of the present application, the first air inlet pipe is installed on the portion of the first air inlet pipe installation base, a positioning groove is arranged on one side of the installation hole of the first air inlet pipe installation base, and the positioning groove are matched to fix the first air inlet pipe on the first air inlet pipe installation base.

In some embodiments of the present application, the furnace tube apparatus further comprises: and the first sealing device is arranged at the bottom of the first mounting hole and used for sealing the first mounting hole.

In some embodiments of the present application, the extension portion includes a protruding portion, the second mounting hole further penetrates through the protruding portion, the second air inlet pipe extends out of the protruding portion, and the protruding portion is provided with a second sealing device.

In some embodiments of the present application, the second sealing device comprises: a first sealing ring, a first portion of which is mounted on the outer surface of the bulge, and a second portion of which extends out of the bulge; and a first part of the second sealing ring is arranged on the outer surface of the second air inlet pipe, and a second part of the second sealing ring extends out of a second part of the first sealing ring.

In some embodiments of the present application, the first portion of the first seal ring and the projection are connected by threads; and a third sealing rubber ring is arranged between the first part of the second sealing ring and the second air inlet pipe.

In some embodiments of the present application, the furnace tube apparatus further comprises: and the exhaust port is arranged on the second side of the reaction cavity, and the second side and the first side are oppositely arranged.

The application provides a boiler tube equipment, with two sections intake pipes of horizontal direction and vertical direction of traditional integral type "L" type intake pipe split, two sections intake pipes can independently maintain or change respectively, can improve the change maintenance problem of intake pipe in the boiler tube equipment.

Drawings

The following drawings describe in detail exemplary embodiments disclosed in the present application. Wherein like reference numerals represent similar structures throughout the several views of the drawings. Those of ordinary skill in the art will understand that the present embodiments are non-limiting, exemplary embodiments, and that the accompanying drawings are for illustrative and descriptive purposes only and are not intended to limit the scope of the present application, as other embodiments may equally accomplish the utility model intent of the present application. It should be understood that the figures are not drawn to scale. Wherein:

FIG. 1 is a schematic structural view of a furnace apparatus;

FIG. 2 is a schematic structural diagram of a furnace apparatus according to an embodiment of the present application;

FIG. 3 is a top view of a flange base of a furnace apparatus according to an embodiment of the present application;

FIG. 4 is a sectional view of a flange base of a furnace tube apparatus according to an embodiment of the present disclosure;

FIG. 5 is an assembly view of a first inlet pipe and a first inlet pipe mounting base of a furnace tube apparatus according to an embodiment of the present disclosure;

FIG. 6 is a cross-sectional view of a first inlet tube mounting base of a furnace tube apparatus according to an embodiment of the present disclosure;

fig. 7 is a schematic structural diagram of a second sealing device of a furnace tube apparatus in the embodiment of the present application.

Detailed Description

The following description is presented to enable one of ordinary skill in the art to make and use the present disclosure. Various localized modifications to the disclosed embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Thus, the present application is not limited to the embodiments shown, but is to be accorded the widest scope consistent with the claims.

The following describes the technical solution of the present invention in detail with reference to the embodiments and the accompanying drawings.

Fig. 1 is a schematic structural diagram of a furnace apparatus 100.

Referring to fig. 1, the furnace apparatus 100 includes: the reaction chamber 110, a radio frequency cavity 120 is disposed on a first side of the reaction chamber 110, and the radio frequency cavity 120 and the reaction chamber 110 are communicated through a plurality of vent holes 121.

The furnace tube apparatus 100 further comprises: an air inlet pipe 130 is positioned in the radio frequency cavity 120, and the air inlet pipe 130 is in an integrated L shape. The short side part of the air inlet pipe 130 is located at the bottom of the radio frequency cavity 120, the long side part of the air inlet pipe 130 is located in the middle of the radio frequency cavity 120, and the long side part of the air inlet pipe 130 is provided with a plurality of air inlet holes 131.

The furnace tube apparatus 100 further comprises: and a flange base 140 disposed at the bottom of the reaction chamber 110 for supporting the reaction chamber 110.

The furnace tube apparatus 100 further comprises: and an air outlet 150 disposed at a second side of the reaction chamber 110.

The furnace tube apparatus 100 further comprises: and a furnace door 160 disposed at the bottom of the flange base 140 for closing the reaction chamber 110.

In the conventional furnace tube equipment structure shown in fig. 1, the gas inlet tube 130 is integrally welded with the whole furnace tube equipment and cannot be replaced independently; and the intake duct 130 is difficult to install. In order to solve the problems, the application provides a furnace tube device, a traditional integrated L-shaped air inlet tube is split into two sections of air inlet tubes in the horizontal direction and the vertical direction, the two sections of air inlet tubes can be independently and respectively maintained or replaced, and the replacement and maintenance problems of the air inlet tubes in the furnace tube device can be solved.

Fig. 2 is a schematic structural diagram of a furnace apparatus 200 according to an embodiment of the present application.

An embodiment of the present application provides a furnace tube apparatus 200, as shown with reference to fig. 2 and 4, including: a reaction chamber 210, wherein a radio frequency cavity 220 is arranged on a first side of the reaction chamber 210, and the radio frequency cavity 220 is communicated with the reaction chamber 210 through a plurality of vent holes 221; a flange base 240 disposed at the bottom of the reaction chamber 210, wherein the flange base 240 includes an extension portion 240a disposed at a first side of the reaction chamber 210, and the extension portion 240a includes a first mounting hole 241 penetrating through the extension portion 240a in a vertical direction and communicating with the rf chamber 220, and a second mounting hole 242 disposed in a horizontal direction and communicating with the first mounting hole 241; the first air inlet pipe 231 is hermetically installed in the first installation hole 241 and extends into the radio frequency cavity 220, and the part of the first air inlet pipe 231 located in the radio frequency cavity 220 comprises a plurality of air inlet holes 231 a; and a second intake pipe 232 sealingly installed in the second installation hole 242, the second intake pipe 232 not being higher than a bottom of the first intake pipe 231 in a vertical direction.

Compare the traditional boiler tube equipment structure that FIG. 1 shows with the present application technical scheme that FIG. 2 shows boiler tube equipment structure, in the technical scheme of this application, with two sections intake pipes (namely first intake pipe 231 and second intake pipe 232) of horizontal direction and vertical direction of traditional integral type "L" type intake pipe split, two sections intake pipes are installed through first mounting hole 241 and second mounting hole 242 respectively, two sections intake pipes can independently be maintained or changed respectively, can improve the change maintenance problem of intake pipe in the boiler tube equipment.

The structure of the furnace tube apparatus 200 and the detailed installation structure of the first inlet tube and the second inlet tube according to the embodiment of the present application are further described in detail below with reference to the accompanying drawings.

In some embodiments of the present application, the furnace apparatus 200 is a quartz furnace, and the reaction chamber 210 is a quartz chamber. The reaction chamber 210 has a cylindrical shape. The reaction chamber 210 is used for accommodating a boat and reacting a reaction gas.

In some embodiments of the present invention, the rf cavity 220 may be integrally connected to the reaction chamber 210, or may be additionally installed on a sidewall of the reaction chamber 210. The radio frequency cavity 220 is internally provided with a radio frequency power supply, and the reaction gas introduced into the radio frequency cavity 220 is ionized by the radio frequency power supply, so that the activity of the reaction gas point is improved, the temperature required by the reaction of the reaction gas is reduced, the low-temperature reaction is realized, and unnecessary damage of high temperature to the wafer is reduced.

The rf cavity 220 and the reaction cavity 210 are communicated through a plurality of vent holes 221, so that the reaction gas in the rf cavity 220 can be introduced into the reaction cavity 210.

Fig. 3 is a top view of a flange base of a furnace tube apparatus according to an embodiment of the present disclosure. Fig. 4 is a sectional view of a flange base of a furnace tube apparatus according to an embodiment of the present application. Specifically, fig. 4 is a sectional view taken along a broken line in fig. 3.

Referring to fig. 2, 3 and 4, the flange base 240 is disposed at the bottom of the reaction chamber 210 for supporting the reaction chamber 210.

The flange base 240 includes an extension 240a disposed on a first side of the reaction chamber 210, and the extension 240a is located right below the rf cavity 220.

The extension 240a includes a first mounting hole 241 penetrating the extension 240a in a vertical direction and communicating with the rf cavity 220, and a second mounting hole 242 disposed in a horizontal direction and communicating with the first mounting hole 241.

In some embodiments of the present application, the diameter of the first mounting hole 241 is 30 to 50 mm, for example 40 mm.

In the traditional furnace tube equipment structure shown in fig. 1, the air inlet tube is directly installed through the radio frequency cavity, and the installation is difficult and the maintenance and the replacement cannot be carried out. And in the technical scheme of this application, reform transform flange base 240, increase extension 240a, and set up in the extension 240a first mounting hole 241 and second mounting hole 242 for install first intake pipe and second intake pipe respectively, make the installation of first intake pipe and second intake pipe more convenient, and still be convenient for maintenance and change first intake pipe and second intake pipe.

With continued reference to fig. 2, the first air inlet pipe 231 is sealingly installed in the first installation hole 241 and extends into the rf cavity 220, and a portion of the first air inlet pipe 231 located in the rf cavity 220 includes a plurality of air inlet holes 231 a.

Fig. 5 is an assembly view of a first air inlet pipe and a first air inlet pipe mounting base of a furnace tube apparatus according to an embodiment of the present application. Fig. 6 is a cross-sectional view of a first inlet pipe mounting base of a furnace pipe apparatus according to an embodiment of the present application. Specifically, fig. 6 is a cross-sectional view taken along the dotted line in fig. 5.

Referring to fig. 2 and 5, the furnace tube apparatus 200 further includes: and a first intake pipe mounting base 230 provided in the first mounting hole 241 for fixing the first intake pipe 231, the first intake pipe mounting base 230 having a communication hole 230a communicating the first intake pipe 231 and the second intake pipe 232.

In some embodiments of the present application, the upper surface of the first intake pipe mounting base 230 is provided with a second sealing rubber ring (not shown) surrounding the first intake pipe 231. The second sealing rubber ring is used to seal the first mounting hole, and fix the first air inlet pipe 231 and the first air inlet pipe mounting base 230 by using the elasticity of the second sealing rubber ring.

In some embodiments of the present application, referring to fig. 5, a positioning portion 231b is provided at a portion of the first air inlet pipe 231, which is mounted to the first air inlet pipe mounting base 230, and referring to fig. 6, a positioning groove 230b is provided at one side of the mounting hole of the first air inlet pipe mounting base 230, and the positioning portion 231b and the positioning groove 230b are adapted to fix the first air inlet pipe 231 to the first air inlet pipe mounting base 230.

In some embodiments of the present application, the first intake pipe 231 has a length of 1100 to 1300 mm, for example 1200 mm.

In some embodiments of the present application, the first intake pipe mounting base 230 has an outer diameter of 30 to 46 mm, for example 38 mm; the first intake pipe mounting base 230 has an inner diameter of 15 to 40 mm, for example, 25 mm; the length of the positioning groove 230b is 2 to 6 mm, for example, 4 mm.

In some embodiments of the present application, as shown in fig. 2, a first sealing rubber ring 270 is disposed at a position where the first mounting hole 241 is communicated with the rf cavity 220, and the first sealing rubber ring 270 is fixed by a jackscrew. The cross section of the jackscrew is an inner hexagonal circular cross section. The width of the hexagon socket portion of the jackscrew is 10 to 20 mm, for example 15 mm; the diameter of the circular portion of the terminal wire is 30 to 46 mm, for example 38 mm.

In some embodiments of the present application, and as illustrated with reference to fig. 2, the furnace tube apparatus 200 further comprises: and a first sealing means 280 disposed at the bottom of the first mounting hole 241 for sealing the first mounting hole 241 and supporting the first intake duct mounting base 230 in the first mounting hole 241. The first sealing device 280 may also be provided with a sealing rubber ring to fix the first air inlet pipe mounting base 230. The upper surface of the first sealing device 280 is an inner hexagonal circular nut.

With continued reference to fig. 2, the second air inlet pipe 232 is sealingly mounted in the second mounting hole 242, and the second air inlet pipe 232 is not higher than the bottom of the first air inlet pipe 231 in the vertical direction. Specifically, the upper surface of the second intake pipe 232 may be flush with the bottom of the first intake pipe 231.

Referring to fig. 7 and 4, the extension portion 240a includes a protrusion 240b, the second mounting hole 242 further penetrates the protrusion 240b, the second air inlet pipe 232 extends out of the protrusion 240b, and the protrusion 240b is provided with a second sealing device 290.

Referring to fig. 7, the second sealing device 290 includes: a first sealing ring 291, a first portion of the first sealing ring 291 being mounted on an outer surface of the protrusion 240b, and a second portion of the first sealing ring 291 extending out of the protrusion 240 b; a second sealing ring 292, a first portion of the second sealing ring 292 being mounted to the outer surface of the second intake pipe 232, a second portion of the second sealing ring 292 extending beyond a second portion of the first sealing ring 291.

With continued reference to FIG. 7, the first portion of the first seal ring 291 and the projection 240b are threadably connected; a third sealing rubber ring 293 is arranged between the first part of the second sealing ring 292 and the second air inlet pipe 232.

In some embodiments of the present application, and as illustrated with reference to fig. 2, the furnace tube apparatus 200 further comprises: and an exhaust port 250 disposed at a second side of the reaction chamber 210, the second side being opposite to the first side. The exhaust port 250 is used to exhaust the reaction gas.

In some embodiments of the present application, and as illustrated with reference to fig. 2, the furnace tube apparatus 200 further comprises: and the furnace door 260 is arranged at the bottom of the flange base 240 and used for closing the reaction cavity 210.

In the technical solution of the present application, the first air inlet pipe mounting base 230 can be detached only by opening the first sealing device 280, so as to implement maintenance and replacement of the first air inlet pipe 231; in addition, the second sealing device 290 only needs to be removed to repair and replace the second air inlet pipe 232.

The installation mode of the first air inlet pipe and the second air inlet pipe of the furnace pipe equipment is also simpler and more convenient.

Referring to fig. 2, in a first step, the first rubber seal ring 270 is placed on the top surface of the jackscrew, the jackscrew is pressed against the first mounting hole 241 by using an allen key, and the jackscrew is mounted in place, so that the O-shaped first rubber seal ring 270 is pressed against the flange base and the jackscrew to form a sealing surface.

Referring to fig. 5, in a second step, an O-shaped second sealing rubber ring is mounted at the bottom of the first air inlet pipe 231, and the first air inlet pipe 231 is mounted on the first air inlet pipe mounting base 230 such that the positioning portion 231b and the positioning groove 230b are aligned, so as to fix the first air inlet pipe 231 to the first air inlet pipe mounting base 230, and ensure that the air inlet holes 231a of the first air inlet pipe 231 face the air vent holes 221.

With reference to fig. 2, in a third step, the first air inlet pipe mounting base 230 is held, the first air inlet pipe 231 is slowly inserted into the first mounting hole 241, and a jig is used to position the first air inlet pipe mounting base 230 from the second mounting hole 242, so as to ensure that the mounting positions of the first air inlet pipe mounting base 230 and the first air inlet pipe 230 are correct.

With reference to fig. 2, in the fourth step, an O-ring is fixed on the first sealing device 280, and the first sealing device 280 is installed in the first installation hole 241 by using an allen wrench and fastened to ensure the air tightness of the cavity.

Continuing to refer to fig. 2 and 7, in the fifth step, inserting the second air inlet pipe 232 into the second mounting hole 242, mounting an O-shaped third sealing rubber ring, and sequentially mounting the second sealing ring 292 and the first sealing ring 291, so that the second air inlet pipe 232 is in close contact with the side wall of the second mounting hole 242, and the air tightness of the cavity is ensured.

According to the technical scheme, a series of problems of quartz nozzle breakage, gouges and the like in the installation process of the gas inlet pipe of the furnace pipe equipment can be effectively solved, and the effect is remarkable; the first air inlet pipe and the second air inlet pipe can be installed from the bottom of the furnace tube, so that the workload is reduced, the maintenance efficiency is improved, and the first air inlet pipe is independently replaced; through changing first intake pipe alone, optimize the change cycle of first intake pipe, can optimize because of the granule that first intake pipe surface quartz peeled off scheduling problem produced, had the promotion effect to whole boiler tube processing procedure.

The application provides a boiler tube equipment, with two sections intake pipes of traditional integral type "L" type intake pipe split one-tenth horizontal direction and vertical direction, two sections intake pipes can independently maintain respectively or change, can improve the change maintenance problem of intake pipe in the boiler tube equipment.

In view of the above, it will be apparent to those skilled in the art upon reading the present application that the foregoing application content may be presented by way of example only, and may not be limiting. Those skilled in the art will appreciate that the present application is intended to cover various reasonable variations, adaptations, and modifications of the embodiments described herein, although not explicitly described herein. Such alterations, improvements, and modifications are intended to be within the spirit and scope of the exemplary embodiments of the application.

It is to be understood that the term "and/or" as used herein in this embodiment includes any and all combinations of one or more of the associated listed items. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present.

It will be further understood that the terms "comprises," "comprising," "includes" or "including," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It will be further understood that, although the terms first, second, third, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element in some embodiments may be termed a second element in other embodiments without departing from the teachings of the present application. The same reference numerals or the same reference characters denote the same elements throughout the specification.

Further, the present specification describes example embodiments with reference to idealized example cross-sectional and/or plan and/or perspective views. Accordingly, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, example embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of exemplary embodiments.

Claims

1. A furnace tube apparatus, comprising:

the reaction chamber, the first side of the said reaction chamber has radio frequency cavities, the said radio frequency cavity and said reaction chamber are communicated through several air vents;

the flange base is arranged at the bottom of the reaction cavity and comprises an extension part arranged on the first side of the reaction cavity, and the extension part comprises a first mounting hole which penetrates through the extension part along the vertical direction and is communicated with the radio frequency cavity and a second mounting hole which is arranged along the horizontal direction and is communicated with the first mounting hole;

the first air inlet pipe is hermetically arranged in the first mounting hole and extends into the radio frequency cavity, and the part of the first air inlet pipe, which is positioned in the radio frequency cavity, comprises a plurality of air inlet holes;

and the second air inlet pipe is hermetically arranged in the second mounting hole, and the second air inlet pipe is not higher than the bottom of the first air inlet pipe in the vertical direction.

2. The furnace tube apparatus of claim 1, wherein a first sealing rubber ring is disposed at a communication position of the first mounting hole and the radio frequency cavity, and the first sealing rubber ring is fixed by a jackscrew.

3. The furnace tube apparatus of claim 1, further comprising: the first air inlet pipe mounting base is arranged in the first mounting hole and used for fixing the first air inlet pipe, and a communicating hole for communicating the first air inlet pipe and the second air inlet pipe is formed in the first air inlet pipe mounting base.

4. The furnace tube apparatus of claim 3, wherein an upper surface of the first inlet tube mounting base is provided with a second sealing rubber ring surrounding the first inlet tube.

5. The furnace tube apparatus of claim 3, wherein a positioning portion is disposed at a portion of the first inlet tube mounted to the first inlet tube mounting base, a positioning groove is disposed at one side of the mounting hole of the first inlet tube mounting base, and the positioning portion and the positioning groove are adapted to fix the first inlet tube to the first inlet tube mounting base.

6. The furnace tube apparatus of claim 1, further comprising: and the first sealing device is arranged at the bottom of the first mounting hole and used for sealing the first mounting hole.

7. The furnace tube apparatus of claim 1, wherein the extension portion comprises a protrusion, the second mounting hole further extends through the protrusion, the second gas inlet tube extends out of the protrusion, and the protrusion is provided with a second sealing device.

8. The furnace tube apparatus of claim 7, wherein the second sealing device comprises:

a first sealing ring, a first portion of which is mounted on the outer surface of the bulge, and a second portion of which extends out of the bulge;

and a first part of the second sealing ring is arranged on the outer surface of the second air inlet pipe, and a second part of the second sealing ring extends out of a second part of the first sealing ring.

9. The furnace tube apparatus of claim 8, wherein the first portion of the first seal ring and the ledge are threadably connected; and a third sealing rubber ring is arranged between the first part of the second sealing ring and the second air inlet pipe.

10. The furnace tube apparatus of claim 1, further comprising: and the exhaust port is arranged on the second side of the reaction cavity, and the second side and the first side are oppositely arranged.