CN217505908U - Signal conditioning circuit of MEMS sensor - Google Patents

Signal conditioning circuit of MEMS sensor Download PDF

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CN217505908U
CN217505908U CN202220956893.7U CN202220956893U CN217505908U CN 217505908 U CN217505908 U CN 217505908U CN 202220956893 U CN202220956893 U CN 202220956893U CN 217505908 U CN217505908 U CN 217505908U
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power supply
operational amplifier
resistor
negative feedback
voltage
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CN202220956893.7U
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周明杰
周富强
翁新全
许静玲
柯银鸿
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Xiamen Niell Electronics Co ltd
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Xiamen Niell Electronics Co ltd
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Abstract

The utility model provides a signal conditioning circuit of MEMS sensor relates to sensor technical field, include: the MEMS chip, the power supply module and the operational amplifier negative feedback module; the power supply module is electrically connected with the MEMS chip and the operational amplifier negative feedback module, and the operational amplifier negative feedback module is electrically connected with the MEMS chip; the power supply module is used for supplying power to the MEMS chip; the operational amplifier negative feedback module is used for conditioning signals of the working bias voltage processed by the MEMS chip and outputting the working voltage at the output end of the operational amplifier negative feedback module, and the operational amplifier negative feedback module is provided with a reference voltage input end. The utility model can meet the use requirement of signal conditioning by only applying a reference bias voltage, and does not need to use the electrifying conditions of two power supply devices to electrify the circuit, thereby reducing the complexity of the power supply devices; meanwhile, an additional voltage conversion jig is not needed in the circuit, and the interference of external factors such as noise and the like introduced by the voltage conversion jig is reduced.

Description

Signal conditioning circuit of MEMS sensor
Technical Field
The utility model relates to a sensor technology field especially relates to a signal conditioning circuit of MEMS sensor.
Background
Micro Electro Mechanical Systems (MEMS) acceleration sensors are widely used because of their small size, light weight, low power consumption, high reliability and good stability. The MEMS acceleration sensor generally includes an MEMS chip, a circuit board, a connector or a cable, and a package, wherein the MEMS chip is used for sensing an acceleration signal and converting the acceleration into a voltage signal for output; the circuit board is provided with a signal conditioning circuit for conditioning signals; the connector or the cable wire is used for transmitting signals; the package housing serves to protect the internal components while serving as a mounting carrier.
Generally, the output characteristics of the MEMS chip cannot directly meet the use requirements, and the output signal often needs to be adjusted, that is, the output characteristic is realized by a signal conditioning circuit, so as to meet the use requirements of the MEMS sensor. However, the power supply condition of the current signal conditioning circuit usually needs to apply two reference bias voltages outside the signal conditioning circuit, and in addition, an external voltage conversion fixture needs to be additionally provided to convert the power supply voltage sometimes, so as to supply power to the signal conditioning circuit, and the voltage conversion fixture itself may introduce interference such as extra noise, etc., which affects the performance of the signal conditioning circuit itself.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a signal conditioning circuit of MEMS sensor, which is used to solve the defects in the prior art.
Based on the above-mentioned purpose, the utility model provides a signal conditioning circuit of MEMS sensor, include:
the MEMS chip, the power supply module and the operational amplifier negative feedback module;
the power supply module is electrically connected with the MEMS chip and the operational amplifier negative feedback module, and the operational amplifier negative feedback module is electrically connected with the MEMS chip;
the power supply module is used for supplying power to the MEMS chip;
the operational amplifier negative feedback module is used for conditioning signals of working bias voltage processed by the MEMS chip and outputting working voltage at the output end of the operational amplifier negative feedback module, and the operational amplifier negative feedback module is provided with a reference voltage input end.
Optionally, the power supply module includes a power supply, a first power supply protection unit, and a second power supply protection unit;
the power supply is connected with the input end of the first power supply protection unit, and inputs power supply voltage to the input end of the first power supply protection unit;
the first power supply protection unit is used for acquiring the power supply voltage and processing the power supply voltage to obtain the working bias voltage when the MEMS chip works, and the working bias voltage is input to the MEMS chip by the operational amplifier negative feedback module;
and the second power supply protection unit is used for clamping when the operational amplifier negative feedback module is used for conditioning signals.
Optionally, the power supply is configured to input a dc power supply voltage to the first power supply protection unit.
Optionally, the first power supply protection unit includes a resistor R1, a resistor R2, a voltage regulator tube D1, and a capacitor C1, the resistor R1, the resistor R2, and the capacitor C1 are sequentially connected in series between the power supply and the ground, a first node formed between the resistor R1 and the resistor R2 is connected to a negative electrode of the voltage regulator tube D1, an anode of the voltage regulator tube D1 is grounded, a second node formed between the resistor R2 and the capacitor C1 is connected to the operational amplifier negative feedback module, and the operational amplifier negative feedback module outputs the working bias voltage.
Optionally, an output end of the operational amplifier negative feedback module is provided with a triode Q1, an output end of the operational amplifier negative feedback module is connected with a base stage of the triode Q1, an emitter of the triode Q1 is connected with a voltage output end, and a collector of the triode Q1 is grounded.
Optionally, the second power supply protection unit includes a resistor R3, a resistor R4, a resistor R5, a capacitor C2, and a voltage regulator tube D2, the resistor R3 and the resistor R4 are connected in series between the output end of the MEMS chip and the input end of the operational amplifier negative feedback module, a third node formed between the resistor R3 and the resistor R4 is connected to one end of the capacitor C2, the other end of the capacitor C2 is grounded, the voltage regulator tube D2 is connected in series between the emitter of the triode Q1 and the voltage output end, the emitter of the triode Q1 is connected to the anode of the voltage regulator tube D2, the cathode of the voltage regulator tube D2 is connected to the voltage output end, and the anode of the voltage regulator tube D2 is connected to one end of the resistor R4 far from the resistor R3 through the resistor R5.
From the above, the signal conditioning circuit of the MEMS sensor provided by the present invention can satisfy the use requirement of signal conditioning by applying only one reference bias voltage, and does not need to apply the power-on conditions of two power supply devices to power on the circuit, thereby reducing the complexity of the power supply devices; meanwhile, an additional voltage conversion jig is not needed in the circuit, and the interference of external factors such as noise and the like introduced by the voltage conversion jig on the MEMS signal conditioning circuit can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic block diagram of a signal conditioning circuit of the MEMS sensor according to the present invention;
fig. 2 is a schematic diagram of the circuit structure of the signal conditioning circuit of the MEMS sensor according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.
It should be noted that unless otherwise defined, technical or scientific terms used in the embodiments of the present invention should have the ordinary meaning as understood by those having ordinary skill in the art to which the present disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
As an preferred embodiment of the present invention, the present invention provides a method for playing video scenario associated content, comprising the following steps:
acquiring a video file and a corresponding configuration file;
analyzing a video file and the configuration file to obtain video content corresponding to the video file, scenario-related content corresponding to the configuration file and time nodes corresponding to the scenario-related content; wherein the plot associated content comprises subtitles, pop windows, video jumps and interactive effects; the time node comprises the starting time and the ending time of the video content and the associated time of the scenario-associated content;
and playing the scenario related content at a time point corresponding to the video content based on the time node, and interacting with the user according to the video related content.
The utility model also provides a signal conditioning circuit of MEMS sensor, include:
the MEMS chip, the power supply module and the operational amplifier negative feedback module;
the power supply module is electrically connected with the MEMS chip and the operational amplifier negative feedback module, and the operational amplifier negative feedback module is electrically connected with the MEMS chip;
the power supply module is used for supplying power to the MEMS chip;
the operational amplifier negative feedback module is used for conditioning signals of working bias voltage processed by the MEMS chip and outputting working voltage at the output end of the operational amplifier negative feedback module, and the operational amplifier negative feedback module is provided with a reference voltage input end.
The signal conditioning circuit of the MEMS sensor can meet the use requirement of signal conditioning only by applying one reference bias voltage, and does not need to electrify the circuit by using the electrifying conditions of two power supply devices, thereby reducing the complexity of the power supply devices; meanwhile, an additional voltage conversion jig is not needed in the circuit, and the interference of external factors such as noise and the like introduced by the voltage conversion jig to the MEMS signal conditioning circuit can be reduced.
The following describes preferred embodiments of the method and apparatus for playing video scenario related content according to the present invention with reference to the accompanying drawings.
In the prior art, the output characteristics of the MEMS chip itself cannot directly meet the use requirements, and the output signal often needs to be adjusted, that is, the output signal is implemented by a signal conditioning circuit, so as to meet the use requirements of the MEMS sensor, and two main indexes determining the performance of the MEMS acceleration sensor are zero output, that is, bias voltage and sensitivity. Because the output voltage of the MEMS chip has a direct current bias voltage, a first reference bias voltage Vref1 needs to be provided, the voltage of the first reference bias voltage Vref1 is equal to the voltage value of the direct current bias voltage output by the MEMS chip, the first reference bias voltage Vref1 acts to offset the original bias voltage of the MEMS chip, the zero output, namely the bias voltage, is 0V at the moment, the signal is amplified by N times through the instrumentation amplifier chip, then the second reference bias voltage Vref2 is applied through the reference adjusting pin, and the bias voltage of the MEMS acceleration sensor is Vref2 at the moment.
In the method in the prior art, the first reference bias voltage Vref1 is used to cancel all the dc bias voltages output by the MEMS chip itself, and in order to avoid distortion of the gravitational acceleration signal output by the MEMS chip itself, the second reference bias voltage Vref2 needs to be applied, that is, a positive power supply and a negative power supply need to be performed, and 2 reference voltages Vref1 and Vref2 need to be applied externally, so that the power supply equipment of the signal conditioning circuit is complicated. In addition, an external voltage conversion fixture is sometimes additionally provided to convert the power supply voltage, so as to supply power to the signal conditioning circuit, and the voltage conversion fixture itself may introduce interference such as extra noise, which affects the performance of the signal conditioning circuit itself.
Referring to fig. 1 and fig. 2, a signal conditioning circuit of a MEMS sensor according to the present application includes:
the power supply module 200 is electrically connected with the MEMS chip 100 and the operational amplifier negative feedback module 300, and the operational amplifier negative feedback module 300 is electrically connected with the MEMS chip 100. The power supply module 200 is configured to supply power to the MEMS chip 100, the operational amplifier negative feedback module 300 is configured to perform signal conditioning on a working bias voltage processed by the MEMS chip 100, and output the working voltage at an output end of the operational amplifier negative feedback module 300, and the operational amplifier negative feedback module 300 has a reference voltage input end Vref, where the working bias voltage is a voltage required by the MEMS chip 100 for normal operation.
Specifically, the power supply module 200 includes a power supply, a first power supply protection unit and a second power supply protection unit. The power supply is connected with the input end of the first power supply protection unit and inputs power supply voltage to the input end of the first power supply protection unit; the first power supply protection unit is configured to obtain the power supply voltage, and process the power supply voltage to obtain a working bias voltage when the MEMS chip 100 works, and in this application, the working bias voltage is input to the MEMS chip 100 by the operational amplifier negative feedback module 300; and the second power supply protection unit is used for clamping when the operational amplifier negative feedback module is used for conditioning signals.
In this embodiment, the power supply is configured to input a dc power supply voltage to the first power supply protection unit.
Referring to fig. 2, the first power supply protection unit includes a resistor R1, a resistor R2, a voltage regulator tube D1 and a capacitor C1, the resistor R1, the resistor R2 and the capacitor C1 are sequentially connected in series between the power supply terminal Vin1 and the ground, a first node formed between the resistor R1 and the resistor R2 is connected to a negative electrode of the voltage regulator tube D1, an anode of the voltage regulator tube D1 is grounded, a second node formed between the resistor R2 and the capacitor C1 is connected to the operational amplifier negative feedback module 300, and the operational amplifier negative feedback module 300 outputs a working bias voltage. In this application, the negative feedback module 300 of the operational amplifier at least includes a voltage follower, and after processing by the voltage follower, the operational bias voltage can be obtained.
The output end of the operational amplifier negative feedback module 300 is provided with a triode Q1, the output end of the operational amplifier negative feedback module 300 is connected with the base level of a triode Q1, the emitting electrode of the triode Q1 is connected with the voltage output end Vout, and the collecting electrode of the triode Q1 is grounded.
The second power supply protection unit comprises a resistor R3, a resistor R4, a resistor R5, a capacitor C2 and a voltage regulator tube D2, the resistor R3 and a resistor R4 are connected in series between the output end of the MEMS chip 100 and the input end of the operational amplifier negative feedback module 300, a third node formed between the resistor R3 and the resistor R4 is connected with one end of a capacitor C2, the other end of the capacitor C2 is grounded, a voltage regulator tube D2 is connected in series between the emitter of the triode Q1 and the voltage output end Vout, the emitter of the triode Q1 is connected with the anode of the voltage regulator tube D2, the cathode of the voltage regulator tube D2 is connected with the voltage output end Vout, and the anode of the voltage regulator tube D2 is connected with one end, far away from the resistor R3, of the resistor R4 through the resistor R5.
When the MEMS chip 100 works, exciting current, namely a power supply, is input at a voltage output end Vout (at the moment, the voltage output end Vout serves as an input end of the power supply current), the exciting current flows through a first power supply protection unit, passes through a resistor D1, a resistor R2 and a voltage regulator tube D1 of the first power supply protection unit, utilizes the clamping of the voltage regulator tube D1, and obtains proper working bias voltage under the action of a voltage follower in an operational amplifier negative feedback module 300, the working bias voltage is output to a power supply end Vin1, and then the working bias voltage is provided to the MEMS chip 100 through the power supply end Vin1, so that the requirement of the MEMS chip 100 for normal work is met.
The power supply terminal Vin1 generates a working bias voltage to make the MEMS chip 100 work and output normally under the action of acceleration, and through the operational amplifier negative feedback module 300 at the rear end of the MEMS chip 100, by adjusting the specific resistance values of the resistors R3, R4, and R5 of the second power supply protection unit, an output voltage meeting the design requirement can be output at the output terminal of the operational amplifier negative feedback module 300, specifically, the detection can be performed at the ground terminal and the two ends of the voltage output terminal Vout, thereby realizing the function of signal conditioning and amplification.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also technical features in the above embodiments or in different embodiments can be combined, steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The present embodiments are intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omission, modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims (6)

1. A signal conditioning circuit for a MEMS sensor, comprising:
the MEMS chip, the power supply module and the operational amplifier negative feedback module;
the power supply module is electrically connected with the MEMS chip and the operational amplifier negative feedback module, and the operational amplifier negative feedback module is electrically connected with the MEMS chip;
the power supply module is used for supplying power to the MEMS chip;
the operational amplifier negative feedback module is used for conditioning signals of working bias voltage processed by the MEMS chip and outputting working voltage at the output end of the operational amplifier negative feedback module, and the operational amplifier negative feedback module is provided with a reference voltage input end.
2. The signal conditioning circuit of the MEMS sensor according to claim 1, wherein the power supply module comprises a power supply, a first power supply protection unit, and a second power supply protection unit;
the power supply is connected with the input end of the first power supply protection unit, and supplies power voltage to the input end of the first power supply protection unit;
the first power supply protection unit is used for acquiring the power supply voltage and processing the power supply voltage to obtain the working bias voltage when the MEMS chip works, and the working bias voltage is input to the MEMS chip by the operational amplifier negative feedback module;
and the second power supply protection unit is used for clamping when the operational amplifier negative feedback module is used for conditioning signals.
3. The signal conditioning circuit of the MEMS sensor according to claim 2, wherein the power supply is configured to input a dc power supply voltage to the first power supply protection unit.
4. The signal conditioning circuit of the MEMS sensor according to claim 2, wherein the first power supply protection unit includes a resistor R1, a resistor R2, a regulator D1, and a capacitor C1, the resistor R1, the resistor R2, and the capacitor C1 are sequentially connected in series between the power supply and ground, a first node formed between the resistor R1 and the resistor R2 is connected to a negative electrode of the regulator D1, an anode of the regulator D1 is grounded, a second node formed between the resistor R2 and the capacitor C1 is connected to the operational amplifier negative feedback module, and the operational amplifier negative feedback module outputs the working bias voltage.
5. The signal conditioning circuit of the MEMS sensor according to claim 4, wherein the output terminal of the operational amplifier negative feedback module is provided with a transistor Q1, the output terminal of the operational amplifier negative feedback module is connected to the base stage of the transistor Q1, the emitter of the transistor Q1 is connected to the voltage output terminal, and the collector of the transistor Q1 is grounded.
6. The signal conditioning circuit of the MEMS sensor according to claim 5, wherein the second power supply protection unit includes a resistor R3, a resistor R4, a resistor R5, a capacitor C2 and a voltage regulator D2, the resistor R3 and the resistor R4 are connected in series between the output terminal of the MEMS chip and the input terminal of the operational amplifier negative feedback module, a third node formed between the resistor R3 and the resistor R4 is connected to one end of the capacitor C2, the other end of the capacitor C2 is grounded, the voltage regulator D2 is connected in series between the emitter of the triode Q1 and the voltage output terminal, the emitter of the triode Q1 is connected to the anode of the voltage regulator D2, the cathode of the voltage regulator D2 is connected to the voltage output terminal, and the anode of the voltage regulator D2 is connected to one end of the resistor R4 far from the resistor R3 through the resistor R5.
CN202220956893.7U 2022-04-24 2022-04-24 Signal conditioning circuit of MEMS sensor Active CN217505908U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220956893.7U CN217505908U (en) 2022-04-24 2022-04-24 Signal conditioning circuit of MEMS sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220956893.7U CN217505908U (en) 2022-04-24 2022-04-24 Signal conditioning circuit of MEMS sensor

Publications (1)

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CN217505908U true CN217505908U (en) 2022-09-27

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