CN217485417U

CN217485417U - Feeding and discharging mechanism

Info

Publication number: CN217485417U
Application number: CN202221232126.8U
Authority: CN
Inventors: 吕波; 胡超; 周沃坤
Original assignee: Zhuhai Cordy Electronic Technology Co ltd
Current assignee: Zhuhai Cordy Electronic Technology Co ltd
Priority date: 2022-05-20
Filing date: 2022-05-20
Publication date: 2022-09-23
Anticipated expiration: 2032-05-20

Abstract

The utility model discloses an go up unloading mechanism aims at providing a compact structure and last unloading mechanism that machining efficiency is high. The utility model discloses a drop feed mechanism is got in feed piece storehouse, receipts material piece storehouse, pan feeding transfer chain, ejection of compact transfer chain and the rotation of double claw, drop feed mechanism's outside is enclosed and is equipped with first station, second station, third station and fourth station to the rotation of double claw, the one end of ejection of compact transfer chain with feed piece storehouse cooperatees, the other end with first station cooperatees, the one end of pan feeding transfer chain with receive the material piece storehouse and cooperate, the other end with the second station cooperatees. The utility model discloses be applied to the technical field of lithography machine.

Description

Feeding and discharging mechanism

Technical Field

The utility model relates to a lithography machine's technical field, in particular to go up unloading mechanism.

Background

In the existing charging and discharging of GPP chips in the market, an independent planar XY manipulator is usually adopted, and a three-point type support column hand-changing mechanism moving up and down is additionally arranged, so that the situations of occupying more space and low efficiency exist, and the control is relatively complex, so that a charging and discharging mechanism with compact structure and high processing efficiency needs to be developed at present.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that overcome prior art not enough, provide a compact structure and last unloading mechanism that machining efficiency is high.

The utility model adopts the technical proposal that: the utility model discloses a drop feed mechanism is got in feed piece storehouse, receipts material piece storehouse, pan feeding transfer chain, ejection of compact transfer chain and the rotation of double claw, drop feed mechanism's outside is enclosed and is equipped with first station, second station, third station and fourth station to the rotation of double claw, the one end of ejection of compact transfer chain with feed piece storehouse cooperatees, the other end with first station cooperatees, the one end of pan feeding transfer chain with receive the material piece storehouse and cooperate, the other end with the second station cooperatees.

Furthermore, the double-claw rotary taking and placing mechanism comprises a mounting seat, a divider and an air slip ring matched with the divider are arranged on the mounting seat, and a first claw and a second claw are arranged on the divider in a matched mode.

Furthermore, an included angle between the first claw and the second claw is 90 degrees.

Further, the pan feeding transfer chain reaches the ejection of compact transfer chain all includes the transfer chain, sliding fit has the removal seat on the transfer chain, be provided with the third hand claw on the removal seat, the exposed core of third hand claw is the U-shaped.

Further, the pan feeding transfer chain reaches the feed piece storehouse reach the material receiving piece storehouse all includes that the Z axle removes the module and the Y axle removes the module, sliding fit has the work or material rest on the Z axle removes the module, be equipped with a plurality of wafer box on the work or material rest from bottom to top, the cooperation is provided with on the Y axle removes the module with wafer box complex material sensor.

The utility model has the advantages that:

compared with the prior art not enough the utility model discloses in, through feed piece storehouse receive the piece storehouse the pan feeding transfer chain reaches unloading is realized going up to ejection of compact transfer chain, and passes through the drop feed mechanism is in the rotation of double claw first station the second station the third station reaches circulation between the fourth station for the whole compact of unloading structure that goes up occupies less space, and improves machining efficiency, makes the utility model has the advantages of compact structure and machining efficiency are high.

Drawings

Fig. 1 is a schematic plan view of the present invention;

FIG. 2 is a schematic perspective view of a double-claw rotary material taking and placing mechanism;

FIG. 3 is a perspective view of the conveyor line, the movable base and the third gripper;

FIG. 4 is a schematic perspective view of a feeding sheet magazine and a receiving sheet magazine;

FIG. 5 is a schematic plan view of the dual-claw rotary material taking and placing mechanism in a first state;

FIG. 6 is a schematic plan view of the double-claw rotary material taking and placing mechanism in a second state;

FIG. 7 is a schematic plan view of the double-claw rotary material taking and placing mechanism in a third state;

FIG. 8 is a schematic plan view of the double-claw rotary material taking and placing mechanism in a fourth state;

fig. 9 is a schematic plan structure view of the double-claw rotary material taking and placing mechanism in a fifth state.

The reference numbers are as follows:

1. a feeding sheet warehouse; 2. a material receiving sheet warehouse; 3. a feeding conveying line; 5. a discharging conveying line; 6. a double-claw rotary material taking and placing mechanism; 7. a first station; 8. a second station; 9. a third station; 10. a fourth station 10; 11. a mounting seat; 12. a divider; 13. an air slip ring; 15. a first gripper; 16. a second gripper; 17. a conveying line; 18. a movable seat; 19. a third gripper; 20. a Z-axis moving module; 21. a Y-axis moving module; 22. a material rack; 23. a wafer cassette; 24. a material sensor.

Detailed Description

As shown in fig. 1 to 5, in this embodiment, the utility model discloses a feeding piece storehouse 1, receive material piece storehouse 2, pan feeding transfer chain 3, ejection of compact transfer chain 5 and the rotatory drop feed mechanism 6 of getting of double claw, the rotatory drop feed mechanism 6's of getting of double claw outside encloses and is equipped with first station 7, second station 8, third station 9 and fourth station 10, ejection of compact transfer chain 5's one end with feeding piece storehouse 1 cooperatees, and the other end with first station 7 cooperatees, the pan feeding transfer chain 3's one end with receive material piece storehouse 2 to cooperate, the other end with second station 8 cooperatees.

It should be noted that the first station 7, the second station 8, the third station 9, and the fourth station 10 are a feeding rough calibration station, a fine calibration station, a transition station, and a discharging transfer station, respectively, and when transporting, the whole wafer box to be exposed is placed in the feeding wafer magazine 1, and the single wafer is transported to the feeding rough calibration station by the discharging conveyor line 5, and further, after the wafer is transferred from the feeding rough calibration station to other stations for positioning and photolithography by the double-claw rotating material taking and placing mechanism 6, the wafer is further transported back to the material receiving wafer magazine 2 by the discharging conveyor line 5.

Compared with the prior art not enough the utility model discloses in, through feed film storehouse 1 receive material film storehouse 2 pan feeding transfer chain 3 reaches ejection of compact transfer chain 5 realizes going up the unloading, and pass through the rotatory drop feed mechanism 6 of getting of double claw is in first station 7 second station 8 third station 9 reaches circulate between the fourth station 10 for the whole compactness of unloading structure that takes less space on the whole, and improve machining efficiency, make the utility model has the advantages of compact structure and machining efficiency are high.

In some embodiments, the double-claw rotary material taking and placing mechanism 6 comprises a mounting seat 11, a divider 12 and an air slip ring 13 matched with the divider 12 are arranged on the mounting seat 11, and a first claw 15 and a second claw 16 are matched with the divider 12. First hand 15 reaches all be equipped with the gas circuit on the second hand 16, the gas circuit all communicates with outside air feeder through the trachea to realize the adsorption efficiency of hand. The divider 12 is a high-precision cam divider, is driven by a single motor, is simple to control, and can drive the rotating double claws to realize high-efficiency circulation.

It should be noted that the double-claw rotary material taking and discharging mechanism 6 is moved among the first station 7, the second station 8, the third station 9 and the fourth station 10, and the first station 7, the second station 8, the third station 9 and the fourth station 10 are respectively a material loading rough calibration station, a fine calibration station, a transition station and a material unloading transfer station, specifically: the initial reset state is shown in fig. 5, at this time, the first gripper 15 and the second gripper 16 are respectively aligned with the first station 7 (a feeding rough calibration station) and the fourth station 10 (a discharging transfer station); further, the double-claw rotary material taking and placing mechanism 6 idles for 90 degrees, so that the first claw 15 and the second claw 16 respectively align with the first station 7 (material loading rough calibration station) and the second station 8 (fine calibration station) and simultaneously grab the wafer, and the state is shown in fig. 6; further, the double-claw rotary material taking and placing mechanism 6 continues to rotate by 90 degrees, so that the first claw 15 and the second claw 16 respectively align with the second station 8 (fine calibration station) and the third station 9 (transition station), the first claw 15 places the wafer on the second station 8 (fine calibration station), and the second claw 16 continues to maintain the state of sucking the wafer, at this time, the state is as shown in fig. 7; further, the double-claw rotary material taking and placing mechanism 6 continues to rotate by 90 degrees, so that the first claw 15 and the second claw 16 respectively align to the third station 9 (transition station) and the fourth station 10 (blanking transfer station), the second claw 16 places the wafer on the fourth station 10 (blanking transfer station), and the first claw 15 and the second claw 16 are both in an unhatched state, which is shown in fig. 8; further the double-claw rotary material taking and placing mechanism 6 continues to rotate for 90 degrees to reset and returns to the initial reset state, the state is as shown in fig. 9, and similarly, the efficient feeding and discharging is realized by repeating the above processes, so that the production efficiency is improved.

In some embodiments, the angle between the first jaw 15 and the second jaw 16 is 90 degrees.

In some embodiments, the feeding line 3 and the discharging line 5 each include a line 17, a moving seat 18 is slidably fitted on the line 17, a third gripper 19 is disposed on the moving seat 18, and a clamping end of the third gripper 19 is U-shaped. And an air path is arranged on the third paw 19 and is connected with external air supply equipment through an air pipe, so that the adsorption function of the paw is realized. The third gripper 19 sucks a single wafer from the supply cassette 1, and further places the single wafer on the first station 7 (the material loading rough calibration station).

In some embodiments, the feeding conveyor line 3, the feeding sheet storage 1 and the receiving sheet storage 2 each include a Z-axis moving module 20 and a Y-axis moving module 21, the Z-axis moving module 20 is slidably fitted with a material holder 22, the material holder 22 is provided with a plurality of wafer boxes 23 from bottom to top, and the Y-axis moving module 21 is provided with a material sensor 24 fitted with the wafer boxes 23. Whether wafers exist in the wafer box 23 or not is sensed through the material sensor 24, so that material taking is performed.

While the embodiments of the present invention have been described in terms of practical embodiments, they are not intended to limit the scope of the invention, and modifications of the embodiments and combinations with other embodiments will be apparent to those skilled in the art in light of the present description.

Claims

1. The utility model provides a go up unloading mechanism which characterized in that: it includes that feed piece storehouse (1), receipts material piece storehouse (2), pan feeding transfer chain (3), ejection of compact transfer chain (5) and double claw are rotatory gets drop feed mechanism (6), the rotatory outside of getting drop feed mechanism (6) of double claw encloses and is equipped with first station (7), second station (8), third station (9) and fourth station (10), the one end of ejection of compact transfer chain (5) with feed piece storehouse (1) cooperatees, the other end with first station (7) cooperate, the one end of pan feeding transfer chain (3) with receive material piece storehouse (2) and cooperate, the other end with second station (8) cooperate.

2. The loading and unloading mechanism of claim 1, wherein: the double-claw rotary material taking and placing mechanism (6) comprises an installation seat (11), a divider (12) and an air slip ring (13) matched with the divider (12) are arranged on the installation seat (11), and a first claw (15) and a second claw (16) are arranged on the divider (12) in a matched mode.

3. The loading and unloading mechanism of claim 2, wherein: the included angle between the first paw (15) and the second paw (16) is 90 degrees.

4. The loading and unloading mechanism of claim 1, wherein: pan feeding transfer chain (3) reach ejection of compact transfer chain (5) all include transfer chain (17), sliding fit has removal seat (18) on transfer chain (17), be provided with third hand claw (19) on removing seat (18), the exposed core of third hand claw (19) is the U-shaped.

5. The loading and unloading mechanism of claim 1, wherein: pan feeding transfer chain (3) reach feed piece storehouse (1) reaches receive material piece storehouse (2) and all include that Z axle removes module (20) and Y axle and remove module (21), sliding fit has work or material rest (22) on Z axle removes module (20), be equipped with a plurality of wafer box (23) on work or material rest (22) from bottom to top, Y axle remove module (21) go up the cooperation be provided with wafer box (23) complex material sensor (24).