CN217457644U

CN217457644U - Semiconductor electronic material buffer memory device

Info

Publication number: CN217457644U
Application number: CN202220648643.7U
Authority: CN
Inventors: 沙伟中
Original assignee: Suzhou I Stock Intelligent Technology Co ltd
Current assignee: Suzhou I Stock Intelligent Technology Co ltd
Priority date: 2022-03-23
Filing date: 2022-03-23
Publication date: 2022-09-20
Anticipated expiration: 2032-03-23

Abstract

The utility model relates to the technical field of semiconductors, in particular to a semiconductor electronic material caching device, which comprises a storage device, a storage device and a control device, wherein the storage device is used for caching semiconductor electronic materials; the conveying device is used for conveying semiconductor electronic materials; the conveying device is arranged inside the storage device and comprises a shifting device, and the shifting device is used for adjusting the position of the semiconductor electronic material. This semiconductor electronic material buffer memory device sends into the buffer memory equipment through the user with the material from the feed inlet, drives the transmission of conveyer belt by the motor drive of equipment, realizes automatic buffer memory and the transport to the material, when needs carry the material to certain region, only as long as with this equipment in this region can. By adopting the automatic caching mode, the efficiency of transferring and storing the electronic materials can be improved, and the convenience of operators is improved.

Description

Semiconductor electronic material buffer memory device

Technical Field

The utility model relates to the field of semiconductor technology, specifically be a semiconductor electronic material buffer memory device.

Background

Semiconductor electronic materials such as wafers, electronic trays and the like need to be transported from a warehouse to a line side for use in the using process. Because the production process has a time sequence of the production process, the electronic material can be used in time instead of being conveyed to the edge of the production line. This allows a large amount of electronic material to be stored on the production line side. This obviously places relatively high demands on material management. To solve this problem, it is proposed in the prior art to store the material in a temporary storage device. When in use, the device for temporarily storing the electronic materials can move the materials out. Generally, the device for temporarily storing the electronic materials is arranged in a straight line, namely, the electronic materials are stored from one end and are linearly transferred to the outlet of the other end after being transferred by the conveyer belt. Obviously, the various materials are intensively placed on the straight conveyor belt in the mode, the front-end materials on the conveyor belt can block the circulation of the rear-end materials, and meanwhile, a large use field can be occupied.

Due to the batched semiconductor parts, the existing caching device in the prior art cannot timely convey electronic materials, the caching efficiency is low, and the manual operation intensity is high. In view of the above, a semiconductor electronic material buffer device is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor electron material memory device, its purpose is under occupying unit area, promotes the quantity of buffer memory electron material, sets up the circulation efficiency of a plurality of discharge gates in order to promote the material simultaneously.

In order to achieve the above object, the utility model provides a following technical scheme:

a semiconductor electronic material caching device comprises a storage device, a first storage device and a second storage device, wherein the storage device is used for caching semiconductor electronic materials;

the conveying device is used for conveying semiconductor electronic materials;

the conveying device is arranged inside the storage device and comprises a shifting device, and the shifting device is used for adjusting the position of the semiconductor electronic material.

Preferably, the storage device comprises a box body, a feed inlet and a discharge outlet are arranged on the box body, an opening is formed in the box body, and a conveying belt is arranged at the bottom of the box body.

Preferably, the shifting device comprises a jacking cylinder, a fixing frame is connected to the jacking cylinder, a connecting plate is connected to an output shaft of the jacking cylinder, and a transmission device is arranged on the connecting plate.

Preferably, a supporting plate is arranged on the rotating shaft.

Preferably, conveyor is including first motor, the output of first motor is connected with first drive wheel, the surface of first drive wheel is passed through the chain and is connected with the surface transmission of first drive wheel, the axle center department of first drive wheel is connected with the drive shaft, the both ends of drive shaft are connected with the drive roller, the surface of drive roller is passed through the belt and is connected with the surface transmission of driven voller.

Preferably, the conveying device further comprises a limiting device, the limiting device comprises a touch switch, and the touch switch is provided with a roller.

Preferably, two feed inlets and two discharge outlets are arranged on two sides of the box body.

Preferably, the semiconductor electronic material is a semiconductor wafer.

Compared with the prior art, the beneficial effects of the utility model are that:

the semiconductor electronic material caching device is provided with a box body, a feeding hole is formed in the box body, and electronic materials can be simultaneously fed into the caching equipment. After the electronic materials are fed into the feeding hole, the motor can drive the conveyer belt to realize automatic caching and conveying of the materials. The electronic material is placed on the supporting plate, and the supporting plate can be moved or lifted by the shifting device and is temporarily arranged on each storage position. When the belt rotates, the belt can drive the material to move transversely, the material is transferred to the belt line of the middle layer, S-shaped circulation and cache of the material are finally achieved, operation personnel can conveniently circulate, and circulation and cache efficiency is improved. Meanwhile, two feed inlets and two discharge outlets can be arranged, so that the efficiency of moving materials into and out of the box body is improved.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the internal structure of the middle body of the present invention;

fig. 3 is a schematic view of the shifting apparatus of the present invention;

fig. 4 is a schematic structural diagram of a storage device according to the present invention;

fig. 5 is a schematic structural diagram of a displacement device in the present invention;

fig. 6 is a schematic diagram of material circulation in the present invention.

In the figure: 1. a storage device; 101. a box body; 102. a feed inlet; 103. a discharge port; 104. opening the opening; 2. a conveying device; 3. a displacement device; 301. a first motor; 302. a first drive wheel; 303. jacking a cylinder; 304. a fixed mount; 305. a connecting plate; 306. a drive roller; 307. a first drive pulley; 308. a drive shaft; 309. a second motor; 310. a second drive wheel; 311. a second transmission wheel; 312. a rotating shaft; 313. a support plate; 314. a support sheet; 315. a touch switch; 316. and a roller.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1-6, the present invention provides a technical solution:

a semiconductor electronic material buffer device comprises a buffer unit,

referring to fig. 1 and 4, a memory device 1 is used for buffering semiconductor electronic materials. The storage device 1 comprises a box body 101, wherein a feeding hole 102 and a discharging hole 103 are formed in the box body 101, and the feeding hole 102 and the discharging hole 103 of the box body 101 are used for providing materials to be discharged so as to facilitate the materials to be circulated. The opening 104 is formed in the box body 101, the arrangement of the opening 104 can facilitate an operator to observe the inside material circulation condition, materials which are needed urgently can be directly put in and also can be directly taken out, the materials can be flexibly used under different requirements, and the bottom of the box body 101 is provided with the conveying belt. The material is conveyed linearly by the conveyer belt.

Referring to fig. 5, a conveying device 2 is used for conveying semiconductor electronic materials. Conveyor 2 sets up in storage device 1's inside, and conveyor 2 is including first motor 301, and drive belt pulley and belt drive through the drive of motor realize carrying the straight line of material, and when first motor 301 drive, the transmission through the chain will drive the rotation of drive shaft 308, and drive shaft 308 is with first drive wheel 307 fixed connection, so will drive the belt rotation on the drive roller 306, will carry the material to circulate. The output end of the first motor 301 is driven to be connected with a first driving wheel 302, the surface of the first driving wheel 302 is in transmission connection with the surface of a first driving wheel 307 through a chain, the axis of the first driving wheel 307 is connected with a driving shaft 308, two ends of the driving shaft 308 are connected with driving rollers 306, and the surface of the driving rollers 306 is in transmission connection with the surface of driven rollers through a belt. The conveying device 2 is further provided with a limiting device, the limiting device comprises a touch switch 315, a roller 316 is arranged on the touch switch 315, when one position storage grid is circulated, the electronic material can contact the roller 316 to drive the rolling rotation to move downwards, the circulation can be stopped at the moment, and the whole device can temporarily buffer the material to the position. When the second material is conveyed to the box body 101, the switch of the control device drives the previous material to be conveyed continuously, at the moment, the first material stopped at the previous storage position can flow to one storage position to provide a position to be reserved for the second material, so that intermittent storage is carried out, and the situation that the material of each storage position is not overstocked and collided is avoided.

The conveying device 2 comprises a shifting device 3, and the shifting device 3 is used for adjusting the position of the semiconductor electronic material. The conveying device 2 is arranged inside the storage device 1, the conveying device 2 comprises a shifting device 3, and the shifting device 3 is used for adjusting the position of the semiconductor electronic material. The shifting device 3 comprises a jacking cylinder 303, a fixing frame 304 is connected to the jacking cylinder 303, and a connecting plate 305 is connected to an output shaft of the jacking cylinder 303. When a certain material needs to be transferred to the middle-level conveyor belt, the shifting device 3 lifts the whole material by a certain distance to separate the material from the belt line, and then the second motor 309 rotates to drive the belt of the second driving wheel 311 to rotate through the connection transmission between the belt lines. When jacking cylinder 303 rises the certain distance, the material will be by jack-up to can be located layer board 313, when the belt rotates, will drive the material and carry out horizontal position and remove, transfer to the belt line of intermediate level on, finally realize S type circulation and the buffer memory to the material, figure 6 is consulted to concrete circulation process, make things convenient for the circulation that carries out of operating personnel, make the efficiency of circulation and buffer memory improve, improve inner space' S utilization ratio. The connecting plate 305 is provided with a transmission device, the transmission device comprises a second motor 309, an output shaft of the second motor 309 is connected with a second driving wheel 310, the surface of the second driving wheel 310 is connected with a second driving wheel 311 through belt transmission, the axis of the second driving wheel 311 is connected with a rotating shaft 312, and the surface of the rotating shaft 312 is connected with the surface of the driving roller through belt transmission. The supporting plate 313 is arranged on the rotating shaft 312, the overall bearing capacity is improved through the arrangement of the supporting plate, the supporting plates 314 are further arranged, and when some objects with heavier weight contact the belt, the supporting plates 314 support the belt, so that the belt is not damaged, and the stability in the conveying process is improved.

The utility model discloses a semiconductor electronic material buffer memory device is when using, arranges the material through the feed inlet 102 with the electronic material from box 101 and sends into to the caching device in the middle of, places by the shrink of jacking cylinder 303 on layer board 313 as the material, comes to holistic place the platform, descends certain distance and slowly places the material in the conveyer belt on drive roller 306 surface, later drives the rotation of conveyer belt by the drive of motor again, realizes the circulation. And whole lift platform is located between two belt lines, so when jacking cylinder 303 oscilaltion, can not cause the influence to the transport of conveyer belt, when a storage position check of circulation, the electron material will contact gyro wheel 316, drives the roll rotation and moves down, and the circulation will stop this moment, and whole equipment will be with this material temporary buffer memory to this position. When the second material is conveyed to the box body 101, the switch of the control device drives the previous material to be conveyed continuously, at the moment, the first material stopped at the previous storage position can flow to one storage position to provide a position to be reserved for the second material, so that intermittent storage is carried out, and the situation that the material of each storage position is not overstocked and collided is avoided. Because the storage position check of whole equipment need turn to, so when certain material need circulate the conveyer belt of middle level, shifter 3 this moment will be whole lifting certain distance of material, make it break away from the belt line, later second motor 309 will rotate, and the connection transmission through between the belt line will drive the belt of second drive wheel 311 and rotate, when jacking cylinder 303 rises certain distance, the material will be jacked up to can be located layer board 313. When the belt rotates, the belt can drive the material to move transversely, the material is transferred to the belt line of the middle layer, S-shaped circulation and cache of the material are finally achieved, operation personnel can conveniently circulate, and circulation and cache efficiency is improved. When the buffer memory in the equipment is enough, the materials can be discharged from the position of the discharge hole 103 according to the requirement, and finally the materials are transferred to the required station. And the staff can come the material observation according to the opening 104 from setting up, observes whether steady in the process of circulation, also can directly take out certain material from the position of opening 104, deals with the urgent need material.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A semiconductor electronic material caching device is characterized in that: comprises the steps of (a) preparing a mixture of a plurality of raw materials,

the storage device (1) is used for caching semiconductor electronic materials;

the conveying device (2) is used for conveying semiconductor electronic materials;

the storage device (1) comprises a box body (101), a feed inlet (102) and a discharge outlet (103) are formed in the box body (101), an open port (104) is formed in the box body (101), and a conveying belt is arranged at the bottom of the box body (101);

the conveying device (2) is arranged inside the storage device (1), the conveying device (2) comprises a shifting device (3), and the shifting device (3) is used for adjusting the position of the semiconductor electronic material.

2. The semiconductor electronic material caching apparatus of claim 1, wherein: the shifting device (3) comprises a jacking cylinder (303), a fixing frame (304) is connected to the jacking cylinder (303), a connecting plate (305) is connected to an output shaft of the jacking cylinder (303), and a transmission device is arranged on the connecting plate (305).

3. The semiconductor electronic material caching apparatus of claim 2, wherein: the transmission device comprises a second motor (309), a second driving wheel (310) is connected to an output shaft of the second motor (309), the surface of the second driving wheel (310) is connected with a second driving wheel (311) through belt transmission, a rotating shaft (312) is connected to the axis of the second driving wheel (311), and the surface of the rotating shaft (312) is connected with the surface of the driving roller through belt transmission.

4. The semiconductor electronic material caching apparatus of claim 3, wherein: and a supporting plate (313) is arranged on the rotating shaft (312).

5. The semiconductor electronic material caching apparatus of claim 1, wherein: conveyor (2) are including first motor (301), the output of first motor (301) is connected with first drive wheel (302), the surface of first drive wheel (302) is passed through the chain and is connected with the surface transmission of first drive wheel (307), the axle center department of first drive wheel (307) is connected with drive shaft (308), the both ends of drive shaft (308) are connected with drive roller (306), the surface of drive roller (306) is passed through the belt and is connected with the surface transmission of driven roller.

6. The semiconductor electronic material caching apparatus of claim 5, wherein: the conveying device (2) further comprises a limiting device, the limiting device comprises a touch switch (315), and a roller (316) is arranged on the touch switch (315).