CN217443181U

CN217443181U - Liftable objective table

Info

Publication number: CN217443181U
Application number: CN202220308839.1U
Authority: CN
Inventors: 伊文君; 张奇; 徐杰; 贾侦华
Original assignee: Beijing Chn Top Optical Electronic Technology Co ltd
Current assignee: Beijing Chn Top Optical Electronic Technology Co ltd
Priority date: 2022-02-18
Filing date: 2022-02-18
Publication date: 2022-09-16
Anticipated expiration: 2032-02-18

Abstract

A liftable objective table comprises a rack, a slide holder (20), a thimble assembly, a lifting mechanism and a driving assembly; the automatic taking and placing device is characterized in that the driving assembly can drive the wafer carrying table (20) to lift through the lifting mechanism, so that the top of a thimble (12) in the thimble assembly is located at a position protruding out of the upper surface of the wafer carrying table (20) by a certain distance, flush with the upper surface of the wafer carrying table (20) or lower than the upper surface of the wafer carrying table (20) by a certain distance, and when the top of the thimble (12) is located at a position protruding out of the upper surface of the wafer carrying table (20) by a certain distance, automatic taking and placing of an epitaxial wafer can be achieved; when the top of the thimble (12) is at a position which is flush with the upper surface of the slide holder (20) or is lower than the upper surface by a certain distance, the adsorption and fixation of the epitaxial wafer and the automatic focusing during detection can be realized.

Description

Liftable objective table

Technical Field

The utility model relates to an objective table of liftable for the detection of epitaxial wafer belongs to epitaxial wafer and detects technical field.

Background

In recent years, the prosperity of the downstream application market drives the rapid development of the LED industry in China, and the epitaxial wafer market also develops good opportunities. The productivity of the domestic LED epitaxial wafer is rapidly improved, the technical level is continuously improved, and the epitaxial wafer is a front-end high-technology product in an LED core device. Therefore, fast, efficient, and low-cost epitaxial wafer inspection equipment is needed. For an objective table on an automatic epitaxial wafer detection device, the objective table needs to be flexibly lifted and adjusted to the optimal detection position and the optimal position for taking and placing the wafer by a manipulator.

The conventional epitaxial wafer detection device employs a cross roller guide rail type slide table, as shown in fig. 1. The basic structure is as follows: the output shaft of the driving motor 001 is provided with a coupling 002, the lead screw 003 is connected with the driving motor 001 through the coupling 002, the cross roller type sliding table contains three groups of cross roller guide rails, namely an XZ cross roller guide rail 006, an X cross roller guide rail 005 and a Z cross roller guide rail 004 along the inclined plane. The ramp 009 is fixed on the screw nut 007, and as the screw 003 rotates, the screw nut 007 drives the ramp 009 to move left and right along the X cross roller guide 005 and the XZ cross roller guide 006, and the ramp 009 drives the lifting block 010 to move up and down along the XZ cross roller guide 006 and the Z cross roller guide 004. Compared with the cross roller type sliding table and the utility model, the cross roller type sliding table has high requirement on the processing precision of parts, difficulty in processing and higher processing cost; the size of the cylindrical roller is larger (proportion), and the lifting stroke is small; the cross roller guide rail has weak impact resistance, and is dropped or applied with excessive force, so that abnormal sliding can be generated, the roller can be dropped when the roller retainer assembly is subjected to external force before unreliable installation and fixation, special attention is required during use, and the difficulty is increased for installation. The sliding table is high in requirement on machining and mounting accuracy, inconvenient to mount, small in Z-axis lifting stroke and low in cost performance.

The lifting block 010 of the sliding table is provided with an object stage 011, the center of the object stage 011 is provided with a groove of a manipulator for taking and placing the sheet, as shown in figure 2, the groove is a position where the manipulator can extend into the groove, and if the manipulator does not have the groove, the manipulator can not take and place the sheet. This take notched objective table can lead to the epitaxial wafer adsorption plane not a plane to influence the epitaxial wafer and adsorb fixed effect, the background is inconsistent when also making transparent epitaxial wafer detect simultaneously, and then influences the degree of accuracy that detects.

Disclosure of Invention

The utility model aims at the above-mentioned problem that exists among the prior art, provide a but automatic rising's objective table, through going up and down this an action in different positions with the objective table, can realize that the manipulator is automatic gets to put the epitaxial wafer, detect that the background is unanimous, but and the realization of automatic adjustment position is focused.

The purpose of the utility model can be realized by the following technical proposal:

a liftable objective table comprises a rack, a slide holder, a thimble assembly, a lifting mechanism and a driving assembly; the driving assembly can drive the slide holder to lift through the lifting mechanism, so that the top of a thimble in the thimble assembly is positioned at a position protruding out of the upper surface of the slide holder by a certain distance, flush with the upper surface of the slide holder or lower than the upper surface of the slide holder by a certain distance, and when the top of the thimble is positioned at a position protruding out of the upper surface of the slide holder by a certain distance, the automatic taking and placing of an epitaxial wafer can be realized; when the top of the thimble is at a position which is flush with the upper surface of the wafer carrying table or is lower than the upper surface by a certain distance, the adsorption and fixation of the epitaxial wafer and the automatic focusing during detection can be realized.

Preferably, the driving assembly comprises a motor and a coupler, and the lifting mechanism is in transmission connection with an output shaft of the motor through the coupler.

Preferably, the lifting mechanism comprises a screw rod, a screw rod support, a screw rod nut, a slide block push plate, an idler wheel support and a Z-axis upper plate; the screw rod is rotatably arranged on a screw rod seat, the screw rod seat is fixed on a screw rod support seat, the screw rod support seat is fixed on a Z-axis bottom plate, one end of the screw rod is in transmission connection with an output shaft of the motor through a coupler, and the other end of the screw rod is sleeved with a screw rod nut; the screw nut is fixedly connected with a slide block push plate, the idler wheel is abutted against the inclined plane of the slide block push plate and can slide along the inclined plane, and the idler wheel is connected with the rack in a sliding manner through an idler wheel support and can slide up and down along the rack; the top of idler support is provided with Z axle upper plate, and the top and the slide holder fixed connection of Z axle upper plate.

Preferably, the ejector pin assembly comprises an ejector pin, an ejector pin support and an ejector pin fixing plate, the ejector pin support is fixed on a Z-axis bottom plate of the rack, the ejector pin fixing plate is fixed on the ejector pin support, and the ejector pin is fixed on the ejector pin fixing plate and can penetrate through a corresponding through hole in the wafer stage.

Preferably, the number of the ejector pins is three, the ejector pins are uniformly distributed along the circumferential direction, and the top ends of all the ejector pins are located in the same horizontal plane.

Preferably, the Z-axis bottom plate is also provided with a horizontal guide rail, and the sliding block push plate is arranged on the horizontal guide rail and can move left and right along the horizontal guide rail.

Preferably, the Z-axis base plate is further provided with a Z-axis guide rail extending in the vertical direction, the Z-axis guide rail plate is slidably disposed on the Z-axis guide rail, the Z-axis guide rail plate is fixedly connected with the Z-axis upper plate, and the idler wheel support is fixedly connected with the Z-axis upper plate, so that the idler wheel can drive the idler wheel support, the Z-axis upper plate and the Z-axis guide rail plate to slide up and down along the Z-axis guide rail.

Preferably, a tension spring is provided between the Z-axis upper plate and the Z-axis base plate, and the tension spring provides a tensile force for moving the Z-axis upper plate downward.

Furthermore, use the utility model discloses well liftable objective table has following step to the method that epitaxial wafer detected:

the first step is as follows: starting a driving assembly, driving a slide holder to move downwards through a lifting mechanism, enabling the top of a thimble in a thimble assembly to be positioned at a position protruding out of the upper surface of the slide holder by a certain distance, and stopping driving;

the second step: driving a mechanical arm to automatically place an epitaxial wafer to be detected on the thimble;

the third step: starting a driving assembly, driving the slide holder to move upwards through a lifting mechanism, enabling the top of a thimble in the thimble assembly not to protrude out of the upper surface of the slide holder, and stopping driving;

the fourth step: fixing the epitaxial wafer on the wafer carrying table in an adsorption manner through negative pressure;

the fifth step: starting a detection system, judging whether the position of the epitaxial wafer is in the best focusing position, if not, continuing to start a driving assembly to drive a wafer carrying table to move upwards, automatically judging the position of the epitaxial wafer at the same time, stopping driving until the epitaxial wafer is in the best focusing position, and starting detection;

and a sixth step: after the detection is finished, starting the driving assembly, driving the slide holder to move downwards through the lifting mechanism, enabling the top of a thimble in the thimble assembly to be at a position protruding out of the upper surface of the slide holder by a certain distance, and stopping driving;

the seventh step: and the driving mechanical arm takes away the epitaxial wafer which is detected to be finished.

Preferably, in the detection method:

the first step is specifically as follows: the driving motor rotates anticlockwise to drive the lead screw to rotate anticlockwise, the lead screw nut moves rightwards, the sliding block push plate moves rightwards on the horizontal guide rail along with the lead screw nut, the tension spring drives the Z-axis upper plate to move downwards, the idle wheel is in contact with the inclined plane of the sliding block push plate, the Z-axis guide rail plate slides downwards along the Z-axis guide rail, the slide holder moves downwards, the ejector pin is exposed out of the slide holder by a certain distance, and when the distance of the ejector pin exceeding the upper surface of the slide holder reaches a preset value, the motor stops rotating;

the third step is specifically as follows: the driving motor rotates clockwise, the motor drives the lead screw and rotates clockwise, the lead screw nut moves left, the slider push pedal moves left on the horizontal guide rail along with the lead screw nut, slider push pedal inclined plane promotes the idler upward movement, the idler drives the idler support, the Z axle upper plate, slide stage upward movement, the extension spring is tensile simultaneously, Z axle guide rail board upwards slides along the Z axle guide rail, slide stage upward movement, the top up to the thimble does not stand out in the upper surface of slide stage, thereby the epitaxial wafer contacts with the upper surface of slide stage.

The utility model discloses an objective table elevating system adjusts in a flexible way, is convenient for install, and the sexual valence relative altitude is also suitable for in narrow and small space. Through the arrangement of the ejector pin assembly and the liftable slide holder, the automatic taking and placing of the slide, the automatic focusing position adjustment and the detection precision improvement can be realized only by controlling the lifting of the slide holder.

Drawings

Fig. 1 is a cross roller guide type slide table in the prior art;

FIG. 2 is a schematic view of a prior art grooved stage;

fig. 3 is an exploded perspective view of the liftable stage of the present invention;

FIG. 4 is a schematic view of the working principle of the stage;

FIG. 5 is a front view of the present application with an epitaxial wafer placed on a stage;

FIG. 6 is a front view of the present application with the epitaxial wafer in the inspection position;

FIG. 7 is a partial cross-sectional view of the ejector pin flush with the upper surface of the stage;

FIG. 8 is a partial cross-sectional view of the ejector pin below the top surface of the stage.

001. Driving motor 002, coupling 003, lead screw 004, Z cross roller guide rail 005, X cross roller guide rail 006, XZ cross roller guide rail 007, lead screw nut 008, base 009, inclined table 010, lifting block 011, groove carrier 012, manipulator 013, epitaxial wafer 1, motor 2, coupling 3, lead screw base 4, lead screw support 5, lead screw 6, slider push plate 7, lead screw nut 8, horizontal guide rail 9, Z axis base plate 10, Z axis guide rail 11, Z axis guide rail plate 12, thimble 13, thimble support 14, thimble fixing plate 15, tension spring 16, tension spring 17, idler support 18, idler 19, Z axis upper plate 20, carrier 21, epitaxial wafer

Detailed Description

Referring to fig. 3-8, the present application is directed to a liftable stage having a frame, a stage 20, a pin assembly, a lifting mechanism, and a drive assembly.

The frame includes Z axle bottom plate 9 (not shown in other part drawings), and drive assembly includes motor 1 and shaft coupling 2, and motor 1 is fixed to be set up in the frame, is provided with shaft coupling 2 on the output shaft of motor 1.

The lifting mechanism comprises a screw rod 5, a screw rod seat 3, a screw rod support 4, a screw rod nut 7, a slide block push plate 6, an idler wheel 18, an idler wheel support 17 and a Z-axis upper plate 19; the screw 5 is rotatably arranged on the screw seat 3, the screw seat 3 is fixed on the screw support 4, the screw support 4 is fixed on the Z-axis bottom plate 9, one end of the screw 5 is in transmission connection with an output shaft of the motor 1 through the coupler 2, and the other end of the screw is provided with a screw nut 7; the lead screw nut 7 is fixedly connected with a slide block push plate 6, an idler wheel 18 is abutted against the inclined plane of the slide block push plate 6 and can slide along the inclined plane, and the idler wheel 18 is connected with the rack in a sliding way through an idler wheel support 17 and can slide up and down along the rack; the top of the idler support 17 is provided with a Z-axis upper plate 19, and the top of the Z-axis upper plate 19 is provided with a slide holder 20.

The thimble assembly comprises a thimble 12, a thimble support 13 and a thimble fixing plate 14, the thimble support 13 is fixed on a Z-axis bottom plate 9 of the frame, the thimble fixing plate 14 is fixed on the thimble support 13, and the thimble 12 is fixed on the thimble fixing plate 14 and passes through a corresponding through hole on the slide holder 20. The number of the thimbles 12 is preferably 3, and the thimbles are uniformly distributed along the circumferential direction. The tops of all the thimbles 12 are located on the same horizontal plane.

The driving assembly can drive the objective table to lift through the lifting mechanism, so that the top of the ejector pin 12 in the ejector pin assembly is positioned at a position protruding out of the upper surface of the wafer stage 20 by a certain distance, flush with the upper surface of the wafer stage 20, or lower than the upper surface of the wafer stage 20 by a certain distance, and when the top of the ejector pin 12 is positioned at a position protruding out of the wafer stage 20 by a certain distance, automatic taking and placing of an epitaxial wafer can be realized; when the top of the thimble 12 is at a position flush with or lower than the upper surface of the slide holder 20 by a certain distance, the adsorption and fixation of the epitaxial wafer and the automatic focusing during detection can be realized.

In another embodiment, a horizontal guide rail 8 can be further arranged on the Z-axis bottom plate 9, and the slide block push plate 6 is arranged on the horizontal guide rail 8 and can move left and right along the horizontal guide rail 8.

In another embodiment, the Z-axis base plate 9 is further provided with a Z-axis guide rail 10 extending in the vertical direction, a Z-axis guide rail plate 11 is slidably disposed on the Z-axis guide rail 10, the Z-axis guide rail plate 11 is connected with a Z-axis upper plate 19, and the idler support 17 is fixedly connected with the Z-axis upper plate 19. So that the idler 18 can drive the idler support 17, the Z-axis upper plate 19 and the Z-axis guide plate 11 to slide up and down along the Z-axis guide rail 10.

In another embodiment, a tension spring 15 is disposed between the Z-axis upper plate 19 and the Z-axis base plate 9, and the tension spring 15 provides a pulling force to move the Z-axis upper plate 19 downward.

When the epitaxial wafer needs to be detected, the working steps are as follows:

the first step is as follows: the driving motor 1 rotates anticlockwise to drive the lead screw 5 to rotate anticlockwise, the lead screw nut 7 moves rightwards (motor side), the slide block push plate 6 moves rightwards (motor side) on the horizontal guide rail 8 along with the lead screw nut 7, the tension spring 15 drives the Z-axis upper plate 19 to move downwards, the idler 18 is in contact with the inclined surface of the slide block push plate 6, the Z-axis guide rail plate 11 slides downwards along the Z-axis guide rail 10, the slide stage 20 moves downwards, the ejector pin 12 is exposed out of the slide stage 20 for a certain distance, and when the distance from the ejector pin 12 to exceed the upper surface of the slide stage 20 reaches a preset value, the motor stops rotating. The predetermined distance value is between 5 and 10mm, preferably 8.7 mm;

the second step is that: driving a mechanical hand to automatically place an epitaxial wafer 21 to be detected on the thimble 12;

the third step: the driving motor 1 rotates clockwise, the motor 1 drives the lead screw 5 to rotate clockwise, the lead screw nut 7 moves leftwards (away from the motor side), the slider push plate 6 moves leftwards (away from the motor side) on the horizontal guide rail 8 along with the lead screw nut 7, the inclined plane of the slider push plate 6 pushes the idler 18 to move upwards, the idler 18 drives the idler support 17, the Z-axis upper plate 19 and the slide bearing table 20 to move upwards, meanwhile, the tension spring 15 stretches, and the Z-axis guide rail plate 11 slides upwards along the Z-axis guide rail 10. The slide holder 20 moves upwards until the top of the thimble 12 does not protrude from the upper surface of the slide holder 20, so that the epitaxial wafer 21 is in contact with the upper surface of the slide holder 20;

the fourth step: starting a vacuum pump to adsorb and fix the epitaxial wafer 21 on the wafer carrying table 20;

the fifth step: starting a detection system, judging whether the position of the epitaxial wafer is in the optimal focusing position for detection, if not, continuously driving the motor 1 to rotate clockwise to drive the wafer carrying table 20 to move upwards, automatically judging the position of the epitaxial wafer at the same time, stopping the motor until the epitaxial wafer is in the optimal focusing position, and starting detection;

and a sixth step: after the detection is finished, starting the driving assembly, driving the slide holder 20 to move downwards through the lifting mechanism, enabling the top of the ejector pin 12 in the ejector pin assembly to be at a position protruding out of the upper surface of the slide holder 20 by a certain distance, and stopping driving;

Claims

1. A liftable objective table comprises a rack, a slide holder (20), a thimble assembly, a lifting mechanism and a driving assembly; the method is characterized in that: the driving assembly can drive the wafer carrying table (20) to lift through the lifting mechanism, so that the top of a thimble (12) in the thimble assembly is positioned at a position protruding out of the upper surface of the wafer carrying table (20) for a certain distance, flush with the upper surface of the wafer carrying table (20) or lower than the upper surface of the wafer carrying table (20) for a certain distance, and when the top of the thimble (12) is positioned at a position protruding out of the upper surface of the wafer carrying table (20) for a certain distance, automatic taking and placing of an epitaxial wafer can be realized; when the top of the thimble (12) is at a position which is flush with the upper surface of the slide holder (20) or is lower than the upper surface by a certain distance, the adsorption and fixation of the epitaxial wafer and the automatic focusing during detection can be realized.

2. The liftable object table according to claim 1, wherein the driving assembly comprises a motor (1) and a coupler (2), and the lifting mechanism is in transmission connection with an output shaft of the motor (1) through the coupler (2).

3. The liftable object table according to claim 2, wherein the lifting mechanism comprises a screw (5), a screw support (4), a screw nut (7), a slider push plate (6), an idler (18), an idler support (17), a Z-axis upper plate (19); the screw rod (5) is rotatably arranged on the screw rod seat (3), the screw rod seat (3) is fixed on the screw rod support (4), the screw rod support (4) is fixed on the Z-axis bottom plate (9), one end of the screw rod (5) is in transmission connection with an output shaft of the motor (1) through the coupler (2), and the other end of the screw rod is sleeved with a screw rod nut (7); a sliding block push plate (6) is fixedly connected to the screw rod nut (7), an idler wheel (18) is abutted to the inclined plane of the sliding block push plate (6) and can slide along the inclined plane, and the idler wheel (18) is connected with the rack in a sliding mode through an idler wheel support (17) and can slide up and down along the rack; the top of the idler wheel support (17) is provided with a Z-axis upper plate (19), and the top of the Z-axis upper plate (19) is fixedly connected with the slide holder (20).

4. The liftable objective table of claim 3, wherein the ejector pin assembly comprises an ejector pin (12), an ejector pin support (13) and an ejector pin fixing plate (14), the ejector pin support (13) is fixed on a Z-axis bottom plate (9) of the rack, the ejector pin fixing plate (14) is fixed on the ejector pin support (13), and the ejector pin (12) is fixed on the ejector pin fixing plate (14) and can penetrate through a corresponding through hole in the loading table (20).

5. The liftable object table according to claim 4, wherein the number of the ejector pins (12) is three, the ejector pins are uniformly distributed along the circumferential direction, and the top ends of all the ejector pins (12) are located in the same horizontal plane.

6. The liftable object table according to claim 5, wherein a horizontal guide rail (8) is further arranged on the Z-axis bottom plate (9), and the slide block push plate (6) is arranged on the horizontal guide rail (8) and can move left and right along the horizontal guide rail (8).

7. The liftable objective table according to claim 6, wherein a Z-axis guide rail (10) extending in the vertical direction is further disposed on the Z-axis base plate (9), the Z-axis guide rail plate (11) is slidably disposed on the Z-axis guide rail (10), the Z-axis guide rail plate (11) is fixedly connected to the Z-axis upper plate (19), and the idler support (17) is fixedly connected to the Z-axis upper plate (19), so that the idler (18) can drive the idler support (17), the Z-axis upper plate (19), and the Z-axis guide rail plate (11) to slide up and down along the Z-axis guide rail (10).

8. The liftable object table according to claim 7, wherein a tension spring (15) is provided between the Z-axis upper plate (19) and the Z-axis base plate (9), and the tension spring (15) provides a pulling force for moving the Z-axis upper plate (19) downward.