CN217440989U

CN217440989U - Pipeline sealing assembly and temperature control equipment

Info

Publication number: CN217440989U
Application number: CN202221378675.6U
Authority: CN
Inventors: 刘伟明; 许航
Original assignee: Suzhou Envicool Temperature Control Technology Co ltd
Current assignee: Suzhou Envicool Temperature Control Technology Co ltd
Priority date: 2022-06-02
Filing date: 2022-06-02
Publication date: 2022-09-16
Anticipated expiration: 2032-06-02

Abstract

The application discloses pipeline seal assembly and temperature control equipment, this pipeline seal assembly include equipment casing, baffle, pipeline, sealed pad and sealed clamp plate of filling up, be equipped with the cavity in the equipment casing, the baffle set up in the cavity, be used for with the cavity is separated for a plurality of air current chambeies, the pipeline is worn to locate the baffle, sealed pad cover is located the pipeline is laminated in sealed pad deviates from one side of baffle makes sealed pad with the pipeline reaches baffle sealing connection. This application comes the clearance between shutoff pipeline and baffle through sealed the pad with sealed the clamp plate that fills up, and it is sealed effectual, and avoids appearing the condition that produces a large amount of granularity impurity after equipment operation certain time, makes equipment still can satisfy the gas test requirement after operation certain time.

Description

Pipeline sealing assembly and temperature control equipment

Technical Field

The application relates to the technical field of high-precision temperature control, in particular to a pipeline sealing assembly and temperature control equipment comprising the same.

Background

For environmental control of ultra-precision processing equipment represented by a lithography machine, besides the equipment is placed outside a high-grade clean room, an independent temperature control device is also needed in a microenvironment inside the equipment, and the temperature control device can realize a cooling function by adopting immersion cooling or air cooling and other modes. Wherein, the air cooling mode is widely adopted due to the simple layout and the convenience of heat exchange by utilizing the chilled water of the clean room.

For the temperature control device which adopts an air cooling mode to realize a cooling function, in the prior art, a sealing structure of an internal pipeline of the temperature control device generally seals a channeling gap between the pipeline and a partition plate by sticking moisture-retaining cotton and sealing clay on the surface of the pipeline.

However, in the process of implementing the present application, the inventors found that at least the following problems exist in the prior art: because of the high precision output requirement of the ultra-precision machining equipment, the high cleanliness requirement is required for the structural operation of the temperature control equipment and the control part in the ultra-precision machining equipment, the high requirements are provided for the sealing property of the equipment structure, the structural property of the device and the selection range of the sealing material, and the sealing structure modes of the existing similar equipment have defects of different degrees, so that the equipment cannot meet the gas test after operating for a certain time, for example, the gas outlet granularity does not exceed 1000 levels in a 1000-level purification room test.

SUMMERY OF THE UTILITY MODEL

In order to overcome the problems in the prior art, the present application mainly aims to provide a pipeline sealing assembly with good sealing effect.

In order to achieve the above purpose, the following technical solutions are specifically adopted in the present application:

the application provides a pipeline sealing assembly, pipeline sealing assembly includes:

the equipment comprises an equipment shell, wherein a cavity is arranged in the equipment shell;

the baffle plate is arranged in the cavity and is used for dividing the cavity into a plurality of airflow cavities;

the pipeline penetrates through the partition plate;

the sealing gasket is sleeved on the pipeline and is attached to the partition plate;

the sealing gasket pressing plate is sleeved on the pipeline and attached to one side, away from the partition plate, of the sealing gasket, so that the sealing gasket is connected with the pipeline and the partition plate in a sealing mode.

In some embodiments, the gasket includes a first portion and a second portion, the first portion and the second portion cooperate to form a first through hole and a first slit, the first slit is located at a junction of the first portion and the second portion, and the pipe is inserted through the first through hole.

In some embodiments, the sealing gasket is integrally formed, and the sealing gasket is provided with a first through hole and a first slit, the first slit extends from the first through hole to the edge of the sealing gasket, and the pipeline can be squeezed into the first through hole through the first slit.

In some embodiments, the sealing gasket pressing plate comprises a first pressing plate and a second pressing plate, the first pressing plate and the second pressing plate are matched to form a second through hole and a second slit, the second slit is located at the joint of the first pressing plate and the second pressing plate, and the pipeline penetrates through the second through hole.

In some embodiments, the direction of the length extension of the first slit intersects the direction of the length extension of the second slit.

In some embodiments, the sealing gasket pressing plate is integrally formed, and the sealing gasket pressing plate is provided with a second through hole, and the pipeline is arranged through the second through hole.

In some embodiments, the duct sealing assembly further comprises a locking member for securing the gasket and the gasket pressure plate.

In some embodiments, the locking element includes a fixing stud disposed on the partition plate, the gasket and the gasket pressing plate are sleeved on the fixing stud, and a nut is screwed to the fixing stud.

In some embodiments, the locking member comprises a nut, and one end of the pipeline sleeve, which is provided with the sealing gasket and the sealing gasket pressing plate, is provided with a thread structure, and the nut is in threaded connection with the pipeline.

Correspondingly, the application also provides a temperature control device, which comprises the pipeline sealing assembly according to any one of the above embodiments.

The utility model provides a pipeline seal assembly includes equipment shell, baffle, pipeline, sealed pad and sealed clamp plate, is equipped with the cavity in the equipment shell, the baffle sets up in the cavity for separate the cavity for a plurality of air current chambeies, the baffle is worn to locate by the pipeline, sealed pad cover is located the pipeline and is laminated in the baffle, sealed pad clamp plate cover is located the pipeline and is laminated in sealed one side that deviates from the baffle, make sealed pad and pipeline and baffle sealing connection. Compared with the prior art, the clearance between shutoff pipeline and baffle is come through sealed pad and sealed clamp plate to this application, and it is sealed effectual, and avoids appearing the condition that produces a large amount of granularity impurity after equipment operation certain time, makes equipment still can satisfy the gas test requirement after operation certain time.

Drawings

Fig. 1 is a perspective view of a pipe sealing assembly provided in an embodiment of the present application.

Fig. 2 is a cross-sectional view of the line seal assembly of fig. 1.

Fig. 3 is a top view of the line seal assembly of fig. 1.

Fig. 4 is a perspective view of a line sealing assembly according to another embodiment of the present application.

Fig. 5 is a perspective view of a duct seal assembly according to yet another embodiment of the present application.

The attached drawings are as follows:

1. an equipment housing; 101. a cavity; 102. an airflow chamber; 2. a partition plate; 3. a pipeline; 4. a gasket; 41. a first portion; 42. a second portion; 43. a first through hole; 44. a first seam; 5. a sealing gasket pressing plate; 51. a first platen; 52. a second platen; 53. a second through hole; 54. a second seam; 6. a locking member; 61. fixing the stud; 62. and a nut.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

In the description of the present application, unless explicitly stated or limited otherwise, the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless specified or indicated otherwise; the terms "connected," "fixed," and the like are to be construed broadly and may, for example, be fixedly connected, detachably connected, integrally connected, or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In the description of the present application, it should be understood that the terms "upper" and "lower" used in the description of the embodiments of the present application are used in a descriptive sense only and not for purposes of limitation. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element through intervening elements.

The pipeline sealing component is applied to temperature control equipment in ultra-precision machining equipment, and the ultra-precision machining equipment can be mechanical machining equipment such as ultra-precision machining equipment represented by a photoetching machine, a measuring equipment, an ultra-precision lathe and a grinding machine.

At present, the node size of a mainstream photoetching machine reaches below 20nm, the alignment precision reaches 3nm or even lower, and a 12nm chip is successfully applied to commercial production. When the photoetching machine works, the spatial unevenness or fluctuation and drift of the local environment can affect the final photoetching positioning precision, the alignment precision and the like, and particularly, the critical parts of the workpiece table deform due to the spatial unevenness, fluctuation and drift of the temperature, so that the movement error is caused; ultra-precise sensing and measuring devices represented by laser interferometers generate measuring errors due to nonuniform spatial distribution, fluctuation and drift of temperature, humidity and pressure. Therefore, the ultra-precision processing equipment represented by the photoetching machine has the requirements on the external large environment and the very strict requirements on the microenvironment in the equipment to ensure the processing precision.

For environmental control of ultra-precision processing equipment represented by a lithography machine, in addition to placing the equipment outside a high-grade clean room, a microenvironment inside the equipment also needs to have independent temperature control equipment, such as immersion cooling, air cooling and the like. Among them, air cooling is widely used because of its simple layout and the convenience of heat exchange with the chilled water of the clean room. However, because the specific heat capacity of air is small, the air is easy to fluctuate and generate local nonuniformity in environmental micro-adjustment, and therefore, each link in the ultra-precise temperature control equipment needs to be designed with stable control and uniform temperature flow field distribution. In the prior art, no feasible solution is provided on a pipeline sealing structure for solving the problems of stability and reliability of the operation of each component of the ultra-precise temperature control equipment, and how to keep the uniformity, stability and non-channeling of air flow and temperature among air flow chambers in the equipment.

In the prior art, a sealing structure of an internal pipeline of a temperature control device generally performs air-tight plugging on a via hole gap through which the pipeline passes by sticking moisturizing cotton and sealing plaster on the surface of the pipeline. However, in the scheme of sticking the moisture-preserving cotton and the sealing clay on the surface of the pipeline to block the channeling gap, a large amount of particle-size impurities are generated after the equipment runs for a certain time, and the requirement of gas test cannot be met. Although the sealing effect is good, the scheme of sealing the channeling gap between the pipeline and the partition by sticking the metal waterproof joint on the pipeline has certain use limitation, for example, the rotary sealing materials at the two ends of the metal waterproof joint are PVC materials which cannot resist high temperature, the safe low-temperature distance cannot be displaced when the position to be welded is met at one use part, and the sealing materials can be directly damaged by the high temperature of welding.

Referring to fig. 1 to 3, fig. 1 is a perspective view of a pipe sealing assembly according to an embodiment of the present disclosure, fig. 2 is a plan view of the pipe sealing assembly in fig. 1, and fig. 3 is a sectional view of the pipe sealing assembly in fig. 1. The pipeline sealing assembly comprises an equipment shell 1, a partition plate 2, a pipeline 3, a sealing gasket 4 and a sealing gasket pressing plate 5. The device comprises a device shell 1, a cavity 101 is arranged in the device shell 1, and a partition plate 2 is arranged in the cavity 101 and used for dividing the cavity 101 into a plurality of airflow cavities 102 which can not blow-by, so that a plurality of sealed airflow layers are arranged in the device shell 1. Pipeline 3 and laminating in baffle 2 are located to sealed 4 covers of filling up, and sealed 5 covers of filling up locate pipeline 3 and laminate in the sealed one side that 4 of filling up deviates from baffle 2, make sealed 4 and pipeline 3 and baffle 2 sealing connection to carry out the gas tightness shutoff to the 2 via hole clearances of baffle that pipeline 3 passed. Wherein the direction of the arrow in fig. 2 indicates the flow direction of the air flow, in the present embodiment, the mat seal 4 and the mat seal holder 5 are arranged in this order in the flow direction of the air flow.

This application comes the clearance between shutoff pipeline 3 and baffle 2 through sealed 4 and the sealed clamp plate 5 of filling up, avoids appearing the condition that produces a large amount of granularity impurity after equipment operation certain time, makes equipment still can satisfy the gas test requirement after operating certain time, has avoided simultaneously meeting welded position and again can't displace safe low temperature distance and lead to welding high temperature give the bottleneck problem of destruction to sealed material when sealed position.

Specifically, the gasket 4 includes a first portion 41 and a second portion 42, the first portion 41 and the second portion 42 are fitted to form a first through hole 43 and a first slit 44, and the first slit 44 is located at a joint of the first portion 41 and the second portion 42. The sealing gasket pressing plate 5 comprises a first pressing plate 51 and a second pressing plate 52, wherein the first pressing plate 51 and the second pressing plate 52 are matched to form a second through hole 53 and a second slit 54, and the second slit 54 is positioned at the joint of the first pressing plate 51 and the second pressing plate 52. The pipe 3 is inserted through the first through hole 43 and the second through hole 53.

Further, the length extending direction of the first slit 44 intersects with the length extending direction of the second slit 54, and preferably, the length extending direction of the first slit 44 is perpendicular to the length extending direction of the second slit 54, so that the possible leakage risk caused by the first slit 44 overlapping with the second slit 54 can be completely avoided.

In order to fix the gasket 4 and the gasket pressure plate 5, the duct sealing assembly further includes a locking member 6, and the gasket 4 and the gasket pressure plate 5 can be fixed by the locking member 6. Specifically, the locking member 6 includes a fixing stud 61 and a nut 62, the fixing stud 61 is disposed on the partition board 2, the gasket 4 and the gasket pressing plate 5 are sleeved on the fixing stud 61, and the nut 62 is screwed to the fixing stud 61 to fix the gasket 4 and the gasket pressing plate 5. In the present embodiment, four fixing studs 61 are provided, and the number of nuts 62 corresponds to the number of fixing studs 61.

When sealing is specifically implemented, firstly, embedding four fixing studs 61 on the partition board 2, then sleeving the first part 41 into the two corresponding fixing studs 61, sleeving the second part 42 into the other two corresponding fixing studs 61, respectively attaching the first part 41 and the second part 42 to the surface of the partition board 2, and positioning the pipeline 3 in the first through hole 43; then, respectively sleeving the first pressing plate 51 and the second pressing plate 52 into the corresponding fixing studs 61, respectively attaching the first pressing plate 51 and the second pressing plate 52 to the surfaces of the first part 41 and the second part 42, and simultaneously enabling the pipeline 3 to be located in the second through hole 53; and finally, respectively locking the fixing studs 61 by nuts according to the diagonal sequence to fix the sealing gasket 4 and the sealing gasket pressing plate 5, so that the sealing gasket 4, the pipeline 3 and the partition board 2 are completely sealed.

In some embodiments, the end of the pipeline 3 that is sleeved with the sealing gasket 4 and the sealing gasket pressing plate 5 is provided with a threaded structure, and the locking member comprises a nut that can be screwed into the pipeline, so as to fix the sealing gasket 4 and the sealing gasket pressing plate 5, thereby simplifying the locking mode.

In this embodiment, the sealing gasket pressing plate 5 is composed of two parts, namely, a first pressing plate 51 and a second pressing plate 52, it can be understood that, in other embodiments, the sealing gasket pressing plate 5 can also be integrally formed, the sealing gasket pressing plate 5 is provided with a second through hole 53, the pipeline 3 is arranged in the second through hole 53 in a penetrating manner, when assembling, the sealing gasket pressing plate 5 is sleeved into the pipeline 3 before the pipeline 3 is assembled or before the pipeline 3 is welded, the sealing gasket 4 is installed when the pipeline 3 is welded or assembled, and finally the nut is locked, so that a cross joint caused by the fact that the sealing gasket pressing plate 5 is divided into two parts can be reduced.

Based on the above embodiment, the present application further discloses another specific implementation manner, and referring to fig. 4, in this embodiment, the gasket 4 is integrally formed, and the gasket 4 is provided with a first through hole 43 and a first slit 44, the first slit 44 extends from the first through hole 43 to an edge of the gasket 4, and the pipeline 3 can be squeezed into the first through hole 43 by the first slit 44.

When the pipeline sealing device is used specifically, the sealing gasket 4 is sleeved into the two fixing studs 61, the pipeline 3 is extruded into the first through hole 43 from the first seam 44, and the sealing gasket 4 is sleeved into the other two fixing studs 61, so that the intersection seam caused by the fact that the sealing gasket 4 is divided into two parts can be reduced.

Further, the sealing gasket pressing plate 5 comprises a first pressing plate 51 and a second pressing plate 52, the first pressing plate 51 and the second pressing plate 52 are matched to form a second through hole 53 and a second slit 54, the second slit 54 is positioned at the joint of the first pressing plate 51 and the second pressing plate 52, the length extending direction of the second slit 54 is intersected with the length extending direction of the first slit 44, and preferably, the length extending direction of the second slit 54 is perpendicular to the length extending direction of the first slit 44. The pipeline 3 is arranged through the second through hole 53, so that the possible leakage risk caused by the superposition of the first slit 44 and the second slit 54 can be completely avoided. In the present embodiment, the sealing gasket pressing plate 5 is formed by two components, namely, the first pressing plate 51 and the second pressing plate 52, it can be understood that, in other embodiments, the sealing gasket pressing plate 5 may also be formed integrally, and the sealing gasket pressing plate 5 is provided with a second through hole 53, and the pipeline 3 is inserted through the second through hole 53, as shown in fig. 5.

The material of the sealing gasket 4 is not limited to silica gel, but also can be high-quality sealing materials such as high-quality rubber, PVC, PTFE and the like which do not generate particle-size impurities after long-term use, so that the problem of generating particle-size impurities under the long-term use of the conventional sealing materials is solved.

Correspondingly, the application also discloses a temperature control device, which comprises the pipeline sealing assembly in any embodiment.

The above description is only for the preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A tube sealing assembly, comprising:

the pipeline penetrates through the partition plate;

2. The duct sealing assembly of claim 1, wherein the gasket includes a first portion and a second portion that cooperate to define a first aperture and a first slit, the first slit being located at a junction of the first portion and the second portion, the duct extending through the first aperture.

3. The pipe seal assembly according to claim 1, wherein said gasket is integrally formed and is provided with a first through hole and a first slit extending from said first through hole to an edge of said gasket, said pipe being capable of being squeezed into said first through hole by said first slit.

4. The pipeline sealing assembly according to claim 2 or 3, wherein the sealing gasket pressing plate comprises a first pressing plate and a second pressing plate, the first pressing plate and the second pressing plate are matched to form a second through hole and a second slit, the second slit is located at the joint of the first pressing plate and the second pressing plate, and the pipeline is arranged through the second through hole.

5. The duct seal assembly of claim 4, wherein a direction of length extension of the first slit intersects a direction of length extension of the second slit.

6. The pipeline sealing assembly according to claim 1, wherein the sealing gasket pressing plate is integrally formed, and the sealing gasket pressing plate is provided with a second through hole, and the pipeline is arranged through the second through hole.

7. The duct seal assembly of claim 1, further comprising a locking member for securing the gasket and the gasket pressure plate.

8. The line sealing assembly according to claim 7, wherein said locking member includes a fixing stud disposed on said partition, said gasket and said gasket pressure plate are sleeved on said fixing stud, and a nut threadedly coupled to said fixing stud.

9. The line sealing assembly according to claim 7, wherein said locking member comprises a nut, and wherein said line housing is provided with a threaded arrangement at one end of said gasket and said gasket pressure plate, said nut being threadedly connected to said line.

10. A temperature control apparatus comprising a duct seal assembly according to any one of claims 1 to 9.