CN217438289U - Arc target anode glow vacuum coating equipment - Google Patents
Arc target anode glow vacuum coating equipment Download PDFInfo
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- CN217438289U CN217438289U CN202123248097.2U CN202123248097U CN217438289U CN 217438289 U CN217438289 U CN 217438289U CN 202123248097 U CN202123248097 U CN 202123248097U CN 217438289 U CN217438289 U CN 217438289U
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Abstract
The utility model discloses an arc target anode glow vacuum coating equipment, which comprises a vacuum cavity, a vacuum-pumping device for vacuum-pumping of the vacuum cavity, a working gas supply device for supplying working gas to the vacuum cavity, an arc power supply, a bias voltage power supply, a first arc target, a second arc target, a workpiece positioning device for positioning a workpiece in the vacuum cavity, a baffle plate driving device and a control system, wherein the first and second arc targets are fixedly arranged in the vacuum cavity, the first and second arc targets are positioned at two sides of the workpiece positioning device, two poles of the arc power supply are respectively electrically connected with the first and second arc targets, the baffle plate can shield one surface of the first and second arc targets as a cathode, the baffle plate driving device drives the baffle plate to move to realize shielding or separating shielding the first and second arc targets as the cathode, the bias voltage power supply bias voltage for the workpiece, the utility model discloses the carbon film layer that forms at the work piece surface has the advantage that compactness is good, corrosion resistance is good, electric conductivity is good.
Description
Technical Field
The utility model relates to a vacuum coating device, in particular to an arc target anode glow vacuum coating device.
Background
In order to improve the corrosion resistance, the wear resistance and the like of the surfaces of an electrode, a cutter and the like of a battery, a carbon film is often required to be plated on the surface of the electrode, the cutter and the like, at present, the common carbon film plating mode is a vapor deposition mode, the surface of a workpiece is cleaned firstly, then a clean workpiece is placed into a vacuum cavity to be subjected to vacuum carbon film plating, in the carbon film plating process, a film layer on a cathode target is easily plated on the workpiece, the carbon film plating quality of the workpiece is poor, and the conductivity of an anode is reduced after long-term use, so that the film plating efficiency is reduced, and the film plating quality is influenced.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model provides an arc target anode glow vacuum coating equipment adopts arc target anode glow vacuum coating equipment to carry out arc target anode glow vacuum coating to the work piece after, can form stable coating layer, coating film high quality at the workpiece surface efficient.
The utility model discloses a solve the technical scheme that its technical problem adopted and be: an arc target anode glow vacuum coating device comprises a vacuum cavity, a vacuumizing device, a working gas supply device, an arc power supply, a bias power supply, a first arc target, a second arc target, a workpiece positioning device, a shielding plate driving device and a control system, wherein the workpiece positioning device is arranged in the vacuum cavity, the workpiece positioning device can stop and position a workpiece, the first arc target and the second arc target are fixedly arranged in the vacuum cavity, the first arc target and the second arc target are respectively arranged at two opposite sides of the workpiece positioning device, two poles of the arc power supply are respectively electrically connected with the first arc target and the second arc target, the shielding plate can shield one surface of the first arc target and the second arc target as a cathode, the shielding plate driving device drives the shielding plate to act to shield or separate the first arc target and the second arc target as the cathode, the two poles of the bias power supply are respectively electrically connected with the vacuum cavity and the workpiece positioning device to enable the surface of the workpiece to form bias voltage, the vacuumizing device can vacuumize the vacuum cavity to reach a set vacuum degree, the working gas supply device can provide gas required by coating in the vacuum cavity, and the control system controls the vacuumizing device, the working gas supply device, the arc power supply, the bias power supply and the shielding plate driving device to start and stop.
As a further improvement, control system can control the two poles of the earth intermittent type nature exchange of arc power, shielding plate drive arrangement can drive shielding plate alternate sheltering from in first electric arc target and second electric arc target surface, and control system control shielding plate drive arrangement intermittent type opens and stops work.
As a further improvement, the shielding plate driving device comprises a connecting rod, a rotating shaft and a rotary driving device, the rotating shaft can be installed on the vacuum cavity body around the axis rotation parallel to the first and second arc targets, one end of the connecting rod is fixedly connected with the rotating shaft, the other end of the connecting rod is fixedly connected with the shielding plate, and the rotary driving device drives the rotating shaft to rotate alternately.
As the utility model discloses a further improvement, go back fixed mounting on the vacuum cavity and have the bearing, in the bearing was worn to locate by the pivot, rotary drive device was revolving cylinder, and revolving cylinder power take off end links firmly with the pivot is coaxial.
As a further improvement, still be equipped with heating device and temperature-sensing device in the vacuum cavity, heating device can give the inside heating of vacuum cavity, and temperature-sensing device can respond to the temperature in the vacuum cavity, temperature-sensing device and control system electric connection communication, control system control heating device open and stop the action.
As a further improvement, the work piece positioner includes carousel and insulating seat, insulating seat fixed mounting is equipped with electrically conductive location axle on the carousel that electrically conductive material preparation formed on the vacuum cavity, electrically conductive location axle on the carousel is worn to locate in the insulating seat, electrically conductive location axle and bias voltage power electric connection on the carousel are equipped with the work piece location structure that is used for the fixed position work piece on the carousel.
As a further improvement, the working gas supply device comprises a working gas supply branch, a working gas supply pipeline and a gas mixing tank, inert gas and carbon-containing gas are filled in the at least two working gas supply branches respectively, the working gas supply branch is communicated with a gas mixing tank air inlet, the gas mixing tank can mix the working gas entering the gas mixing tank, the gas outlet of the gas mixing tank is communicated with the inside of the vacuum cavity through the working gas supply pipeline, and the working gas supply branch is provided with a solenoid valve and a flowmeter, the flowmeter can detect the gas flow in the working gas supply branch, the flowmeter is communicated with a control system, and the control system controls the solenoid valve to open and close to realize the opening and closing of the working gas supply branch.
As the utility model discloses a further improvement still is equipped with vacuum detection device in the vacuum cavity, and vacuum detection device can detect the vacuum in the vacuum cavity, and vacuum detection device communicates with control system electric connection.
The utility model has the advantages that: the utility model adopts the vacuum coating mode to carry out vacuum coating on the workpiece, acetylene or methane is filled into the vacuum cavity, a carbon-containing film layer is deposited on the workpiece, the cathode is shielded through the shielding plate in the coating process, the cathode target film layer is prevented from being directly coated on the workpiece, the workpiece surface coating is only carbon film, the workpiece coating quality is ensured, the polarity of the anode and cathode arc targets is alternately switched according to the frequency, so that the first arc target and the second arc target are alternately used as the anode, the problem that the electric conductivity of the target surface is reduced after the working time of the anode arc target is long and the normal work is influenced is avoided, the vacuum coating equipment can stably carry out coating work for a long time, in the process of carrying out vacuum coating on the workpiece with the carbon film, the workpiece is firstly glowed and cleaned, then the workpiece is coated with the film through the cathode, finally, the carbon film deposition is carried out on the surface of the workpiece, make the carbon film have good adhesive force on the workpiece surface, the carbon film on workpiece surface can not drop even for long-term use, the utility model discloses the carbon film layer that forms at the workpiece surface has the advantage that compactness is good, corrosion resistance is good, electric conductivity is good, can apply to on hydrogen fuel cell's electrode plate surface treatment and other similar usage's products.
Drawings
Fig. 1 is a schematic view of a first working state of the present invention;
fig. 2 is a schematic view of a second operating state of the present invention.
Detailed Description
Example (b): an arc target anode glow vacuum coating device comprises a vacuum cavity 3, a vacuumizing device, a working gas supply device, an arc power supply 1, a bias power supply 2, a first arc target 4, a second arc target 5, a workpiece positioning device, a shielding plate 6 driving device and a control system, wherein the workpiece positioning device is arranged in the vacuum cavity 3, the workpiece positioning device can stop and position a workpiece 9, the first arc target 4 and the second arc target 5 are fixedly arranged in the vacuum cavity 3, the first arc target 4 and the second arc target 5 are respectively arranged at two opposite sides of the workpiece positioning device, two poles of the arc power supply 1 are respectively electrically connected with the first arc target 4 and the second arc target 5, the shielding plate 6 can shield one surface of the first arc target 4 and the second arc target 5 serving as a cathode, the shielding plate 6 driving device drives the shielding plate 6 to act to shield or separate the first arc target 4 and the second arc target 5 serving as the cathode, two poles of the bias power supply 2 are respectively electrically connected with the vacuum cavity 3 and the workpiece positioning device to enable the surface of the workpiece to form bias voltage, the vacuumizing device can vacuumize the vacuum cavity 3 to reach a set vacuum degree, the working gas supply device can provide gas required by coating in the vacuum cavity 3, and the control system controls the vacuumizing device, the working gas supply device, the arc power supply 1, the bias power supply 2 and the shielding plate 6 driving device to start and stop.
After a workpiece 9 is placed on a workpiece positioning device for positioning, a vacuum cavity 3 is closed, the vacuum cavity 3 is vacuumized through a vacuumizing device to achieve the required vacuum degree, required various working gases are filled into the vacuum cavity 3 through a working gas supply device, meanwhile, bias voltage is provided for the workpiece through a bias voltage power supply 2, an electrode is used as an electron source, electron bombardment is carried out on the surface of the workpiece 9 with negative bias voltage to realize glow cleaning, then an arc power supply 1 is opened, one of a first arc target 4 and a second arc target 5 is connected with an anode and a cathode, the arc target connected with the anode forms an anode arc target, the arc target connected with the cathode forms a cathode arc target, wherein the anode arc target and the cathode arc target can be correspondingly arranged into one or more groups, a graphite target material is arranged on the anode arc target, when the cathode arc target works, a large amount of electrons can move towards the surface of the anode arc target, therefore, the anode arc target can form strong glow, a coating layer can be deposited on the surface of the workpiece 9 after working gas containing coating ions is flushed into the cavity, the cathode arc target is blocked by the shielding plate 6 when the workpiece is subjected to glow cleaning and coating, the cathode target can be prevented from being directly coated on the workpiece 9, the coating layer formed on the workpiece is a coating layer formed by ions ionized in the working gas, the shielding plate 6 is opened before the surface of the workpiece 9 is coated, the workpiece is coated and bottomed by the cathode arc target, a bottoming film layer is deposited on the surface of the workpiece 9, and the adhesive force of the coating layer can be improved. The device can realize the whole set of processes of glow cleaning, coating priming and vacuum coating of the workpiece, so that a stable coating layer is formed on the surface of the workpiece 9, the surface of the workpiece 9 is protected, and meanwhile, the required performance is formed.
The control system can control the two poles of the arc power supply 1 to intermittently exchange, the driving device of the shielding plate 6 can drive the shielding plate 6 to alternately shield the surfaces of the first arc target 4 and the second arc target 5, and the control system controls the driving device of the shielding plate 6 to intermittently start and stop. Through the intermittent type nature exchange of the two poles of the body of arc power 1 for first arc target 4 and the mutual switch positive negative pole of second arc target 5, avoid the positive pole arc target because of target surface electric conductivity decline behind the operating time overlength, influence normal work, first, two arc targets switch positive negative pole according to certain frequency each other, can effectively avoid the problem that positive pole arc target surface electric conductivity descends, thereby can long-time stable work, shielding plate 6 switches along with first, two arc target positive poles and negative poles and shelters from the position, the electric arc target of selecting as the negative pole shelters from.
6 drive arrangement of shielding plate includes connecting rod, pivot and rotary drive device, the pivot can be around being on vacuum chamber 3 around being on a parallel with the rotatory installation of the axis of first, two arc targets, connecting rod one end and pivot fixed connection, the connecting rod other end and 6 fixed connection of shielding plate, rotary drive device drive pivot positive and negative rotations in turn.
The rotary driving device drives the rotary shaft to rotate repeatedly and alternately (the rotation angle is 180 degrees), so that the connecting rod can swing in the vacuum cavity 3 in a reciprocating manner, the baffle plate 6 is driven to change in the position in the vacuum cavity 3, the first arc target 4 and the second arc target 5 can be shielded alternately, the polarity switching of the first arc target 4 and the second arc target 5 can be adapted, the baffle plate 6 can rotate around the rotary shaft in a rotary shaft manner to switch the shielding position, the baffle plates 6 can be arranged on the side parts of the first arc target 4 and the second arc target 5, the first arc target 4 and the second arc target 5 can be shielded alternately by the alternate displacement of the two baffle plates 6, the first arc target 4 and the second arc target 5 can be shielded alternately in other manners, and the shielding of the first arc target 4 and the second arc target 5 can be shielded alternately by other manners, which is an equivalent replacement structure that is easy for technicians in the field to think of the invention, all falling within the scope of protection of this patent.
The vacuum chamber 3 is further fixedly provided with a bearing, the rotating shaft penetrates through the bearing, the rotary driving device is a rotary cylinder 7, and the power output end of the rotary cylinder 7 is coaxially and fixedly connected with the rotating shaft. The bearing is arranged on the vacuum cavity 3, so that the rotating shaft can rotate more smoothly, and the fault is avoided.
Still be equipped with heating device 11 and temperature-sensing device in the vacuum cavity 3, heating device 11 can give the inside heating of vacuum cavity 3, and temperature-sensing device can respond to the temperature in the vacuum cavity 3, temperature-sensing device and control system electric connection communication, control system control heating device 11 opens and stops the action.
The heating device 11 can be a heating pipe arranged at the periphery of the first arc target and the second arc target, so that the temperature in the vacuum cavity 3 is uniformly heated, the temperature in the vacuum cavity 3 is ensured to be in a proper range, and the workpiece is glow-cleaned and coated.
The workpiece positioning device comprises a turntable 8 and an insulating base 10, wherein the insulating base 10 is fixedly installed on the vacuum cavity 3, a conductive positioning shaft is arranged on the turntable 8 made of conductive materials, the conductive positioning shaft on the turntable 8 penetrates through the insulating base 10, the conductive positioning shaft on the turntable 8 is electrically connected with the bias voltage power supply 2, and a workpiece positioning structure for fixedly positioning a workpiece is arranged on the turntable 8. The rotary table 8 of the workpiece positioning device is made of a conductive material and can conduct electricity after being electrically connected with the bias voltage power supply 2 to form bias voltage on a workpiece, the bias voltage circuit is isolated from the vacuum cavity 3 through the insulating base 10 to form a bias voltage circuit, the rotary table 8 can rotate in the vacuum cavity 3 or can not rotate, a workpiece positioning structure on the rotary table 8 can be a hanger or a positioning pin, and the workpiece positioning structure can be selected and designed by a person skilled in the art according to actual coating requirements.
The working gas supply device comprises a working gas supply branch, a working gas supply pipeline and a gas mixing tank 14, wherein inert gas and carbon-containing gas are respectively filled in at least two working gas supply branches, the working gas supply branch is communicated with a gas inlet of the gas mixing tank 14, the gas mixing tank 14 can mix the entering working gas, a gas outlet of the gas mixing tank 14 is communicated with the inside of the vacuum cavity 3 through the working gas supply pipeline, each working gas supply branch is further provided with an electromagnetic valve 13 and a flowmeter 12, the flowmeter 12 can detect the gas flow in the working gas supply branch, the flowmeter 12 is communicated with a control system, and the control system controls the electromagnetic valve 13 to open and close to realize the opening and closing of the working gas supply branch. The working gas supply device supplies different working gases into the vacuum cavity 3 through different working gas supply branches, the amount of the supplied working gas and whether the supplied working gas is detected and calculated by the flowmeter 12, the electromagnetic valve 13 is used for on-off operation of the working gas supply branches, the mixing tank can uniformly mix the different working gases entering simultaneously, so as to ensure that the coating film is uniform and stable, except the above-mentioned selective switch of the plurality of working gas supply branches, finally, the working gas supply scheme is sent into the vacuum cavity 3 by one working gas supply pipeline, and the vacuum cavity 3 can be supplied with different working gases by a plurality of gas supply pipelines.
A vacuum degree detection device is further arranged in the vacuum cavity 3 and can detect the vacuum degree in the vacuum cavity 3, and the vacuum degree detection device is electrically connected and communicated with the control system. The vacuum degree detection device is used for detecting the vacuum degree in the vacuum cavity 3 in real time so as to ensure that the vacuum degree in the vacuum cavity 3 meets the requirements when different operations are carried out on workpieces, and therefore the vacuum degree in the vacuum cavity 3 can be adjusted in real time.
An arc target anode glow vacuum coating process comprises the following specific steps:
the method comprises the following steps: placing the workpiece 9 on a workpiece positioning device in the vacuum cavity 3, closing the door and exhausting air;
step two: when the vacuum degree in the vacuum cavity 3 is pumped to 1000Pa, the cavity heating device 11 is started;
step three: pumping the vacuum degree in the vacuum cavity 3 to 5 × 10-3Pa, and heating to 500 ℃;
step four: glow cleaning of a workpiece:
(1) opening an inert gas flowmeter 12 and an electromagnetic valve 13 to inject inert gas into the vacuum cavity 3, adjusting the vacuum degree to 7 x 10 < -1 > Pa, and opening a bias power supply 2;
(2) setting the bias voltage power supply 2 to 800-1000V, and performing glow cleaning on the workpiece for 15 minutes;
step five: coating and priming the workpiece by using a cathode arc target:
(1) the bias power supply 2 is set to be 500V, and the shielding plate 6 in front of the cathode arc target is opened;
(2) turning on an arc power supply 1, setting the current to be 100A, flushing inert gas, setting the vacuum degree in a vacuum cavity 3 to be 5 x 10-1Pa, and coating and bottoming the workpiece by using a cathode arc target for 10 minutes;
step six: coating a workpiece using an anodic arc target
(1) The bias power supply 2 is set to be 100V-300V, the flowmeter 12 and the electromagnetic valve 13 of the inert gas are closed, the flowmeter 12 and the electromagnetic valve 13 of the carbon-containing gas are opened, and the vacuum degree in the vacuum cavity 3 is adjusted to be 1-2 Pa;
(2) starting an arc power supply 1, setting the current to be 200A, and setting the mutual switching frequency of the anode arc target and the cathode arc target for 120 seconds;
(3) the shielding plate 6 shields along with the cathode electric arc target;
(4) the arc target works for 15-30 minutes, and an arc power supply 1, a bias power supply 2, a carbon-containing gas flowmeter 12, an electromagnetic valve 13 and a heating device 11 are closed;
step seven: and maintaining the pressure and reducing the temperature for 30 minutes, opening the door after the vacuum cavity 3 is broken, and taking out the workpiece.
The inert gas is argon or nitrogen, and the carbon-containing gas is a mixed gas formed by hydrogen and at least one of acetylene (C2H2) and methane (CH 4). When the workpiece 9 is cleaned in glow, argon or helium with proper partial pressure needs to be filled, the argon or helium is ionized in the discharging process and bombards the surface of the workpiece 9 to realize cleaning, and in the vacuum coating process, acetylene or methane is flushed into the vacuum cavity 3 to deposit a carbon-containing film layer on the surface of the workpiece 9, wherein the carbon-containing film layer has the advantages of good compactness, good corrosion resistance and good conductivity, and can be applied to the surface treatment of the electrode plate of a hydrogen fuel cell and other products with similar purposes.
Claims (8)
1. An arc target anode glow vacuum coating equipment is characterized in that: the device comprises a vacuum cavity (3), a vacuumizing device, a working gas supply device, an arc power supply (1), a bias power supply (2), a first arc target (4), a second arc target (5), a workpiece positioning device, a baffle plate (6), a baffle plate driving device and a control system, wherein the workpiece positioning device is arranged in the vacuum cavity, the workpiece positioning device can stop and position a workpiece (9), the first arc target and the second arc target are fixedly arranged in the vacuum cavity, the first arc target and the second arc target are respectively arranged at two opposite sides of the workpiece positioning device, two poles of the arc power supply are respectively electrically connected with the first arc target and the second arc target, the baffle plate can shield one surface of the first arc target and the second arc target as a cathode, and the baffle plate driving device drives the baffle plate to act to shield or separate the first arc target and the second arc target as the cathode, the two poles of the bias power supply are respectively electrically connected with the vacuum cavity and the workpiece positioning device to enable the surface of the workpiece to form bias voltage, the vacuumizing device can vacuumize the vacuum cavity to reach a set vacuum degree, the working gas supply device can provide gas required by coating in the vacuum cavity, and the control system controls the vacuumizing device, the working gas supply device, the arc power supply, the bias power supply and the shielding plate driving device to start and stop.
2. The arc target anode glow vacuum coating apparatus according to claim 1, wherein: the control system can control the two poles of the arc power source to intermittently exchange, the shielding plate driving device can drive the shielding plates to alternately shield the surfaces of the first arc target and the second arc target, and the control system controls the shielding plate driving device to intermittently start and stop.
3. The arc target anode glow vacuum coating apparatus according to claim 2, wherein: baffle drive arrangement includes connecting rod, pivot and rotary drive device, the pivot can be around being on the vacuum chamber around being on a parallel with the rotatory installation in the axis of first, two arc targets, connecting rod one end and pivot fixed connection, the connecting rod other end and baffle fixed connection, the rotary drive device drive pivot is positive and negative rotation in turn.
4. The arc target anode glow vacuum coating apparatus according to claim 3, wherein: the vacuum cavity is further fixedly provided with a bearing, the rotating shaft penetrates through the bearing, the rotary driving device is a rotary cylinder (7), and the power output end of the rotary cylinder is coaxially and fixedly connected with the rotating shaft.
5. The arc target anode glow vacuum coating apparatus according to claim 1, wherein: still be equipped with heating device (11) and temperature-sensing device in the vacuum cavity, heating device can give the inside heating of vacuum cavity, and temperature-sensing device can respond to the temperature in the vacuum cavity, temperature-sensing device and control system electric connection communication, control system control heating device open and stop the action.
6. The arc target anode glow vacuum coating apparatus according to claim 1, wherein: the workpiece positioning device comprises a turntable (8) and an insulating seat (10), the insulating seat is fixedly installed on the vacuum cavity, a conductive positioning shaft is arranged on the turntable made of conductive materials, the conductive positioning shaft on the turntable penetrates through the insulating seat, the conductive positioning shaft on the turntable is electrically connected with a bias power supply, and a workpiece positioning structure for fixedly positioning a workpiece is arranged on the turntable.
7. The arc target anode glow vacuum coating apparatus according to claim 1, wherein: working gas supply device includes working gas supply branch road, working gas air supply line and gas mixing tank (14), and working gas supply branch road and gas mixing tank air inlet intercommunication, the gas mixing tank can mix the working gas that gets into, and the gas outlet of gas mixing tank passes through working gas air supply line and the inside intercommunication of vacuum cavity, and is individual still be equipped with solenoid valve (13) and flowmeter (12) on the working gas supply branch road, the gas flow in the working gas supply branch road can be detected to the flowmeter, and the flowmeter communicates with control system connection, and the switching of working gas supply branch road is realized to control system control solenoid valve switching.
8. The arc target anode glow vacuum coating apparatus according to claim 7, wherein: still be equipped with vacuum detection device in the vacuum cavity, vacuum detection device can detect the vacuum in the vacuum cavity, and vacuum detection device and control system electric connection communicate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202123248097.2U CN217438289U (en) | 2021-12-22 | 2021-12-22 | Arc target anode glow vacuum coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202123248097.2U CN217438289U (en) | 2021-12-22 | 2021-12-22 | Arc target anode glow vacuum coating equipment |
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| CN217438289U true CN217438289U (en) | 2022-09-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481045A (en) * | 2021-12-22 | 2022-05-13 | 昆山浦元真空技术工程有限公司 | Arc target anode glow vacuum coating process and equipment used by same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481045A (en) * | 2021-12-22 | 2022-05-13 | 昆山浦元真空技术工程有限公司 | Arc target anode glow vacuum coating process and equipment used by same |
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