CN217383806U

CN217383806U - Connecting assembly, image acquisition device and high-temperature furnace

Info

Publication number: CN217383806U
Application number: CN202220549698.2U
Authority: CN
Inventors: 徐鹏国; 张建华; 李博一; 马学贵; 马志财; 杨丽; 苟斌
Original assignee: Yinchuan Longi Solar Technology Co Ltd
Current assignee: Yinchuan Longi Solar Technology Co Ltd
Priority date: 2022-03-14
Filing date: 2022-03-14
Publication date: 2022-09-06
Anticipated expiration: 2032-03-14
Also published as: WO2023173786A1

Abstract

The embodiment of the utility model provides a coupling assembling, image acquisition device and high temperature furnace, coupling assembling for connecting image acquisition module and high temperature furnace bell, coupling assembling includes the flange section of thick bamboo; an accommodating cavity for accommodating at least part of the image acquisition module is formed between the first end and the second end of the flange cylinder, and a flange structure for connecting with a furnace cover of the high-temperature furnace is arranged at one end of the flange cylinder; wherein the first end and the second end are two ends opposite to each other along the axis of the flange cylinder; a first cooling cavity is formed between the inner wall and the outer wall of the flange cylinder and is used for filling cooling media. The utility model discloses a coupling assembling can prevent that high temperature from leading to the image acquisition module failure to damage to the image acquisition module cooling that holds in the chamber, can ensure the normal work of image acquisition module.

Description

Connecting assembly, image acquisition device and high-temperature furnace

Technical Field

The utility model relates to a crystal pulling equipment technical field especially relates to a coupling assembling, image acquisition device and high temperature furnace.

Background

At present, in the crystal pulling growth process of a silicon rod, an industrial camera is usually installed at an observation port of a single crystal furnace, the camera is used for shooting images in the furnace, and the temperature in the single crystal furnace and the growth quality of a crystal rod can be obtained by measuring light ray information in the images and the size of the crystal rod, so that the crystal pulling process can be automatically controlled.

In the measurement mode, the industrial camera is fixed outside the single crystal furnace through the mounting bracket, the position and the angle of the industrial camera have limitations, and the collected visual field range in the furnace is narrow. When the industrial camera is built in, the high-temperature environment in the furnace can prevent the industrial camera from working normally.

SUMMERY OF THE UTILITY MODEL

The utility model provides a coupling assembling, image acquisition device and high temperature furnace aims at solving when the installation of industry camera in the high temperature furnace, the unable normal problem of working of industry camera.

The embodiment of the utility model provides a connecting assembly, which is used for connecting an image acquisition module and a furnace cover of a high-temperature furnace, and comprises a flange cylinder;

an accommodating cavity for accommodating at least part of the image acquisition module is formed between the first end and the second end of the flange cylinder, and a flange structure for connecting with the furnace cover is arranged at one end of the flange cylinder; wherein the first end and the second end are two ends opposite to each other along the axis of the flange cylinder;

a first cooling cavity is formed between the inner wall and the outer wall of the flange cylinder and is used for filling cooling media.

The embodiment of the utility model also provides an image acquisition device, the image acquisition device includes image acquisition module and the aforementioned coupling assembling;

at least part of the image acquisition module is embedded in the accommodating cavity.

The embodiment of the utility model provides a high temperature furnace is still provided, high temperature furnace includes aforementioned image acquisition device.

The utility model discloses among the coupling assembling, the one end of a flange section of thick bamboo is provided with the flange structure that is used for being connected with the high temperature furnace bell, forms the chamber that holds that is used for holding partial image collection module at least between the first end of a flange section of thick bamboo and the second end. When the flange cylinder is connected with the furnace cover, the flange cylinder can be positioned inside the high-temperature furnace, and the image acquisition module is installed inside the high-temperature furnace through the accommodating cavity. Furthermore, a first cooling chamber is formed between the inner wall and the outer wall of the flange shaft, which cooling chamber can be filled with a cooling medium. Consequently, first cooling chamber can prevent that high temperature from leading to the image acquisition module to lose efficacy to the cooling of the image acquisition module that holds in the chamber, can ensure that the image acquisition module normally works.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.

Fig. 1 shows a schematic view of a connection assembly in an embodiment of the invention;

FIG. 2 is a schematic cross-sectional view taken along the direction A-A in FIG. 1 according to an embodiment of the present invention;

fig. 3 shows a schematic diagram of the embodiment of the present invention in the direction of M in fig. 1;

FIG. 4 shows a schematic view of a high temperature furnace in an embodiment of the invention;

fig. 5 is a partially enlarged schematic view of the position I in fig. 4 according to the embodiment of the present invention;

fig. 6 shows a simplified schematic diagram of a mounting structure of a connection assembly in an embodiment of the invention;

fig. 7 shows a simplified schematic diagram of yet another mounting structure of a connection assembly in an embodiment of the present invention;

fig. 8 shows a simplified schematic diagram of another mounting structure of the connection assembly in an embodiment of the present invention.

Description of the figure numbering:

10-a flange cylinder, 11-a heat insulation filter, 12-a first joint, 13-a second joint, 14-quartz glass, 15-a first sealing ring, 16-a fixed ring, 17-a second sealing ring, 18-a third joint, 19-a fourth joint, 20-a furnace cover, 21-a heat exchanger, 30-a connecting piece, 101-a first cooling cavity, 102-a mounting boss, 103-a second cooling cavity and 161-a third cooling cavity.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the process of pulling and growing the silicon rod, the image of the crystal rod growth can be acquired by the image acquisition module in a visual image mode, so that the growth environment and the growth quality of the silicon rod can be measured. The utility model discloses coupling assembling can be used for connecting image acquisition module and high temperature furnace bell, is connected the back when image acquisition module and high temperature furnace bell, can shoot the image in the high temperature furnace. It should be noted that the temperature in the high temperature furnace is usually not lower than 1000 ℃, and the common working temperature is about 1400 ℃ or 1700 ℃.

Referring to fig. 1 and 2, the present invention provides a schematic structural diagram of a connecting assembly, which includes a flange barrel 10;

an accommodating cavity for accommodating at least part of the image acquisition module is formed between the first end and the second end of the flange cylinder 10, and a flange structure for connecting with the furnace cover is arranged at one end of the flange cylinder 10; wherein the first end and the second end are two ends opposite to each other along the axis of the flange cylinder 10;

a first cooling cavity 101 is formed between the inner wall and the outer wall of the flange cylinder 10, and the first cooling cavity 101 is used for filling a cooling medium.

Specifically, as shown in fig. 1 and fig. 2, the connection assembly of the embodiment of the present invention includes a flange cylinder 10, and the flange cylinder 10 is a hollow cylindrical structure with two through ends, and may be a cylindrical hollow cylinder or a hollow cylinder with a polygonal cross section. The hollow portions at the two ends of the flange barrel 10 form a containing cavity, which can be used for installing a part of the image acquisition module or the whole image acquisition module. It should be noted that the image capturing module is a module for capturing a live image in the high temperature furnace, such as a common industrial camera. The image acquisition assembly in the image acquisition module is used as a core assembly to realize photoelectric conversion so as to output image information. The image acquisition module can also comprise a prism for refracting light, and the prism can be arranged in front of the lens of the image acquisition assembly to expand the shooting view of the image acquisition assembly.

Whether partial image acquisition modules are placed in the flange cylinder 10 or all image acquisition modules are placed in the flange cylinder 10. In order to prevent the image acquisition module from being damaged by high temperature. The cooling structure can be designed in the flange cylinder 10 to cool the accommodating cavity of the flange cylinder 10, so that the accommodating cavity is in a proper temperature range. Specifically, as illustrated in fig. 2, a first cooling chamber 101 is formed between the inner wall and the outer wall of the flange cylinder 10, and the first cooling chamber 101 is used for filling a cooling medium.

In actual manufacturing, the inner sleeve and the outer sleeve of the flange cylinder 10 can be manufactured and processed respectively, the inner sleeve and the outer sleeve are sleeved together and then welded or bonded into a whole, and a first cooling cavity 101 is formed between the inner wall and the outer wall of the flange cylinder 10. In another embodiment, a fluid cooling medium, for example, a liquid cooling liquid or a low-temperature gas, may be injected into the first cooling chamber 101. It can be understood that the material for preparing the flange cylinder 10 may be high temperature resistant alloy or ceramic, and it is only necessary to ensure that the flange cylinder 10 is not deformed when heated in a high temperature furnace.

The utility model discloses among the coupling assembling, when a flange section of thick bamboo was arranged in the high temperature furnace and is used, utilize its first cooling chamber can realize holding the thermal-insulated cooling of the image acquisition module in the chamber to inside, help preventing that high temperature from resulting in the image acquisition module to become invalid and damaging, can ensure that the image acquisition module normally works.

Optionally, referring to fig. 2, the connection assembly further includes a heat insulation filter 11, where the heat insulation filter 11 is fixed to an end of the flange barrel 10 away from the flange structure.

Specifically, as shown in fig. 2, in one embodiment, the connection assembly further includes a heat insulation filter 11. The heat insulation filter 11 may be a high temperature resistant filter, and since the flange cylinder 10 is connected to the furnace lid through the flange structure, one end of the flange cylinder 10 away from the flange structure is further away from the furnace lid, and the heat insulation filter 11 is fixed at the end to filter out glaring glare in the high temperature furnace, and the filtering performance is specifically determined by a coating or a doped substance of the heat insulation filter 11. It will be readily appreciated that if the insulating filter 11 is fixed near one end of the flange structure, the receiving cavity is readily exposed to high temperature environments. On the other hand, the heat insulation filter 11 is located at a position farther away from the flange structure, and can play an effective heat insulation role inside and outside the accommodating cavity of the flange cylinder 10. It should be noted that the heat insulation filter 11 in the embodiment of the present invention may be gold-plated glass with a thin gold-plated layer, or may be high temperature resistant glass doped with one or more oxides such as iron oxide, cobalt oxide, copper oxide, or manganese oxide. These thermal-insulated light filter 11 can satisfy thermal-insulated demand, also can satisfy the light filtering demand, makes the image acquisition module group in holding the chamber can gather the image that has clear boundary.

Optionally, referring to fig. 2, the connection assembly further comprises a first joint 12 and a second joint 13;

at least one of the first joint 12 and the second joint 13 is connected to the inner wall or the outer wall, and both the first joint 12 and the second joint 13 are communicated with the first cooling cavity 101;

the first joint 12 is used for introducing the cooling medium, and the second joint 13 is used for discharging the cooling medium.

Specifically, as shown in fig. 2, in one embodiment, when the cooling medium is a fluid, the connection assembly may further include a first joint 12 and a second joint 13 in order to improve cooling efficiency. At least one of the first joint 12 and the second joint 13 is connected to an inner wall or an outer wall of the flange cylinder 10, and both the first joint 12 and the second joint 13 communicate with the first cooling chamber 101. The two joints are communicated with a container for storing cooling medium outside the high-temperature furnace through a pipeline, a pumping device is arranged in the pipeline, the low-temperature cooling medium is led into the first cooling cavity 101 from one joint under the pressure action of the pumping device, and after heat is absorbed, the heated cooling medium is led out into the container from the other joint. Thereby recycling the cooling medium, improving the cooling efficiency and reducing the cooling cost.

Optionally, referring to fig. 2, the connection assembly further comprises quartz glass 14;

the quartz glass 14 and the heat insulation filter 11 are stacked on one end of the flange cylinder 10 far away from the flange structure.

Specifically, as shown in fig. 2, in one embodiment, the heat-insulating filter 11 should not be too thick because it has both heat-insulating performance and light-filtering performance. If the heat-insulating property is insufficient when the light-filtering property is satisfied, a quartz glass 14 may be stacked on the side of the heat-insulating filter 11 close to the flange structure, and the quartz glass 14 has high-temperature resistance and explosion-proof property because it is a mineral transparent glass. Therefore, the heat insulation filter plate can be used together with the heat insulation filter plate 11, double heat insulation and explosion prevention effects can be achieved, the defect that the heat insulation of the heat insulation filter plate 11 is insufficient is overcome, and reliable protection on the image acquisition module can be formed.

It can be understood that, when the image acquisition assembly of the image acquisition module is located outside the flange cylinder 10, and the prism is located in the accommodating cavity of the flange cylinder 10, if the prism has high temperature resistance, the heat-insulating optical filter 11 can also be installed and fixed at one end close to the flange structure, and at this moment, the heat-insulating optical filter 11 is located between the lens front end of the image acquisition assembly and the prism, and mainly filters light. Two or more layers of quartz glass 14 may also be used at either end of the flange cylinder for thermal insulation depending on the thermal protection requirements.

Optionally, referring to fig. 2, an end of the flange cylinder 10 away from the flange structure is provided with a mounting boss 102 extending radially toward the axial center, the quartz glass 14 is fixedly connected to the mounting boss 102, and the heat insulation filter 11 is disposed on a side of the quartz glass 14 away from the mounting boss 102.

Specifically, as shown in fig. 2, in one embodiment, a mounting boss 102 is provided at an end of the flange cylinder 10 away from the flange structure, and extends toward the axial center along the radial direction of the flange cylinder 10, and the mounting boss 102 may surround the inner wall of the flange cylinder 10 by one turn. The size of the quartz glass 14 may be the same as the size of the inner ring of the flange cylinder 10, so that when the quartz glass 14 is installed in the flange cylinder 10, the installation boss 102 may play an axial positioning blocking role to prevent the quartz glass 14 from slipping out and falling. Meanwhile, the heat insulating filter 11 may be stacked and fixed on the side of the quartz glass 14 away from the mounting boss 102. In this mounting structure, the silica glass 14 may serve as an outer-layer heat insulator, the heat-insulating filter 11 may serve as an inner-layer heat insulator, and the silica glass 14 may protect the heat-insulating filter 11. It is understood that the mounting positions of the two can be interchanged.

Optionally, referring to fig. 2, the connecting assembly further comprises a first sealing ring 15, wherein the first sealing ring 15 is disposed between the quartz glass 14 and the mounting boss 102.

Specifically, as shown in fig. 2, in one embodiment, in order to improve the sealing performance of the connection assembly, the connection assembly further includes a first sealing ring 15, the first sealing ring 15 may be an annular sealing ring made of a soft rubber material with certain heat resistance, and the first sealing ring 15 is disposed between the quartz glass 14 and the mounting boss 102 and seals a mounting gap between the quartz glass 14 and the mounting boss 102. Therefore, when the connecting assembly is connected with the furnace cover of the high-temperature furnace, the product defect caused by insufficient gas pressure in the furnace or impure gas purity in the furnace due to the defect of gas tightness can be avoided, and the improvement of the gas tightness is beneficial to improving the preparation quality of products when the high-temperature furnace is used.

Optionally, referring to fig. 2, a second cooling cavity 103 is formed between the inner wall and the outer wall of the mounting boss 102, and the second cooling cavity 103 is communicated with the first cooling cavity 101.

Specifically, as shown in fig. 2, in an embodiment, since the mounting boss 102 is a mounting structure formed by extending the flange barrel 10 inward, a second cooling cavity 103 may be formed between an inner wall and an outer wall of the mounting boss 102, and the second cooling cavity 103 is integrally communicated with the first cooling cavity 101, and a cooling medium in the first cooling cavity 101 may enter the second cooling cavity 103. With reference to the schematic diagram of fig. 2, the first sealing ring 15 contacts the mounting boss 102, so that the cooling medium enters the second cooling cavity 103 to cool the first sealing ring 15, which is beneficial to prolonging the service life of the first sealing ring 15 and improving the sealing performance.

Optionally, referring to fig. 2, the connection assembly further comprises a fixing ring 16 and a second sealing ring 17;

the fixing ring 16 is embedded in the accommodating cavity and fixedly connected with one end of the flange cylinder 10 far away from the flange structure, the quartz glass 14 is arranged between the mounting boss 102 and the fixing ring 16, and the second sealing ring 17 is arranged between the quartz glass 14 and the fixing ring 16;

a third cooling chamber 161 is formed between the inner wall and the outer wall of the fixing ring 16, and the third cooling chamber 161 is filled with a cooling medium.

Specifically, as shown in fig. 2, in an embodiment, the connection assembly may further include a fixing ring 16 and a second sealing ring 17, the fixing ring 16 may be a circular ring-shaped part and has a relatively thick thickness, two end surfaces of the fixing ring 16 are both recessed to form a groove, the groove of one end surface is used for being mounted and attached to the quartz glass 14, and the other groove is used for fixing the thermal insulation filter 11. With reference to the illustration of fig. 2, the fixing ring 16 can be fastened to the mounting boss 102 by screws, the quartz glass 14 is arranged between the mounting boss 102 and the fixing ring 16, and the fixing ring 16 and the mounting boss 102 clamp and fix the quartz glass 14. The second seal ring 17 is provided between the silica glass 14 and the fixed ring 16, and seals the mounting gap at that position. The material of the second seal ring 17 may be the same as that of the first seal ring 16, and will not be described herein.

In addition, a third cooling chamber 161 is formed between the inner wall and the outer wall of the fixing ring 16 for a hollow structure, and the third cooling chamber 161 is used for filling a cooling medium. In combination with the illustration, the second seal ring 17 contacts the fixing ring 16, and the cooling medium in the third cooling cavity 161 can cool down the second seal ring 17, which is beneficial to prolonging the service life of the second seal ring 17 and improving the sealing performance.

Alternatively, referring to fig. 2, an end of the fixing ring 16 away from the quartz glass 14 is provided with a caulking groove, and the heat insulation filter 11 is fixed in the caulking groove.

Specifically, as shown in fig. 2, in one embodiment, an end surface of the fixing ring 16, which is away from the quartz glass 14, is recessed in the axial direction to form a stepped recess, and the heat insulating filter 11 may be fixed in the recess by interference fit or adhesion, so that the heat insulating filter 11 is reliably fixed.

Optionally, referring to fig. 3, the connection assembly further comprises a third joint 18 and a fourth joint 19;

the third joint 18 and the fourth joint 19 are both in communication with the third cooling chamber 161, the third joint 18 is used for introducing the cooling medium, and the fourth joint 19 is used for discharging the cooling medium.

Specifically, as shown in fig. 3, in one embodiment, when the cooling medium is a fluid, the connecting assembly may further include a third joint 18 and a fourth joint 19 in order to improve cooling efficiency in the fixing ring 16. The third joint 18 and the fourth joint 19 are both in communication with the third cooling chamber 161. The two joints are communicated with a container for storing cooling medium outside the high-temperature furnace through a pipeline, a pumping device is arranged in the pipeline, the low-temperature cooling medium is led into the third cooling cavity 161 from one joint under the pressure action of the pumping device, and after heat absorption, the heated cooling medium is led out into the container from the other joint. Thereby recycling the cooling medium, improving the cooling efficiency and reducing the cooling cost. It should be noted that the pumping device and the container for supplying the cooling medium to the third cooling chamber 161 and the first cooling chamber 101 may be shared to reduce the equipment cost.

The embodiment of the utility model also provides an image acquisition device, the image acquisition device includes the image acquisition module and any one of the connecting components mentioned above;

Particularly, in practical application, the image acquisition module with the image acquisition function and the connecting assembly can be used in combination as a high-temperature-resistant image acquisition device. At least some image acquisition modules inlay in holding the intracavity among this kind of image acquisition device, the chamber that holds that has thermal-insulated cooling function can play the guard action to at least some image acquisition modules, the effective work of guarantee image acquisition function.

Optionally, the image capturing module includes an image capturing assembly, and the image capturing assembly is disposed in or outside the accommodating cavity.

Specifically, in an embodiment, the image capturing module may be implemented by an image capturing component, and the image capturing component may be a CCD (charge coupled device) component or a cmos (complementary metal oxide semiconductor) component, that is, a component for photoelectric conversion. This image acquisition subassembly can be installed and hold the intracavity or outside a flange section of thick bamboo 10, only need guarantee the camera lens optical axis of image acquisition subassembly and the axis coincidence of a flange section of thick bamboo 10 and the camera lens deviate from the flange structure can, when the image acquisition subassembly was installed in holding the intracavity, more be close to the thermal-insulated light filter 11 and the quartz glass 14 of tip, consequently, have more wide shooting field of vision, can shoot more comprehensive accurate information.

Optionally, the image acquisition module further comprises an external prism, and the external prism is arranged on one side of the light receiving surface of the image acquisition assembly;

the image acquisition assembly and the external prism are embedded in the accommodating cavity; or, the external prism is embedded in the accommodating cavity, and the image acquisition assembly is positioned outside the accommodating cavity.

Specifically, in an embodiment, the image capturing module further includes an external prism, and the external prism is a prism that refracts light. The external prism is arranged on one side of the illuminated surface of the image acquisition assembly, namely on the incident path of light, and the collection visual field of the image acquisition module can be enlarged under the refraction action of the external prism. It can be understood that the shape of the external prism and the optical structure can be enlarged as required to carry out the targeted design, and the utility model discloses the explanation is not repeated to this.

When the installation was used, both can all inlay image acquisition subassembly and external prism in holding the intracavity, when holding intracavity space limited or receive other factors to restrict, also can inlay external prism in holding the intracavity, be fixed in image acquisition subassembly outside holding the chamber to coordinate the installation of each part.

Referring to fig. 4 to 7, the embodiment of the present invention further provides a high temperature furnace, the high temperature furnace includes any one of the aforementioned image acquisition devices, the furnace cover 20 is provided with a viewing port, the flange cylinder 10 passes through the flange structure with the furnace cover 20 is connected, just the flange cylinder 10 passes through the viewing port stretches into to inside the high temperature furnace.

Specifically, as shown in fig. 4 and 5, when the image capturing device is used in a high temperature furnace, the image capturing device may be connected to the furnace cover 20 by bolts using a flange structure, and sealed by using a sealing ring, so as to facilitate subsequent disassembly and maintenance. Specifically, the furnace cover 20 is provided with an observation port communicating the inside and the outside of the high temperature furnace. In an installation structure, the outer surface of the position of the viewing port of the furnace cover 20 can be processed into an installation plane, and a flange cylinder 10 penetrates through the viewing port from outside to inside and is fastened by a flange structure through bolts. In another installation structure, the inner surface of the viewing port of the furnace cover 20 may be formed as an installation plane, and the flange structure of the flange cylinder 10 may be directly aligned with the installation plane and fastened by bolts. When the installation plane of the viewing port of the furnace cover 20 is inconvenient to process, a connecting member 30 having an installation plane may be welded at the position for fixing the flange cylinder 10, and the connecting member 30 may be an annular flange joint having an installation plane, as shown in fig. 6, and when the connecting member 30 is welded to the outer wall of the viewing port of the furnace cover 20 and the flange cylinder 10 is inserted into the furnace from the outside of the furnace cover 20, the connecting member supports the flange cylinder 10 at the viewing port position and a portion of the flange cylinder 10 is located in the furnace. When the flange cartridge 10 is installed by extending from the outside of the furnace cover 20 into the furnace as schematically shown in fig. 7, the flange cartridge 10 is suspended and fixed at the viewing port position by the connecting member 30 welded to the inner wall of the viewing port position of the furnace cover 20, and the flange cartridge 10 may be entirely located in the furnace. Since the pressure inside the furnace is lower than the pressure outside the furnace, the installation structure shown in fig. 6 or fig. 7 facilitates the tight connection and assembly of the flange cylinder 10 and the furnace cover 20 through the flange structure, and improves the airtightness of the high-temperature furnace. In addition, as shown in fig. 8, under the condition that the process and the cost allow, the flange structure and the connecting member 30 at the end of the flange cylinder 10 may be omitted, the cylinder body of the flange cylinder 10 may be directly welded to the viewing port of the furnace cover 20, or the flange cylinder 10 may be processed at one time when the furnace cover 20 is manufactured, that is, the flange cylinder 10 and the furnace cover 20 are integrally manufactured. Thus, the assembly gap between the flange cylinder 10 and the furnace cover 20 can be eliminated, and the airtightness of the high-temperature furnace can be improved.

Therefore, the high-temperature furnace can meet the task requirement of image acquisition in a high-temperature environment due to the adoption of the image acquisition device. The high-temperature furnace can provide processing equipment with a high-temperature working environment for a single crystal furnace, a sapphire furnace, a silicon carbide crystal growth furnace and the like. For example, when the high-temperature furnace is a single crystal furnace, the image acquisition device on the high-temperature furnace can acquire images from the furnace, so that the growth quality of the silicon rod can be measured more accurately.

Optionally, referring to fig. 4, the high temperature furnace is a single crystal furnace, the high temperature furnace further includes a heat exchanger 21, a first included angle α 1 is formed between a radiation surface of the heat exchanger 21 and an axis of the furnace cover 20,

a second included angle alpha 2 is formed between the axis of the flange cylinder 10 and the axis of the furnace cover 20, and the second included angle alpha 2 is not more than the first included angle alpha 1.

Specifically, as illustrated in fig. 4, when the high temperature furnace is a single crystal furnace, a heat exchanger 21 may be installed in the single crystal furnace to improve the heat convection efficiency of the thermal field in the furnace, and the heat exchanger 21 has a structure having a conical radiation surface and is located below the furnace cover 20. The radiation surface of the heat exchanger 21 forms a first included angle alpha 1 with the axis of the furnace cover 20, and the axis of the flange cylinder 10 forms a second included angle alpha 2 with the axis of the furnace cover 20. When the fixed flange cylinder 10 is installed, the second included angle alpha 2 can be controlled not to exceed the first included angle alpha 1, the shielding of the view field caused by the heat exchanger 21 is avoided, and the image acquisition device can have a wider view field. That is, when the flange cylinder 10 is installed closer to the axis of the furnace cover 20, the image pickup device is photographed downward closer to the front view, and has a wide field of view. Illustratively, when the first included angle α 1 is 15 °, the second included angle α 2 is less than or equal to 15 °, and when actually installed, the included angle α 2 may be selected to be smaller than 10 °, 6 °, and the like, so as to provide a wide field of view.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

While the embodiments of the present invention have been described with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many modifications may be made by one skilled in the art without departing from the spirit and scope of the present invention as defined in the appended claims.

Claims

1. A connecting assembly is used for connecting an image acquisition module and a furnace cover of a high-temperature furnace, and is characterized by comprising a flange cylinder;

a first cooling cavity is formed between the inner wall and the outer wall of the flange cylinder and used for filling cooling media.

2. The connection assembly according to claim 1, further comprising a heat-insulating filter secured to an end of the flange cartridge remote from the flange structure.

3. The connection assembly according to claim 1, further comprising a first joint and a second joint;

at least one of the first joint and the second joint is connected to the inner wall or the outer wall, and the first joint and the second joint are both communicated with the first cooling cavity;

the first joint is used for leading in the cooling medium, and the second joint is used for leading out the cooling medium.

4. The connection assembly according to claim 2, wherein the connection assembly further comprises quartz glass;

the quartz glass and the heat insulation filter are arranged at one end, far away from the flange structure, of the flange cylinder in a laminated mode.

5. The connecting assembly according to claim 4, wherein a mounting boss is radially arranged at one end of the flange barrel away from the flange structure and extends towards the axial center, the quartz glass is fixedly connected with the mounting boss, and the heat-insulating filter is arranged at one side of the quartz glass away from the mounting boss.

6. The connection assembly according to claim 5, further comprising a first sealing ring disposed between the quartz glass and the mounting boss.

7. The connection assembly according to claim 6, wherein a second cooling cavity is formed between the inner wall and the outer wall of the mounting boss, the second cooling cavity being in communication with the first cooling cavity.

8. The connection assembly of claim 7, further comprising a retaining ring and a second seal ring;

the fixing ring is embedded in the accommodating cavity and fixedly connected with one end, far away from the flange structure, of the flange cylinder, the quartz glass is arranged between the mounting boss and the fixing ring, and the second sealing ring is arranged between the quartz glass and the fixing ring;

and a third cooling cavity is formed between the inner wall and the outer wall of the fixing ring and is used for filling cooling media.

9. The connection assembly according to claim 8, wherein one end of the fixing ring away from the quartz glass is provided with a caulking groove, and the heat-insulating filter is fixed in the caulking groove.

10. The connection assembly according to claim 8, further comprising a third joint and a fourth joint;

the third joint and the fourth joint are both communicated with the third cooling cavity, the third joint is used for leading in the cooling medium, and the fourth joint is used for leading out the cooling medium.

11. An image acquisition device, characterized in that it comprises an image acquisition module and a connection assembly according to any one of claims 1 to 10;

12. The image capturing device of claim 11, wherein the image capturing module includes an image capturing assembly disposed within or outside the receiving cavity.

13. The image acquisition device according to claim 12, wherein the image acquisition module further comprises an external prism, and the external prism is arranged on one side of the light receiving surface of the image acquisition assembly;

14. A high temperature furnace comprising the image capturing device as set forth in any one of claims 11 to 13, wherein the furnace cover is provided with a viewing port, the flange cylinder is connected to the furnace cover through the flange structure, and the flange cylinder extends into the high temperature furnace through the viewing port.

15. The high-temperature furnace according to claim 14, wherein the high-temperature furnace is a single crystal furnace, the high-temperature furnace further comprises a heat exchanger, a first included angle is formed between a radiation surface of the heat exchanger and an axis of the furnace cover, a second included angle is formed between an axis of the flange cylinder and an axis of the furnace cover, and the second included angle is not larger than the first included angle.