CN217378099U

CN217378099U - Heating device of MOCVD reaction chamber

Info

Publication number: CN217378099U
Application number: CN202123345641.5U
Authority: CN
Inventors: 谈逊; 谈谦; 刘宁波; 刘才; 吴曦; 王占玲
Original assignee: Huaxia Semiconductor Shenzhen Co ltd
Current assignee: Huaxia Semiconductor Ningbo Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-09-06
Anticipated expiration: 2031-12-28

Abstract

The utility model discloses a heating device of MOCVD reaction chamber, including a plurality of cartridge heaters, it is a plurality of heating cylinder's inside is all installed the heating column core, is located two at the edge all be equipped with on the heating column core and connect the electricity piece, two connect the equal fixedly connected with clamp plate in electricity piece side, two be equipped with fastening bolt, adjacent two between the clamp plate be connected through coupling assembling between the cartridge heater. The utility model discloses make heating device can be applicable to the thing of waiting to heat of different shapes, avoid appearing heating device can't take place with the condition of waiting to heat thing surface laminating, guarantee to the heating effect of waiting to heat the thing, avoid the heating in-process to wait to heat the thing local high that is heated.

Description

Heating device of MOCVD reaction chamber

Technical Field

The utility model relates to a MOCVD technical field especially relates to a heating device of MOCVD reaction chamber.

Background

MOCVD is a new vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth (VPE).

Chinese utility model patent publication No. CN 215103543U: an MOCVD heating assembly comprising: the heating piece comprises a heating part and two connecting parts, the two connecting parts are respectively connected to two ends of the heating part, and the connecting parts and the heating part are in smooth transition; the two electrode pins are respectively connected with the two connecting parts, so that a local temperature accumulation region of the heating sheet is avoided, the heating efficiency is improved, and the service life of the heating sheet is prolonged.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a heating device of an MOCVD reaction chamber.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a heating device of MOCVD reaction chamber, includes a plurality of cartridge heaters, and is a plurality of heating cylinder's inside is all installed the heating column core, is located two at the edge all be equipped with on the heating column core and connect the electricity piece, two connect the equal fixedly connected with clamp plate in electricity piece side, two be equipped with fastening bolt between the clamp plate, adjacent two be connected through coupling assembling between the cartridge heater.

As a preferred technical scheme of the utility model, coupling assembling includes two conducting rings, conducting strip, connecting plate, two recesses and two connecting screws, two the conducting ring is fixed connection respectively at the both ends of conducting strip bottom surface, the connecting plate is installed on the conducting strip, two the recess is seted up respectively on the top of two heating post cores, two the conducting ring difference joint is in two recesses, and the inner face of two recesses has all seted up the thread groove, two connecting screw all passes connecting plate and conducting strip to the screw thread cup joints in two conducting rings.

As an optimized technical scheme of the utility model, the outer fringe of conducting ring is laminated with the inner face of recess mutually.

As an optimized technical scheme of the utility model, two the clamp plate is made by insulating material.

As an optimized technical proposal of the utility model, the outer edge of the heating column core is attached to the inner surface of the heating cylinder.

As a preferred technical scheme of the utility model, all seted up on conducting ring and the connecting plate and avoided the mouth with two connecting screw looks adaptations.

The utility model discloses a set up a plurality of heating barrels, the staff can adjust the quantity of heating barrels according to the diameter of waiting to heat the thing, establish a plurality of heating barrel covers in the outer fringe of waiting to heat the thing after that for a plurality of heating barrels are laminated with the surface of waiting to heat the thing mutually, make heating device can be applicable to waiting of different shapes heat the thing, avoid appearing heating device can't take place with the condition of waiting to heat the thing surface laminating, guarantee to the heating effect of waiting to heat the thing, avoid in the heating process to wait to heat the thing local high that is heated.

Drawings

Fig. 1 is a schematic structural diagram of a heating device of an MOCVD reaction chamber according to the present invention;

fig. 2 is an enlarged view of a structure at a position a of the heating device of the MOCVD reactor;

fig. 3 is a schematic structural diagram of the connection between two adjacent heating barrels in the heating apparatus of the MOCVD reaction chamber according to the present invention;

fig. 4 is an enlarged view of a structure at a position B of the heating device of the MOCVD reaction chamber.

In the figure: 1 heating cylinder, 2 heating column core, 3 electric connecting block, 4 pressing plate, 5 fastening bolt, 6 connecting component, 61 conductive ring, 62 conductive sheet, 63 connecting plate, 64 groove and 65 connecting screw.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-4, a heating device of MOCVD reaction chamber, including a plurality of heating barrels 1, heating post core 2 is all installed to the inside of a plurality of heating barrels 1, the specific theory of operation of heating post core 2 is mature prior art, not shown in the figure, do not do too much and describe here, it connects electric block 3 all to be equipped with on two heating post cores 2 that are located the edge, connect electric block 3 equal fixedly connected with clamp plate 4 in side for two, be equipped with fastening bolt 5 between two clamp plates 4, be connected through coupling assembling 6 between two adjacent heating barrels 1.

Referring to fig. 3-4, the connection assembly 6 includes two conductive rings 61, a conductive sheet 62, a connection plate 63, two grooves 64 and two connection screws 65, the two conductive rings 61 are respectively and fixedly connected to two ends of the bottom surface of the conductive sheet 62, the connection plate 63 is installed on the conductive sheet 62, the two grooves 64 are respectively opened on the top ends of the two heating column cores 2, the two conductive rings 61 are respectively connected in the two grooves 64 in a clamping manner, thread grooves are respectively opened on the inner surfaces of the two grooves 64, the two connection screws 65 all penetrate through the connection plate 63 and the conductive sheet 62, and are sleeved in the two conductive rings 61 in a threaded manner, by setting the connection assembly 6, the heating cylinder 1 is convenient to disassemble and assemble.

Referring to fig. 3, the outer edge of the conductive ring 61 is attached to the inner surface of the groove 64, so as to ensure the stability of the circuit formed by the heating cores 2.

Referring to fig. 2, both the pressing plates 4 are made of an insulating material, and particularly, both the pressing plates 4 may be made of a rubber material.

Referring to fig. 3, the outer edge of the heating column core 2 is attached to the inner surface of the heating cylinder 1, so that the heating effect of the heating column core 2 on the heating cylinder 1 can be ensured.

Referring to fig. 3, the conductive ring 61 and the connecting plate 63 are both provided with an avoiding opening matched with the two connecting screws 65.

The utility model discloses a concrete theory of operation as follows:

use the utility model provides a during heating device, the staff can adjust the quantity of cartridge heater 1 according to the diameter of waiting to heat the thing, establish the outer fringe of waiting to heat the thing to a plurality of cartridge heaters 1 cover after that, make a plurality of cartridge heaters 1 laminate mutually with the surface of waiting to heat the thing, then, to two electricity connection piece 3 circular telegrams, under the conductive action of a plurality of conducting strips 62 and a plurality of conducting ring 61, a plurality of heating post cores 2 can heat cartridge heater 1, make a plurality of cartridge heaters 1 can evenly treat heat the thing and carry out the even heating, when dismouting cartridge heater 1, the staff can use the screwdriver to dismantle two connecting screw 65, can demolish cartridge heater 1, the equipment principle of a plurality of cartridge heaters 1 is roughly the same with the principle of wrist-watch chain.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a heating device of MOCVD reaction chamber, its characterized in that, includes a plurality of cartridge heaters (1), and is a plurality of heating column core (2) are all installed to the inside of cartridge heater (1), are located two on the edge all be equipped with on heating column core (2) and connect electric block (3), two connect the equal fixedly connected with clamp plate (4) in electric block (3) side, two be equipped with fastening bolt (5), adjacent two be connected through coupling assembling (6) between cartridge heater (1).

2. The heating device of the MOCVD reaction chamber, according to claim 1, characterized in that the connecting assembly (6) comprises two conducting rings (61), conducting strips (62), a connecting plate (63), two grooves (64) and two connecting screws (65), the two conducting rings (61) are respectively fixedly connected to two ends of the bottom surface of the conducting strips (62), the connecting plate (63) is installed on the conducting strips (62), the two grooves (64) are respectively formed at the top ends of the two heating column cores (2), the two conducting rings (61) are respectively clamped in the two grooves (64), thread grooves are formed in the inner surfaces of the two grooves (64), and the two connecting screws (65) respectively penetrate through the connecting plate (63) and the conducting strips (62) and are in thread sleeve connection with the two conducting rings (61).

3. The MOCVD reactor heating device according to claim 2, wherein the outer edge of the conductive ring (61) is fitted to the inner surface of the groove (64).

4. The heating device for an MOCVD reactor according to claim 1, wherein both of the platens (4) are made of an insulating material.

5. The MOCVD reactor heating device according to claim 1, wherein the outer edge of the heating core (2) is in contact with the inner surface of the heating cylinder (1).

6. The heating device of the MOCVD reaction chamber according to claim 2, wherein the conductive ring (61) and the connecting plate (63) are respectively provided with an avoidance opening matched with the two connecting screws (65).