CN217359678U - High-applicability X-RAY detection equipment for 2.5D imaging - Google Patents

Abstract

The utility model discloses a 2.5D imaging high-applicability X-RAY detection device, which comprises a machine body, an X-RAY source, a receiving device, an objective table, a refining mechanism, a first movable plate and a second movable plate, wherein the X-RAY source and the receiving device can rotate in a detection chamber on the machine body, the objective table is horizontally arranged and can be used for placing detected objects, the X-RAY source is arranged below the objective table and can emit X-RAYs which can penetrate the objects on the objective table, and the receiving device is arranged above the objective table and can receive the X-RAYs emitted by the X-RAY source to form an image with gray level difference; the first movable plate can move along the length direction of the machine body, the objective table can rotate on the second movable plate, the material homogenizing mechanism can drive the objective table to rotate on the second movable plate so as to drive the detected object to rotate synchronously, and the second movable plate can drive the objective table to move along the width direction of the machine body. The utility model discloses can detect the different positions of article and can prevent that the colloidal liquid in the article from piling up, it is high to detect precision and suitability.

Description

High-applicability X-RAY detection equipment for 2.5D imaging

Technical Field

The utility model relates to a check out test set especially relates to a high suitability X-RAY check out test set of 2.5D formation of image.

Background

The working principle of the X-RAY detection system is that an X-RAY source emits X-RAYs, the X-RAYs with attenuated intensity are received on a detector or an image intensifier after penetrating through an object to be detected, and an image with gray difference is formed. Therefore, whether the performance index of the detected object meets the requirement or not is judged according to the image.

The current methods for square imaging of weld hole defects include 3D imaging (i.e., CT imaging), 2.5D imaging, and 2D imaging. 3D imaging equipment has extremely high manufacturing cost and low market popularization rate; 2D imaging can only describe image information of a certain fault direction, and is not intuitive enough; 2.5D imaging is an imaging method between 3D imaging and 2D imaging, the equipment cost is close to that of 2D imaging equipment, and images are more visual and stereoscopic than 2D imaging, so that the 2.5D imaging equipment is widely applied.

When different positions of a detected article are detected, colloidal liquid in the detected article which is horizontally placed is easy to accumulate at one position, and the detection precision is influenced.

SUMMERY OF THE UTILITY MODEL

In order to overcome the deficiency of the prior art, the utility model aims to provide a high suitability X-RAY check out test set of 2.5D formation of image is when realizing 2.5D formation of image, detects and can prevent that the level that is placed from being piled up by the colloidal liquid in it by the article to the different positions that are detected article, is favorable to improving detection precision and suitability.

The purpose of the utility model is realized by adopting the following technical scheme:

a high-applicability X-RAY detection device for 2.5D imaging, comprising:

the X-ray detector comprises a machine body, an X-ray source, a receiving device and an object stage, wherein a detection chamber is formed in the machine body, the X-ray source and the receiving device are arranged in the detection chamber and are rotatably connected with the machine body, the object stage is horizontally arranged and used for placing a detected object, the X-ray source is arranged below the object stage and used for emitting X-rays capable of penetrating through the object on the object stage, and the receiving device is arranged above the object stage and used for receiving the X-rays emitted by the X-ray source to form an image with gray difference;

refining mechanism, first fly leaf and second fly leaf, the length direction that the fuselage can be followed to first fly leaf removes, the rotatable setting of objective table is on the second fly leaf, refining mechanism is used for ordering about the objective table rotates in order to drive the synchronous rotation of the article that is detected on the second fly leaf and prevents the colloidal liquid in the article that is detected and pile up, the width direction removal that the second fly leaf can follow first fly leaf and can drive the objective table and remove along the width direction of fuselage.

Further, the refining mechanism is meshed with the object stage.

Further, refining mechanism includes hold-in range, gear and refining drive arrangement, the direction of rotation that the hold-in range wound the objective table is arranged, the gear is connected with the hold-in range meshing, refining drive arrangement is used for ordering about gear revolve and drives the hold-in range and rotate so that the objective table rotates on the second fly leaf.

The X-ray source and the receiving device are driven to synchronously rotate by the rotating mechanism; the receiving device is movably arranged on the rotating mechanism and can move along the height direction of the machine body to be close to or far away from the object stage, and the first locking device is used for limiting the movement of the receiving device; the X-ray source is movably arranged on the rotating mechanism and can move along the height direction of the machine body to be close to or far away from the objective table, and the second locking device is used for limiting the movement of the X-ray source.

Furthermore, the rotating mechanism comprises a swing arm and a rotating driving device, the X-ray source and the receiving device are rotatably arranged on the machine body through the swing arm, and the rotating driving device is used for driving the swing arm to rotate so as to enable the X-ray source and the receiving device to synchronously rotate.

Further, the rotation driving device comprises a first guide rail, a second guide rail, a screw rod, a nut and a rotation driving part, wherein the first guide rail is arranged on the machine body and is arranged along the length direction of the machine body, the second guide rail is arranged on the swing arm and is arranged along the height direction of the machine body, the screw rod is rotatably arranged on the machine body and is parallel to the first guide rail, the nut is sleeved on the screw rod, the nut is respectively connected with the first guide rail and the second guide rail in a sliding manner, and the rotation driving part is used for driving the screw rod to rotate so that the nut can move on the screw rod and slide on the first guide rail and the second guide rail.

Further, still include the third guide rail, the third guide rail is arranged along the length direction of fuselage, the first fly leaf can slide on the third guide rail.

Further, the first translation driving device is further included and is used for driving the first movable plate to slide on the third guide rail.

Further, the movable plate is provided with a fourth guide rail arranged along the width direction of the first movable plate, and the second movable plate can slide on the fourth guide rail.

Further, the second movable plate is driven to slide on the fourth guide rail by the second translation driving device.

Compared with the prior art, the beneficial effects of the utility model reside in that:

an X-ray source in the detection chamber emits X-rays to penetrate through the object on the object stage, and a receiving device receives the X-rays emitted by the X-ray source and forms an image with gray difference so as to effectively detect the object according to the image. Through setting up first fly leaf and second fly leaf, make the objective table can follow the length and the width direction removal of fuselage for the X ray source can be to the different region emission X ray of article, even the X ray can pierce through the different regions of article, can do benefit to and effectively detect the different regions of article. Through setting up refining mechanism, make the objective table level rotate in order to drive the synchronous rotation of the article that are detected and prevent the colloidal liquid in the article that are detected and pile up to be favorable to improving and detect precision and suitability.

Drawings

FIG. 1 is a schematic structural diagram of a 2.5D imaging high-applicability X-RAY detection device according to the present invention;

FIG. 2 is a schematic diagram of a partial structure of a 2.5D imaging high-applicability X-RAY detection device according to the present invention;

FIG. 3 is a schematic view of a portion of the structure of FIG. 2;

FIG. 4 is a schematic diagram of the internal top view structure of the high-applicability X-RAY inspection apparatus for 2.5D imaging according to the present invention;

FIG. 5 is a schematic structural diagram of a rotating mechanism of the high-applicability X-RAY detecting device for 2.5D imaging according to the present invention;

fig. 6 is a schematic structural diagram of the swing arm of the high-applicability X-RAY detection device for 2.5D imaging in the present invention.

In the figure: 1. a body; 2. an X-ray source; 3. a receiving device; 4. an object stage; 5. a first movable plate; 6. a second movable plate; 7. a synchronous belt; 8. a gear; 9. a refining drive device; 10. swinging arms; 11. a bearing seat; 12. a first guide rail; 13. a second guide rail; 14. a rotation driving member; 15. a third guide rail; 16. a first translation screw rod; 17. a first translation drive member; 18. a fourth guide rail; 19. a second translation screw rod; 20. a second translation drive member; 21. a first slider; 22. a second slider; 23. a first elevation drive device; 24. a second elevation drive device; 25. a fifth guide rail; 26. a sixth guide rail; 27. sliding the door; 28. operating a keyboard; 29. an equipment button; 30. a display; 31. a camera is provided.

Detailed Description

This section will describe in detail the embodiments of the present invention, preferred embodiments of the present invention are shown in the attached drawings, which are used to supplement the description of the text part of the specification with figures, so that one can intuitively and vividly understand each technical feature and the whole technical solution of the present invention, but they cannot be understood as the limitation of the protection scope of the present invention.

In the description of the present invention, it should be understood that the directional descriptions, such as the directions or positional relationships indicated by upper, lower, front, rear, left, right, etc., are based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but not for indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention.

In the description of the present invention, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the meaning of more than, less than, exceeding, etc. is understood as excluding the number, and the meaning of more than, less than, or the like is understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

Referring to fig. 1 to 6, the preferred embodiment of the present invention provides a 2.5D imaging high-applicability X-RAY inspection apparatus, which can be widely applied to SMT, chip, battery and other industries, and the inspection apparatus has BGA detection module and bubble measurement module functions, and can perform good identification and judgment, and plays a crucial role in inspecting the welding quality, and can accurately determine good products and defective products.

The detection device comprises a machine body 1, an X-ray source 2, a receiving device 3 and an object stage 4, a detection chamber is formed in the machine body 1, the X-ray source 2 and the receiving device 3 are arranged in the detection chamber and are rotatably connected with the machine body 1, the object stage 4 is horizontally arranged and used for placing an object to be detected, the X-ray source 2 is arranged below the object stage 4 and is used for emitting X rays capable of penetrating the object on the object stage 4, and the receiving device 3 is arranged above the object stage 4 and is used for receiving the X rays emitted by the X-ray source 2 to form an image with gray level difference.

In addition, the detection device further comprises a material homogenizing mechanism, a first movable plate 5 and a second movable plate 6, the first movable plate 5 can move along the length direction of the machine body 1, the object stage 4 is rotatably arranged on the second movable plate 6, the material homogenizing mechanism is used for driving the object stage 4 to rotate on the second movable plate 6 so as to drive the detected object to synchronously rotate and prevent colloidal liquid in the detected object from accumulating, and the second movable plate 6 can move along the width direction of the first movable plate 5 and can drive the object stage 4 to move along the width direction of the machine body 1.

On the basis of the structure, the X-ray source 2 in the detection chamber emits X-rays to penetrate through the object on the object stage 4, the receiving device 3 receives the X-rays emitted by the X-ray source 2 and forms an image with gray difference, and 2.5D imaging is realized, so that the object can be effectively detected according to the image. Through setting up first movable plate 5 and second movable plate 6, make objective table 4 can move along the length and the width direction of fuselage 1 for X ray source 2 can be to the different region emission X ray of article, even X ray can pierce through the different region of article, can do benefit to and carry out effective detection to the different region of article. Through setting up the refining mechanism, make objective table 4 horizontal rotation rotate in order to drive the synchronous rotation of the article that are detected and prevent the colloidal liquid in the article that are detected and pile up. Thereby being beneficial to improving the detection precision and the applicability of the detection equipment.

As a preferred embodiment of the present invention, it may also have the following additional technical features:

in this embodiment, the receiving device 3 is a detector, and can effectively receive the X-ray with attenuated intensity after penetrating through the detected object and form an image with gray scale difference, so as to determine whether the performance index of the detected object meets the requirement according to the image. Specifically, the detector is provided with a camera 31 for shooting.

In other embodiments, the receiving device 3 is an image intensifier.

In this embodiment, the second movable plate 6 is provided with a mounting hole, and the object stage 4 is mounted in the mounting hole of the second movable plate 6 through a bearing, which is beneficial to realize effective rotation of the object stage 4 on the second movable plate 6.

In this embodiment, the refining mechanism is engaged with the object stage 4, and the transmission structure is simple, so that the transmission between the refining mechanism and the object stage 4 is convenient.

In this embodiment, the refining mechanism includes a synchronous belt 7, a gear 8 and a refining driving device 9, the synchronous belt 7 is arranged around the rotation direction of the objective table 4, the gear 8 is meshed with the synchronous belt 7, and the refining driving device 9 is configured to drive the gear 8 to rotate so as to drive the synchronous belt 7 to rotate, so that the objective table 4 rotates stably on the second movable plate 6, and the refining mechanism has a simple structure and a low cost.

Specifically, the timing belt 7 and the gear 8 of the present embodiment are provided with teeth, and are engaged with each other by the respective teeth to achieve effective rotation of the stage 4.

In this embodiment, the refining driving device 9 is a motor, and can drive the gear 8 to rotate effectively, so that the refining mechanism has a simple structure and low cost. In other embodiments, the refining drive 9 may be a cylinder, or the like.

More specifically, the object stage 4 of the present embodiment is circular, and the synchronous belt 7 is disposed around the outer circle of the object stage 4, so as to facilitate circumferential rotation of the object stage 4.

In other embodiments, the objective table 4 is square, the refining mechanism includes a synchronous belt 7, a rack and a refining driving device 9, the synchronous belt 7 is disposed on a side surface of the objective table 4, the rack is meshed with the synchronous belt 7, the refining driving device 9 drives the rack to move linearly to drive the synchronous belt 7 and the objective table 4 to rotate on the second movable plate 6, and further the rotation of the objective table 4 is realized. Further, refining drive arrangement 9 can order about the rack and be reciprocating linear motion, drives hold-in range 7 promptly and realizes clockwise and anticlockwise two-way rotation on second fly leaf 6 to make objective table 4 two-way rotation, be favorable to further increasing its flow efficiency of the colloidal liquid in the article that is detected, can more effectively prevent the colloidal liquid in the article that is detected and pile up.

The better embodiment is that synchronous belt 7 and objective table 4 in this embodiment pass through adhesive connection, are favorable to improving synchronous belt 7 and objective table 4 between connection structure's stability, and the connected mode is comparatively simple, the preparation of being convenient for.

In other embodiments, the synchronous belt 7 and the stage 4 may also be integrally formed, or may be connected and fixed by using a fastening, a thread, a welding, or other connection methods.

In this embodiment, the detection apparatus further includes a rotating mechanism, an unlockable first locking device, and an unlockable second locking device, where the rotating mechanism is configured to drive the X-ray source 2 and the receiving device 3 to rotate synchronously; the receiving device 3 is movably arranged on the rotating mechanism and can move along the height direction of the machine body 1 to be close to or far away from the object stage 4, and the first locking device is used for limiting the movement of the receiving device 3; the X-ray source 2 is movably arranged on the rotating mechanism and can move along the height direction of the machine body 1 to be close to or far away from the object stage 4, and the second locking device is used for limiting the movement of the X-ray source 2.

In this way, by moving the receiving device 3 and the X-ray source 2 along the height direction of the body 1, the distances between the receiving device 3 and the X-ray source 2 and the stage 4 can be adjusted, and the upper and lower positions of the receiving device 3 and the X-ray source 2 can be locked by the first locking device and the second locking device, respectively, so that the magnification factor can be adjusted effectively. The X-ray source 2 and the receiving device 3 are driven to synchronously rotate through the rotating mechanism, even if the X-ray source 2 and the receiving device 3 rotate around the same rotating center, the 2.5D imaging algorithm can be simpler, and the improvement of the detection efficiency and the reduction of the equipment cost are facilitated.

In this embodiment, the rotating mechanism includes a swing arm 10 and a rotation driving device, the X-ray source 2 and the receiving device 3 are rotatably disposed on the body 1 through the swing arm 10, and the rotation driving device is used for driving the swing arm 10 to rotate so as to enable the X-ray source 2 and the receiving device 3 to rotate synchronously, thereby simplifying the structure of the rotating mechanism, enabling the X-ray source 2 and the receiving device 3 to rotate around the same rotation center, simplifying the 2.5D imaging algorithm, and being beneficial to improving the detection efficiency and reducing the equipment cost.

In the present embodiment, the swing arm 10 is rotatably disposed on the body 1 through the bearing seat 11, which facilitates the effective rotation of the swing arm 10, thereby facilitating the synchronous rotation of the X-ray source 2 and the receiving device 3.

In this embodiment, the rotation driving device includes a first guide rail 12, a second guide rail 13, a lead screw, a nut, and a rotation driving component 14, the first guide rail 12 is disposed on the body 1 and is arranged along the length direction of the body 1, the second guide rail 13 is disposed on the swing arm 10 and is arranged along the height direction of the body 1, the lead screw is rotatably disposed on the body 1 and is parallel to the first guide rail 12, the nut is sleeved on the lead screw, the nut is slidably connected to the first guide rail 12 and the second guide rail 13, respectively, and the rotation driving component 14 is configured to drive the lead screw to rotate so that the nut can move on the lead screw and slide on the first guide rail 12 and the second guide rail 13, so that the linear motion of the nut can drive the rotation of the swing arm 10. So arrange for rotation drive arrangement's simple structure, the operation is more steady, reliable, makes X ray source 2 and receiving arrangement 3 can be better rotate around same rotation center, makes 2.5D imaging algorithm simpler, is favorable to improving detection efficiency and reduction equipment cost.

In this embodiment, the ball screw is composed of the screw rod and the nut, which is advantageous for improving the efficiency of the linear motion so that the swing arm 10 can realize the stable rotation.

In this embodiment, the rotation driving part 14 is a motor, which can simplify the structure of the rotation mechanism and is beneficial to reducing the equipment cost.

In other embodiments, the rotational drive member 14 is a pneumatic cylinder or an oil cylinder, etc.

In this embodiment, the nut slides on the first guide rail 12 through the first slider 21, and the nut slides on the second guide rail 13 through the second slider 22, which facilitates the effective sliding of the nut on the first guide rail 12 and the second guide rail 13, respectively, so that the swing arm 10 can be driven to rotate smoothly during the sliding process.

In other embodiments, the rotating mechanism is a motor, a cylinder, or the like, which can directly drive the X-ray source 2 and the receiving device 3 to rotate.

In specific implementation, the movement of the object stage 4 on the body 1 can be driven by manually applying external force, so that the structure of the detection device is simpler.

In this embodiment, the detection apparatus further includes a third guide rail 15, the third guide rail 15 is disposed along the length direction of the body 1, the first movable plate 5 can slide on the third guide rail 15, the third guide rail 15 provides a better guiding effect for the movement of the first movable plate 5, and the first movable plate 5 drives the second movable plate 6 and the object stage 4 to slide on the third guide rail 15, so that the position of the object stage 4 in the length direction of the body 1 can be effectively adjusted, and effective detection of different regions of an object is facilitated. Specifically, the first flap 5 slides on the third rail 15 through the third slider, facilitating to improve the sliding efficiency of the first flap 5.

In this embodiment, the detecting apparatus further includes a first translation driving device, and the first translation driving device is configured to drive the first movable plate 5 to slide on the third guide rail 15, which is beneficial to improving the automation degree of the detecting apparatus.

Specifically, the first translation driving device in this embodiment includes a first translation screw 16 and a first translation driving part 17, the first translation screw 16 is disposed along the length direction of the body 1 and is connected to the first movable plate 5 through a first translation nut, and the first translation driving part 17 is configured to drive the first translation screw 16 to rotate so that the first translation nut drives the first movable plate 5 to slide on the third guide rail 15. More specifically, the first translation drive means 17 is a motor.

In other embodiments, the first translation driving device is a driving component such as a cylinder or an oil cylinder.

In the present embodiment, the detecting apparatus further includes a fourth guide rail 18, the fourth guide rail 18 is disposed along the width direction of the first flap 5, i.e., the width direction of the body 1, and the second flap 6 is slidable on the fourth guide rail 18. The fourth guide rail 18 provides a better guiding function for the movement of the object stage 4, and the second movable plate 6 drives the object stage 4 to slide on the fourth guide rail 18, so that the position of the object stage 4 in the width direction of the machine body 1 can be effectively adjusted, and effective detection on different regions of an object is facilitated. Specifically, the second flap 6 slides on the fourth rail 18 through the fourth slider, so as to improve the sliding efficiency of the second flap 6.

In this embodiment, the detecting apparatus further includes a second translation driving device, and the second translation driving device is used for driving the second movable plate 6 to slide on the fourth guide rail 18, which is beneficial to improving the degree of automation of the detecting apparatus.

Specifically, the second translational driving device in this embodiment includes a second translational screw rod 19 and a second translational driving part 20, the second translational screw rod 19 is disposed along the width direction of the first flap 5 and is connected to the second flap 6 through a second translational nut, and the second translational driving part 20 is configured to drive the second translational screw rod 19 to rotate so that the second translational nut drives the second flap 6 to slide on the fourth guiding rail 18. More specifically, the second translation drive component 20 is a motor.

In other embodiments, the second translation drive is a drive member such as a cylinder or an oil cylinder.

In specific implementation, the receiving device 3 and the X-ray source 2 can be driven to move along the height direction of the body 1 by manually applying an external force, and the up-and-down positions of the receiving device 3 and the X-ray source 2 are maintained by the first locking device and the second locking device respectively. Specifically, a first locking device and a second locking device can be movably connected with the rotating mechanism, and the first locking device and the second locking device are respectively contacted with the receiving device 3 and the X-ray source 2 to limit the movement of the receiving device 3 and the X-ray source 2. More specifically, a first locking device and a second locking device are respectively inserted into the swing arm 10, a plurality of insertion holes are formed in the swing arm 10 along the height direction of the machine body 1, the first locking device and the second locking device are both bolts, and the bolts are inserted into the corresponding insertion holes and can be in contact with the first locking device and the second locking device to limit the movement of the first locking device and the second locking device.

In this embodiment, the detecting apparatus further comprises a first lifting driving device 23, wherein the first lifting driving device 23 is used for driving the receiving device 3 to move along the height direction of the body 1 and can be used as a first locking device for maintaining the up-down position of the receiving device 3. Thus, the distance between the receiving device 3 and the object stage 4 can be effectively adjusted, namely the distance between the receiving device 3 and the object can be adjusted, and the amplification factor can be effectively adjusted.

Specifically, the first lifting driving device 23 is a motor, and is simple in structure and beneficial to reducing the equipment cost.

In other embodiments, the first elevation driving means 23 is a cylinder or an oil cylinder.

In a more preferred embodiment, the detecting apparatus further comprises a fifth guide rail 25, the fifth guide rail 25 is disposed along the height direction of the main body 1 and is connected with the rotating mechanism, and the receiving device 3 can slide on the fifth guide rail 25, so as to apply a better guiding function to the movement of the receiving device 3. Specifically, the fifth guide rail 25 is disposed on the swing arm 10 and is rotatable together with the swing arm 10, so that the swing arm 10 can drive the receiving device 3 to rotate together. The first elevation driving means 23 drives the receiving means 3 to slide on the fifth guide rail 25.

In this embodiment, the detecting apparatus further includes a second lifting driving device 24, and the second lifting driving device 24 is used for driving the X-ray source 2 to move along the height direction of the body 1 and can be used as a second locking device to maintain the up-and-down position of the X-ray source 2. Therefore, the distance between the X-ray source 2 and the object stage 4 can be effectively adjusted, namely the distance between the X-ray source 2 and an object can be adjusted, and the amplification factor can be effectively adjusted.

Specifically, the second lifting driving device 24 is a motor, and has a simple structure, which is beneficial to reducing the equipment cost.

In other embodiments, the second lift drive 24 is a pneumatic or hydraulic cylinder.

In a more preferred embodiment, the detecting apparatus further comprises a sixth guiding rail 26, the sixth guiding rail 26 is disposed along the height direction of the body 1 and connected with the rotating mechanism, and the X-ray source 2 can slide on the sixth guiding rail 26 to facilitate better guiding effect on the movement of the X-ray source 2. Specifically, the sixth guide rail 26 is disposed on the swing arm 10 and can rotate together with the swing arm 10, so that the swing arm 10 can drive the X-ray source 2 to rotate together. The second elevating drive 24 drives the X-ray source 2 to slide on the sixth guide rail 26.

In this embodiment, the fifth guide rail 25 and the sixth guide rail 26 are both linear modules, which can further improve the guiding efficiency.

In this embodiment, the body 1 is provided with a material inlet/outlet port mutually communicated with the detection chamber, so that the detected article can be conveniently placed on the object stage 4 in the detection chamber through the material inlet/outlet port or the detected article can be conveniently taken out through the material inlet/outlet port. Specifically, a sliding door 27 is slidably provided at the inlet/outlet port, so that the inlet/outlet port can be opened and closed, and radiation leakage can be prevented.

In this embodiment, the body 1 is a lead-shielded enclosure, and the X-ray source 2 and the receiving device 3 are disposed in the detection chamber, which is beneficial to prevent radiation leakage.

In the present embodiment, the main body 1 is provided with an operation keyboard 28 (including a mouse) for inputting instructions, device buttons 29 for controlling the device switches, a display 30 for displaying detection information, and a controller for receiving instructions.

In the present embodiment, the length, width and height directions of the body 1 correspond to the X-axis, Y-axis and Z-axis directions of a cartesian coordinate system, respectively. The stage 4 is linearly movable in the X-axis and the Y-axis in the horizontal plane by the first movable plate 5 and the second movable plate 6. The X-ray source 2 is positioned below the object stage 4 and can move linearly on a Z2 axis on a sixth guide rail 26; the detector is positioned above the stage 4 and is linearly movable on the fifth rail 25 about a Z1 axis. Linear movement of the stage 4 in the X-axis and Y-axis directions is used to detect different regions of the article and linear movement of the detector in the Z1 axis direction and the X-ray source 2 in the Z2 axis direction is used to adjust the magnification.

The fifth guide rail 25 and the sixth guide rail 26 are fixedly connected to the swing arm 10, and the swing arm 10 can rotate around the bearing seat 11 to perform R rotation so as to image different sections of the detected object, thereby realizing 2.5D detection.

In specific implementation, the X-ray source 2 is fixedly connected to the sixth guide rail 26, and the sixth guide rail 26 is fixedly connected to the swing arm 10; the detector is fixedly connected to the fifth guide rail 25, and the fifth guide rail 25 is fixedly connected to the swing arm 10; the swing arm 10 is rotatable about a bearing housing 11, and a bearing is mounted in the bearing housing 11. The swing arm 10 rotates by two first guide rails 12 and second guide rails 13 installed in a crossed manner, and the specific connection relationship is as follows: a second guide rail 13 (comprising a second sliding block 22) is fixedly connected to the swing arm 10; the second slide block 22 is fixedly connected to a nut of the ball screw; the ball screw is supported and fixed by screw rod bearing blocks 11 at two ends and is fixedly connected with a rotary driving part 14; the nut is fixedly connected on the first slide block 21 of the first guide rail 12; the first guide rail 12 is fixedly connected to the body 1. The nut is driven to move linearly by the rotation of the rotary driving part 14, and the swing arm 10 is pushed to rotate around the bearing seat 11.

The working process of the equipment is as follows: the material inlet/outlet is opened, the article is placed on the object stage 4, and the apparatus is started to operate. When the swing arm 10 is in the vertical station, the device performs 2D imaging. That is, the X-ray source 2 moves to a proper position along the sixth guide rail 26, the detector moves to a proper position along the fifth guide rail 25, and the object stage 4 moves linearly along the X-axis and the Y-axis in the horizontal plane, so as to complete the 2D imaging detection. When 2.5D imaging is needed, the swing arm 10 swings according to a certain step angle, a plurality of 2D images are taken, the plurality of 2D images are synthesized into an approximate 3D image by utilizing an algorithm, and 2.5D imaging is realized. When the area of the detected object to be detected is blocked by the colloidal liquid in the area, the object stage 4 is driven by the material homogenizing mechanism to drive the detected object to rotate in the horizontal direction so as to realize 2.5D imaging for making the image clear.

The above additional technical features can be freely combined and used in superposition by those skilled in the art without conflict.

The above is only the preferred embodiment of the present invention, as long as the technical solution of the purpose of the present invention is realized by the substantially same means, all belong to the protection scope of the present invention.

Claims (10)

1.2.5D imaging high-applicability X-RAY detection apparatus, comprising:

the device comprises a machine body (1), an X-ray source (2), a receiving device (3) and an object stage (4), wherein a detection chamber is formed in the machine body (1), the X-ray source (2) and the receiving device (3) are arranged in the detection chamber and rotatably connected with the machine body (1), the object stage (4) is horizontally arranged and used for placing a detected object, the X-ray source (2) is arranged below the object stage (4) and used for emitting X-rays capable of penetrating the object on the object stage (4), and the receiving device (3) is arranged above the object stage (4) and used for receiving the X-rays emitted by the X-ray source (2) to form an image with gray level difference;

refining mechanism, first fly leaf (5) and second fly leaf (6), the length direction that fuselage (1) can be followed in first fly leaf (5) removes, the rotatable setting of objective table (4) is on second fly leaf (6), refining mechanism is used for ordering about objective table (4) rotate in order to drive the synchronous rotation of the article that is detected and prevent the colloidal liquid in the article that are detected and pile up on second fly leaf (6), second fly leaf (6) can be followed the width direction removal of first fly leaf (5) and can drive objective table (4) and remove along the width direction of fuselage (1).

2. The high-applicability X-RAY inspection apparatus for 2.5D imaging according to claim 1, wherein the refining mechanism is engaged with the stage (4).

3. The high-applicability X-RAY detection device for 2.5D imaging according to claim 2, wherein the refining mechanism comprises a synchronous belt (7), a gear (8) and a refining driving device (9), the synchronous belt (7) is arranged around the rotation direction of the object stage (4), the gear (8) is in meshed connection with the synchronous belt (7), and the refining driving device (9) is used for driving the gear (8) to rotate so as to drive the synchronous belt (7) to rotate, so that the object stage (4) rotates on the second movable plate (6).

4. The high-applicability X-RAY detection apparatus for 2.5D imaging according to claim 1, further comprising a rotating mechanism, an unlockable first locking device and an unlockable second locking device, wherein the rotating mechanism is used for driving the X-RAY source (2) and the receiving device (3) to rotate synchronously; the receiving device (3) is movably arranged on the rotating mechanism and can move along the height direction of the machine body (1) to be close to or far away from the object stage (4), and the first locking device is used for limiting the movement of the receiving device (3); the X-ray source (2) is movably arranged on the rotating mechanism and can move along the height direction of the machine body (1) to be close to or far away from the object stage (4), and the second locking device is used for limiting the movement of the X-ray source (2).

5. The high-applicability X-RAY detection device for 2.5D imaging according to claim 4, wherein the rotating mechanism comprises a swing arm (10) and a rotating driving device, the X-RAY source (2) and the receiving device (3) are rotatably disposed on the body (1) through the swing arm (10), and the rotating driving device is used for driving the swing arm (10) to rotate so as to synchronously rotate the X-RAY source (2) and the receiving device (3).

6. The high applicability X-RAY detection device for 2.5D imaging according to claim 5, it is characterized in that the rotation driving device comprises a first guide rail (12), a second guide rail (13), a screw rod, a nut and a rotation driving component (14), the first guide rail (12) is arranged on the machine body (1) and is arranged along the length direction of the machine body (1), the second guide rail (13) is arranged on the swing arm (10) and is arranged along the height direction of the machine body (1), the screw rod is rotatably arranged on the machine body (1) and is parallel to the first guide rail (12), the nut is sleeved on the screw rod and is respectively connected with the first guide rail (12) and the second guide rail (13) in a sliding way, the rotary driving component (14) is used for driving the screw rod to rotate so that the nut can move on the screw rod and slide on the first guide rail (12) and the second guide rail (13).

7. The high-applicability X-RAY inspection apparatus for 2.5D imaging according to claim 1, further comprising a third guide rail (15), wherein the third guide rail (15) is disposed along a length direction of the main body (1), and the first movable plate (5) is slidable on the third guide rail (15).

8. The high-applicability X-RAY detection apparatus for 2.5D imaging according to claim 7, further comprising a first translational drive device for driving the first movable plate (5) to slide on the third guide rail (15).

9. The high-applicability X-RAY inspection apparatus for 2.5D imaging according to claim 1, further comprising a fourth guide rail (18), the fourth guide rail (18) being arranged along a width direction of the first movable plate (5), the second movable plate (6) being slidable on the fourth guide rail (18).

10. The high-applicability X-RAY inspection apparatus for 2.5D imaging according to claim 9, further comprising a second translation driving device for driving the second movable plate (6) to slide on the fourth guide rail (18).

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