CN114755251A - X-RAY detection equipment for 2.5D imaging - Google Patents
X-RAY detection equipment for 2.5D imaging Download PDFInfo
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- CN114755251A CN114755251A CN202210246596.8A CN202210246596A CN114755251A CN 114755251 A CN114755251 A CN 114755251A CN 202210246596 A CN202210246596 A CN 202210246596A CN 114755251 A CN114755251 A CN 114755251A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
Abstract
The invention discloses X-RAY detection equipment for 2.5D imaging, which comprises a machine body, an X-RAY source, a receiving device, an object stage, a rotating mechanism, a first locking device and a second locking device, wherein the X-RAY source and the receiving device are rotatably arranged in the machine body; the rotating mechanism can drive the X-ray source and the receiving device to synchronously rotate; the receiving device and the X-ray source are movably arranged on the rotating mechanism respectively and can be close to or far away from the objective table, the first locking device can limit the movement of the receiving device, and the second locking device is used for limiting the movement of the X-ray source. The X-RAY detection equipment for 2.5D imaging can simplify the imaging algorithm, improve the detection efficiency and reduce the equipment cost.
Description
Technical Field
The invention relates to a detection device, in particular to an X-RAY detection device for 2.5D imaging.
Background
The X-RAY detection system operates on the principle that an X-RAY source 2 emits X-RAYs, which penetrate through a detection object 24, and then a receiving device 3 such as a detector or an image intensifier receives the X-RAYs with attenuated intensity to form an image with gray level difference. So as to judge whether the performance index of the detected article 24 meets the requirement according to the image, as shown in fig. 1.
The current welding hole defect square imaging methods include 3D imaging (namely CT imaging), 2.5D imaging and 2D imaging. 3D imaging equipment has extremely high cost and low market popularization rate; 2D imaging can only describe image information of a certain fault direction, and is not intuitive enough; 2.5D imaging is an imaging method between 3D imaging and 2D imaging, the equipment cost is close to that of 2D imaging equipment, and images are more visual and stereoscopic than 2D imaging, so that the 2.5D imaging equipment is widely applied.
In order to realize 2.5D imaging detection of welding defects, the X-RAY detection equipment on the market can well meet the requirements at present. For example, the chinese utility model with the publication number CN 212341051U discloses an X-RAY detection system, which has the following structure: the X-ray machine is positioned below the detector and positioned above the detector, and the position of an article between the X-ray machine and the detector is detected; the detection object can respectively move linearly along the length direction and the width direction of the cabinet body in the horizontal plane, the X-ray machine and the detector can respectively move linearly up and down along the height direction of the cabinet body, and the detector can rotate in the vertical plane. The 2.5D imaging is realized by the rotation of the detector, the X-ray machine does not rotate with the detector at the same time, the amplification factor is continuously changed in the 2.5D imaging process of the equipment under the condition that the positions of the X-ray machine and the detector are unchanged in the height direction, and the imaging algorithm is complex.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide the X-RAY detection equipment for 2.5D imaging, which can simplify an imaging algorithm, and is beneficial to improving the detection efficiency and reducing the equipment cost.
The purpose of the invention is realized by adopting the following technical scheme:
an X-RAY inspection apparatus for 2.5D imaging, comprising:
the X-ray detector comprises a body, an X-ray source, a receiving device and an object stage, wherein a detection chamber is formed in the body, the X-ray source and the receiving device are arranged in the detection chamber and are rotatably connected with the body, the object stage is arranged between the X-ray source and the receiving device and used for placing an object to be detected, the object stage is movably arranged on the body and can move along the length direction and the width direction of the body, the X-ray source is used for emitting X-rays and enabling the X-rays to penetrate through the object on the object stage, and the receiving device is used for receiving the X-rays emitted by the X-ray source and forming images with gray difference;
the rotating mechanism is used for driving the X-ray source and the receiving device to synchronously rotate;
the first locking device can be unlocked, the receiving device can be movably arranged on the rotating mechanism and can move along the height direction of the machine body to be close to or far away from the object stage, and the first locking device is used for limiting the movement of the receiving device;
And the second locking device can be unlocked, the X-ray source is movably arranged on the rotating mechanism and can move along the height direction of the machine body to be close to or far away from the object stage, and the second locking device is used for limiting the movement of the X-ray source.
Further, the receiving device and the X-ray source are respectively arranged above and below the object stage.
Furthermore, the rotating mechanism comprises a swing arm and a rotation driving device, the X-ray source and the receiving device are rotatably arranged on the machine body through the swing arm, and the rotation driving device is used for driving the swing arm to rotate so as to enable the X-ray source and the receiving device to synchronously rotate.
Further, the swing arm is rotatably arranged on the machine body through a bearing seat.
Further, the rotation driving device comprises a first guide rail, a second guide rail, a screw rod, a nut and a rotation driving part, the first guide rail is arranged on the machine body and arranged along the length direction of the machine body, the second guide rail is arranged on the swing arm and arranged along the height direction of the machine body, the screw rod is rotatably arranged on the machine body and parallel to the first guide rail, the nut is sleeved on the screw rod, the nut is respectively connected with the first guide rail and the second guide rail in a sliding manner, and the rotation driving part is used for driving the screw rod to rotate so as to enable the nut to move on the screw rod and slide on the first guide rail and the second guide rail.
Further, the nut slides on the first guide rail through the first sliding block, and the nut slides on the second guide rail through the second sliding block.
Further, the lifting device comprises a first lifting driving device, wherein the first lifting driving device is used for driving the receiving device to move along the height direction of the machine body and can be used as the first locking device to maintain the up-down position of the receiving device.
Furthermore, the X-ray source lifting device further comprises a second lifting driving device, wherein the second lifting driving device is used for driving the X-ray source to move along the height direction of the machine body and can be used as the second locking device to maintain the up-and-down position of the X-ray source.
Further, the device also comprises a third guide rail, the third guide rail is arranged along the length direction of the machine body, and the object stage can slide on the third guide rail.
Further, the device also comprises a fourth guide rail, the fourth guide rail is arranged along the width direction of the machine body, and the object stage can slide on the fourth guide rail.
Compared with the prior art, the invention has the beneficial effects that:
an X-ray source in the detection chamber emits X-rays to penetrate through the object on the object stage, and a receiving device receives the X-rays emitted by the X-ray source and forms an image with gray difference so as to effectively detect the object according to the image. The receiving device and the X-ray source respectively move along the height direction of the machine body, so that the distances between the receiving device and the X-ray source and the object stage can be respectively adjusted, and the upper position and the lower position of the receiving device and the X-ray source are respectively locked through the first locking device and the second locking device, so that the amplification factor can be effectively adjusted. The X-ray source and the receiving device are driven to synchronously rotate through the rotating mechanism, even if the X-ray source and the receiving device rotate around the same rotating center, the 2.5D imaging algorithm can be simpler, and the improvement of the detection efficiency and the reduction of the equipment cost are facilitated. The object stage is moved along the length direction and the width direction of the machine body, so that the X-ray source can emit X-rays to different areas of the object, and even if the X-rays can penetrate through different areas of the object, the effective detection of different areas of the object can be facilitated.
Drawings
FIG. 1 is a schematic diagram of X-ray imaging;
FIG. 2 is a schematic diagram of the structure of an X-RAY detection device for 2.5D imaging in a preferred embodiment of the present invention;
FIG. 3 is a partial schematic diagram of the X-RAY inspection apparatus for 2.5D imaging in the preferred embodiment of the present invention;
FIG. 4 is a schematic view of a portion of the structure of FIG. 3;
fig. 5 is a schematic view of another angle structure of fig. 4.
In the figure: 1. a body; 2. an X-ray source; 3. a receiving device; 4. an object stage; 5. swinging arms; 6. a bearing seat; 7. a first guide rail; 8. a second guide rail; 9. a screw rod; 10. a nut; 11. a rotation driving member; 12. a first slider; 13. a second slider; 14. a first elevation drive device; 15. a second elevation drive device; 16. a third guide rail; 17. a fourth guide rail; 18. a fifth guide rail; 19. a sixth guide rail; 20. sliding the door; 21. operating a keyboard; 22. an equipment button; 23. a display; 24. the article is detected.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings only for the convenience of description of the present invention and simplification of the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the plurality means one or more, the plurality means two or more, and larger, smaller, larger, etc. are understood as excluding the essential numbers, and larger, smaller, inner, etc. are understood as including the essential numbers. If there is a description of first and second for the purpose of distinguishing technical features only, this is not to be understood as indicating or implying a relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of technical features indicated.
In the description of the present invention, unless otherwise specifically limited, terms such as set, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention by combining the specific contents of the technical solutions.
Referring to fig. 1 to 5, a preferred embodiment of the present invention provides a 2.5D imaging X-RAY inspection apparatus, which can be widely applied to SMT, chip, battery and other industries, and the apparatus has functions of a BGA inspection module and a bubble measurement module, and performs recognition and determination well, and plays an important role in inspecting the welding quality.
The detection equipment comprises a machine body 1, an X-ray source 2, a receiving device 3, an object stage 4, a rotating mechanism, a first locking device capable of being unlocked and a second locking device capable of being unlocked, wherein a detection chamber is formed in the machine body 1, the X-ray source 2 and the receiving device 3 are arranged in the detection chamber and are rotatably connected with the machine body 1, the object stage 4 is arranged between the X-ray source 2 and the receiving device 3 and is used for placing a detected object, the object stage 4 is movably arranged on the machine body 1 and can move along the length and width directions of the machine body 1, the X-ray source 2 is used for emitting X-rays and enabling the X-rays to penetrate through the object on the object stage 4, and the receiving device 3 is used for receiving the X-rays emitted by the X-ray source 2 and forming an image with gray difference; the rotating mechanism is used for driving the X-ray source 2 and the receiving device 3 to synchronously rotate; the receiving device 3 is movably arranged on the rotating mechanism and can move along the height direction of the machine body 1 to be close to or far away from the objective table 4, and the first locking device is used for limiting the movement of the receiving device 3; the X-ray source 2 is movably arranged on the rotating mechanism and can move along the height direction of the machine body 1 to be close to or far away from the object stage 4, and the second locking device is used for limiting the movement of the X-ray source 2.
On the basis of the structure, the X-ray source 2 in the detection chamber emits X-rays to penetrate through the object on the object stage 4, the receiving device 3 receives the X-rays emitted by the X-ray source 2 and forms an image with gray difference, and 2.5D imaging is realized, so that the object can be effectively detected according to the image. By enabling the receiving device 3 and the X-ray source 2 to move along the height direction of the machine body 1 respectively, the distances between the receiving device 3 and the X-ray source 2 and the objective table 4 can be adjusted respectively, and the upper position and the lower position of the receiving device 3 and the upper position and the lower position of the X-ray source 2 are locked respectively through the first locking device and the second locking device, so that the magnification factor can be adjusted effectively. The X-ray source 2 and the receiving device 3 are driven to synchronously rotate through the rotating mechanism, even if the X-ray source 2 and the receiving device 3 rotate around the same rotating center, the 2.5D imaging algorithm can be simpler, and the improvement of the detection efficiency and the reduction of the equipment cost are facilitated. The object stage 4 is moved along the length and width directions of the body 1, so that the X-ray source 2 can emit X-rays to different regions of the object, and even if the X-rays can penetrate through different regions of the object, the effective detection of different regions of the object can be facilitated.
As a preferred embodiment of the present invention, it may also have the following additional technical features:
In this embodiment, the receiving device 3 is a detector, and can effectively receive the X-ray with attenuated intensity after penetrating through the inspection object 24 and form an image with gray level difference, so as to determine whether the performance index of the inspection object 24 meets the requirement according to the image.
In other embodiments, the receiving means 3 is an image intensifier.
In this embodiment, the object stage 4 is horizontally arranged, and the receiving device 3 and the X-ray source 2 are respectively disposed above and below the object stage 4, so that the structure of the detection apparatus is simpler, and the detection efficiency is improved.
In other embodiments, the object table 4 is arranged horizontally, the receiving device 3 is arranged below the object table 4, and the X-ray source 2 is arranged above the object table 4. Of course, the object table 4 may also be arranged vertically, so that the receiving device 3 and the X-ray source 2 are respectively arranged on the left and right sides of the object table 4.
In practice, a clamp for fixing the object may be provided on the stage 4.
In this embodiment, the rotating mechanism is located on the upper side of the object stage 4 and drives the X-ray source 2 and the receiving device 3 to rotate synchronously, even if the X-ray source 2 and the receiving device 3 rotate around the same rotating center, and the rotating center is located on the upper side of the object stage 4, so that the 2.5D imaging algorithm is simpler, and the improvement of the detection efficiency and the reduction of the equipment cost are facilitated.
In this embodiment, the rotating mechanism includes a swing arm 5 and a rotation driving device, the X-ray source 2 and the receiving device 3 are rotatably arranged on the machine body 1 through the swing arm 5, the rotation driving device is used for driving the swing arm 5 to rotate so as to enable the X-ray source 2 and the receiving device 3 to synchronously rotate, the structure of the rotating mechanism is simplified, the X-ray source 2 and the receiving device 3 rotate around the same rotating center, a 2.5D imaging algorithm can be simpler, and the detection efficiency can be improved and the equipment cost can be reduced.
In this embodiment, the swing arm 5 is rotatably disposed on the body 1 through the bearing seat 6, which facilitates effective rotation of the swing arm 5, thereby facilitating synchronous rotation of the X-ray source 2 and the receiving device 3.
In this embodiment, the rotation driving device includes a first guide rail 7, a second guide rail 8, a screw rod 9, a nut 10, and a rotation driving component 11, where the first guide rail 7 is disposed on the machine body 1 and arranged along the length direction of the machine body 1, the second guide rail 8 is disposed on the swing arm 5 and arranged along the height direction of the machine body 1, the screw rod 9 is rotatably disposed on the machine body 1 and parallel to the first guide rail 7, the nut 10 is sleeved on the screw rod 9, the nut 10 is slidably connected to the first guide rail 7 and the second guide rail 8, respectively, and the rotation driving component 11 is configured to drive the screw rod 9 to rotate so that the nut 10 can move on the screw rod 9 and slide on the first guide rail 7 and the second guide rail 8, so that the linear motion of the nut 10 can drive the rotation of the swing arm 5. So arrange for rotation driving device's simple structure, the operation is more steady, reliable, makes that X ray source 2 and receiving arrangement 3 can be better rotate around same rotation center, makes 2.5D imaging algorithm simpler, is favorable to improving detection efficiency and reduction equipment cost.
In this embodiment, the screw 9 and the nut 10 form a ball screw, which is beneficial to improving the efficiency of linear motion and enabling the swing arm 5 to realize stable rotation.
In this embodiment, the rotation driving part 11 is a motor, which can simplify the structure of the rotation mechanism and is beneficial to reducing the equipment cost.
In other embodiments, the rotation driving part 11 is a cylinder or an oil cylinder.
In this embodiment, the nut 10 slides on the first guide rail 7 through the first slider 12, and the nut 10 slides on the second guide rail 8 through the second slider 13, which facilitates the effective sliding of the nut 10 on the first guide rail 7 and the second guide rail 8, respectively, so that the swing arm 5 can be driven to rotate smoothly during the sliding process.
In other embodiments, the rotating mechanism is a motor, a cylinder, a hydro-cylinder, or the like, which can directly drive the X-ray source 2 and the receiving device 3 to rotate.
In particular implementations, movement of the stage 4 on the body 1 may be actuated by manually applying an external force.
In this embodiment, the detection apparatus further includes a third guide rail 16, the third guide rail 16 is disposed along the length direction of the body 1, the object stage 4 can slide on the third guide rail 16, and the third guide rail 16 provides a better guiding function for the movement of the object stage 4, so that the position of the object stage 4 in the length direction of the body 1 can be effectively adjusted, and effective detection of different areas of an object is facilitated.
In this embodiment, the detection apparatus further includes a fourth guide rail 17, the fourth guide rail 17 is disposed along the width direction of the body 1, the object stage 4 can slide on the fourth guide rail 17, and the fourth guide rail 17 provides a better guiding effect for the movement of the object stage 4, so that the position of the object stage 4 in the width direction of the body 1 can be effectively adjusted, and effective detection of different areas of an article is facilitated.
In specific implementation, the receiving device 3 and the X-ray source 2 can be driven to move along the height direction of the body 1 by manually applying an external force, and the up-and-down positions of the receiving device 3 and the X-ray source 2 are maintained by the first locking device and the second locking device respectively. Specifically, the first locking device and the second locking device may be movably connected to the rotating mechanism, and the first locking device and the second locking device respectively contact with the receiving device 3 and the X-ray source 2 to limit the movement of the receiving device 3 and the X-ray source 2. More specifically, a first locking device and a second locking device are respectively inserted into the swing arm 5, a plurality of jacks are arranged on the swing arm 5 along the height direction of the machine body 1, the first locking device and the second locking device are both bolts, and the bolts are inserted into the corresponding jacks and can be in contact with the first locking device and the second locking device to limit the movement of the first locking device and the second locking device.
In this embodiment, the detecting apparatus further comprises a first lifting driving device 14, and the first lifting driving device 14 is used for driving the receiving device 3 to move along the height direction of the body 1 and can be used as a first locking device to maintain the up-down position of the receiving device 3. Thus, the distance between the receiving device 3 and the object stage 4 can be effectively adjusted, namely, the distance between the receiving device 3 and the object can be adjusted, and the amplification factor can be effectively adjusted.
Specifically, the first lifting driving device 14 is a motor, and is simple in structure and beneficial to reducing the equipment cost.
In other embodiments, the first lift drive 14 is a pneumatic or hydraulic cylinder.
In a more preferred embodiment, the detecting apparatus further comprises a fifth guide rail 18, the fifth guide rail 18 is arranged along the height direction of the machine body 1 and is connected with the rotating mechanism, and the receiving device 3 can slide on the fifth guide rail 18, so as to apply a better guiding function to the movement of the receiving device 3. Specifically, the fifth guide rail 18 is disposed on the swing arm 5, and can rotate together with the swing arm 5, so that the swing arm 5 can drive the receiving device 3 to rotate together. The first lifting drive 14 drives the receiving device 3 to slide on the fifth guide rail 18.
In this embodiment, the detecting apparatus further includes a second lifting driving device 15, and the second lifting driving device 15 is configured to drive the X-ray source 2 to move along the height direction of the body 1 and can be used as a second locking device to maintain the up-and-down position of the X-ray source 2. Therefore, the distance between the X-ray source 2 and the object stage 4 can be effectively adjusted, namely the distance between the X-ray source 2 and an object can be adjusted, and the magnification can be effectively adjusted.
Specifically, the second lifting driving device 15 is a motor, and is simple in structure and beneficial to reducing the equipment cost.
In other embodiments, the second elevation drive means 15 is a cylinder or a ram.
In a more preferred embodiment, the detecting apparatus further comprises a sixth guiding rail 19, the sixth guiding rail 19 is disposed along the height direction of the body 1 and connected with the rotating mechanism, and the X-ray source 2 can slide on the sixth guiding rail 19, so as to apply a better guiding effect on the movement of the X-ray source 2. Specifically, the sixth guiding rail 19 is disposed on the swing arm 5, and can rotate together with the swing arm 5, so that the swing arm 5 can drive the X-ray source 2 to rotate together. The second lifting drive 15 drives the X-ray source 2 to slide on the sixth guide rail 19.
In this embodiment, the fifth guide rail 18 and the sixth guide rail 19 are both linear modules, which can further improve the guiding efficiency.
In this embodiment, the body 1 is provided with a material inlet/outlet port mutually communicated with the detection chamber, so that the detected article can be conveniently placed on the object stage 4 in the detection chamber through the material inlet/outlet port or the detected article can be conveniently taken out through the material inlet/outlet port. Specifically, the sliding door 20 is slidably disposed at the inlet/outlet, so that the inlet/outlet can be opened and closed, and radiation leakage can be prevented.
In this embodiment, the body 1 is a lead-shielded enclosure, and the X-ray source 2 and the receiving device 3 are disposed in the detection chamber thereof, which is beneficial to preventing radiation leakage.
In the present embodiment, the main body 1 is provided with an operation keyboard 21 (including a mouse) for inputting instructions, device buttons 22 for controlling device switches, a display 23 for displaying detection information, and a controller for receiving instructions.
In the present embodiment, the length, width and height directions of the body 1 correspond to the X-axis, Y-axis and Z-axis directions of a cartesian coordinate system, respectively. The objective table 4 can do X-axis and Y-axis linear movement in the horizontal plane, and a tray is arranged on the objective table 4 and is positioned right above the objective table 4. The X-ray source 2 is positioned below the object stage 4 and can do Z2 axis linear movement on a sixth guide rail 19; the detector is positioned above the stage 4 and is linearly movable on a fifth rail 18 about a Z1 axis. Linear movement of stage 4 in the X-axis and Y-axis directions is used to detect different regions of article 24, and linear movement of the detector in the Z1 axis direction and X-ray source 2 in the Z2 axis direction is used to adjust the magnification.
In specific implementation, the X-ray source 2 is fixedly connected to the sixth guide rail 19, and the sixth guide rail 19 is fixedly connected to the swing arm 5; the detector is fixedly connected to a fifth guide rail 18, and the fifth guide rail 18 is fixedly connected to the swing arm 5; the swing arm 5 can rotate around a bearing seat 6, and a bearing is arranged in the bearing seat 6. The rotation of the swing arm 5 is realized by a first guide rail 7 and a second guide rail 8 which are arranged in a crossed way, and the specific connection relationship is as follows: a second guide rail 8 (comprising a second sliding block 13) is fixedly connected to the swing arm 5; the second slide block 13 is fixedly connected to the nut 10 of the ball screw; the ball screw is supported and fixed by screw rod bearing seats at two ends and is fixedly connected with the rotation driving part 11; the nut 10 is fixedly connected to a first slide block 12 of the first guide rail 7; the first guide rail 7 is fixedly connected to the body 1. The nut 10 is driven to move linearly by the rotation of the rotary driving part 11, and the swing arm 5 is pushed to rotate around the bearing seat 6.
The working process of the equipment is as follows: the material inlet/outlet is opened, the article is placed on the tray, and the apparatus is started to operate. When the swing arm 5 is positioned at the vertical station, the device performs 2D imaging. That is, the X-ray source 2 moves to a proper position along the sixth guide rail 19, the detector moves to a proper position along the fifth guide rail 18, and the object stage 4 moves linearly along the X-axis and the Y-axis in the horizontal plane, thereby completing the 2D imaging detection. When 2.5D imaging is needed, the swing arm 5 swings according to a certain step angle, a plurality of 2D images are taken, the plurality of 2D images are synthesized into an approximate 3D image by utilizing an algorithm, and 2.5D imaging is realized.
The above additional technical features can be freely combined and used in addition by those skilled in the art without conflict.
The above description is only a preferred embodiment of the present invention, and all technical solutions that can achieve the object of the present invention by substantially the same means are within the protection scope of the present invention.
Claims (10)
1. An X-RAY inspection apparatus for 2.5D imaging, comprising:
the X-ray detector comprises a machine body (1), an X-ray source (2), a receiving device (3) and an object stage (4), wherein a detection chamber is formed in the machine body (1), the X-ray source (2) and the receiving device (3) are arranged in the detection chamber and are rotatably connected with the machine body (1), the object stage (4) is arranged between the X-ray source (2) and the receiving device (3) and is used for placing a detected object, the object stage (4) is movably arranged on the machine body (1) and can move along the length and width directions of the machine body (1), the X-ray source (2) is used for emitting X-rays and enabling the X-rays to penetrate through the object on the object stage (4), and the receiving device (3) is used for receiving the X-rays emitted by the X-ray source (2) and forming images with gray level differences;
the rotating mechanism is used for driving the X-ray source (2) and the receiving device (3) to synchronously rotate;
the first locking device can be unlocked, the receiving device (3) is movably arranged on the rotating mechanism and can move along the height direction of the machine body (1) to be close to or far away from the object stage (4), and the first locking device is used for limiting the movement of the receiving device (3);
And the second locking device can be unlocked, the X-ray source (2) is movably arranged on the rotating mechanism and can move along the height direction of the machine body (1) to be close to or far away from the object stage (4), and the second locking device is used for limiting the movement of the X-ray source (2).
2. The X-RAY detection apparatus for 2.5D imaging according to claim 1, characterized in that the receiving device (3) and the X-RAY source (2) are arranged above and below the object table (4), respectively.
3. The 2.5D imaging X-RAY detection apparatus according to claim 1, wherein the rotating mechanism comprises a swing arm (5) and a rotating driving device, the X-RAY source (2) and the receiving device (3) are rotatably disposed on the body (1) through the swing arm (5), and the rotating driving device is used for driving the swing arm (5) to rotate so as to synchronously rotate the X-RAY source (2) and the receiving device (3).
4. The 2.5D imaging X-RAY detection device according to claim 3, characterized in that the swing arm (5) is rotatably arranged on the body (1) through a bearing block (6).
5. The X-RAY detecting apparatus for 2.5D imaging according to claim 3, wherein the rotation driving device comprises a first guide rail (7), a second guide rail (8), a lead screw (9), a nut (10) and a rotation driving part (11), the first guide rail (7) is disposed on the body (1) and is arranged along the length direction of the body (1), the second guide rail (8) is disposed on the swing arm (5) and is arranged along the height direction of the body (1), the lead screw (9) is rotatably disposed on the body (1) and is parallel to the first guide rail (7), the nut (10) is sleeved on the lead screw (9), the nut (10) is slidably connected with the first guide rail (7) and the second guide rail (8), respectively, the rotation driving part (11) is used for driving the lead screw (9) to rotate, so that the nut (10) can move on the lead screw (9) and can move on the first guide rail (7), The second guide rail (8) slides on.
6. The 2.5D imaging X-RAY inspection apparatus according to claim 5, characterized in that the nut (10) is slid on the first rail (7) by a first slide (12) and the nut (10) is slid on the second rail (8) by a second slide (13).
7. The 2.5D imaging X-RAY detection device according to claim 1, further comprising a first lifting driving device (14), wherein the first lifting driving device (14) is used for driving the receiving device (3) to move along the height direction of the machine body (1) and can be used as the first locking device to maintain the up-down position of the receiving device (3).
8. The 2.5D imaging X-RAY detection device according to claim 1, further comprising a second lifting driving device (15), wherein the second lifting driving device (15) is used for driving the X-RAY source (2) to move along the height direction of the machine body (1) and can be used as the second locking device to maintain the up-down position of the X-RAY source (2).
9. The 2.5D imaging X-RAY detection device according to claim 1, further comprising a third guide rail (16), wherein the third guide rail (16) is arranged along the length direction of the body (1), and the stage (4) is slidable on the third guide rail (16).
10. The X-RAY inspection apparatus for 2.5D imaging according to claim 1, further comprising a fourth guide rail (17), the fourth guide rail (17) being arranged along a width direction of the body (1), the stage (4) being slidable on the fourth guide rail (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210246596.8A CN114755251A (en) | 2022-03-14 | 2022-03-14 | X-RAY detection equipment for 2.5D imaging |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116203051A (en) * | 2023-05-06 | 2023-06-02 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116203051A (en) * | 2023-05-06 | 2023-06-02 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
| CN116203051B (en) * | 2023-05-06 | 2023-08-08 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
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