CN217332629U - Online pure water conductivity detection alarm device of silicon wafer cleaning machine - Google Patents
Online pure water conductivity detection alarm device of silicon wafer cleaning machine Download PDFInfo
- Publication number
- CN217332629U CN217332629U CN202220007550.6U CN202220007550U CN217332629U CN 217332629 U CN217332629 U CN 217332629U CN 202220007550 U CN202220007550 U CN 202220007550U CN 217332629 U CN217332629 U CN 217332629U
- Authority
- CN
- China
- Prior art keywords
- pure water
- seat
- cleaning machine
- installation
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The utility model belongs to the technical field of pure water detection alarm of cleaning machines, in particular to an online pure water conductivity detection alarm device of a silicon wafer cleaning machine, aiming at the online pure water conductivity detection alarm device of the existing silicon wafer cleaning machine, the time period blind area exists in the water quality detected by manually and regularly detecting the pure water conductivity, and the problem can not be found in time and the delayed property exists; increase disability rate and manufacturing cost, and consume the human cost, and be not convenient for carry out the problem of installing to the seat of placing of alarm, now propose following scheme, it includes the cell body, one side fixed mounting of cell body has the curb plate, is equipped with installation mechanism on the curb plate, and installation mechanism includes first cardboard, second cardboard and places the seat, and one side of curb plate is equipped with the installation shell. The utility model discloses simple structure is convenient for install the seat of placing of alarm, but the device of real-time detection pure water conductivity quality of water and can send audible-visual alarm when the pure water conductivity is unusual to remind, make things convenient for people to use.
Description
Technical Field
The utility model relates to a cleaning machine electric pure water detection alarm technical field especially relates to an online pure water conductivity detection alarm device of silicon chip cleaning machine.
Background
The silicon wafer cleaning machine in the market at present does not have an equipment device for monitoring the pure water conductivity of a water tank in the cleaning machine in real time, and the equipment device is used for measuring and monitoring through a manual handheld pure water conductivity detector and carrying out feedback investigation when the measurement is abnormal. After verification: when the conductivity value of the pure water in the cleaning machine is more than or equal to 2 mu s, the silicon wafer cannot completely clean the dirt after being cleaned by the pure water, and finally the black spot dirt sheet is formed.
The existing online pure water conductivity detection alarm device of the silicon wafer cleaning machine detects the existence of a time period blind zone of pure water conductivity and water quality at regular time by manpower, and can not find the existence of delay when problems occur; increase disability rate and manufacturing cost, and consume the human cost, and be not convenient for install the seat of placing of alarm.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problems that the existing online pure water conductivity detection alarm device of the silicon wafer cleaning machine detects the existence of time period blind zones of pure water conductivity water quality through manual timing detection, and can not find the problems in time and has delay; increase disability rate and manufacturing cost, and consume the human cost, and be not convenient for carry out the shortcoming of installation to the seat of placing of alarm, and the online pure water conductivity detection alarm device of silicon chip cleaning machine who provides.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an on-line pure water conductivity detection alarm device of a silicon wafer cleaning machine comprises a tank body, a side plate is fixedly installed on one side of the tank body, an installation mechanism is arranged on the side plate and comprises a first clamping plate, a second clamping plate and a placing seat, an installation shell is arranged on one side of the side plate, a driving box is fixedly installed on the top of the installation shell, a driving rotating rod is rotatably connected in the driving box, two worms are fixedly connected on the driving rotating rod, a first installation screw and a second installation screw are rotatably connected at the bottom of the driving box, the directions of threads at two ends of the first installation screw are opposite, worm wheels are fixedly connected at one ends of the first installation screw and the second installation screw, the directions of threads at two ends of the second installation screw are opposite, the two worm wheels are respectively meshed with the two worms, auxiliary seats are fixedly installed on the inner walls at two sides of the installation shell, two left push blocks are connected on the first installation screw in a threaded manner, threaded connection has two right side ejector pads on the second installation screw rod, equal swing joint has two left side push rods on two left side ejector pads, two left side push rods can slide on first cardboard, equal swing joint has right side push rod on two right side ejector pads, two right side push rods can slide on the second cardboard, first cardboard, the second cardboard with place the seat and all be located the installation shell, first cardboard and second cardboard all with installation shell sliding connection, place the seat and locate in the installation shell.
Preferably, one side fixed mounting of drive case has the fixing base, and threaded connection has the screw on the fixing base, and the one end and the drive bull stick of screw are laminated mutually.
Preferably, fixed mounting has the conductivity tester probe on the cell body, and fixed mounting has conductivity tester and treater on the curb plate, places on the seat the buckle and is connected with buzzing light alarm, is connected with the electric wire between buzzing light alarm and conductivity tester and the treater, and the one end and the conductivity tester probe of electric wire are connected.
Compared with the prior art, the utility model has the advantages of:
(1) this scheme is owing to set up the drive bull stick and drive two worms and rotate, two worms drive two worm wheel rotations, two worm wheels drive first installation screw rod and second installation screw rod and rotate, first installation screw rod drives two left side ejector pads and is close to each other, two left side ejector pads drive the one end of two left side push rods and slide on first cardboard, and make first cardboard remove right, second installation screw rod drives two right side ejector pads and is close to each other, two right side ejector pads drive two right side push rods and slide on the second cardboard, and make the second cardboard remove left, when first cardboard and second cardboard remove, can fix placing the seat, the fixed mesh of installation has been realized.
The utility model discloses simple structure is convenient for install the seat of placing of alarm, but the device of real-time detection pure water conductivity quality of water and can send audible-visual alarm when the pure water conductivity is unusual to remind, make things convenient for people to use.
Drawings
Fig. 1 is a schematic structural view of an on-line pure water conductivity detection alarm device of a silicon wafer cleaning machine according to the present invention;
FIG. 2 is a schematic diagram of a side view of an on-line pure water conductivity detection alarm device of a silicon wafer cleaning machine according to the present invention;
fig. 3 is the utility model provides an overlook schematic structure of the installation shell and the drive box of the online pure water conductivity detection alarm device of silicon wafer cleaning machine.
In the figure: 1. a trough body; 2. a side plate; 3. mounting a shell; 4. a drive box; 5. driving the rotating rod; 6. a worm; 7. a first mounting screw; 8. a second mounting screw; 9. a worm gear; 10. an auxiliary seat; 11. a left push block; 12. a right push block; 13. a left push rod; 14. a right push rod; 15. a first card; 16. a second clamping plate; 17. a placing seat; 18. a fixed seat; 19. a screw; 20. a conductivity tester probe; 21. a conductivity tester and a processor; 22. a light alarm is buzzed; 23. an adjusting seat; 24. adjusting the screw rod; 25. and (4) a regulating pipe.
Detailed Description
The technical solutions in the embodiments will be described clearly and completely with reference to the drawings in the embodiments, and it is obvious that the described embodiments are only a part of the embodiments, but not all embodiments.
Example one
Referring to fig. 1-3, an on-line pure water conductivity detection alarm device for a silicon wafer cleaning machine comprises a tank body 1, a side plate 2 is fixedly installed on one side of the tank body 1, an installation mechanism is arranged on the side plate 2, the installation mechanism comprises a first clamping plate 15, a second clamping plate 15 and a placing seat 17, an installation shell 3 is arranged on one side of the side plate 2, a driving box 4 is fixedly installed on the top of the installation shell 3, a driving rotating rod 5 is rotatably connected in the driving box 4, two worms 6 are fixedly connected on the driving rotating rod 5, a first installation screw 7 and a second installation screw 8 are rotatably connected at the bottom of the driving box 4, the thread directions of two ends of the first installation screw 7 are opposite, a worm wheel 9 is fixedly connected at one end of the first installation screw 7 and one end of the second installation screw 8, the thread directions of two ends of the second installation screw 8 are opposite, the two worm wheels 9 are respectively meshed with the two worms 6, auxiliary seats 10 are fixedly installed on the inner walls of two sides of the installation shell 3, threaded connection has two left side ejector pads 11 on the first installation screw 7, threaded connection has two right side ejector pads 12 on the second installation screw 8, equal swing joint has two left side push rods 13 on two left side ejector pads 11, two left side push rods 13 can slide on first cardboard 15, equal swing joint has right side push rod 14 on two right side ejector pads 12, two right side push rods 14 can slide on second cardboard 16, first cardboard 15, second cardboard 16 all is located installing shell 3 with placing seat 17, first cardboard 15 and second cardboard 16 all with installing shell 3 sliding connection, place seat 17 and locate in installing shell 3.
In this embodiment, one side fixed mounting of drive case 4 has fixing base 18, and threaded connection has screw 19 on fixing base 18, and the one end of screw 19 is laminated with drive bull stick 5 mutually.
In this embodiment, fixed mounting has conductivity tester probe 20 on the cell body 1, and fixed mounting has conductivity tester and treater 21 on the curb plate 2, places on the seat 17 the buckle and is connected with buzzing light alarm 22, is connected with the electric wire between buzzing light alarm 22 and conductivity tester and the treater 21, and the one end and the conductivity tester probe 20 of electric wire are connected.
The working principle is as follows: when the device is used, a screw 19 is screwed out, a driving rotating rod 5 is screwed to rotate, the driving rotating rod 5 drives two worms 6 to rotate, the two worms 6 drive two worm wheels 9 to rotate, the two worm wheels 9 drive a first mounting screw 7 and a second mounting screw 8 to rotate, the first mounting screw 7 drives two left push blocks 11 to approach each other, the two left push blocks 11 drive one ends of two left push rods 13 to slide on a first clamping plate 15 and enable the first clamping plate 15 to move rightwards, the second mounting screw 8 drives two right push blocks 12 to approach each other, the two right push blocks 12 drive two right push rods 14 to slide on a second clamping plate 16 and enable the second clamping plate 16 to move leftwards, the placing seat 17 can be fixed when the first clamping plate 15 and the second clamping plate 16 move, when a silicon wafer is soaked and cleaned in the cleaning machine tank body 1, a conductivity tester and a processor 21 can detect the condition of pure water in real time through a conductivity tester probe 20 fixed in the tank body 1, the data result signals tested by the conductivity tester and processor 21 are analyzed in real time, when the pure water conductivity test data exceeds the preset range, the buzzer light alarm 22 can send out alarm response, and the working personnel can quickly check and confirm according to the alarm information.
Example two
Referring to fig. 1-3, an on-line pure water conductivity detection alarm device for a silicon wafer cleaning machine comprises a tank body 1, a side plate 2 is welded and installed on one side of the tank body 1, an installation mechanism is arranged on the side plate 2 and comprises a first clamping plate 15, a second clamping plate 15 and a placing seat 17, an installation shell 3 is arranged on one side of the side plate 2, a driving box 4 is welded and installed on the top of the installation shell 3, a driving rotating rod 5 is connected in the driving box 4 in a rotating mode, two worms 6 are welded and connected on the driving rotating rod 5, a first installation screw 7 and a second installation screw 8 are connected at the bottom of the driving box 4 in a rotating mode, the thread directions of two ends of the first installation screw 7 are opposite, a worm wheel 9 is welded and connected at one end of the first installation screw 7 and one end of the second installation screw 8, the thread directions of two ends of the second installation screw 8 are opposite, the two worm wheels 9 are respectively meshed with the two worms 6, auxiliary seats 10 are welded and installed on the inner walls of two sides of the installation shell 3, threaded connection has two left side ejector pads 11 on the first installation screw 7, threaded connection has two right side ejector pads 12 on the second installation screw 8, equal swing joint has two left side push rods 13 on two left side ejector pads 11, two left side push rods 13 can slide on first cardboard 15, equal swing joint has right side push rod 14 on two right side ejector pads 12, two right side push rods 14 can slide on second cardboard 16, first cardboard 15, second cardboard 16 all is located installing shell 3 with placing seat 17, first cardboard 15 and second cardboard 16 all with installing shell 3 sliding connection, place seat 17 and locate in installing shell 3.
In this embodiment, one side welded mounting of drive case 4 has fixing base 18, and threaded connection has screw 19 on fixing base 18, and the one end of screw 19 is laminated mutually with drive bull stick 5.
In this embodiment, the welding is installed conductivity tester probe 20 on the cell body 1, and the welding is installed conductivity tester and treater 21 on the curb plate 2, places on the seat 17 the buckle and is connected with buzzing light alarm 22, is connected with the electric wire between buzzing light alarm 22 and conductivity tester and the treater 21, and the one end and the conductivity tester probe 20 of electric wire are connected.
In this embodiment, adjustment mechanism includes adjusting screw 24 and adjusting tube 25, and one side welded mounting of curb plate 2 has regulation seat 23, and adjusting screw 24 and adjusting tube 25 all are located regulation seat 23, and adjusting screw 24 rotates with regulation seat 23 to be connected, adjusting tube 25 and adjusting screw 24 threaded connection, and adjusting tube 25 and installation shell 3 welded connection.
The difference between the second embodiment and the first embodiment is that: twist and move adjusting screw 24 and rotate, adjusting screw 24 drives adjusting tube 25 and removes, and adjusting tube 25 drives installation shell 3 and removes, and installation shell 3 can indirectly drive buzzing light alarm 22 and remove, and all structures in this application all can carry out the selection of material and length according to the in-service use condition, and the drawing is the schematic structure picture, and suitable adjustment can be made to specific actual dimension.
The above descriptions are only preferred embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the scope of the present invention, and the technical solutions and the utility model concepts of the present invention are equivalent to, replaced or changed.
Claims (4)
1. An online pure water conductivity detection alarm device of a silicon wafer cleaning machine comprises a tank body (1) and is characterized in that a side plate (2) is fixedly installed on one side of the tank body (1), an installation mechanism is arranged on the side plate (2) and comprises a first clamping plate (15), a second clamping plate (16) and a placing seat (17), an installation shell (3) is arranged on one side of the side plate (2), a driving box (4) is fixedly installed on the top of the installation shell (3), a driving rotating rod (5) is connected in the driving box (4) in a rotating manner, two worms (6) are fixedly connected on the driving rotating rod (5), a first installation screw (7) and a second installation screw (8) are rotatably connected at the bottom of the driving box (4), worm wheels (9) are fixedly connected at one ends of the first installation screw (7) and the second installation screw (8), and the two worm wheels (9) are respectively meshed with the two worms (6), equal fixed mounting has supplementary seat (10) on the both sides inner wall of installing shell (3), threaded connection has two left side ejector pads (11) on first installation screw (7), threaded connection has two right side ejector pads (12) on second installation screw (8), equal swing joint has two left side push rods (13) on two left side ejector pads (11), equal swing joint has right side push rod (14) on two right side ejector pads (12), first cardboard (15), second cardboard (16) and place seat (17) and all be located installing shell (3), first cardboard (15) and second cardboard (16) all with installing shell (3) sliding connection, place seat (17) and locate in installing shell (3).
2. The on-line pure water conductivity detection alarm device of the silicon wafer cleaning machine according to claim 1, wherein a fixed seat (18) is fixedly installed on one side of the driving box (4), a screw (19) is connected to the fixed seat (18) in a threaded manner, and one end of the screw (19) is attached to the driving rotating rod (5).
3. The on-line pure water conductivity detection alarm device of the silicon wafer cleaning machine as claimed in claim 1, wherein a conductivity tester probe (20) is fixedly installed on the tank body (1), and a conductivity tester and processor (21) are fixedly installed on the side plate (2).
4. The on-line pure water conductivity detection alarm device of the silicon wafer cleaning machine according to claim 3, wherein a buzzer light alarm (22) is connected to the placing seat (17) in a buckling manner, an electric wire is connected between the buzzer light alarm (22) and the conductivity tester and processor (21), and one end of the electric wire is connected with the conductivity tester probe (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220007550.6U CN217332629U (en) | 2022-01-04 | 2022-01-04 | Online pure water conductivity detection alarm device of silicon wafer cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220007550.6U CN217332629U (en) | 2022-01-04 | 2022-01-04 | Online pure water conductivity detection alarm device of silicon wafer cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217332629U true CN217332629U (en) | 2022-08-30 |
Family
ID=82991438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220007550.6U Active CN217332629U (en) | 2022-01-04 | 2022-01-04 | Online pure water conductivity detection alarm device of silicon wafer cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217332629U (en) |
-
2022
- 2022-01-04 CN CN202220007550.6U patent/CN217332629U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217332629U (en) | Online pure water conductivity detection alarm device of silicon wafer cleaning machine | |
| CN103604867A (en) | Ultrasonic testing device and detecting method for aluminium alloy slab ingot | |
| CN211030033U (en) | Cable duct detection robot | |
| CN210376140U (en) | Miniature turbidity normal position on-line measuring device | |
| CN210037787U (en) | Fixed automatic detection device for surface water layering water quality | |
| CN208432604U (en) | A kind of water quality indicator buoy | |
| CN217981354U (en) | Flaw detection device for machining | |
| CN216206508U (en) | Communication information safety data acquisition device | |
| CN212932441U (en) | Intelligent detection tool for detecting surface defects of cables and wires | |
| CN110849643B (en) | Railway wheel detection device beneficial to simulating real-time operation | |
| CN211061417U (en) | Detection apparatus for conductive glass luminousness | |
| CN206311595U (en) | A kind of waste water intermediate ion concentration monitor analyzer | |
| CN219162122U (en) | Multifunctional testing suspension tester for Bluetooth swimming pool | |
| CN209979388U (en) | Steel quality detection device for building detection | |
| CN112001078A (en) | Solar water heater intelligent analysis management system based on big data | |
| CN208568755U (en) | A kind of floated real-time water quality detecting device | |
| CN217080750U (en) | Water pump operation fault detection feedback device | |
| CN218097937U (en) | Measuring device is used in municipal administration water supply and drainage design | |
| CN208155974U (en) | Active carbon detection device is used in a kind of processing of active carbon filter | |
| CN210243579U (en) | Ultrasonic diagnostic equipment that plain type welding was used | |
| CN211178804U (en) | Electric metering device capable of detecting equipment pressure | |
| CN211347715U (en) | Conductive glass strength detection device | |
| CN115240354B (en) | Verification device of old person building safety guarantee equipment | |
| CN215953474U (en) | Ultrasonic flaw detection device for steel structure detection | |
| CN114384200B (en) | Environment detection equipment capable of rapidly detecting air quality |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 519000 404, 4th floor, No. 4 plant, No. 46, West Jinhai Avenue, Sanzao Town, Jinwan District, Zhuhai City, Guangdong Province Patentee after: Guangdong Jinwan Gaojing Solar Energy Technology Co.,Ltd. Patentee after: Gaojing Solar Co.,Ltd. Address before: 519000 404, 4th floor, No. 4 plant, No. 46, West Jinhai Avenue, Sanzao Town, Jinwan District, Zhuhai City, Guangdong Province Patentee before: Guangdong Jinwan Gaojing Solar Energy Technology Co.,Ltd. Patentee before: Guangdong Gaojing Solar Energy Technology Co.,Ltd. |