CN217332139U

CN217332139U - Visual detection system using multi-wavelength RGB laser light source

Info

Publication number: CN217332139U
Application number: CN202220867373.9U
Authority: CN
Inventors: 朱兵兵; 陈秋白; 杨超慧
Original assignee: Sansui Optical Technology Suzhou Co ltd
Current assignee: Sansui Optical Technology Suzhou Co ltd
Priority date: 2022-04-15
Filing date: 2022-04-15
Publication date: 2022-08-30
Anticipated expiration: 2032-04-15

Abstract

The utility model discloses an use multi-wavelength RGB laser light source's visual detection system, expand system, beam shaping system, even light dissipation spot system, beam splitting system and image processing system including RGB laser light source module, Galileo, RGB laser light source module, Galileo expand system, beam shaping system, even light dissipation spot system and beam splitting system from left to right coaxial setting in proper order, one of them beam directive testee through beam splitting system reflects to image processing system and is received again. The utility model discloses a structural scheme of coaxial illumination, through setting up the coherence that is used for even light to reduce the two microlens array combination of speckle in order to reduce laser, reach even light and reduce the effect of speckle to can make the illumination more even, be fit for more using in high accuracy visual detection field, effectively reduce stray light influence through falling triangle-shaped or curved groove structure at beam splitter inner wall design, can be used to the defect detection of product, the defect detection of wafer etc..

Description

Visual detection system using multi-wavelength RGB laser light source

Technical Field

The utility model belongs to the technical field of visual detection, concretely relates to use multi-wavelength RGB laser light source's visual detection system.

Background

The visual detection system uses an industrial camera to replace human eyes to complete the functions of identification, measurement, positioning and the like. The general visual detection system is formed by combining a light source, a lens, a camera and an image processing system, can replace manual work to finish detection of bar code characters, cracks, packages, whether surface layers are complete or not, depressions and the like, can effectively improve the detection speed and precision of a production line by using the visual detection system, greatly improves the yield and quality, reduces the labor cost, and simultaneously prevents misjudgment caused by eye fatigue.

Most of light sources in the existing visual detection system are LED light sources, the light sources are long in service life, low in energy consumption and high in brightness, but the size is relatively limited, the illumination distance is limited to a certain extent, and the LED light sources have different structures, such as coaxial illumination, annular light sources, strip illumination and the like, aiming at different application scenes.

In a visual inspection system, a light source is usually homogenized, and the most common homogenization method is to use a light homogenizing sheet or a diffusion sheet to make illumination more uniform, which is beneficial to improving the inspection precision.

Along with the development of laser technology, more and more illumination fields begin to develop towards laser light sources, and compared with LED light sources, laser has higher luminance, is applicable to remote illumination and volume is littleer, has satisfied the demand in more fields. However, due to the characteristics of the laser, when the laser light source is used for illumination, phenomena such as speckle and illumination unevenness often occur, which seriously affect the imaging quality and the detection accuracy, and therefore, when the laser light source is used for illumination, the homogenization and speckle reduction must be considered at the same time.

SUMMERY OF THE UTILITY MODEL

For solving the technical problem who exists among the prior art, the utility model aims to provide an use multi-wavelength RGB laser light source's visual detection system.

In order to realize the above purpose, reach above-mentioned technological effect, the utility model discloses a technical scheme be:

a visual detection system using a multi-wavelength RGB laser light source comprises an RGB laser light source module, a Galileo beam expanding system, a light beam shaping system, a light homogenizing and spot dissipating system, a beam splitting system and an image processing system, wherein the RGB laser light source module, the Galileo beam expanding system, the light beam shaping system, the light homogenizing and spot dissipating system and the beam splitting system are sequentially and coaxially arranged from left to right, and one light beam passing through the beam splitting system irradiates to a detected object and then is reflected to the image processing system and received.

Furthermore, the emergent light beam of the RGB laser light source module is white light, and the diameter of the emergent light spot of the RGB laser light source module is 0.3-0.6 mm.

Further, the Galileo beam expanding system comprises a positive lens and a negative lens which are coaxially arranged.

Furthermore, the focal length of a positive lens of the Galileo beam expanding system is 1-5 mm, the focal length of a negative lens is-2-10 mm, the aperture of the positive lens is larger than that of the negative lens, the aperture of the negative lens is 1-3 mm, and the aperture of the positive lens is 5-10 mm.

Furthermore, the beam shaping system comprises a cylindrical mirror and a diaphragm which are coaxially arranged from left to right, wherein an antireflection film is plated on the front surface of the cylindrical mirror, and the focal length f is 4-20 mm.

Further, even light speckle system that disappears includes first group microlens array and field mirror group, field mirror group includes second group microlens array and positive lens, first group microlens array links to each other with the vibrator, drives first group microlens array through the vibrator and vibrates, and second group microlens array sets up in the image plane department of first group microlens array, and positive lens set up behind second microlens array and the distance between the two is adjustable.

Further, the distance between the positive lens and the second micro-lens array is 0.5-5 mm.

Furthermore, the first group of micro lens array and the second group of micro lens array respectively comprise a plurality of positive micro lenses which are arranged at equal intervals, and the focal length of each positive micro lens is 0.5-1.5 mm.

Furthermore, the numerical aperture of the object space of the field lens group is larger than the numerical aperture of the image space of the first group of micro lens arrays, and the numerical aperture NA of the positive lens is 0.4-0.6.

Furthermore, the beam splitting system comprises a beam splitter, and an inverted triangle or arc-shaped groove structure is formed in the inner wall of the light inlet of the beam splitter.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses an use multi-wavelength RGB laser light source's visual detection system, expand system, beam shaping system, even light dissipation spot system, beam splitting system and image processing system including RGB laser light source module, Galileo, RGB laser light source module, Galileo expand system, beam shaping system, even light dissipation spot system and beam splitting system from left to right coaxial setting in proper order, one of them beam directive testee through beam splitting system reflects to image processing system and is received again. The utility model provides an use multi-wavelength RGB laser light source's visual detection system has added Galileo and has expanded system and beam shaping system in the system, expands through Galileo and expands the beam system and then pass through beam shaping system and collimate and the plastic, and the stray light that the filtering marginal aperture brought can obtain satisfied collimated light beam; the system is added with a double-microlens array combination for homogenizing light and reducing speckles, the first group of microlens array has vibration with certain frequency, the second group of microlens array and a positive lens are used as a field lens group for homogenizing light, so that the speckles are effectively reduced, the illumination is more uniform, the illumination uniformity can reach more than 0.85, and the system is more suitable for being applied to the field of high-precision visual detection; the inner wall of the beam splitter is provided with an inverted triangular groove structure, stray light can be reflected for multiple times after entering the groove, and the power carried by the reflected light can be decreased progressively, so that the aim of reducing stray light entering an image processing system is fulfilled; the utility model discloses a structural scheme of coaxial illumination can be used to the defect detection of product, the defect detection of wafer etc..

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

fig. 3 is a schematic structural view of the galileo beam expanding system of the present invention;

fig. 4 is a schematic perspective view of a first microlens array of the present invention;

fig. 5 is a plan view of a first set of microlens arrays or a second set of microlens arrays in accordance with the present invention;

fig. 6 is a schematic structural diagram of the beam splitting system of the present invention;

fig. 7 is a partial light path diagram of the beam splitting system of the present invention.

Detailed Description

The present invention is described in detail below to enable the advantages and features of the present invention to be more easily understood by those skilled in the art, thereby making more clear and definite definitions of the scope of the present invention.

The following presents a simplified summary of one or more aspects in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all contemplated aspects, and is intended to neither identify key or critical elements of all aspects nor delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later.

As shown in fig. 1-7, a visual inspection system using multi-wavelength RGB laser source comprises an RGB laser source module 1, a galileo beam expanding system 2, a beam shaping system 3, a light-homogenizing and speckle-eliminating system, a beam splitting system and an image processing system, wherein the RGB laser source module 1, the galileo beam expanding system 2, the beam shaping system 3, the light-homogenizing and speckle-eliminating system and the beam splitting system are coaxially arranged from left to right in sequence, a light beam emitted from the RGB laser source module 1 is white light, the light loss is small, the diameter of an emitted light spot is 0.3 to 0.6mm, the galileo beam expanding system 2 comprises a positive lens and a negative lens which are coaxially arranged, the positive lens and the negative lens can respectively adopt spherical or aspherical lenses, and in order to obtain a better collimated light beam, the galileo beam expanding system 2 preferably adopts an aspherical lens combination, the beam shaping system 3 comprises a cylindrical lens 31 and a diaphragm 32 which are arranged from left to right in sequence, the image processing system comprises a CCD 9, the light beam emitted from an RGB laser light source module 1 is expanded by a Galileo beam expanding system 2, the beam expanding magnification is 5-20 times, the fast axis of the light beam emitted from the RGB laser light source module 1 is collimated, therefore, the expanded light needs to be collimated by a cylindrical mirror 31 of a light beam shaping system 3 in the slow axis, the collimated light spot is an elliptic light spot, the diameter of the long axis can reach 1.5-12 mm, because unnecessary stray light exists in the edge aperture of the light spot, the size of the elliptic light spot needs to be controlled by a diaphragm 32, so as to filter the stray light brought by the edge aperture, the aperture value of the diaphragm 32 can be adjusted, the light passing size of the diaphragm 32 is 85% of the size of the light spot, the light beam filtered by the diaphragm 32 is emitted into a light homogenizing and speckle eliminating system to reduce the coherence of the laser, thereby achieving the effects of homogenizing and reducing the speckles, the homogenized light beam is divided into two beams of light by a beam splitting system, one beam of light is emitted from left to right along the axis and is unnecessary light, the other beam of light is emitted to an object to be measured, and a reflected light beam with object surface information is finally received by a CCD 9.

As a specific embodiment, the outgoing light beam of the RGB laser light source module 1 is formed by combining the outgoing light beams of three LD semiconductor lasers (R, G, B), the outgoing light beams of the three LD semiconductor lasers are red light, green light and blue light respectively, the combined light is white light, and the RGB laser light source module 1 may be a conventional laser product capable of outputting white light.

In a specific embodiment, the focal length of the positive lens of the galilean beam expanding system 2 may be 1 to 5mm, the focal length of the negative lens may be-2 to-10 mm, the aperture of the positive lens is larger than the aperture of the negative lens, the aperture of the negative lens may be 1 to 3mm, and the aperture of the positive lens may be 5 to 10 mm.

In a specific embodiment, the front surface of the cylindrical mirror 31 is coated with an antireflection film, and the focal length f is 4-20 mm.

The light uniformizing and speckle eliminating system comprises a first group of micro lens arrays 4, a vibrator 5 and a field lens group 6, wherein the field lens group 6 comprises a second group of micro lens arrays and a positive lens, the object-side numerical aperture of the field lens group is larger than the image-side numerical aperture of the first group of micro lens arrays 4, the numerical aperture NA of the positive lens is 0.4-0.6, the first group of micro lens arrays 4 and the vibrator 5 are mechanically connected, the first group of micro lens arrays 4 can be arranged on the vibrator 5, the vibrator 5 transmits energy to the first group of micro lens arrays 4 when vibrating to realize the vibration of the first group of micro lens arrays 4, because the ideal uniform illumination is difficult to achieve by only using the first group of micro lens arrays 4, the second group of micro lens arrays and the positive lens are additionally used as the field lens group 6, the second group of micro lens arrays are arranged at the image plane of the first group of micro lens arrays 4, the positive lens in the field lens group 6 is arranged behind the second micro lens arrays, and the distance between the positive lens and the second micro lens arrays is adjustable, the adjustable distance is 0.5-5 mm.

As a specific implementation mode, the first group of micro-lens array 4 and the second group of micro-lens array respectively comprise a plurality of positive micro-lenses which are arranged at equal intervals, and the focal length of each positive micro-lens is 0.5-1.5 mm.

The beam splitting system comprises a beam splitter 7, and an inverted triangle or arc-shaped groove 8 is formed in the inner wall of a light inlet of the beam splitter 7 and is blackened so as to further reduce stray light.

The utility model discloses a visual detection system accessible elevating system 11 installs in objective table 10 one side, and CCD 9 sets up in objective table 10 top, and elevating system 11 can drive the vertical reciprocating motion of visual detection system, and elevating system 11 adopts current elevating gear can.

The utility model discloses the part or the structure that do not specifically describe adopt prior art or current product can, do not do here and describe repeatedly.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all utilize the equivalent structure or equivalent flow transformation that the content of the specification does, or directly or indirectly use in other related technical fields, all including in the same way the patent protection scope of the present invention.

Claims

1. A visual detection system using a multi-wavelength RGB laser source is characterized by comprising an RGB laser source module, a Galileo beam expanding system, a beam shaping system, a light homogenizing and spot dissipating system, a beam splitting system and an image processing system, wherein the RGB laser source module, the Galileo beam expanding system, the beam shaping system, the light homogenizing and spot dissipating system and the beam splitting system are sequentially and coaxially arranged from left to right, and one beam of light passing through the beam splitting system is emitted to a measured object and then reflected to the image processing system and received.

2. The vision inspection system of claim 1, wherein the outgoing light beam of the RGB laser source module is white light, and the outgoing spot diameter of the RGB laser source module is 0.3-0.6 mm.

3. The vision inspection system of claim 1, wherein said Galileo beam expansion system includes a positive lens and a negative lens coaxially disposed.

4. The visual inspection system of claim 3, wherein the focal length of the positive lens of the Galileo beam expander system is 1-5 mm, the focal length of the negative lens is-2-10 mm, the aperture of the positive lens is larger than the aperture of the negative lens, the aperture of the negative lens is 1-3 mm, and the aperture of the positive lens is 5-10 mm.

5. The vision inspection system of claim 1, wherein the beam shaping system comprises a cylindrical mirror and a diaphragm coaxially arranged from left to right, the front surface of the cylindrical mirror is coated with an antireflection film, and the focal length f is 4-20 mm.

6. The vision inspection system of claim 1, wherein the speckle reduction and equalization system comprises a first microlens array and a field lens assembly, the field lens assembly comprises a second microlens array and a positive lens, the first microlens array is connected to the vibrator, the vibrator drives the first microlens array to vibrate, the second microlens array is disposed at the image plane of the first microlens array, and the positive lens is disposed behind the second microlens array with an adjustable distance therebetween.

7. The vision inspection system of claim 6, wherein the distance between the positive lens of the field lens group and the second micro lens array is 0.5-5 mm.

8. The vision inspection system of claim 6, wherein said first and second microlens arrays comprise a plurality of positive microlenses with equal spacing, and the focal length of said positive microlenses is 0.5-1.5 mm.

9. The vision inspection system of claim 6, wherein the numerical aperture of the field lens set on the object side is larger than the numerical aperture of the first microlens array on the image side, and the numerical aperture NA of the positive lens is 0.4-0.6.

10. The vision inspection system of claim 1, wherein the beam splitter system includes a beam splitter, and an inner wall of a light inlet of the beam splitter is formed with an inverted triangle or an arc groove structure.