CN217328722U - Single-drive double-valve-cover high valve mechanism - Google Patents
Single-drive double-valve-cover high valve mechanism Download PDFInfo
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- CN217328722U CN217328722U CN202221327232.4U CN202221327232U CN217328722U CN 217328722 U CN217328722 U CN 217328722U CN 202221327232 U CN202221327232 U CN 202221327232U CN 217328722 U CN217328722 U CN 217328722U
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- molecular pump
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Abstract
The utility model discloses a high valve mechanism of single drive double valve gap, including high vacuum molecular pump, molecular pump valve gap, vacuum cavity and drive assembly, drive assembly is connected with the molecular pump valve gap for drive molecular pump valve gap is opened or is closed. The driving assembly comprises a driving cylinder, a driving shaft swing arm, a driving shaft, a driven shaft swing arm and a pressing rod, one end of the driving shaft swing arm is connected with the driving cylinder, the other end of the driving shaft swing arm is connected with the driving shaft, the driven shaft is connected with the driving shaft and the driven shaft swing arm, and the pressing rod is connected with the driven shaft swing arm and a valve cover of the molecular pump. The utility model discloses a single set of cylinder mechanism, opening and being closed of a plurality of molecular pump valve gap of synchro control is superior to in the cost and adopts many sets of control mechanism, reduces the production cost of manufacture of equipment, has simplified mechanical structure to a certain extent, reduces the overall dimension of equipment, has reduced the occupation space of equipment to reduce the quantity that drives actuating cylinder, reduced the cost by a wide margin and the control degree of difficulty, improved the convenience of control.
Description
Technical Field
The utility model relates to a high vacuum molecular pump valve gap is opened and closed control mechanism especially relates to a high valve mechanism of single drive double valve gap.
Background
The high vacuum molecular pump is a component which is widely applied in the vacuum industry and is used for obtaining the vacuum degree required by production. Vacuum degree means pressure below 10 5 Gas state of Pa, range: 10 5 Pa to 1x10 -11 Pa is even lower. The invention relates to a high vacuum molecular pump, the vacuum degree range of which can reach: 10 -4 ～10 -7 mmHg，1.33x10 -2 ～1.33x10 -4 Pa。
In order to understand and master the working principle of the mechanism, the working principle of the high vacuum valve needs to be introduced:
when the system generates negative pressure, the pressure difference between the atmospheric pressure and the system pressure acts on the sealing element, so that the sealing element of the vacuum valve is pushed to open the sealing surface to introduce the external atmosphere into the system, the pressure of the system is increased to destroy the negative pressure, the sealing element of the vacuum valve falls down again to seal and block the atmosphere again, and the external atmosphere does not enter the system any more.
When the system generates positive pressure, the working medium enters the upper part of the sealing element and presses the sealing element downwards. The greater the system pressure, the tighter the seal. Thereby guaranteeing the tightness of the vacuum valve during positive pressure and achieving the effect of water dripping and leakage prevention.
Control valves are installed in vacuum systems and are conventionally referred to as vacuum break and vacuum break valves. The vacuum breaking valve is required by process design and is used for breaking the vacuum state of the system, realizing parking or partial parking and facilitating maintenance or system switching. The vacuum breaker may be a manually controlled valve or an automatically controlled valve depending on the process requirements. The aim is to open the introduction of the required medium into the system and to increase the absolute pressure of the system.
The valve cover of the existing high vacuum valve is opened and closed by adopting independent control. However, when a plurality of high valve covers need to be controlled, a plurality of sets of mechanisms are often needed, which not only increases the cost, but also generally causes the mechanical structure to be complex and the control to be inconvenient.
Accordingly, the prior art is deficient and needs improvement.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of prior art, provide a high valve mechanism of single drive double valve gap.
The technical scheme of the utility model as follows: a single drive dual bonnet high valve mechanism comprising: the high-vacuum molecular pump is connected with the vacuum cavity, the molecular pump valve cover covers the high-vacuum molecular pump and is positioned in the vacuum cavity, and the driving component is connected with the molecular pump valve cover and is used for driving the molecular pump valve cover to be opened or closed;
the drive assembly includes: drive actuating cylinder, driving shaft swing arm, driving shaft, driven shaft swing arm and depression bar, the one end of driving shaft swing arm with drive actuating cylinder connects, the other end with the driving shaft is connected, the driven shaft is connected the driving shaft and the driven shaft swing arm, the depression bar with driven shaft swing arm and molecular pump valve lid are connected.
Further, the high vacuum molecular pump is arranged on the bottom surface of the vacuum cavity, the driving cylinder is located above the valve cover of the molecular pump, the driving shaft swing arm and the driving shaft are 90 degrees, the driven shaft and the driving shaft are a straight line, the driven shaft swing arm and the driven shaft are 90 degrees, and the pressing rod and the driven shaft swing arm are 90 degrees.
Furthermore, a sealing shaft sleeve is arranged at the joint of the driving shaft swing arm and the driving shaft, and the driven shaft is connected with the driving shaft through a coupling.
Furthermore, the single-drive double-valve-cover high-valve mechanism is at least provided with two sets of high-vacuum molecular pumps.
Furthermore, the bottom surface of the vacuum cavity is provided with round holes corresponding to each high-vacuum molecular pump, and the bottom surface of the valve cover of the molecular pump is provided with a sealing groove.
Furthermore, a cooling water tank is arranged inside the valve cover of the molecular pump, a water inlet and a water outlet are connected to the outside of the cooling water tank, and the water inlet and the water outlet are connected with a water nozzle joint.
Furthermore, a cooling water tank is also arranged on the outer surface of the vacuum cavity.
Furthermore, the cooling water tank on the outer surface of the vacuum cavity is bent at 90 degrees and distributed in a reciprocating manner.
Adopt above-mentioned scheme, the utility model discloses a single set of cylinder mechanism, opening and being closed of a plurality of molecular pump valve gap of synchro control has following beneficial effect:
1. the cost is superior to that of adopting a plurality of sets of control mechanisms, and the production and manufacturing cost of the equipment is reduced;
2. the mechanical structure is simplified to a certain extent, the overall size of the equipment is reduced, and the occupied space of the equipment is reduced;
3. the number of driving cylinders is reduced, the control difficulty is greatly reduced, and the control convenience is improved.
Drawings
Fig. 1 is a schematic view of a three-dimensional structure of the present invention.
Fig. 2 is a schematic view of a three-dimensional structure of the present invention.
Fig. 3 is a schematic structural diagram of the driving assembly of the present invention.
Fig. 4 is a schematic view of the three-dimensional structure of the valve cover of the molecular pump of the present invention.
Fig. 5 is a sectional view of the valve cover of the molecular pump of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 and 2, the present invention provides a single-drive dual-valve-cover high-valve mechanism, which includes: a plurality of high vacuum molecular pumps 1, molecular pump valve gap 2, vacuum cavity 3 and drive assembly 4, every high vacuum molecular pump 2 corresponds and sets up a molecular pump valve gap 2, in this embodiment, is equipped with two high vacuum molecular pumps 1 and two molecular pump valve gaps 2 altogether.
The high-vacuum molecular pump 1 is a common device in the vacuum coating industry, and the high-vacuum molecular pump 1 is connected with the vacuum cavity 3.
Referring to fig. 4 and 5, the molecular pump valve cover 2 is located inside the vacuum chamber 3, the molecular pump valve cover 2 is made of a metal material (such as stainless steel), and is a circular plate welding member having a sealing groove 21 on a bottom surface thereof and a cooling water tank 22 inside thereof, wherein the cooling water tank 22 is externally connected with a water inlet 23 and a water outlet 24, and the water inlet 23 and the water outlet 24 are connected with a water nozzle joint.
Two cavity side surfaces of the vacuum cavity 3 are formed by bending stainless steel plates and are welded with two flat plates on the top surface and the bottom surface of the cavity together, and frame-shaped connecting flanges are welded at two ends of the cavity so as to be conveniently connected to the main vacuum cavity.
The bottom plate of the vacuum cavity 3 is provided with round holes corresponding to each high-vacuum molecular pump, the high-vacuum molecular pumps are communicated through the round holes, the sealing positions of the valve covers of the molecular pumps are convenient to position, the sealing grooves 21 of the valve covers 2 of the molecular pumps are matched with the round holes in the bottom surface of the vacuum cavity 3, and the round holes in the bottom surface of the vacuum cavity 3 are sealed when the valve covers 2 of the molecular pumps are covered.
The two curved side surfaces of the vacuum chamber 3 are welded with cooling water tanks 31, and the cooling water tanks 31 are distributed in a 90-degree bending reciprocating manner to increase the cooling area.
The driving component 4 is connected with the molecular pump valve cover 2 and used for driving the molecular pump valve cover 2 to be opened or closed.
Referring to fig. 3, specifically, the driving assembly 4 includes: a driving cylinder 41, a driving shaft swing arm 42, a driving shaft 43, a driven shaft 44, a driven shaft swing arm 45, and a pressing rod 46. One end of the driving shaft swing arm 42 is connected with the driving cylinder 41, the other end of the driving shaft swing arm is connected with the driving shaft 43, the driven shaft 44 is connected with the driving shaft 43 and the driven shaft swing arm 42, the pressing rod 46 is connected with the driven shaft swing arm 45 and the molecular pump valve covers 2, and one pressing rod 46 can be connected with a plurality of molecular pump valve covers 2.
The driving cylinder 41 is located above the molecular pump valve cover 2, the driving shaft swing arm 42 and the driving shaft 43 are 90 degrees, the driven shaft 44 and the driving shaft 43 are a straight line, the driven shaft swing arm 45 and the driven shaft 44 are 90 degrees, and the pressing rod 46 and the driven shaft swing arm 45 are 90 degrees. The structural design can reduce the overall dimension of the whole mechanism and reduce the occupied space. And a sealing shaft sleeve 47 is arranged at the joint of the driving shaft swing arm 42 and the driving shaft 41, and the driven shaft 44 is connected with the driving shaft 43 through a coupling 48.
The utility model discloses an action flow as follows:
when the valve cover 2 of the molecular pump needs to be opened, the control system sends an instruction, the rodless side of the driving air cylinder 41 is communicated with pressure air, so that an air cylinder piston rod is pushed out, the air cylinder piston rod pushes the driving shaft swing arm 42 to swing, the driving shaft swing arm 42 pushes the driving shaft 43 to rotate, the driven shaft swing arm 45 on the driven shaft 44 is driven to swing through the coupler 48, and therefore the driving pressure rod 46 moves upwards, and the valve cover 2 of the molecular pump is driven to be opened upwards.
When the valve cover 2 of the molecular pump needs to be closed, the control system sends an instruction, the rod side of the driving air cylinder 41 is communicated with pressure air, so that the piston rod of the air cylinder is retracted, the driving shaft swing arm 42 is driven to swing, the driving shaft 43 is further pushed to rotate, the driven shaft swing arm 45 on the driven shaft 44 is driven to swing through the coupler 48, the driving pressure rod 46 is driven to move downwards, and the valve cover 2 of the molecular pump is further driven to be closed downwards.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A single drive dual bonnet high valve mechanism, comprising: the high-vacuum molecular pump is connected with the vacuum cavity, the molecular pump valve cover covers the high-vacuum molecular pump and is positioned in the vacuum cavity, and the driving component is connected with the molecular pump valve cover and is used for driving the molecular pump valve cover to be opened or closed;
the drive assembly includes: drive actuating cylinder, driving shaft swing arm, driving shaft, driven shaft swing arm and depression bar, the one end of driving shaft swing arm with drive actuating cylinder connects, the other end with the driving shaft is connected, the driven shaft is connected the driving shaft and the driven shaft swing arm, the depression bar with driven shaft swing arm and molecular pump valve lid are connected.
2. The single-drive double-valve-cover high-valve mechanism according to claim 1, wherein the high-vacuum molecular pump is arranged on the bottom surface of the vacuum cavity, the drive cylinder is positioned above the valve cover of the molecular pump, the swing arm of the drive shaft is 90 degrees to the drive shaft, the driven shaft is in a straight line with the drive shaft, the swing arm of the driven shaft is 90 degrees to the driven shaft, and the press rod is 90 degrees to the swing arm of the driven shaft.
3. The single-drive double-valve cover high valve mechanism as claimed in claim 2, wherein a sealing shaft sleeve is arranged at the joint of the driving shaft swing arm and the driving shaft, and the driven shaft is connected with the driving shaft through a coupling.
4. A single drive dual valve cover high valve mechanism according to any one of claims 1 to 3, wherein at least two sets of high vacuum molecular pumps are provided.
5. The single-drive double-valve cover high valve mechanism as claimed in claim 4, wherein a circular hole is formed in the bottom surface of the vacuum cavity corresponding to each high vacuum molecular pump, and a sealing groove is formed in the bottom surface of the valve cover of the molecular pump.
6. The single-drive double-valve cover high valve mechanism as claimed in claim 4, wherein a cooling water tank is arranged inside the valve cover of the molecular pump, a water inlet and a water outlet are connected to the outside of the cooling water tank, and the water inlet and the water outlet are connected with a water nozzle joint.
7. The single-drive double-valve cover high valve mechanism as claimed in claim 4, wherein a cooling water tank is also arranged on the outer surface of the vacuum cavity.
8. The single-drive double-valve cover high valve mechanism as claimed in claim 7, wherein the cooling water grooves on the outer surface of the vacuum cavity are distributed in a 90-degree bending reciprocating manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221327232.4U CN217328722U (en) | 2022-05-30 | 2022-05-30 | Single-drive double-valve-cover high valve mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221327232.4U CN217328722U (en) | 2022-05-30 | 2022-05-30 | Single-drive double-valve-cover high valve mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217328722U true CN217328722U (en) | 2022-08-30 |
Family
ID=82987151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221327232.4U Active CN217328722U (en) | 2022-05-30 | 2022-05-30 | Single-drive double-valve-cover high valve mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217328722U (en) |
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2022
- 2022-05-30 CN CN202221327232.4U patent/CN217328722U/en active Active
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