CN214782129U - Vacuum coating cavity door adsorption structure - Google Patents
Vacuum coating cavity door adsorption structure Download PDFInfo
- Publication number
- CN214782129U CN214782129U CN202120913115.5U CN202120913115U CN214782129U CN 214782129 U CN214782129 U CN 214782129U CN 202120913115 U CN202120913115 U CN 202120913115U CN 214782129 U CN214782129 U CN 214782129U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- door
- vacuum coating
- coating cavity
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Abstract
The utility model provides a vacuum coating cavity door adsorption structure, including vacuum coating cavity and the door that is used for sealing the vacuum coating cavity, a side of vacuum coating cavity laminating door is equipped with vacuum tank and seal structure, adsorption structure still includes the evacuation mechanism that is linked together with the vacuum tank, evacuation mechanism makes vacuum coating cavity AND gate laminating sealed through vacuuming the vacuum tank. In the adsorption structure of the utility model, the stress on the door surface is uniform, and the local deformation can not be generated; the hinge structure for connecting the door and the vacuum coating cavity is very simple, and has no high strength and precision requirements; the operation is simple, and the automation degree is high.
Description
Technical Field
The utility model relates to a vacuum coating device technical field especially relates to a vacuum coating cavity door adsorption structure.
Background
The sealing of the domestic existing vacuum chamber door mainly depends on an external pressing mechanism. The device mainly comprises a purely mechanical pressing mechanism and a pneumatic pressing mechanism. Purely mechanical hold-down mechanisms can be broadly divided into simple mechanical hold-down mechanisms and complex hold-down mechanisms.
Simple mechanical hold-down mechanism: the structure is simple, the manufacture is convenient, the cost is low, but the box door and the box body are pressed together, the labor is more consumed, and the pressing is more labor-consuming when the box body door is deformed a little; and is limited to compact use with smaller case sizes; the cam of the corresponding pressing part is worn quickly, and the service life is short. Complicated hold-down mechanism: the advantage is that when the structure is used for pressing the box body door and the box body, the rotation is stable and flexible, and the labor is saved; even if the box body door has small deformation, the compaction is more labor-saving, and the service life is relatively long; the disadvantages are as follows: the manufacturing difficulty is increased, the production and processing period is prolonged, the assembly and manufacturing cost is greatly increased, the economical efficiency is poor, and the method cannot be widely applied. Pneumatic hold-down mechanism: the service life is long; the manual pressing is not needed, the production efficiency is high, and the pressing is reliable; the disadvantage is that the external structure is complex, and the abrasion of the door shaft is increased because the cylinder force can not vertically act on the vertical surface of the door; and all have the problem of single stress point.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving the technical problem who exists among the prior art. Therefore, the utility model provides a vacuum coating cavity door adsorption structure, the purpose is the sealed of realization vacuum cavity door under the prerequisite that does not adopt the outside to compress tightly.
Based on the above object, the utility model provides a vacuum coating cavity door adsorption structure, include the vacuum coating cavity and be used for sealing the door of vacuum coating cavity, a side of vacuum coating cavity laminating door is equipped with vacuum tank and seal structure, adsorption structure still includes the evacuation mechanism that is linked together with the vacuum tank, the evacuation mechanism makes vacuum coating cavity AND gate laminating sealed through to vacuum tank evacuation.
The sealing structure comprises a sealing groove and a sealing ring arranged in the sealing groove.
The sealing groove is two, and two sealing grooves are the ring channel, the sealing washer is O type sealing washer, the vacuum groove is located between two sealing grooves.
The vacuum groove is an annular vacuum groove.
The vacuum pumping mechanism comprises a vacuum pump, a vacuum pressure regulating valve, a control valve and a vacuum connecting pipeline, and the vacuum pump is communicated with the vacuum groove through the vacuum connecting pipeline.
The utility model has the advantages that: the utility model discloses a surface at vacuum coating cavity AND gate laminating sets up the vacuum tank to carry out the evacuation through outside evacuation mechanism, realize that door and vacuum coating cavity adsorb the laminating in the negative pressure of laminating department, simultaneously, set up seal groove and sealing washer at the binding face of vacuum coating cavity, realize that vacuum coating cavity AND gate adsorbs the sealed after the laminating. In the adsorption structure of the utility model, the stress on the door surface is uniform, and the local deformation can not be generated; the hinge structure for connecting the door and the vacuum coating cavity is very simple, and has no high strength and precision requirements; the operation is simple, and the automation degree is high.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
FIG. 3 is an enlarged view of a portion of FIG. 2;
fig. 4 is a schematic view of a connection structure of the vacuum-pumping mechanism and the vacuum coating chamber.
Labeled as:
1. a vacuum coating cavity; 2. a door; 3. a vacuum tank; 4. a seal ring; 5. a vacuum tube connector; 6. a vacuum pump; 7. a control valve; 8. and vacuum connecting pipelines.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.
It should be noted that unless otherwise defined, technical or scientific terms used in the embodiments of the present invention should have the ordinary meaning as understood by those having ordinary skill in the art to which the present disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
The utility model provides a vacuum coating cavity door adsorption structure, includes vacuum coating cavity 1 and the door 2 that is used for sealing vacuum coating cavity 1, and a side of vacuum coating cavity 1 laminating door 2 is equipped with vacuum tank 3 and seal structure, and this adsorption structure still includes the evacuation mechanism who is linked together with vacuum tank 3, and the evacuation mechanism makes vacuum coating cavity 1 and door 2 laminating sealed through the evacuation to vacuum tank 3. In the adsorption structure, the vacuum groove 3 is arranged on the surface attached to the vacuum coating cavity and the door, and the external vacuumizing mechanism is used for vacuumizing, so that the door and the vacuum coating cavity are attached to each other in a negative pressure adsorption mode at the attaching position, and meanwhile, the sealing structure is arranged on the attaching surface of the vacuum coating cavity, so that the vacuum coating cavity and the door are sealed after being attached to each other in an adsorption mode.
As a preferred embodiment, as shown in fig. 2 and 3, the sealing structure includes a sealing groove and a sealing ring 4 installed in the sealing groove. Through setting up the seal groove, with the sealing washer installation like the seal groove after, realize fine sealed effect behind vacuum coating cavity AND gate absorption laminating.
As a further improvement, two sealing grooves are preferably adopted, the two sealing grooves are annular grooves, the sealing ring 4 is an O-shaped sealing ring 4, and the vacuum groove 3 is arranged between the two sealing grooves. The vacuum groove is preferably provided at a position intermediate between the two seal grooves. The structure arrangement optimizes the structure layout and well ensures the sealing effect. The vacuum vessel 3 is an annular vacuum vessel 3. When the vacuum film coating device is specifically arranged, three grooves are processed on the surfaces of the vacuum film coating cavity and the door, wherein the three grooves are annular sealing grooves for placing O-shaped sealing rings, and one groove is a vacuum annular groove in the middle of the two annular sealing grooves.
As shown in fig. 4, the vacuum pumping mechanism includes a vacuum pump 6, a vacuum pressure regulating valve, a control valve 7, and a vacuum connecting line 8, and the vacuum pump 6 is communicated with the vacuum tank 3 through the vacuum connecting line 8. Specifically, a vacuum channel communicated with the vacuum groove is arranged in the vacuum coating cavity, the vacuum channel can be a multi-section channel communicated as shown in fig. 3, a vacuum pipe connecting port 5 is correspondingly arranged on the vacuum coating cavity, one end of a vacuum connecting pipeline is connected with the vacuum pipe connecting port, and the other end of the vacuum connecting pipeline is connected with a vacuum pump.
The working steps of the adsorption structure are as follows:
firstly, closing a door to close a vacuum coating cavity;
and opening the control valve, and vacuumizing the vacuum groove between the two sealing rings through a vacuum pump to realize the sealing of the vacuum coating cavity and the door after adsorption and lamination.
In the adsorption structure of the utility model, the stress on the door surface is uniform, and the local deformation can not be generated; the hinge structure for connecting the door and the vacuum coating cavity is very simple, and has no high strength and precision requirements; the operation is simple, and the automation degree is high.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also technical features in the above embodiments or in different embodiments can be combined, steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The present embodiments are intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omission, modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (5)
1. The utility model provides a vacuum coating cavity door adsorption structure, includes vacuum coating cavity and the door that is used for sealing the vacuum coating cavity, its characterized in that, a side of vacuum coating cavity laminating door is equipped with vacuum tank and seal structure, adsorption structure still includes the evacuation mechanism that is linked together with the vacuum tank, the evacuation mechanism makes vacuum coating cavity and door laminating sealed through the evacuation to the vacuum tank.
2. The vacuum coating chamber door attachment structure of claim 1, wherein the sealing structure comprises a sealing groove and a sealing ring mounted in the sealing groove.
3. The vacuum coating chamber door attachment structure of claim 2, wherein there are two sealing grooves, both sealing grooves are annular grooves, the sealing ring is an O-ring, and the vacuum groove is disposed between the two sealing grooves.
4. The vacuum coating chamber door adsorption structure of claim 1, wherein said vacuum groove is an annular vacuum groove.
5. The vacuum coating chamber door adsorption structure of claim 1, wherein the vacuum pumping mechanism comprises a vacuum pump, a vacuum pressure regulating valve, a control valve and a vacuum connecting pipeline, and the vacuum pump is communicated with the vacuum groove through the vacuum connecting pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120913115.5U CN214782129U (en) | 2021-04-29 | 2021-04-29 | Vacuum coating cavity door adsorption structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120913115.5U CN214782129U (en) | 2021-04-29 | 2021-04-29 | Vacuum coating cavity door adsorption structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214782129U true CN214782129U (en) | 2021-11-19 |
Family
ID=78691521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120913115.5U Active CN214782129U (en) | 2021-04-29 | 2021-04-29 | Vacuum coating cavity door adsorption structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214782129U (en) |
-
2021
- 2021-04-29 CN CN202120913115.5U patent/CN214782129U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102599822B (en) | Safety valve of coffee maker | |
| CN214782129U (en) | Vacuum coating cavity door adsorption structure | |
| CN203314756U (en) | Air charging connector of sparkling water machine | |
| CN207500544U (en) | A kind of spherical shape plugging type check valve | |
| CN216742848U (en) | Stop valve | |
| CN201347847Y (en) | Gas automatical pressure maintaining complement booster pump | |
| CN210317739U (en) | Double-sealing screw pump capable of reducing noise and energy consumption | |
| CN206190589U (en) | Chemical industry pump mechanical seal device convenient to it is fixed | |
| CN2474875Y (en) | Self sealing quick exchange joint | |
| CN2400650Y (en) | Hard sealing high-temperature ball valve | |
| CN215257854U (en) | Novel high-pressure stop valve | |
| CN210318623U (en) | Novel pressure reducing valve | |
| CN217762181U (en) | Negative pressure diaphragm valve | |
| CN214093041U (en) | Novel mechanical seal device for shaft | |
| CN219933080U (en) | Spring plate type valve locking structure | |
| CN215214796U (en) | Butterfly valve seat with good sealing effect | |
| CN220816625U (en) | Vacuum ball valve | |
| CN210397225U (en) | Hydraulic shaft seal part | |
| CN218480168U (en) | High gas tightness industrial chemicals carries stop valve | |
| CN211367642U (en) | Vacuum floating sealing device | |
| CN209245283U (en) | Three-eccentric-butterfly-valve with metal sealing | |
| CN212338177U (en) | Mechanical sealing structure with strong back pressure bearing capacity | |
| CN201318267Y (en) | Mini air compressor pressure adjuster | |
| CN2641403Y (en) | Tube clamping valve controlled by man power or electricity | |
| CN220249011U (en) | Three-way copper valve for fluid delivery |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |