CN217305714U - Yellow light process exposure offset correction device - Google Patents

Yellow light process exposure offset correction device Download PDF

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Publication number
CN217305714U
CN217305714U CN202220373678.4U CN202220373678U CN217305714U CN 217305714 U CN217305714 U CN 217305714U CN 202220373678 U CN202220373678 U CN 202220373678U CN 217305714 U CN217305714 U CN 217305714U
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China
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fixed connection
fixedly connected
pillar
cylinder
screw rod
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CN202220373678.4U
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Chinese (zh)
Inventor
肖啸
见强
周国鹏
张建权
郑志鹏
刘明淇
曾云飞
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Hubei Xiangcheng Intelligent Electromechanical Research Institute Co ltd
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Hubei Xiangcheng Intelligent Electromechanical Research Institute Co ltd
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Abstract

The utility model relates to an image processing technology field discloses a yellow light processing procedure exposure skew correcting unit, including the stage body, the top left part fixed connection of stage body is in the bottom of longeron, the bottom inner wall fixed connection of longeron is in elevator motor's bottom, elevator motor's drive end fixed connection is in the bottom of screw rod, the periphery threaded connection of screw rod has the clamping bar, the bottom fixed connection of longeron is in the bottom left part of crossbeam, the top right part fixedly connected with cylinder of crossbeam, the inner wall middle part of stage body is provided with the pillar, the equal fixed connection in the drive end of pneumatic cylinder in both ends about the pillar, the top fixed connection of pillar is in the bottom of cushion cap. The utility model discloses in, elevator motor rotates and drives the screw rod and rotate, and the screw rod rotates and drives the clamping bar and remove, and the clamping bar removes and drives the light-passing board and remove, and the drive end of cylinder promotes lamps and lanterns and removes, adjusts the height of light-passing board and lamps and lanterns according to not unidimensional product.

Description

Yellow light process exposure offset correction device
Technical Field
The utility model relates to an image processing technology field especially relates to a yellow light processing procedure exposure skew correcting unit.
Background
The yellow light process transfers the main pattern of the light shield to the photosensitive material, and uses the light to irradiate the photosensitive material through the light shield, and then uses the solvent to soak the irradiated part of the photosensitive material to dissolve or retain, so that the formed photoresist pattern can be identical to or complementary with the light shield, and sometimes the device can be deviated in the yellow light process, and it needs to be corrected.
The exposure requirement of the yellow light process is high, the angle and the illumination intensity are required to meet the conditions, and the common device has the following defects: firstly, the height of lamps and lanterns can not be adjusted to ordinary device, and the light-passing board also can not remove, can not adjust apart from the height according to the particular case of exposure, influences the quality of product, and secondly the device exposure in-process can appear the condition of skew, and the processing procedure board does not aim at the centre, causes the product that the processing procedure exposure came out to have the flaw, and it is very inconvenient to use.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a yellow light processing procedure exposure offset correction device.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a yellow light processing procedure exposure skew correcting unit, includes the stage body, the top left part fixed connection of stage body is in the bottom of longeron, the bottom inner wall fixed connection of longeron is in elevator motor's bottom, elevator motor's drive end fixed connection is in the bottom of screw rod, the periphery threaded connection of screw rod has the clamping bar, the bottom fixed connection of longeron is in the bottom left part of crossbeam, the top right part fixedly connected with cylinder of crossbeam, the inner wall middle part of stage body is provided with the pillar, the equal fixed connection in the drive end of pneumatic cylinder in both ends about the pillar, the top fixed connection of pillar is in the bottom of cushion cap.
As a further description of the above technical solution:
the right part of the front end of the table body is fixedly connected with an operating table, and the operating table is electrically connected with a lifting motor, an air cylinder and a hydraulic cylinder.
As a further description of the above technical solution:
the right end of the longitudinal beam is provided with an opening, and the clamping rod vertically penetrates through the opening.
As a further description of the above technical solution:
and a lamp is fixedly connected to the bottom end of the cylinder.
As a further description of the above technical solution:
and the right end of the clamping rod is fixedly connected with a light-transmitting plate.
As a further description of the above technical solution:
the bottom of pillar is provided with the gyro wheel.
As a further description of the above technical solution:
the top end of the bearing platform is fixedly connected to the bottom end of the processing plate.
As a further description of the above technical solution:
the four corners of the bottom end of the table body are fixedly connected to the top ends of the supporting legs.
The utility model discloses following beneficial effect has:
1. the utility model discloses in, at first elevator motor rotates and drives the screw rod and rotate, and the screw rod rotates and drives the clamping bar and remove, then the clamping bar removes and drives the light-passing board and remove, has reached the purpose of adjusting the light-passing board height from top to bottom, and the drive end of last cylinder promotes lamps and lanterns and removes, adjusts the distance of lamps and lanterns to the processing procedure board, adjusts the height of light-passing board and lamps and lanterns according to not unidimensional product, guarantees to adapt to the manufacturing of various sizes product, has improved the quality of product, and it is very convenient to use.
2. The utility model discloses in, at first the equal fixedly connected with pneumatic cylinder in both ends about the pillar, the drive end of pneumatic cylinder removes and drives the pillar and removes, then the pillar removes and drives the cushion cap and remove, and the cushion cap removes and drives the processing procedure board and remove at last, has reached the purpose that the skew was rectified, has guaranteed that the processing procedure board is in the intermediate position, has ensured the quality of product, and it is very convenient to use.
Drawings
Fig. 1 is a front view of a yellow light process exposure offset calibration device according to the present invention;
fig. 2 is a detailed view of exposure adjustment of a yellow light process exposure offset calibration device according to the present invention;
fig. 3 is a detailed diagram of a correction device of the yellow light process exposure offset correction device provided by the present invention.
Illustration of the drawings:
1. a stage body; 2. a process plate; 3. a bearing platform; 4. an operation table; 5. a support leg; 6. a light-transmitting plate; 7. a clamping rod; 8. an opening; 9. a stringer; 10. a cross beam; 11. a light fixture; 12. a cylinder; 13. a lifting motor; 14. a screw; 15. a pillar; 16. a hydraulic cylinder; 17. and (4) a roller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-3, the present invention provides an embodiment: a yellow light process exposure offset correction device comprises a table body 1, the left part of the top end of the table body 1 is fixedly connected to the bottom end of a longitudinal beam 9, the longitudinal beam 9 plays a supporting role, the inner wall of the bottom end of the longitudinal beam 9 is fixedly connected to the bottom end of a lifting motor 13, the driving end of the lifting motor 13 is fixedly connected to the bottom end of a screw rod 14, the outer periphery of the screw rod 14 is in threaded connection with a clamping rod 7, the lifting motor 13 rotates to drive the screw rod 14 to rotate, the screw rod 14 rotates to drive the clamping rod 7 to move, the clamping rod 7 moves to drive a light transmission plate 6 to move, the purpose of adjusting the height of the light transmission plate 6 up and down is achieved, the bottom end of the longitudinal beam 9 is fixedly connected to the left part of the bottom end of a cross beam 10, the cross beam 10 plays a role of fixedly supporting an air cylinder 12 and a lamp 11, the air cylinder 12 is fixedly connected to the right part of the top end of the cross beam 10, the driving end of the air cylinder 12 pushes the lamp 11 to move, the distance from the lamp 11 to a process plate 2 is adjusted, the heights of the light transmission plate 6 and the lamp 11 are adjusted according to products with different sizes, the product manufacturing that the assurance adapts to various sizes, the quality of product has been improved, the inner wall middle part of stage body 1 is provided with pillar 15, the equal fixed connection in the drive end of pneumatic cylinder 16 in both ends about pillar 15, the top fixed connection of pillar 15 is in the bottom of cushion cap 3, it is more accurate and stable to adopt the 16 drive modes of two pneumatic cylinders, the drive end of pneumatic cylinder 16 removes and drives pillar 15 and remove, pillar 15 removes and drives cushion cap 3 and remove, cushion cap 3 removes and drives the removal of processing procedure board 2, the purpose of skew correction has been reached, it is in the intermediate position to have guaranteed processing procedure board 2, the quality of product has been ensured.
The right part of the front end of the table body 1 is fixedly connected with an operating table 4, the operating table 4 is electrically connected with a lifting motor 13, an air cylinder 12 and a hydraulic cylinder 16, through operation panel 4 control electrical equipment work, the right-hand member of longeron 9 is provided with opening 8, clamping bar 7 runs through opening 8 perpendicularly, make things convenient for reciprocating of clamping bar 7, the bottom fixedly connected with lamps and lanterns 11 of cylinder 12, the drive end of cylinder 12 promotes lamps and lanterns 11 and removes, adjust lamps and lanterns 11 to the distance of processing procedure board 2, the right-hand member fixedly connected with light-passing board 6 of clamping bar 7, light-passing board 6 can be dismantled, the bottom of pillar 15 is provided with gyro wheel 17, the frictional force that pillar 15 removed has been reduced, the top fixed connection of cushion cap 3 is in the bottom of processing procedure board 2, processing procedure board 2 places the top at cushion cap 3, both can dismantle, the equal fixed connection in the top of landing leg 5 in bottom four corners of stage body 1, landing leg 5 plays the effect of support and bearing.
The working principle is as follows: the lifting motor 13 rotates to drive the screw 14 to rotate, the screw 14 rotates to drive the clamping rod 7 to move, the clamping rod 7 moves to drive the light transmission plate 6 to move, the purpose of adjusting the height of the light transmission plate 6 up and down is achieved, the driving end of the air cylinder 12 pushes the lamp 11 to move, the distance between the lamp 11 and the processing board 2 is adjusted, the height of the light-transmitting plate 6 and the height of the lamp 11 are adjusted according to products of different sizes, the product manufacturing of various sizes are guaranteed to be adapted, the product quality is improved, hydraulic cylinders 16 are fixedly connected to the left end and the right end of the support column 15, the driving mode of the double hydraulic cylinders 16 is more accurate and stable, the driving end of each hydraulic cylinder 16 moves to drive the support column 15 to move, the support column 15 moves to drive the bearing platform 3 to move, the bearing platform 3 moves to drive the process plate 2 to move, the purpose of offset correction is achieved, the process plate 2 is guaranteed to be located at the middle position, the product quality is guaranteed, and the use is very convenient.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims (8)

1. A yellow light process exposure offset correction device comprises a stage body (1), and is characterized in that: the utility model discloses a hydraulic support platform, including the platform body, the top left part fixed connection of platform body (1) is in the bottom of longeron (9), the bottom inner wall fixed connection of longeron (9) is in the bottom of elevator motor (13), the drive end fixed connection of elevator motor (13) is in the bottom of screw rod (14), the periphery threaded connection of screw rod (14) has clamping bar (7), the bottom left part of the bottom fixed connection of longeron (9) at crossbeam (10), the top right part fixedly connected with cylinder (12) of crossbeam (10), the inner wall middle part of platform body (1) is provided with pillar (15), the equal fixed connection in the drive end of pneumatic cylinder (16) in both ends about pillar (15), the top fixed connection of pillar (15) is in the bottom of cushion cap (3).
2. The apparatus of claim 1, wherein the apparatus comprises: the right part of the front end of the table body (1) is fixedly connected with an operation table (4), and the operation table (4) is electrically connected with a lifting motor (13), an air cylinder (12) and a hydraulic cylinder (16).
3. The apparatus of claim 1, wherein the offset correction device comprises: an opening (8) is formed in the right end of the longitudinal beam (9), and the clamping rod (7) penetrates through the opening (8) vertically.
4. The apparatus of claim 1, wherein the apparatus comprises: the bottom end of the cylinder (12) is fixedly connected with a lamp (11).
5. The apparatus of claim 1, wherein the offset correction device comprises: and the right end of the clamping rod (7) is fixedly connected with a light-transmitting plate (6).
6. The apparatus of claim 1, wherein the apparatus comprises: the bottom end of the strut (15) is provided with a roller (17).
7. The apparatus of claim 1, wherein the apparatus comprises: the top end of the bearing platform (3) is fixedly connected to the bottom end of the processing plate (2).
8. The apparatus of claim 1, wherein the apparatus comprises: four corners of the bottom end of the table body (1) are fixedly connected to the top ends of the supporting legs (5).
CN202220373678.4U 2022-02-24 2022-02-24 Yellow light process exposure offset correction device Active CN217305714U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220373678.4U CN217305714U (en) 2022-02-24 2022-02-24 Yellow light process exposure offset correction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220373678.4U CN217305714U (en) 2022-02-24 2022-02-24 Yellow light process exposure offset correction device

Publications (1)

Publication Number Publication Date
CN217305714U true CN217305714U (en) 2022-08-26

Family

ID=82928580

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220373678.4U Active CN217305714U (en) 2022-02-24 2022-02-24 Yellow light process exposure offset correction device

Country Status (1)

Country Link
CN (1) CN217305714U (en)

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