CN217298083U - Cooling equipment of single crystal furnace - Google Patents
Cooling equipment of single crystal furnace Download PDFInfo
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- CN217298083U CN217298083U CN202220219974.9U CN202220219974U CN217298083U CN 217298083 U CN217298083 U CN 217298083U CN 202220219974 U CN202220219974 U CN 202220219974U CN 217298083 U CN217298083 U CN 217298083U
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Abstract
The utility model discloses a cooling device of a single crystal furnace, which comprises a cooling device body, wherein the cooling device body is positioned in a sealing box, and the first side of the sealing box comprises an opening; the cooling apparatus body includes: the cooling water pipe, the linear slide rail and the motor are arranged; the cooling water pipe comprises at least one U-shaped water pipe extending along a first direction and used for circulating water, the motor is used for driving the linear slide rail to drive the cooling water pipe to move along the first direction, part of the cooling water pipe is positioned outside the seal box and used for being inserted into a feed inlet of the single crystal furnace connected with the cooling device when the cooling device body is in a first state, and the cooling water pipe is positioned inside the seal box when the cooling device body is in a second state; a part of cooling water pipe is positioned outside the seal box and is inserted into a feed inlet of the single crystal furnace connected with the cooling device, so that the single crystal furnace is cooled, and the cooling efficiency is effectively improved.
Description
Technical Field
The utility model relates to a single crystal growing furnace cooling technology field, more specifically relates to a single crystal growing furnace cooling arrangement.
Background
In the preparation process of the czochralski silicon single crystal, a thermal field of a single crystal furnace is in a high-temperature state, and after crystal pulling is finished, the temperature of the thermal field is required to be reduced to below 300 ℃ to ensure that parts of the thermal field are not oxidized, and then the furnace is disassembled. However, the time for naturally cooling the single crystal furnace needs 8-10 hours to disassemble the furnace, and the furnace needs to be automatically cooled for a long time before disassembly, so that the cooling efficiency of the single crystal furnace is influenced.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a single crystal growing furnace cooling arrangement, through with some the condenser tube is located the seal box outside is used for inserting the feed inlet of the single crystal growing furnace of being connected with cooling arrangement, carries out cooling treatment to the single crystal growing furnace, effectively improves cooling efficiency.
On one hand, the utility model provides a cooling device of a single crystal furnace, which comprises a cooling device body, wherein the cooling device body is positioned in a sealing box, and the first side of the sealing box comprises an opening;
the cooling apparatus body includes: the cooling water pipe, the linear slide rail and the motor are arranged;
the cooling water pipe comprises at least one U-shaped water pipe extending along a first direction and used for circulating water, the cooling water pipe comprises a water inlet and a water outlet, the water inlet and the water outlet are located on a second side of the seal box, and the first side and the second side are respectively located on two sides of the cooling equipment;
the linear slide rail extends along the first direction, the linear slide rail is respectively connected with the cooling water pipe and the motor, the motor is used for driving the linear slide rail to drive the cooling water pipe to move along the first direction, part of the cooling water pipe is positioned outside the seal box and is used for being inserted into a feed inlet of a single crystal furnace connected with cooling equipment when the cooling equipment body is in a first state, and the cooling water pipe is positioned inside the seal box when the cooling equipment body is in a second state;
wherein the first direction is a direction in which the second side points to the first side.
Optionally, the cooling device body further comprises a connecting piece, wherein the connecting piece comprises a first face and a second face which are connected;
the first surface is perpendicular to the linear slide rail and comprises a water inlet hole and a water outlet hole, one side of the water inlet of the cooling water pipe penetrates through the water inlet hole, and one side of the water outlet penetrates through the water outlet hole;
the second surface is parallel to the linear slide rail, and the second surface is connected with the linear slide rail.
Optionally, the first side and the second side form a storage space;
the cooling device body further comprises a water storage tank, the water storage tank is located in the storage space and comprises a first water storage tank and a second water storage tank, the water inlet is connected with the first water storage tank, and the water outlet is connected with the second water storage tank.
Optionally, the seal box comprises a first side wall and a second side wall oppositely arranged along a second direction;
the cooling equipment body further comprises a water pipe positioning rod, a water inlet pipe and a water outlet pipe, the positioning rod is positioned on the second side, close to the seal box, and the water pipe positioning rod comprises a first water pipe positioning rod and a second water pipe positioning rod;
one end of the first water pipe positioning rod is fixedly connected with the first side wall, the first end of the water inlet pipe is connected with the first water storage tank, and the water inlet pipe is wound on the first water pipe positioning rod;
one end of the second water pipe positioning rod is fixedly connected with the second side wall, the first end of the water outlet pipe is connected with the second water storage tank, and the water outlet pipe is wound on the second water pipe positioning rod;
wherein the first direction and the second direction intersect.
Optionally, the first side wall includes a first opening, and the second end of the water inlet pipe penetrates through the first opening and extends out of the seal box;
the second side wall comprises a second opening, and the water outlet pipe penetrates through the second opening and extends out of the sealing box.
Optionally, the device further comprises an outer frame, a top plate, a bottom plate and a plurality of rollers;
in a third direction, the outer frame includes a top side and a bottom side, the bottom side being connected to the roller;
the top plate is positioned on one side of the top side, which is far away from the bottom side, and is fixedly connected with the external frame, and the top plate is connected with the sealing box through a lifting device;
the bottom plate is positioned on one side of the bottom side close to the top side and is overlapped with the external frame, and the seal box is positioned on the bottom plate;
wherein the first direction intersects with the third direction, and the third direction intersects with the linear slide rail.
Optionally, the external frame further comprises a plurality of limiting rods;
the top plate comprises a plurality of limiting holes, and the limiting rods penetrate through the limiting holes and are connected with the top plate.
Optionally, one side of the bottom plate, which is far away from the top plate, includes a plurality of limiting clamping pieces, and the limiting clamping pieces are clamped with limiting pits on the ground.
Optionally, the seal box includes a first vent hole and a second vent hole, and the first vent hole and the second vent hole are respectively located at two sides of the seal box;
the first vent hole is used for pumping air in the seal box, and the second vent hole is used for inputting the same inert gas as that in the single crystal furnace.
Optionally, the seal box further comprises a gas channel, one end of the gas channel is connected with the second vent hole, the gas channel is adjacent to the cooling water pipe, and the other end of the gas channel is located outside the seal box and used for being inserted into the single crystal furnace and inputting the circulating gas into the single crystal furnace when the cooling device body is in the first state.
Compared with the prior art, the utility model provides a single crystal growing furnace cooling arrangement, it is connected with condenser tube and motor respectively to set up linear slide rail, it removes along first direction to drive the condenser tube through motor drive linear slide rail, ensure single crystal growing furnace cooling arrangement can make partial condenser tube be located the seal box outside, and insert in the feed inlet of the single crystal growing furnace of being connected with cooling arrangement, effectively cool down the single crystal growing furnace, can shorten the blowing out cooling time about 3 hours, the utilization ratio and the production efficiency of single crystal growing furnace have been improved, and can also be after single crystal growing furnace cooling treatment, make condenser tube accomodate inside the seal box of single crystal growing furnace cooling arrangement through the motor, the operation of being convenient for, easily accomodate.
Of course, it is not necessary for any product of the present invention to achieve all of the above technical effects simultaneously.
Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments of the invention, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
FIG. 1 is a schematic structural view of a cooling apparatus of a single crystal furnace provided by the present invention;
FIG. 2 is a front view of a cooling apparatus of a single crystal furnace provided by the present invention in a second state;
FIG. 3 is an enlarged view of the cooling apparatus of the crystallization furnace shown in FIG. 2;
FIG. 4 is a front view of a cooling apparatus of a single crystal growing furnace according to the present invention in a first state;
FIG. 5 is a schematic structural view of another cooling apparatus of a single crystal furnace according to the present invention;
fig. 6 is an enlarged view of W in fig. 5.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be discussed further in subsequent figures.
At present, before the furnace is disassembled, about 8 hours are needed for a 32-inch thermal field, and about 10 hours are needed for a 36-inch thermal field, namely, the single crystal furnace needs to be cooled for 8-10 hours in a natural cooling state to be disassembled, and the single crystal furnace needs to be cooled for a long time before being disassembled, so that the unit-time capacity of the single crystal furnace is influenced.
In order to solve the technical problem, the utility model provides a cooling device of a single crystal furnace. The embodiment of the cooling device of the single crystal furnace provided by the utility model is described in detail below.
With reference to fig. 1 to fig. 6, fig. 1 is the utility model provides a structural schematic diagram of a cooling device of a single crystal furnace, fig. 2 is the utility model provides a main view of a cooling device of a single crystal furnace under the second state, fig. 3 is the enlarged view of cooling device of a single crystal furnace in fig. 2, fig. 4 is the utility model provides a main view of a cooling device of a single crystal furnace under the first state, fig. 5 is the utility model provides a structural schematic diagram of another cooling device of a single crystal furnace, fig. 6 is a structural enlarged view of W in fig. 5. The cooling device 100 of the single crystal furnace provided by the embodiment comprises a cooling device body 10, wherein the cooling device body 10 is positioned in a sealed box 20, and a first side 21 of the sealed box 20 comprises an opening Q; the cooling apparatus body 10 includes: a cooling water pipe 11, a linear slide rail 12 and a motor 13; the cooling water pipe 11 comprises at least one U-shaped water pipe 111 extending along the first direction X for circulating water, the cooling water pipe 11 comprises a water inlet S1 and a water outlet S2, the water inlet S1 and the water outlet S2 are located on the second side 22 of the sealed box 20, and the first side 21 and the second side 22 are respectively located on two sides of the cooling device; the linear slide rail 12 extends along a first direction X, the linear slide rail 12 is respectively connected with the cooling water pipe 11 and the motor 13, the motor 13 is used for driving the linear slide rail 12 to drive the cooling water pipe 11 to move along the first direction X, part of the cooling water pipe 11 is positioned outside the seal box 20 and is used for being inserted into a feed inlet of the single crystal furnace 200 connected with the cooling device when the cooling device body 10 is in a first state, and the cooling water pipe 11 is positioned inside the seal box 20 when the cooling device is in a second state; wherein the first direction X is a direction in which the second side 22 points towards the first side 21.
It can be understood that the cooling apparatus body 10 of the single crystal furnace cooling apparatus 100 provided in this embodiment includes a first side 21 and a second side 22 disposed opposite to each other along the first direction X, the first side 21 includes an opening Q, the cooling apparatus body 10 further includes a cooling water pipe 11 for circulating water, the cooling water pipe 11 includes at least one U-shaped water pipe 111 extending along the first direction X, the cooling water pipe 11 includes a water inlet S1 and a water outlet S2, the water inlet S1 and the water outlet S2 are located on the second side 22 of the seal box 20, and further includes a closed pipe far from the water inlet S1 and the water outlet S2, an end of the closed pipe far from the water inlet S1 and the water outlet S2 is disposed opposite to the opening Q, the linear slide rail 12 is driven by the motor 13 to drive the cooling water pipe 11 to move to a side close to the single crystal furnace 200 along the first direction X, so that an end of the closed pipe far from the water inlet S1 and the water outlet S2 is located outside the seal box 20, and the part of the cooling water pipe 11 is inserted into a feed inlet of the single crystal furnace 200 connected with the cooling device, so that effective cooling treatment is performed on the single crystal furnace 200, the furnace shutdown cooling time can be shortened by about 3 hours, the utilization rate and the production efficiency of the single crystal furnace are improved, and after the single crystal furnace is cooled, the linear slide rail 12 is driven by the motor 13 to drive the cooling water pipe 11 to move towards one side away from the single crystal furnace 200 along the first direction X, so that the cooling water pipe 11 is positioned in the sealing box 20, that is, the cooling water pipe 11 is accommodated in the sealing box 20 of the single crystal furnace cooling device 100, and the operation is convenient and the accommodation is easy. Meanwhile, the cooling equipment 100 of the single crystal furnace provided by the embodiment can extend and retract the cooling water pipe 11 through the motor in the whole process, the automatic design does not need manual operation of workers, the operation is more convenient, and because the feed inlet of the single crystal furnace 200 is the structure of the single crystal furnace 200, part of the cooling water pipe 11 is inserted into the single crystal furnace 200 by using the structure, the temperature of the single crystal furnace is reduced, the structure of the single crystal furnace 200 does not need to be changed, and the single crystal furnace can be matched with various models.
Wherein, condenser tube 11 includes at least one U type water pipe 111 that extends along first direction X, and U type water pipe can adopt rigid material water pipe, ensures that condenser tube 11 shape is fixed, avoids condenser tube 11 to take place deformation, guarantees that the condenser tube can insert the inside of single crystal growing furnace 200 smoothly, carries out effective cooling to single crystal growing furnace 200 and handles. And, the utility model discloses do not specifically prescribe a limit to the quantity of U-shaped water pipe, can set up according to actual conditions.
In some optional embodiments, with continuing reference to fig. 1 to 6, in the single crystal furnace cooling device 100 provided in this embodiment, the cooling device body 10 further includes a connecting member 14, and the connecting member 14 includes a first face L1 and a second face L2 connected to each other; the first face L1 is perpendicular to the linear slide rail 12, the first face L1 comprises a water inlet hole K1 and a water outlet hole K2, one side of a water inlet S1 of the cooling water pipe 11 penetrates through the water inlet hole K1, and one side of a water outlet S2 penetrates through the water outlet hole K2; the second face L2 is parallel to the linear guide 12, and the second face L2 is connected to the linear guide 12.
It can be understood that, in the cooling apparatus 100 for a single crystal furnace provided by this embodiment, the cooling apparatus body 10 further includes the connecting member 14, the connecting member 14 includes the first face L1 and the second face L2 that are connected, the second face L2 is connected to the linear slide rail 12, the first face L1 is connected to the cooling water pipe 11, and further when the motor 13 drives the linear slide rail 12 to move along the first direction X, the cooling water pipe 11 can be pushed to move closer to the single crystal furnace 200 or move away from the single crystal furnace 200, so as to realize the extension and retraction of the cooling water pipe 11 through the motor in the whole course of the cooling apparatus 100 for a single crystal furnace. The first face L1 comprises a water inlet hole K1 and a water outlet hole K2, one side of a water inlet S1 of the cooling water pipe 11 penetrates through the water inlet hole K1, one side of a water outlet S2 penetrates through the water outlet hole K2, and the influence of the first face L1 on the circulating flow of liquid in the cooling water pipe 11 is avoided.
In some alternative embodiments, with continued reference to fig. 1 to 6, the single crystal furnace cooling apparatus 100 provided in this embodiment, the first face L1 and the second face L2 form a storage space; the cooling device body 10 further comprises a water storage tank 15, the water storage tank 15 is located in the storage space, the water storage tank 15 comprises a first water storage tank 151 and a second water storage tank 152, the water outlet S2 is connected with the first water storage tank 151, and the water outlet S2 is connected with the second water storage tank 152.
It can be understood that the single crystal furnace cooling device 100 provided by the present embodiment, the connecting member 14 includes the first face L1 and the second face L2 connected, and the first face L1 and the second face L2 form a storage space; the cooling device body 10 further comprises a water storage tank 15, the water storage tank 15 is located in the storage space, and the water storage tank 15 is convenient to fix, wherein the water storage tank 15 comprises a first water storage tank 151 and a second water storage tank 152, the water inlet S1 is connected with the first water storage tank 151, and the water outlet S2 is connected with the second water storage tank 152. Wherein, the first reservoir 151 and the second reservoir 152 may be externally connected with a water tower, when liquid enters the first reservoir 151 from the water tower, the first reservoir 151 stores liquid drops and then flows into the water inlet S1 of the cooling water pipe 11 and flows in the cooling water pipe 11, when the single crystal furnace cooling device 100 is used, part of the cooling water pipe 11 is inserted into the single crystal furnace 200, the first water storage tank 151 continuously provides liquid drops with lower temperature to be introduced into the cooling water pipe 11, the cooling water pipe 11 absorbs the heat of the single crystal furnace 200 to cool the single crystal furnace 200, and the liquid with the increased temperature flows into the second water storage tank 152 through the water outlet S2, the second water storage tank 152 stores water and then flows into the water tower, the water circulation is realized, and because the liquid drop volume in the water tower is larger, the influence of the input liquid with the increased temperature on the water temperature of the liquid in the water tower is small, and the single crystal furnace 200 can be continuously cooled. Wherein, the first water storage tank 151 and the second water storage tank 152 are provided, which can be used for pre-storing some liquid, thereby avoiding the problem of discontinuous liquid supply.
In some alternative embodiments, and with continued reference to fig. 1-6, the present embodiment provides a cooling apparatus 100 for a single crystal furnace, wherein the seal box 20 includes a first sidewall 23 and a second sidewall 24 oppositely disposed along a second direction Y; the cooling device body 10 further comprises a water pipe positioning rod 16, a water inlet pipe 17 and a water outlet pipe 18, the positioning rod is located on the sealing box 20 and close to the second side 22, and the water pipe positioning rod 16 comprises a first water pipe positioning rod 161 and a second water pipe positioning rod 162; one end of the first water pipe positioning rod 161 is fixedly connected with the first side wall 23, the first end of the water inlet pipe 17 is connected with the first water storage tank 151, and the water inlet pipe 17 is wound on the first water pipe positioning rod 161; one end of the second water pipe positioning rod 162 is fixedly connected with the second side wall 24, the first end of the water outlet pipe 18 is connected with the second water storage tank 152, and the water outlet pipe 18 is wound on the second water pipe positioning rod 162; wherein the first direction X and the second direction Y intersect.
It can be understood that, in the cooling device 100 for a single crystal furnace provided by the present embodiment, the cooling device body 10 further includes a water pipe positioning rod 16, a water inlet pipe 17 and a water outlet pipe 18, the water pipe positioning rod 16 includes a first water pipe positioning rod 161 and a second water pipe positioning rod 162; one end of the first water pipe positioning rod 161 is fixedly connected with the first side wall 23, the first end of the water inlet pipe 17 is connected with the first water storage tank 151, the water inlet pipe 17 is wound on the first water pipe positioning rod 161, one end of the second water pipe positioning rod 162 is fixedly connected with the second side wall 24, the first end of the water outlet pipe 18 is connected with the second water storage tank 152, and the water outlet pipe 18 is wound on the second water pipe positioning rod 162. When condenser tube 11 inserts inside single crystal growing furnace 200, condenser tube 11 is to the one side removal that is close to single crystal growing furnace 200, can drive inlet tube 17 and outlet pipe 18 this moment and break away from water pipe positioning rod 16, guarantee the length of water pipe, and when condenser tube 11 withdraws to the inside of seal box 20, condenser tube 11 is to the one side removal of keeping away from single crystal growing furnace 200, can drive inlet tube 17 and outlet pipe 18 this moment and twine respectively on first water pipe positioning rod 161 and second water pipe positioning rod 162, be convenient for inlet tube 17 and outlet pipe 18 accomodate, avoid inlet tube 17 and outlet pipe 18 to twine each other in seal box 20 is inside, influence the hydrologic cycle of condenser tube 11. And, set up first water pipe positioning rod 161 and second water pipe positioning rod 162 and be located two relative lateral walls that set up of seal box 200 respectively, can further avoid inlet tube 17 and outlet pipe 18 contact to lead to the winding problem.
In some alternative embodiments, and with continued reference to fig. 1-6, the present embodiment provides a cooling apparatus 100 for a single crystal furnace, wherein the first sidewall 23 comprises a first opening 231, and the second end of the water inlet pipe 17 extends through the first opening 231 and out of the seal box 20; the second side wall 24 includes a second opening 241, and the outlet pipe 18 extends through the second opening 241 and out of the seal box 20.
It can be understood that in the cooling apparatus 100 of the single crystal furnace provided in the present embodiment, the first side wall 23 of the sealed box 20 includes the first opening 231, the second side wall 24 includes the second opening 241, and the water inlet pipe 17 and the water outlet pipe 18 can respectively extend out of the sealed box 20 through the first opening 231 and the second opening 241, so as to ensure the water circulation of the cooling water pipe 11.
In some alternative embodiments, and with continued reference to fig. 1-6, the present embodiment provides a single crystal furnace cooling apparatus 100 further comprising an outer frame 30, a top plate 40, a bottom plate 50, and a plurality of rollers 60; in the third direction Z, the outer frame 30 includes a top side and a bottom side, the bottom side being connected with the roller 60; the top plate 40 is positioned on one side of the top side, which is far away from the bottom side, and is fixedly connected with the outer frame 30, and the top plate 40 is connected with the seal box 20 through a lifting device 70; the bottom plate 50 is positioned on one side of the bottom side close to the top side and is overlapped with the outer frame 30, and the seal box 20 is positioned on the bottom plate 50; wherein the first direction X intersects the third direction Z, and the third direction Z intersects the linear guideway 12.
It can be understood that the cooling apparatus 100 of the single crystal furnace provided by the present embodiment further includes an outer frame 30 and a plurality of rollers 60, the seal box 20 is disposed in the outer frame 20, and the lower portion of the outer frame 30 is connected to the plurality of rollers 60, so that the plurality of rollers 60 can be used to facilitate the movement of the outer frame 30. Meanwhile, the cooling apparatus 100 of the single crystal furnace further includes a top plate 40 and a bottom plate 50, the top plate 40 and the bottom plate 50 being respectively located at the top side and the bottom side of the outer frame 30, and the bottom plate 50 being adapted to be placed at the bottom side of the outer frame 30 for receiving the seal box 20. The top plate 40 is arranged on the top side of the outer frame 30, the top plate 40 is connected with the seal box 20 through the lifting device 70, the seal box 20 can move towards or away from one side of the top plate 40 along the third direction Z direction by using the lifting device 70, the position of the seal box 20 is adjusted, the cooling water pipe 11 can be ensured to correspond to the position of the feeding hole of the single crystal furnace 200, and the subsequent cooling water pipe 11 can be smoothly inserted into the single crystal furnace 200. Alternatively, the lifting device 70 may be a jack, but is not limited thereto, and other devices that can drive the seal box 20 to move also belong to the protection scope of the present invention.
In some optional embodiments, with reference to fig. 1 to 6, the single crystal furnace cooling apparatus 100 provided in this embodiment further includes a plurality of limiting rods 31 on the outer frame 30; the top plate 40 includes a plurality of limiting holes 41, and the limiting rod 31 penetrates through the limiting holes 41 to be connected with the top plate 40.
It can be understood that, the single crystal furnace cooling device 100 provided by this embodiment, the top plate 40 includes a plurality of limiting holes 41, the external frame 30 further includes a plurality of limiting rods 31, the limiting rods 31 correspond to the limiting holes 41 one to one, so that the limiting rods 31 penetrate through the limiting holes 41, when the lifting device 70 is used to move the seal box 20 along the third direction Z toward the side close to or away from the top plate 40, the limiting rods 31 penetrate through the limiting holes 41 to be mutually engaged to play a limiting role, thereby preventing the seal box 20 from shaking, and ensuring the stability of the seal box 20.
In some alternative embodiments, with reference to fig. 1 to 6, the single crystal furnace cooling apparatus 100 provided in this embodiment includes a plurality of limiting latches 51 on a side of the bottom plate 50 away from the top plate 40, and the limiting latches 51 are engaged with the limiting pits on the ground.
It can be understood that, in the single crystal furnace cooling device 100 provided in this embodiment, one side of the bottom plate 50 away from the top plate 40 includes a plurality of limiting fasteners 51, and the limiting fasteners 51 are engaged with the limiting pits on the ground, so that after the single crystal furnace cooling device 100 moves to a target position, the limiting fasteners 51 are engaged with the limiting pits on the ground, thereby ensuring the position stability of the outer frame 30, that is, the stability of the single crystal furnace cooling device 100. The single crystal furnace cooling equipment 100 and the single crystal furnace feeding equipment are both butted with a feeding hole of the single crystal furnace 200, so that the ground limiting pit can be reused by the ground limiting pit when the single crystal furnace feeding equipment is used, and the pit digging on the ground is not needed again.
In some alternative embodiments, and with continued reference to fig. 1-6, the present embodiment provides a cooling apparatus 100 for a single crystal furnace, wherein the sealed box 20 comprises a first vent 25 and a second vent 26, the first vent 25 and the second vent 26 are respectively located at two sides of the sealed box 20, the first vent 25 is used for exhausting air in the sealed box 20, and the second vent 26 is used for exhausting the same inert gas as that in the single crystal furnace 200.
It can be understood that, in the cooling apparatus 100 for a single crystal furnace provided in this embodiment, both sides of the sealed box 20 include the first vent hole 25 and the second vent hole 26, the first vent hole 25 may be located on the first side wall 23, and the second vent hole 26 may be located on the second side wall 24, but not limited thereto, on one hand, before the cooling apparatus 100 for a single crystal furnace is used, the air in the sealed box 20 may be extracted by using the first vent hole 25, so as to prevent impurities such as oxygen in the air from affecting the extraction of the single crystal by the single crystal furnace 200, and at the same time, the same inert gas as that in the single crystal furnace 200 may be input through the second vent hole 26, so as to ensure that the gases in the sealed box 20 and the single crystal furnace 200 are the same, and also avoid affecting the extraction of the single crystal by the single crystal furnace 200.
In some optional embodiments, with reference to fig. 1 to 6, in the cooling apparatus 100 for a single crystal furnace provided in this embodiment, the sealing box 20 further includes a gas passage (not shown), one end of the gas passage is connected to the second vent 26, the gas passage is adjacent to the cooling water pipe 11, and in the first state of the cooling apparatus body 10, the other end of the gas passage is located outside the sealing box 20 for inserting into the single crystal furnace 200 and inputting the circulating gas into the single crystal furnace 200.
It can be understood that in the cooling apparatus 100 for a single crystal furnace provided in this embodiment, the sealing box 20 further includes a gas channel connected to the second vent 26, the gas channel is adjacent to the cooling water pipe 11, and in the first state of the cooling apparatus body 10, the other end of the gas channel is located outside the sealing box 20 for being inserted into the single crystal furnace 200 and inputting the circulating gas into the single crystal furnace 200, so that the cooling apparatus can perform air cooling while water cooling. Optionally, a cooling device (not shown in the figure) and a gas storage chamber (not shown in the figure) may be further included, when gas is input into the gas channel through the second vent 26, the other end of the gas channel is located outside the seal box 20 and is used for being inserted into the single crystal furnace 200 and inputting the circulating gas into the single crystal furnace 200, and the gas for cooling is output from the gas outlet of the single crystal furnace 200 and is input into the gas cooling device and the gas storage chamber, so that gas circulation is realized.
According to the embodiment, the cooling device of the single crystal furnace provided by the utility model has the following beneficial effects:
compared with the prior art, the utility model provides a single crystal growing furnace cooling arrangement, it is connected with condenser tube and motor respectively to set up linear slide rail, it removes along first direction to drive the condenser tube through motor drive linear slide rail, ensure single crystal growing furnace cooling arrangement can make partial condenser tube be located the seal box outside, and insert in the feed inlet of the single crystal growing furnace of being connected with cooling arrangement, effectively cool down the single crystal growing furnace, can shorten the blowing out cooling time about 3 hours, the utilization ratio and the production efficiency of single crystal growing furnace have been improved, and can also be after the cooling treatment to the single crystal growing furnace, make condenser tube accomodate in the seal box inside of single crystal growing furnace cooling arrangement through the motor, and the operation of being convenient for, easily accomodate.
Although certain specific embodiments of the present invention have been described in detail by way of example, it should be understood by those skilled in the art that the foregoing examples are for purposes of illustration only and are not intended to limit the scope of the invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.
Claims (10)
1. The cooling equipment of the single crystal furnace is characterized by comprising a cooling equipment body, wherein the cooling equipment body is positioned in a sealed box, and a first side of the sealed box comprises an opening;
the cooling apparatus body includes: the cooling water pipe, the linear slide rail and the motor are arranged;
the cooling water pipe comprises at least one U-shaped water pipe extending along a first direction and used for circulating water, the cooling water pipe comprises a water inlet and a water outlet, the water inlet and the water outlet are located on a second side of the seal box, and the first side and the second side are respectively located on two sides of the cooling equipment;
the linear slide rail extends along the first direction, the linear slide rail is respectively connected with the cooling water pipe and the motor, the motor is used for driving the linear slide rail to drive the cooling water pipe to move along the first direction, part of the cooling water pipe is positioned outside the seal box and is used for being inserted into a feed inlet of a single crystal furnace connected with cooling equipment when the cooling equipment body is in a first state, and the cooling water pipe is positioned inside the seal box when the cooling equipment body is in a second state;
wherein the first direction is a direction in which the second side points to the first side.
2. The single crystal furnace cooling apparatus of claim 1, wherein the cooling apparatus body further comprises a connector comprising a first face and a second face connected;
the first surface is perpendicular to the linear slide rail and comprises a water inlet hole and a water outlet hole, one side of the water inlet of the cooling water pipe penetrates through the water inlet hole, and one side of the water outlet penetrates through the water outlet hole;
the second surface is parallel to the linear slide rail, and the second surface is connected with the linear slide rail.
3. The cooling apparatus of a single crystal furnace as claimed in claim 2, wherein the first face and the second face form a storage space;
the cooling device body further comprises a water storage tank, the water storage tank is located in the storage space and comprises a first water storage tank and a second water storage tank, the water inlet is connected with the first water storage tank, and the water outlet is connected with the second water storage tank.
4. The single crystal furnace cooling apparatus according to claim 3, wherein the seal box includes a first side wall and a second side wall which are oppositely disposed in the second direction;
the cooling equipment body further comprises a water pipe positioning rod, a water inlet pipe and a water outlet pipe, the positioning rod is positioned on the second side, close to the seal box, and the water pipe positioning rod comprises a first water pipe positioning rod and a second water pipe positioning rod;
one end of the first water pipe positioning rod is fixedly connected with the first side wall, the first end of the water inlet pipe is connected with the first water storage tank, and the water inlet pipe is wound on the first water pipe positioning rod;
one end of the second water pipe positioning rod is fixedly connected with the second side wall, the first end of the water outlet pipe is connected with the second water storage tank, and the water outlet pipe is wound on the second water pipe positioning rod;
wherein the first direction and the second direction intersect.
5. The single crystal furnace cooling apparatus of claim 4, wherein the first sidewall includes a first opening through which the second end of the water inlet tube extends out of the seal box;
the second side wall comprises a second opening, and the water outlet pipe penetrates through the second opening and extends out of the sealing box.
6. The single crystal furnace cooling apparatus of claim 1, further comprising an outer frame, a top plate, a bottom plate, and a plurality of rollers;
in a third direction, the outer frame includes a top side and a bottom side, the bottom side being connected to the roller;
the top plate is positioned on one side of the top side, which is far away from the bottom side, and is fixedly connected with the external frame, and the top plate is connected with the sealing box through a lifting device;
the bottom plate is positioned on one side of the bottom side close to the top side and is overlapped with the external frame, and the seal box is positioned on the bottom plate;
wherein the first direction intersects with the third direction, and the third direction intersects with the linear slide rail.
7. The single crystal furnace cooling apparatus of claim 6, wherein the outer frame further comprises a plurality of stop rods;
the top plate comprises a plurality of limiting holes, and the limiting rods penetrate through the limiting holes and are connected with the top plate.
8. The cooling equipment of the single crystal furnace according to claim 6, wherein one side of the bottom plate, which is far away from the top plate, comprises a plurality of limiting clamping pieces, and the limiting clamping pieces are clamped with limiting pits on the ground.
9. The single crystal furnace cooling apparatus of claim 1, wherein the seal box includes a first vent hole and a second vent hole, the first vent hole and the second vent hole being located on both sides of the seal box, respectively;
the first vent hole is used for pumping air in the seal box, and the second vent hole is used for inputting the same inert gas as that in the single crystal furnace.
10. The cooling apparatus for a single crystal furnace according to claim 9, wherein the seal box further comprises a gas passage, one end of the gas passage is connected to the second vent hole, the gas passage is adjacent to the cooling water pipe, and the other end of the gas passage is located outside the seal box in the first state for inserting into the single crystal furnace and inputting the circulating gas into the single crystal furnace.
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| CN202220219974.9U CN217298083U (en) | 2022-01-26 | 2022-01-26 | Cooling equipment of single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114703540A (en) * | 2022-04-28 | 2022-07-05 | 晶科能源股份有限公司 | Heat exchange equipment of single crystal furnace and application method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114703540A (en) * | 2022-04-28 | 2022-07-05 | 晶科能源股份有限公司 | Heat exchange equipment of single crystal furnace and application method thereof |
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