CN210151241U - Cooling device of sapphire single crystal growth furnace - Google Patents
Cooling device of sapphire single crystal growth furnace Download PDFInfo
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- CN210151241U CN210151241U CN201920437206.9U CN201920437206U CN210151241U CN 210151241 U CN210151241 U CN 210151241U CN 201920437206 U CN201920437206 U CN 201920437206U CN 210151241 U CN210151241 U CN 210151241U
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Abstract
The utility model relates to a single crystal cooling device technical field just discloses a sapphire single crystal growth furnace cooling device, including the furnace body, the bottom fixed mounting of furnace body inner chamber has a supporting bench, and a supporting bench's top fixed mounting has the solution tank, and one side fixed mounting of solution tank has the feed liquor pipe, and the opposite side fixed mounting of solution tank has the drain pipe, and one side fixed mounting of furnace body has first box, and the opposite side fixed mounting of furnace body has the second box, and the outside fixed mounting of first box has temperature controller. This sapphire single crystal growth furnace cooling device through the cooperation between temperature controller and the first box, can control the low temperature through the inside solution of temperature controller with first box, sets up through the cooperation between feed liquor pipe, solution tank, drain pipe, second box and the connecting pipe simultaneously, can make the inside solution circulation flow of solution tank for solution keeps the low temperature always, accelerates sapphire single crystal's cooling rate.
Description
Technical Field
The utility model relates to a single crystal cooling device technical field specifically is a sapphire single crystal growth furnace cooling device.
Background
After the sapphire single crystal is pulled, in order to obtain a perfect single crystal, the single crystal needs to be taken out after being cooled to a specified temperature, and the quality of the single crystal can be effectively ensured in the cooling process.
When the existing single crystal is cooled, argon is introduced into the furnace, then the argon is extracted from the furnace through a vacuum pump, the effect of taking away the heat of the single crystal is achieved, the cooling effect is low in efficiency, the cooling time is long, and meanwhile, when the argon is introduced, the surface of the single crystal is not uniformly cooled due to the fact that the argon is not uniformly contacted with the surface of the single crystal, so that the quality of the single crystal is reduced, and therefore the cooling device of the sapphire single crystal growth furnace is provided.
SUMMERY OF THE UTILITY MODEL
The utility model provides a sapphire single crystal growth stove cooling device, possess the cooling efficiency height, the even advantage of cooling has solved the single crystal cooling efficiency and has hanged down, and cooling time is long, and single crystal surface cooling is inhomogeneous, causes the problem that the single crystal quality is low.
The utility model provides a following technical scheme: a cooling device of a sapphire single crystal growth furnace comprises a furnace body, wherein a supporting table is fixedly arranged at the bottom of an inner cavity of the furnace body, a solution tank is fixedly arranged at the top of the supporting table, a liquid inlet pipe is fixedly arranged at one side of the solution tank, a liquid outlet pipe is fixedly arranged at the other side of the solution tank, a first box body is fixedly arranged at one side of the furnace body, a second box body is fixedly arranged at the other side of the furnace body, a temperature controller is fixedly arranged at the outer side of the first box body, an argon box is fixedly arranged at the top of the second box body, an air inlet pipe is fixedly arranged at one side of the argon box, a joint is fixedly arranged at one side of the air inlet pipe, an air outlet pipe is movably connected at one side of the joint, a first gear is fixedly arranged at the outer part of the air outlet pipe, a chain is connected with the external transmission, the outside fixed mounting of movable rod one end has the second gear, the top fixed mounting of furnace body has the motor, fixedly connected with connecting rod on the output shaft of motor.
Preferably, one end of the liquid inlet pipe extends to the inside of the first box body, and the outside of one end of the liquid inlet pipe is fixedly connected with the inner wall of the first box body.
Preferably, one end of the liquid outlet pipe is fixedly connected with one side of the second box body, and the bottom of the second box body is fixedly connected with the bottom of the first box body through a connecting pipe.
Preferably, the sapphire single crystal is arranged in the solution tank, and the sapphire single crystal arranged in the solution tank is fixedly connected with the bottom of the connecting rod.
Preferably, a groove is formed in the joint, the groove formed in the joint is movably connected with one side of the air outlet pipe, and a clamping block is arranged on one side of the air outlet pipe.
Preferably, the inside of outlet duct is seted up the circular port that runs through outlet duct one side, the circular port that sets up in the outlet duct and the through-hole looks adaptation that connects inside the portion to set up.
Preferably, the outer part of the first gear is in transmission connection with the outer part of the second gear through the inner side of the chain.
Compared with the prior art, the utility model discloses possess following beneficial effect:
1. this sapphire single crystal growth furnace cooling device through the cooperation between temperature controller and the first box, can control the low temperature through the inside solution of temperature controller with first box, sets up through the cooperation between feed liquor pipe, solution tank, drain pipe, second box and the connecting pipe simultaneously, can make the inside solution circulation flow of solution tank for solution keeps the low temperature always, accelerates sapphire single crystal's cooling rate.
2. This sapphire single crystal growth furnace cooling device sets up through the cooperation between argon gas case, intake pipe and the outlet duct, can let in the furnace body with argon gas inside, simultaneously through the cooperation between joint, outlet duct, first gear, second gear and the movable rod, adjusts the venthole through rotating the movable rod, makes the even single crystal surface that lets in of argon gas, guarantees that the single crystal surface cooling is even, does not receive the damage among the protection single crystal cooling process.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a detailed view of the outlet pipe of the present invention;
fig. 3 is a schematic view of the part a of the present invention.
In the figure: 1. a furnace body; 2. a support table; 3. a solution tank; 4. a liquid inlet pipe; 5. a liquid outlet pipe; 6. a first case; 7. a second case; 8. a temperature controller; 9. an argon gas tank; 10. an air inlet pipe; 11. a joint; 12. an air outlet pipe; 13. a first gear; 14. a chain; 15. a movable rod; 16. a second gear; 17. an electric motor; 18. a connecting rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, a sapphire single crystal growth furnace cooling device comprises a furnace body 1, a supporting table 2 is fixedly installed at the bottom of an inner cavity of the furnace body 1, a solution tank 3 is fixedly installed at the top of the supporting table 2, a sapphire single crystal is arranged inside the solution tank 3, the sapphire single crystal arranged inside the solution tank 3 is fixedly connected with the bottom of a connecting rod 18, a rapid cooling effect is achieved by contacting the sapphire single crystal with a solution inside the solution tank 3, a liquid inlet pipe 4 is fixedly installed at one side of the solution tank 3, one end of the liquid inlet pipe 4 extends to the inside of a first tank 6, the outer portion of one end of the liquid inlet pipe 4 is fixedly connected with the inner wall of the first tank 6, the solution can be adjusted to a proper temperature by the matching arrangement of a temperature controller 8, the first tank 6, the liquid inlet pipe 4 and the solution tank 3 and the adjustment of the temperature controller 8, then the solution is guided into the solution tank 3 through the liquid inlet pipe 4, the other side of the solution tank 3 is fixedly provided with the liquid outlet pipe 5, one end of the liquid outlet pipe 5 is fixedly connected with one side of the second tank 7, the bottom of the second tank 7 is fixedly connected with the bottom of the first tank 6 through the connecting pipe, the solution in the solution tank 3 is guided into the second tank 7 through the liquid outlet pipe 5 by the matching arrangement between the solution tank 3 and the liquid outlet pipe 5 as well as the second tank 7, the solution with higher temperature can be finally guided into the first tank 6 by the matching use between the first tank 6 and the second tank 7, the solution with high temperature is adjusted to be in a lower temperature state through the temperature controller 8, the purpose of recycling the solution is realized, meanwhile, the cooling rate of crystals can be accelerated and the cooling time is shortened through the continuous cooling of the solution, the first tank 6 is fixedly arranged on one side of the furnace body 1, a second box body 7 is fixedly arranged at the other side of the furnace body 1, a temperature controller 8 is fixedly arranged at the outer side of the first box body 6, an argon box 9 is fixedly arranged at the top of the second box body 7, an air inlet pipe 10 is fixedly arranged at one side of the argon box 9, a joint 11 is fixedly arranged at one side of the air inlet pipe 10, a groove is arranged at the inner part of one side of the joint 11, the inner part of the joint 11, which is provided with the groove, is movably connected with one side of an air outlet pipe 12, a clamping block is arranged at one side of the air outlet pipe 12, the air outlet pipe 12 and the joint 11 can be clamped through the matching arrangement of the joint 11, the air outlet pipe 12 can be simultaneously ensured to rotate at one side of the joint 11, the air outlet pipe 12 is movably connected with one side of the joint 11, a circular hole penetrating through one side of the, the inlet amount of the argon can be adjusted by rotating the outlet pipe 12 through the matching arrangement of the outlet pipe 12, the joint 11, the circular hole and the through hole, the first gear 13 is fixedly arranged outside the outlet pipe 12, the outside of the first gear 13 is in transmission connection with the outside of the second gear 16 through the inner side of the chain 14, through first gear 13, cooperation setting between second gear 16 and the chain 14, can realize rotating through movable rod 15, it rotates simultaneously to drive first gear 13 and second gear 16, can effectively adjust the argon gas input, improve cooling efficiency, the outside transmission of first gear 13 is connected with chain 14, one side swing joint of furnace body 1 has movable rod 15 that extends to furnace body 1 inside, the outside fixed mounting of movable rod 15 one end has second gear 16, the top fixed mounting of furnace body 1 has motor 17, fixedly connected with connecting rod 18 on motor 17's the output shaft.
Working principle, during the use, open temperature controller 8, with solution temperature regulation to low temperature, solution passes through feed liquor pipe 4, get into solution tank 3 insidely, open drain pipe 5 simultaneously, solution circulates once more through second box 7 and gets back to inside first box 6, open motor 17, motor 17 drives connecting rod 18 rotatory, it is rotatory to drive the sapphire single crystal simultaneously, then rotatory movable rod 15, drive second gear 16, chain 14 and first gear 13 rotate, drive outlet duct 12 simultaneously and rotate, adjust to suitable position, open argon gas case 9, argon gas passes through outlet duct 12 and gets into inside furnace body 1, can.
Also in the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and for simplicity of description, and do not indicate or imply that the equipment or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a sapphire single crystal growth furnace cooling device, includes furnace body (1), its characterized in that: the bottom fixed mounting of furnace body (1) inner chamber has brace table (2), the top fixed mounting of brace table (2) has solution tank (3), one side fixed mounting of solution tank (3) has feed liquor pipe (4), the opposite side fixed mounting of solution tank (3) has drain pipe (5), one side fixed mounting of furnace body (1) has first box (6), the opposite side fixed mounting of furnace body (1) has second box (7), the outside fixed mounting of first box (6) has temperature controller (8), the top fixed mounting of second box (7) has argon gas tank (9), one side fixed mounting of argon gas tank (9) has intake pipe (10), one side fixed mounting of intake pipe (10) has joint (11), one side swing joint of joint (11) has outlet duct (12), the outside fixed mounting of outlet duct (12) has first gear (13), the outside transmission of first gear (13) is connected with chain (14), one side swing joint of furnace body (1) has movable rod (15) that extend to furnace body (1) inside, the outside fixed mounting of movable rod (15) one end has second gear (16), the top fixed mounting of furnace body (1) has motor (17), fixedly connected with connecting rod (18) on the output shaft of motor (17).
2. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: one end of the liquid inlet pipe (4) extends to the inside of the first box body (6), and the outside of one end of the liquid inlet pipe (4) is fixedly connected with the inner wall of the first box body (6).
3. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: one end of the liquid outlet pipe (5) is fixedly connected with one side of the second box body (7), and the bottom of the second box body (7) is fixedly connected with the bottom of the first box body (6) through a connecting pipe.
4. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: the sapphire single crystal is arranged in the solution tank (3), and the sapphire single crystal arranged in the solution tank (3) is fixedly connected with the bottom of the connecting rod (18).
5. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: the connector is characterized in that a groove is formed in the interior of one side of the connector (11), the interior of the groove formed in the connector (11) is movably connected with one side of the air outlet pipe (12), and a clamping block is arranged on one side of the air outlet pipe (12).
6. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: the inside of outlet duct (12) is seted up the circular port that runs through outlet duct (12) one side, the circular port that the inside was seted up of outlet duct (12) and the through-hole looks adaptation that the inside was seted up of joint (11).
7. A cooling apparatus of a sapphire single crystal growth furnace as set forth in claim 1, wherein: the outer part of the first gear (13) is in transmission connection with the outer part of the second gear (16) through the inner side of the chain (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920437206.9U CN210151241U (en) | 2019-04-02 | 2019-04-02 | Cooling device of sapphire single crystal growth furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920437206.9U CN210151241U (en) | 2019-04-02 | 2019-04-02 | Cooling device of sapphire single crystal growth furnace |
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| CN210151241U true CN210151241U (en) | 2020-03-17 |
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| CN201920437206.9U Active CN210151241U (en) | 2019-04-02 | 2019-04-02 | Cooling device of sapphire single crystal growth furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112216044A (en) * | 2020-11-09 | 2021-01-12 | 哈尔滨晶创科技有限公司 | Automatic alarm system for single crystal growth process |
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2019
- 2019-04-02 CN CN201920437206.9U patent/CN210151241U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112216044A (en) * | 2020-11-09 | 2021-01-12 | 哈尔滨晶创科技有限公司 | Automatic alarm system for single crystal growth process |
| CN112216044B (en) * | 2020-11-09 | 2022-02-08 | 哈尔滨晶创科技有限公司 | Automatic alarm system for single crystal growth process |
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