CN217298009U - Novel conductive electrode block structure suitable for tubular PECVD - Google Patents
Novel conductive electrode block structure suitable for tubular PECVD Download PDFInfo
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- CN217298009U CN217298009U CN202220980073.1U CN202220980073U CN217298009U CN 217298009 U CN217298009 U CN 217298009U CN 202220980073 U CN202220980073 U CN 202220980073U CN 217298009 U CN217298009 U CN 217298009U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a novel conductive electrode piece structure that is adapted to tubular PECVD, including ceramic support rod, ceramic support rod's outside is provided with the supporting seat, and the outside of supporting seat is provided with two stainless steel connecting rods, two be provided with the stainless steel bracing piece between the stainless steel connecting rod, one the outside of stainless steel connecting rod is provided with graphite conducting block, and graphite conducting block's outside is provided with arc stainless steel electrode piece, the outside of another stainless steel connecting rod is provided with square stainless steel electrode piece. This novel conductive electrode piece structure that is adapted to tubular PECVD, the stainless steel electrode piece through taking the cambered surface is electrically conductive with the boat piece contact of graphite boat, and square stainless steel electrode piece is electrically conductive with graphite boat foot contact, utilizes the stainless steel bracing piece to keep the support stability of two stainless steel electrode pieces, and the support that single graphite piece can be avoided to the bi-electrode piece is unstable, can increase the area of contact of graphite conductive piece and graphite boat again.
Description
Technical Field
The utility model relates to a two boat coating film board technical field of solar wafer specifically are a novel conductive electrode block structure who is adapted to tubular PECVD.
Background
The invention aims to solve the defects of the prior art, enhance the support stability and the conductive stability of a conductive block, improve the yield of a battery piece and reduce the maintenance cost of the battery piece, and further improve the yield of the battery piece and the maintenance cost of equipment.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Not enough to prior art, the utility model provides a novel conductive electrode piece structure who is adapted to tubular PECVD possesses advantages such as electrically conductive stability, has solved the electrically conductive unstable problem of current conductive electrode piece.
(II) technical scheme
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a novel conductive electrode block structure that is adapted to tubular PECVD, includes ceramic support pole, ceramic support pole's outside is provided with the supporting seat, and the outside of supporting seat is provided with two stainless steel connecting rods, two be provided with the stainless steel support pole between the stainless steel connecting rod, one the outside of stainless steel connecting rod is provided with graphite conducting block, and graphite conducting block's outside is provided with arc stainless steel electrode block, the outside of another stainless steel connecting rod is provided with square stainless steel electrode block.
Further, the inner wall of the arc-shaped stainless steel electrode block is arc-shaped.
Furthermore, the square stainless steel electrode block is a cube.
Further, the stainless steel support rod is in an arch shape.
(III) advantageous effects
Compared with the prior art, the technical scheme of the application has the following beneficial effects:
this be adapted to tubular PECVD's novel conductive electrode piece structure, the stainless steel electrode piece through taking the cambered surface is electrically conductive with the boat piece contact of graphite boat, square stainless steel electrode piece is electrically conductive with graphite boat foot contact, utilize the stainless steel bracing piece to keep the support stability of two stainless steel electrode pieces, the support that single graphite piece can be avoided to the bi-electrode piece is unstable, can increase the area of contact of graphite conducting piece and graphite boat again, stainless steel electrode piece has more excellent electric conductive property simultaneously, so both the support that increases, the stability of contact, electrically conductive stability has been guaranteed again, greatly reduced produces the maintenance and the manufacturing cost of line, can improve the A level product rate of battery piece.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a main sectional view of the structure of the present invention;
fig. 3 is a top view of the present invention.
In the figure: 1. ceramic support rod, 2, supporting seat, 3, stainless steel connecting rod, 4, stainless steel support rod, 5, graphite conducting block, 6, arc stainless steel electrode block, 7, square stainless steel electrode block.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the novel conductive electrode block structure adapted to the tubular PECVD in the present embodiment includes a ceramic support rod 1, the ceramic support rod 1 is cylindrical, a support base 2 is fixedly installed on the outer wall of the ceramic support rod 1, the support base 2 is tubular, two stainless steel connecting rods 3 are fixedly installed on the outer wall of the support base 2, the two stainless steel connecting rods 3 are respectively located on the left and right sides of the support base 2, the stainless steel connecting rods 3 are rectangular and cylindrical, a stainless steel support rod 4 is fixedly installed between the two stainless steel connecting rods 3, a graphite conductive block 5 is fixedly installed on the outside of one stainless steel connecting rod 3, an arc-shaped stainless steel electrode block 6 is fixedly installed on the outside of the graphite conductive block 5, the arc-shaped stainless steel electrode block 6 is used for contacting with the boat block of the graphite boat to conduct electricity, a square stainless steel electrode block 7 is fixedly installed on the outside of the other stainless steel connecting rod 3, the square stainless steel electrode blocks 7 are in contact conduction with the graphite boat feet, the stainless steel support rods 4 are in an arch shape, so that the stainless steel support rods 4 are utilized to keep the support stability of the two stainless steel electrode blocks, the double electrode blocks can avoid the instability of support of the single graphite conductive block 5, and the contact area of the graphite conductive block 5 and the graphite boat can be increased.
In this embodiment, the inner wall of the arc-shaped stainless steel electrode block 6 is arc-shaped, and the arc-shaped stainless steel electrode block 6 is used for contacting with the boat block of the graphite boat for conducting electricity.
In this embodiment, the square stainless steel electrode block 7 is a cube, and the square stainless steel electrode block 7 is in contact with the graphite boat leg for conduction.
In this embodiment, the stainless steel support rod 4 has an arch shape, so that the stainless steel support rod 4 is used to maintain the support stability of the two stainless steel electrode blocks.
The working principle of the above embodiment is as follows:
take the stainless steel electrode piece of cambered surface to electrically conduct with the boat piece contact of graphite boat, square stainless steel electrode piece is electrically conductive with graphite boat foot contact, utilize stainless steel bracing piece 4 to keep the support stability of two stainless steel electrode pieces, the support instability of single graphite piece can be avoided to the bi-electrode piece, can increase the area of contact of graphite conducting piece 5 and graphite boat again, stainless steel electrode piece has more excellent electric conductive property simultaneously, the support of so both having increased, the stability of contact, electrically conductive stability has been guaranteed again, greatly reduced produces the maintenance and the manufacturing cost of line, can improve the A grade product rate of battery piece.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. The utility model provides a novel conductive electrode piece structure that is adapted to tubular PECVD, includes ceramic support pole (1), its characterized in that: the outside of ceramic support pole (1) is provided with supporting seat (2), and the outside of supporting seat (2) is provided with two stainless steel connecting rods (3), two be provided with stainless steel bracing piece (4), one between stainless steel connecting rod (3) the outside of stainless steel connecting rod (3) is provided with graphite conducting block (5), and the outside of graphite conducting block (5) is provided with arc stainless steel electrode block (6), the outside of another stainless steel connecting rod (3) is provided with square stainless steel electrode block (7).
2. The novel conductive electrode block structure adapted for tubular PECVD as recited in claim 1, wherein: the inner wall of the arc-shaped stainless steel electrode block (6) is arc-shaped.
3. The novel conductive electrode block structure adapted for tubular PECVD as recited in claim 1, wherein: the square stainless steel electrode block (7) is a cube.
4. The novel conductive electrode block structure adapted for tubular PECVD as recited in claim 1, wherein: the stainless steel supporting rod (4) is in an arch shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220980073.1U CN217298009U (en) | 2022-04-26 | 2022-04-26 | Novel conductive electrode block structure suitable for tubular PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220980073.1U CN217298009U (en) | 2022-04-26 | 2022-04-26 | Novel conductive electrode block structure suitable for tubular PECVD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217298009U true CN217298009U (en) | 2022-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220980073.1U Active CN217298009U (en) | 2022-04-26 | 2022-04-26 | Novel conductive electrode block structure suitable for tubular PECVD |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334595A (en) * | 2023-02-18 | 2023-06-27 | 阳光中科（福建）能源股份有限公司 | Boat bearing block for improving conductivity of perc battery piece coating process |
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2022
- 2022-04-26 CN CN202220980073.1U patent/CN217298009U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334595A (en) * | 2023-02-18 | 2023-06-27 | 阳光中科（福建）能源股份有限公司 | Boat bearing block for improving conductivity of perc battery piece coating process |
| CN116334595B (en) * | 2023-02-18 | 2023-11-17 | 阳光中科（福建）能源股份有限公司 | Boat bearing block for improving conductivity of perc battery piece coating process |
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