CN217290723U

CN217290723U - Automatic precision cutting machine for manufacturing evaporation target

Info

Publication number: CN217290723U
Application number: CN202123427302.1U
Authority: CN
Inventors: 周其刚; 周心立; 陈玉芝; 陈玲玲
Original assignee: Nanjing Omd Application Material Science And Technology Co ltd
Current assignee: Nanjing Omd Application Material Science And Technology Co ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-08-26
Anticipated expiration: 2031-12-31

Abstract

The utility model discloses an automatic precision cutting machine of preparation evaporation target, including the cutting machine main part, the upper end external surface fixed connection of cutting machine main part has the slide rail, the front end internal surface swing joint of slide rail has places the board, the front end internal surface of placing the board is provided with first splint, the outer wall elastic connection of first splint has first pressure spring, the upper end surface mounting who places the board has the commentaries on classics board. This preparation evaporation target's automatic precision cutting machine uses through placing the board, the cooperation between first splint and the second splint for carry out omnidirectional fixed spacing to the outer wall of target, improve the precision and the effect of cutting machine cutting, through the continuous clearance of making a round trip of cleaning brush, make cleaning brush can clear up the residual target material piece residue on placing the board, let it drop and concentrate in the piece collection box and collect, regularly dismantle the piece and collect the unified recovery of box.

Description

Automatic precision cutting machine for manufacturing evaporation target

Technical Field

The utility model relates to a target processing technology field specifically relates to an automatic precision cutting machine of preparation evaporation target.

Background

The target material is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, multi-arc ion plating system or other types of film coating systems under proper process conditions, and is simply called as a target material bombarded by high-speed charged particles, and is used in a high-energy laser weapon, when lasers with different power densities, different output waveforms and different wavelengths interact with different target materials, different killing and damaging effects can be generated, and the manufacturing of the evaporation target material needs to use an automatic precision cutting machine for cutting processing, so that the evaporation target material is widely applied.

When using, current cutting machine, the in-process of target processing, need carry out the fixed on the level to the target, and the shape of most targets is all cylindrical, be difficult to fixed make the target take place the skew easily, thereby make cutting effect and the precision of cutting machine lower, cause the waste of target, and the cutting machine is at the in-process of cutting the target, can produce a large amount of piece residues, make follow-up continuation work can influence the result of use of cutting machine, also can cause the clean and tidy degree of cutting machine lower, based on the problem, for this, an automatic precision cutting machine of preparation evaporation target has been proposed.

SUMMERY OF THE UTILITY MODEL

In view of the above problems, the present invention provides an automatic precision cutting machine for manufacturing an evaporation target, so as to improve the above problems.

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: the utility model provides an automatic precision cutting machine of preparation evaporation target, includes the cutting machine main part, the upper end external surface fixedly connected with slide rail of cutting machine main part, the front end internal surface swing joint of slide rail has places the board, the front end internal surface of placing the board is provided with first splint, the outer wall elastic connection of first splint has first pressure spring, the upper end surface mounting who places the board has the commentaries on classics board, the lower extreme internal surface sliding connection who changes the board has the second splint, the outer wall elastic connection of second splint has second pressure spring, the upper end internal surface of cutting machine main part is provided with removes the seat, the lower extreme external surface fixedly connected with cleaning brush who removes the seat.

Optionally, a target main body is mounted on the inner surface of the upper end of the placing plate, a threaded handle is connected to the inner surface of the front end of the rotating plate in a threaded manner, an electric push rod is fixedly connected to the outer surface of the right side of the placing plate, a motor is mounted on the outer surface of the left side of the cutting machine main body, a threaded rod is fixedly connected to the outer surface of the right side of the motor, a cutting knife assembly is mounted on the outer surface of the upper end of the cutting machine main body, and a chip collecting box is arranged on the inner surface of the right side of the cutting machine main body.

Optionally, a circular groove is formed in the inner surface of the front end of the placing plate, the circular groove is matched with the first clamping plate, and the outer wall of the first clamping plate is connected with the inner surface of the front end of the placing plate in a sliding mode through the circular groove.

Optionally, the inner surface of the upper end of the cutting machine main body is provided with a sliding groove, the sliding groove is matched with the movable seat, and the outer surface of the lower end of the movable seat is in sliding connection with the inner surface of the upper end of the cutting machine main body through the sliding groove.

Optionally, a clamping groove is formed in the inner surface of the upper end of the rotating plate and matched with the placing plate, and the outer wall of the placing plate is clamped with the inner surface of the upper end of the rotating plate through the clamping groove.

Optionally, the right side internal surface of cutting machine main part has seted up the mounting groove, mounting groove and piece collection box looks adaptation, the left side surface of piece collection box passes through the mounting groove and the right side internal surface looks joint of cutting machine main part.

Compared with the prior art, the utility model provides an automatic precision cutting machine of preparation evaporation target possesses following beneficial effect:

1. this preparation evaporation target's automatic precision cutting machine uses through placing the cooperation between board, first splint and the second splint for carry out omnidirectional fixed spacing to the outer wall of target, improve the precision and the effect of cutting machine cutting, the motor drives the threaded rod simultaneously and rotates, makes and places the board and remove towards cutting knife subassembly department, recycles electric putter and promotes the target, so that carry out the cutting of a lot of targets, improves the work efficiency of cutting machine.

2. This preparation evaporation target's automatic precision cutting machine places the board through the rotation drive of threaded rod and removes the below that removes the seat, will utilize and remove moving about the seat to drive the continuous clearance of making a round trip of clean brush, make clean brush can clear up the residual target material piece residue on placing the board, let it drop and concentrate in the piece collection box and collect, regularly dismantle the piece and collect the unified recovery of box.

Drawings

Fig. 1 is an overall schematic view of the present invention;

fig. 2 is an installation schematic diagram of the middle placing plate of the present invention;

fig. 3 is a schematic view illustrating the installation of the target main body according to the present invention;

fig. 4 is an installation schematic diagram of the middle movable seat of the present invention.

In the figure: 1. a cutter body; 2. a slide rail; 3. placing the plate; 4. a first splint; 5. a first hold-down spring; 6. rotating the plate; 7. a second splint; 8. a second hold-down spring; 9. a movable seat; 10. cleaning the brush; 11. a target material main body; 12. a threaded handle; 13. an electric push rod; 14. a motor; 15. a threaded rod; 16. a cutter assembly; 17. a debris collection box.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2 and fig. 3, the present invention provides a technical solution: an automatic precision cutting machine for manufacturing evaporation targets comprises a cutting machine body 1, a sliding rail 2 is fixedly connected to the outer surface of the upper end of the cutting machine body 1, a placing plate 3 is movably connected to the inner surface of the front end of the sliding rail 2, the placing plate 3 can stably and safely move in the sliding rail 2 through the arrangement of the sliding rail 2 and the placing plate 3, the stability of the placing plate 3 is improved, a first clamping plate 4 is arranged on the inner surface of the front end of the placing plate 3, a circular groove is formed in the inner surface of the front end of the placing plate 3 and is matched with the first clamping plate 4, the outer wall of the first clamping plate 4 is in sliding connection with the inner surface of the front end of the placing plate 3 through the circular groove, a first compression spring 5 is elastically connected to the outer wall of the first clamping plate 4, the first clamping plate 4 is matched with the first compression spring 5 for use, the first compression spring 5 can extrude the first clamping plate 4 to limit the outer wall of the targets, the outer surface of the upper end of the placing plate 3 is provided with a rotating plate 6, the inner surface of the upper end of the rotating plate 6 is provided with a clamping groove, the clamping groove is matched with the placing plate 3, the outer wall of the placing plate 3 is clamped with the inner surface of the upper end of the rotating plate 6 through the clamping groove, the inner surface of the lower end of the rotating plate 6 is connected with a second clamping plate 7 in a sliding manner, the outer wall of the second clamping plate 7 is elastically connected with a second compression spring 8, the second compression spring 8 can drive the second clamping plate 7 to limit the outer wall of the target material by utilizing the acting force of the second compression spring 8 through the matching use of the second clamping plate 7 and the second compression spring 8, the fixing effect of the target material is improved through a double limiting manner, the inner surface of the upper end of the cutting machine main body 1 is provided with a moving seat 9, the inner surface of the upper end of the cutting machine main body 1 is provided with a sliding groove, the outer surface of the lower end of the moving seat 9 is connected with the inner surface of the upper end of the cutting machine main body 1 through the sliding groove, the outer surface of the lower end of the movable seat 9 is fixedly connected with a cleaning brush 10, and the movable seat 9 and the cleaning brush 10 are matched for use, so that the movable seat 9 can drive the cleaning brush 10 to move together, and the cleaning work of the scraps can be conveniently carried out.

Referring to fig. 1 and 4, a target main body 11 is installed on the inner surface of the upper end of a placing plate 3, the target can be attached to a fixed clamping measure by placing and installing the target, and meanwhile, the target with different sizes can be fixedly clamped, so that the flexibility of the cutting machine is improved, a threaded handle 12 is connected to the inner surface of the front end of a rotating plate 6 in a threaded manner, the rotating plate 6 can be fixed by using the threaded handle 12 through the arrangement of the threaded handle 12, so that the fixing effect on the target is enhanced, an electric push rod 13 is fixedly connected to the outer surface of the right side of the placing plate 3, a motor 14 is installed on the outer surface of the left side of the cutting machine main body 1, a threaded rod 15 is fixedly connected to the outer surface of the right side of the motor 14, the threaded rod 15 can be used for cutting the target on the placing plate 3 through the arrangement of the threaded rod 15, so that the continuous operation of the cutting machine is ensured, a cutting knife assembly 16 is installed on the outer surface of the upper end of the cutting machine main body 1, the right side internal surface of cutting machine main part 1 is provided with piece collection box 17, and through the setting of piece collection box 17, piece collection box 17 can collect the piece that cleaning brush 10 cleared down, facilitates the use, and the mounting groove has been seted up to the right side internal surface of cutting machine main part 1, and mounting groove and piece collection box 17 looks adaptation, and the left side surface of piece collection box 17 passes through the mounting groove and is connected with the right side internal surface looks joint of cutting machine main part 1.

To sum up, when the automatic precise cutting machine for manufacturing the evaporation target is used, the target is placed on the placing plate 3, the first compression spring 5 drives the first clamping plate 4 to fixedly clamp the front side and the rear side of the target, then the rotating plate 6 is inserted, the threaded handle 12 is used for fixing the rotating plate 6, at the moment, the second compression spring 8 drives the second clamping plate 7 to fixedly clamp the upper side of the target, so that the outer wall of the target is fixed and limited in an omnibearing manner, the cutting precision and the cutting effect of the cutting machine are improved, the motor 14 is started, the motor 14 drives the threaded rod 15 to rotate, the placing plate 3 moves towards the cutting knife assembly 16, the target is pushed by the electric push rod 13, so that the target is cut for multiple times, the working efficiency of the cutting machine is improved, the left and right reciprocating movement of the moving seat 9 can be utilized by moving the placing plate 3 to the lower side of the moving seat 9, thereby drive cleaning brush 10's round trip movement for cleaning brush 10 can clear up the target material piece residue that remains on placing board 3, lets it drop and concentrates in piece collection box 17 and collect, regularly dismantles the piece and collects box 17 and unify the recovery.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a preparation evaporation target's automatic precision cutting machine, includes cutting machine main part (1), its characterized in that: the utility model discloses a cutting machine, including cutting machine main part (1), the upper end outer fixed surface of cutting machine main part (1) is connected with slide rail (2), the front end internal surface swing joint of slide rail (2) has places board (3), the front end internal surface of placing board (3) is provided with first splint (4), the outer wall elastic connection of first splint (4) has first pressure spring (5), the upper end outer surface mounting who places board (3) has commentaries on classics board (6), the lower extreme internal surface sliding connection who changes board (6) has second splint (7), the outer wall elastic connection of second splint (7) has second pressure spring (8), the upper end internal surface of cutting machine main part (1) is provided with removes seat (9), the lower extreme outer fixed surface of removing seat (9) is connected with clean brush (10).

2. The automatic precision cutting machine for manufacturing the evaporation target according to claim 1, wherein: the cutting machine is characterized in that a target main body (11) is installed on the inner surface of the upper end of the placing plate (3), a threaded handle (12) is connected to the inner surface of the front end of the rotating plate (6) in a threaded mode, an electric push rod (13) is fixedly connected to the outer surface of the right side of the placing plate (3), a motor (14) is installed on the outer surface of the left side of the cutting machine main body (1), a threaded rod (15) is fixedly connected to the outer surface of the right side of the motor (14), a cutting knife assembly (16) is installed on the outer surface of the upper end of the cutting machine main body (1), and a chip collecting box (17) is arranged on the inner surface of the right side of the cutting machine main body (1).

3. The automatic precision cutting machine for manufacturing the evaporation target according to claim 1, wherein: the inner surface of the front end of the placing plate (3) is provided with a circular groove, the circular groove is matched with the first clamping plate (4), and the outer wall of the first clamping plate (4) is connected with the inner surface of the front end of the placing plate (3) in a sliding mode through the circular groove.

4. The automatic precision cutting machine for manufacturing the evaporation target according to claim 1, wherein: the cutting machine is characterized in that a sliding groove is formed in the inner surface of the upper end of the cutting machine main body (1), the sliding groove is matched with the moving seat (9), and the outer surface of the lower end of the moving seat (9) is connected with the inner surface of the upper end of the cutting machine main body (1) in a sliding mode through the sliding groove.

5. The automatic precision cutting machine for manufacturing the evaporation target according to claim 1, wherein: the inner surface of the upper end of the rotating plate (6) is provided with a clamping groove, the clamping groove is matched with the placing plate (3), and the outer wall of the placing plate (3) is clamped with the inner surface of the upper end of the rotating plate (6) through the clamping groove.

6. The automatic precision cutting machine for manufacturing the evaporation target according to claim 2, wherein: the right side internal surface of cutting machine main part (1) has seted up the mounting groove, mounting groove and piece collection box (17) looks adaptation, the left side surface of piece collection box (17) passes through the right side internal surface looks joint of mounting groove and cutting machine main part (1).