CN217278768U

CN217278768U - SiC semiconductor device grid electric leakage detection device

Info

Publication number: CN217278768U
Application number: CN202220588288.9U
Authority: CN
Inventors: 艾育林
Original assignee: Jiangxi Wannianxin Microelectronics Co Ltd
Current assignee: Jiangxi Wannianxin Microelectronics Co Ltd
Priority date: 2022-03-17
Filing date: 2022-03-17
Publication date: 2022-08-23
Anticipated expiration: 2032-03-17

Abstract

The utility model relates to the technical field of semiconductor devices, in particular to a SIC semiconductor device grid electrode leakage detection device, which comprises a loading table, wherein a detection table is installed on a mounting seat through a positioning chute, a positioning cylinder is arranged in the middle of the end part of a bearing plate, a loading plate is arranged at the driving end of the positioning cylinder, guide rods are symmetrically arranged at the left and right ends of the loading plate, detection heads are symmetrically installed in the loading groove, a limiting knob rod is installed on a limiting plate, the pulling displacement convenience of the detection table is high through the sliding connection of the detection table and the positioning chute, the loading and unloading convenience of the semiconductor device is high, the space between the detection heads can be conveniently regulated and controlled through the sliding connection of the detection heads with the loading groove and the limiting groove, the detection applicability of the detection heads to the semiconductor devices with different sizes is high, the positioning stability of the detection head can be high through the limiting knob rod, and the detection quality and efficiency of the semiconductor device are improved.

Description

SiC semiconductor device grid electric leakage detection device

Technical Field

The utility model relates to a semiconductor device technical field specifically is a SiC semiconductor device grid electric leakage detection device.

Background

The semiconductor device is an electronic device having a conductivity between a good conductor and an insulator, and performing a specific function by using a special electrical characteristic of a semiconductor material, and can be used for generating, controlling, receiving, converting, amplifying a signal and performing energy conversion.

Along with the continuous development of science and technology, semiconductor device's application is also extensive more and more, and in the in-process of semiconductor device production, need carry out circular telegram quality detection to it, avoid the inferior product to flow into in the market, the detection to semiconductor device among the prior art is usually through artifical the detection, artifical the detection has the inaccurate phenomenon of test, and detect one by one through the manual work and need consume a large amount of time, need consume a large amount of hand labor power, and detection efficiency is low, thereby the production efficiency of producer has been reduced, consequently, need a SiC semiconductor device grid electric leakage detection device to make improvement to above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a SiC semiconductor device grid electric leakage detection device to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a grid leakage detection device for a SiC semiconductor device comprises a loading table, wherein an installation seat is arranged inside the loading table, a detection box is arranged on the left side inside the loading table, a circuit seat is arranged at the end part of the detection box, positioning sliding grooves are symmetrically formed in the left and right ends of the installation seat, the installation seat is provided with a detection table through the positioning sliding grooves, a pull rod is arranged in the middle of the front surface of the detection table, a display is arranged in the middle of the front surface of the loading table, loading frames are symmetrically arranged on the loading table in the left and right direction, loading plates are arranged at the end parts of the loading frames, positioning cylinders are arranged in the middle of the end parts of the loading plates, a loading plate is arranged at the driving end of each positioning cylinder, guide rods are symmetrically formed in the left and right direction of the end parts of the loading plate, a circuit constraint clamping seat is arranged on the rear side of the bottom of the loading plate, and loading grooves are transversely formed in the middle of the bottom of the loading plate, the positioning grooves are symmetrically formed in the left side and the right side of the front side of the bottom of the loading plate, the detection heads are symmetrically arranged in the loading groove in the left side and the right side, limiting plates are arranged on the front sides of the inner walls of the detection heads, and limiting knob rods are arranged on the limiting plates.

As the utility model discloses preferred scheme, the bottom left and right sides of examining test table is provided with the joint board with location spout adaptation.

As the preferred proposal of the utility model, the loading frame is arranged in a U-shaped structure.

As the utility model discloses preferred scheme, correspond the adaptation with the guide bar on the loading board and seted up the guiding hole.

As the utility model discloses preferred scheme, the spacing groove has been seted up to the inside bilateral symmetry of loading groove, the downside structure and the loading groove and the spacing groove adaptation setting of detecting the head.

As the utility model discloses preferred scheme, spacing knob pole and limiting plate threaded connection, the lower extreme and the constant head tank of spacing knob pole correspond the setting.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses in, through examining test table and location spout sliding connection, can make the pulling displacement convenience that examines the test table high, make semiconductor device's material loading and the convenient height of unloading, can the guide bar higher to the direction stability of loading board through the guiding hole, make semiconductor device's detection accuracy higher.

2. The utility model discloses in, through detecting the head and loading groove and spacing groove adaptation sliding connection, can make the interval regulation and control between the detection head convenient high, it is high to the semiconductor device detection suitability of unidimensional not to make the detection head, can make the positional stability who detects the head high through spacing knob pole, improves detection quality and efficiency to semiconductor device.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic view of a partial bottom structure of the present invention;

fig. 3 is an enlarged schematic view of the part a of the present invention.

In the figure: 1. a loading table; 2. a mounting seat; 3. a detection box; 4. a circuit base; 5. positioning the chute; 6. a detection table; 7. a pull rod; 8. a display; 9. a loading frame; 10. a carrier plate; 1001. a guide hole; 11. positioning the air cylinder; 12. loading a plate; 13. a guide rod; 14. a line restraint card seat; 15. a loading slot; 1501. a limiting groove; 16. positioning a groove; 17. a detection head; 18. a limiting plate; 19. a limiting knob rod.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.

In order to facilitate understanding of the invention, the invention will be described more fully hereinafter with reference to the accompanying drawings, in which several embodiments of the invention are shown, but which can be embodied in many different forms and are not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The embodiment is as follows: referring to fig. 1-3, a SiC semiconductor device gate leakage detection device includes a loading platform 1, a mounting seat 2 is disposed inside the loading platform 1, a detection box 3 is disposed on the left side inside the loading platform 1, a circuit seat 4 is disposed at an end portion of the detection box 3, positioning chutes 5 are symmetrically disposed at end portions of the mounting seat 2 in the left-right direction, a detection platform 6 is mounted on the mounting seat 2 through the positioning chutes 5, a pull rod 7 is disposed at a middle portion of a front surface of the detection platform 6, a display 8 is disposed at a middle portion of the front surface of the loading platform 1, loading frames 9 are symmetrically disposed on the loading platform 1 in the left-right direction, a loading plate 10 is disposed at an end portion of the loading plate 9, a positioning cylinder 11 is disposed at a middle portion of an end portion of the loading plate 10, a loading plate 12 is disposed at a driving end of the positioning cylinder 11, guide rods 13 are symmetrically disposed at end portions of the loading plate 12 in the left-right direction, a circuit restraining cassette 14 is disposed at a rear side of a bottom portion of the loading plate 12, the middle of the bottom of the loading plate 12 is transversely provided with a loading groove 15, the front side of the bottom of the loading plate 12 is bilaterally symmetrically provided with positioning grooves 16, the inside of the loading groove 15 is bilaterally symmetrically provided with a detection head 17, the front side of the inner wall of the detection head 17 is provided with a limiting plate 18, and the limiting plate 18 is provided with a limiting knob rod 19.

In this embodiment, the bottom left and right sides of examining test table 6 is provided with the linkage plate with 5 adaptations of location spout, load frame 9 is the setting of "U" type structure, loading board 10 is last to correspond the adaptation with guide bar 13 and has seted up guiding hole 1001, through examining test table 6 and 5 sliding connection of location spout, can make the pulling displacement convenience that examines test table 6 high, make semiconductor device's material loading and the convenient height of unloading, can the guide bar 13 higher to loading plate 12's direction stability through guiding hole 1001, make semiconductor device's detection accuracy higher.

In this embodiment, the inside bilateral symmetry of loading groove 15 has seted up spacing groove 1501, the downside structure of detecting head 17 sets up with loading groove 15 and spacing groove 1501 adaptation, spacing knob pole 19 and limiting plate 18 threaded connection, the lower extreme of spacing knob pole 19 corresponds the setting with constant head tank 16, through detecting head 17 and loading groove 15 and spacing groove 1501 adaptation sliding connection, can make the interval regulation and control between the detecting head 17 convenient high, it is high to the semiconductor device detection suitability of not unidimensional that messenger detects head 17, can make the positioning stability who detects head 17 high through spacing knob pole 19, improve detection quality and efficiency to semiconductor device.

The working principle is as follows: when the device is used, the detection table 6 is moved, the semiconductor device is positioned and placed, the detection table 6 is reset, the loading plate 12 is positioned and pushed through the positioning air cylinder 11, the detection head 17 is used for conducting power-on and power-off detection on the semiconductor device, the detection result is analyzed and processed through the detection box 3, the display 8 is used for displaying the detection result, the detection table 6 is in sliding connection with the positioning sliding chute 5 through the detection table 6, the pulling displacement convenience of the detection table 6 is high, the loading and unloading convenience of the semiconductor device is high, the guiding stability of the loading plate 12 through the guide rod 13 through the guide hole 1001 is high, the detection accuracy of the semiconductor device is high, the detection head 17 is in adaptive sliding connection with the loading chute 15 and the limiting chute 1501, the regulation and control of the distance between the detection heads 17 are convenient and high, and the detection applicability of the detection head 17 to the semiconductor devices with different sizes is high, the positioning stability of the detection head 17 can be high through the limiting knob rod 19, and the detection quality and efficiency of the semiconductor device are improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A gate leak detection device for a SiC semiconductor device, comprising a loading table (1), characterized in that: the device is characterized in that a mounting seat (2) is arranged in the loading platform (1), a detection box (3) is arranged on the left side of the interior of the loading platform (1), a circuit seat (4) is arranged at the end part of the detection box (3), positioning sliding grooves (5) are symmetrically formed in the left and right of the end part of the mounting seat (2), a detection platform (6) is installed on the mounting seat (2) through the positioning sliding grooves (5), a pull rod (7) is arranged in the middle of the front surface of the detection platform (6), a display (8) is arranged in the middle of the front surface of the loading platform (1), loading frames (9) are symmetrically arranged on the loading platform (1) in the left and right direction, a loading plate (10) is arranged at the end part of each loading frame (9), a positioning cylinder (11) is arranged in the middle of the end part of each loading plate (10), a loading plate (12) is arranged at the driving end part of each positioning cylinder (11), the tip bilateral symmetry of loading board (12) is provided with guide bar (13), the bottom rear side of loading board (12) is provided with circuit restraint cassette (14), department transversely has seted up loading groove (15) in the middle of the bottom of loading board (12), constant head tank (16) have been seted up to the bottom front side bilateral symmetry of loading board (12), the inside bilateral symmetry of loading groove (15) is installed and is detected head (17), the inner wall front side that detects head (17) is provided with limiting plate (18), install spacing knob pole (19) on limiting plate (18).

2. The SiC semiconductor device gate leakage detection device of claim 1, wherein: the left side and the right side of the bottom of the detection table (6) are matched with the positioning sliding grooves (5) and provided with connecting plates.

3. The SiC semiconductor device gate leakage detection device of claim 1, wherein: the loading frame (9) is arranged in a U-shaped structure.

4. The SiC semiconductor device gate leakage detection device of claim 1, wherein: the bearing plate (10) is correspondingly matched with the guide rod (13) to be provided with a guide hole (1001).

5. The SiC semiconductor device gate leakage detection device of claim 1, wherein: limiting grooves (1501) are symmetrically formed in the loading groove (15) in the left-right direction, and the lower side structure of the detection head (17) is matched with the loading groove (15) and the limiting grooves (1501).

6. The SiC semiconductor device gate leakage detection device of claim 1, wherein: the limiting knob rod (19) is in threaded connection with the limiting plate (18), and the lower end of the limiting knob rod (19) is arranged corresponding to the positioning groove (16).