CN217271777U - Main shaft rotating device - Google Patents

Abstract

The application discloses a main shaft rotating device, which comprises a main shaft, a mounting part and a sealing part. The main shaft comprises a first shaft body and a second shaft body, and the outer diameter of the first shaft body is larger than that of the second shaft body. The installed part cover is established on the main shaft, and the installed part includes the installation department and the connecting portion of being connected with the installation department, and connecting portion and the first axle body set up along the central line direction interval of main shaft for form sealed chamber between first axle body, the second axle body, installation department and the connecting portion, be provided with the working chamber on the connecting portion. The sealing assembly comprises a first sealing element and a second sealing element, the first sealing element and the second sealing element are sleeved on the second shaft body and distributed on two sides of the working cavity, and the first sealing element is arranged in the sealing cavity. Through setting up first sealing member and second sealing member, can guarantee that the working chamber is in encapsulated situation, and can reduce the friction when the main shaft is rotatory, reduce the heat that the main shaft produced to improve the life of main shaft.

Description

Main shaft rotating device

Technical Field

The application relates to the technical field of high-speed rotation of spindles, in particular to a spindle rotating device.

Background

In the current semiconductor laser processing field, before a wafer is processed by laser, laser cutting protective glue needs to be coated on the surface of the wafer, so that chips are prevented from being adhered to the surface of the wafer, and meanwhile, the wafer is cooled. At present, the glue coating method commonly adopted in the industry is a high-speed centrifugal glue coating method, and a wafer glue coating machine is used for coating glue on the surface of a wafer so that the glue can be uniformly coated on the surface of the wafer.

In the prior art, a main shaft in a wafer glue spreader rotates at a high speed, and the main shaft generates serious heat due to excessive parts on the main shaft, so that the service life of the rotary main shaft is greatly shortened.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a main shaft rotating device which is used for solving the high-temperature problem caused by high-speed rotation of a main shaft.

A spindle rotation device comprising: the main shaft comprises a first shaft body and a second shaft body which are distributed along the central axis direction of the main shaft, the first shaft body is connected with the second shaft body, and the outer diameter of the first shaft body is larger than that of the second shaft body; the mounting part comprises a mounting part and a connecting part connected with the mounting part, the mounting part is sleeved on the first shaft body and the second shaft body, a gap is formed between the mounting part and the second shaft body, the connecting part is positioned in the gap and is arranged at intervals with the first shaft body along the direction of the central axis, so that a sealing cavity is formed by enclosing the first shaft body, the second shaft body, the mounting part and the connecting part, and a working cavity penetrating through the surface of the connecting part facing the second shaft body is arranged on the connecting part; the sealing assembly comprises a first sealing piece and a second sealing piece, wherein the first sealing piece and the second sealing piece are sleeved on the second shaft body and distributed on two sides of the working cavity along the direction of the central axis, the first sealing piece is located in the sealing cavity and abutted against the first shaft body, the second shaft body, the connecting portion and the mounting portion, and the second sealing piece is abutted against the second shaft body, the connecting portion and the mounting portion.

In the technical scheme, the mounting piece is used for sleeving the main shaft, so that the main shaft can rotate in the mounting piece to achieve the purpose of gluing. The sealing assembly is used for sealing the working cavity, so that in the operation process of the main shaft rotating device, the working cavity is in a sealing state, and the normal operation of the main shaft rotating device is not influenced by the leakage of gas in the working cavity. The first sealing element is arranged in the sealing cavity, so that the connection among the main shaft, the first sealing element and the mounting element can be more stable, the first sealing element is ensured not to move along the central axis direction of the main shaft in the operation process of the device, and the first sealing element can thoroughly seal the upper port of the working cavity; the second seal is used to completely seal the lower port of the working chamber so that the working chamber is completely sealed. In addition, the sealing working cavity is arranged on the main shaft in a sleeved mode through the first sealing element and the second sealing element, and compared with the scheme that a plurality of sealing elements are used, the contact of the main shaft can be reduced to reduce the friction of the main shaft, so that the temperature of the main shaft is reduced, the normal operation of the main shaft rotating device is guaranteed, and the service life of the main shaft is prolonged.

In some embodiments, the first shaft body is provided with a first gas passage communicating with the working chamber, the mounting portion is provided with a second gas passage communicating with the working chamber, and the spindle rotating device further includes: the air pumping piece is arranged at one end, far away from the working cavity, of the second air channel and is communicated with the second air channel.

In the technical scheme, when the main shaft rotating device operates, the air pumping piece can pump the air in the working cavity through the first air channel, so that the air in the second air channel on the main shaft is further pumped, the air pressure in the main shaft is lower than the air pressure outside the main shaft, and the wafer is adsorbed on the main shaft and rotates together with the main shaft to finish wafer gluing.

In some embodiments, the mounting portion is further provided with a liquid passage communicating with the working chamber, and the spindle rotating device further includes: the sealed lid sets up in the one end that working chamber was kept away from to the liquid passage and can dismantle with the installed part and be connected.

In the technical scheme, after the wafer is coated with glue, the surface of the wafer needs to be cleaned, part of liquid can enter the working cavity through the main shaft, and after the main shaft rotating device stops working, the sealing cover is opened, so that the liquid in the working cavity can pass through the liquid channel discharging device, and the working cavity is ensured to be clean.

In some embodiments, the inner wall surface of the liquid passage is provided with an internal thread, and the sealing cap includes: tip and pole portion, tip are located the installation piece outside and with the installation piece laminating, pole portion are located liquid channel and are provided with the external screw thread with internal thread looks adaptation, pole portion and liquid channel's internal face threaded connection.

In above-mentioned technical scheme, the pole portion and the liquid channel threaded connection of sealed lid for being connected between sealing member and the liquid channel is more stable, prevents the condition that the sealed lid drops from the liquid channel in the in-process of main shaft rotary device operation, in order to guarantee main shaft rotary device's normal operating.

In some embodiments, the sealing cap comprises: joint spare, the one end of joint spare is located liquid channel, and the other end of joint spare is located the installed part and is connected outside and with the installed part block.

In above-mentioned technical scheme, sealed lid is connected the break-make that realizes sealed lid control fluid passage through the surface block of joint spare with the installed part to ensure the normal work of the smooth discharge of work intracavity liquid and main shaft rotary device, the block is connected simultaneously and is made the dismantlement of sealed lid make things convenient for manual operation more, reduces the manpower consumption.

In some embodiments, the first gas passage has a first opening communicating with the sealed chamber, the liquid passage has a second opening communicating with the sealed chamber, the central axis direction is a vertical direction, and the first opening is located above the second opening along the central axis direction.

In the technical scheme, the first opening is arranged above the second opening, so that when the main shaft rotating device works, gas in the working cavity can be pumped from the first liquid channel, and liquid in the working cavity cannot enter the first gas channel to influence the normal action of the air pumping piece. When the spindle rotating device stops working, the liquid accumulated in the working cavity can be discharged through the lower liquid channel.

In some embodiments, the spindle rotating apparatus further comprises: the first fixing piece is sleeved on the main shaft, the first fixing piece is located on one side, away from the first shaft body, of the first sealing piece, and the first fixing piece is abutted to the second sealing piece.

In the above technical scheme, the first fixing piece is used for abutting the second sealing piece from the lower end of the second sealing piece, and the sealing piece is prevented from influencing the rotation of the main shaft along the play of the main shaft in the direction of the central axis of the main shaft, so that the smooth operation of the main shaft rotating device and the sealing performance of the working cavity are ensured.

In some embodiments, the spindle rotating apparatus further comprises: the first bearing is positioned on one side of the first fixing piece, which is far away from the second sealing piece, the first bearing is sleeved on the second shaft body, the outer ring of the first bearing is abutted against the first fixing piece, and the first bearing is connected with the mounting part; and the second fixing piece is fixedly positioned at one end of the first bearing, which deviates from the first fixing piece, and is abutted against the inner ring of the first bearing, and the second fixing piece is sleeved on the second shaft body.

In the technical scheme, the first bearing is sleeved on the second shaft body, so that the rotation of the main shaft is facilitated, the friction on the main shaft is reduced, and the temperature of the main shaft is reduced. The second fixing piece is used for fixing the first bearing, so that the first fixing piece and the second sealing piece on the first bearing are fixed, the first fixing piece acts on the outer ring of the first bearing, and the second fixing piece acts on the inner ring of the first bearing, so that the stress of the first bearing is uniform, the normal work of the first bearing is guaranteed, and the service life of the first bearing is prolonged.

In some embodiments, the spindle rotating apparatus further comprises: and the second bearing is positioned on one side of the first sealing element, which deviates from the connecting part, the second bearing is sleeved on the first shaft body, and the second bearing is connected with the mounting part.

In the technical scheme, the second bearing is sleeved on the first shaft body, so that the rotation of the main shaft is facilitated, the friction on the main shaft is reduced, and the temperature of the main shaft is reduced.

In some embodiments, the spindle rotating apparatus further comprises: the third fixing piece is positioned outside the mounting piece and is abutted against the mounting piece and the outer ring of the second bearing; and the fourth fixing piece is positioned between the second bearing and the first sealing element, the fourth fixing piece is sleeved on the first shaft body, and the fourth fixing piece is abutted against the inner ring of the second bearing.

In the technical scheme, the fourth fixing piece is sleeved on the first shaft body and used for fixing the position of the second bearing, so that the second bearing cannot move downwards to influence the normal rotation of the main shaft; the third mounting is located the position that the installed part is used for the restriction and fixes the second bearing outward, makes the second bearing can not the drunkenness that makes progress with the cooperation of fourth mounting, and acts on the outer lane of second bearing, the inner circle that the fourth mounting acted on the second bearing through the third mounting for the atress of second bearing is even, thereby guarantees the normal work of second bearing and improves the life of second bearing.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a perspective view of a spindle rotation device provided in an embodiment of the present application;

fig. 2 is a sectional view of a spindle rotation device provided in an embodiment of the present application;

fig. 3 is a sectional view of the region B shown in fig. 2;

fig. 4 is a cross-sectional view of a second connection of a seal cap and a mounting member on a spindle rotation device in an embodiment of the present application.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more clear, embodiments of the present application will be described in further detail below with reference to the accompanying drawings.

The following description refers to the accompanying drawings in which the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the application, as detailed in the claims that follow.

In the related art, when a manufacturer uses a wafer gumming machine to glue the surface of a wafer, the rotating main shaft in the wafer gumming machine can generate serious heating problems due to the contact with too many parts, the main shaft needs to be shut down and trimmed when the temperature is too high, the working efficiency of the wafer gumming machine is not high, and the service life of the main shaft can be seriously influenced due to the fact that the temperature of the main shaft is too high for a long time.

Referring to fig. 1 and 2, to solve the above technical problem, an embodiment of the present invention provides a spindle rotation device 1 for improving wafer gluing efficiency, reducing temperature of a spindle 2 during rotation, and prolonging a service life of the spindle 2. The spindle rotation device 1 includes a spindle 2, a mounting member 3, and a seal assembly 4. The mounting member 3 is sleeved on the spindle 2, so that the spindle 2 can rotate in the mounting member 3 to achieve the purpose of gluing the wafer on the spindle rotating device 1.

Specifically, the main shaft 2 includes a first shaft body 21 and a second shaft body 22, the first shaft body 21 is connected with the second shaft body 22, an outer diameter of the first shaft body 21 is larger than an outer diameter of the second shaft body 22, and a first gas passage 211 is provided in the first shaft body 21. The installed part 3 includes installation department 31 and the connecting portion 32 of connecting the installation department 31, the installation department 31 cover is established on first axis body 21 and second axis body 22, and there is the clearance between installation department 31 and the second axis body 22, connecting portion 32 is located clearance department and sets up along the interval on the axis A direction with first axis body 21, axis A direction is vertical direction, so that enclose between first axis body 21, the second axis body 22, installation department 31 and the connecting portion 32 and close formation sealed chamber 5, be provided with the working chamber 321 that runs through to the surface of connecting portion 32 towards the second axis body 22 on the connecting portion 32. The working chamber 321 is communicated with the first gas channel 211, and the gas in the first gas channel 211 can flow into the working chamber 321, so that the first gas channel 211 is in a negative pressure state, and when the spindle rotation device 1 operates, the wafer can be stably adsorbed on the spindle 2 and rotate along with the spindle 2, thereby completing the wafer gluing process.

In addition, in order to ensure that the working chamber 321 can perform a normal function, the working chamber 321 must be kept in a sealed state during the operation of the spindle rotating device 1, and therefore, a sealing assembly 4 is provided to seal the working chamber 321. Specifically, the sealing assembly 4 includes a first sealing element 41 and a second sealing element 42, the first sealing element 41 and the second sealing element 42 are all sleeved on the second shaft body 22, the first sealing element 41 and the second sealing element 42 are distributed on two sides of the working cavity 321 along the central axis a direction, the first sealing element 41 is located in the sealing cavity 5, and is abutted to the first shaft body 21, the second shaft body 22, the connecting portion 32 and the mounting portion 31, and the second sealing element 42 is abutted to the second shaft body 22, the connecting portion 32 and the mounting portion 31. The first sealing element 41 is arranged in the sealing cavity 5, so that the connection among the main shaft 2, the first sealing element 41 and the mounting part 3 is more stable, the first sealing element 41 is prevented from moving up and down along the central axis A of the main shaft 2, the main shaft 2 is convenient to normally rotate, the upper port of the working cavity 321 can be completely sealed by the first sealing element 41, the lower port of the working cavity 321 can be completely sealed by the second sealing element 42, and the working cavity 321 can be completely sealed by the mutual matching of the first sealing element 41 and the second sealing element 42.

In some embodiments, the number of the first sealing member 41 and the second sealing member 42 is plural. Each first sealing element 41 is sleeved on the second shaft body 22, every two first sealing elements are connected with each other and located in the sealing cavity 5, each second sealing element 42 is sleeved on the second shaft body 22, every two second sealing elements are connected with each other and located at the lower end of the working cavity 321, and the plurality of first sealing elements 41 and the plurality of second sealing elements 42 are arranged at two ends of the working cavity 321 in a matched mode so that the sealing performance of the working cavity 321 is further enhanced. In the embodiment of the present application, the number of the first sealing element 41 and the second sealing element 42 is one, and the working cavity 321 is sealed on the spindle 2 only by sleeving one first sealing element 41 and one second sealing element 42, so that not only can the sealing performance of the working cavity 321 be ensured, but also the contact between the spindle 2 and the parts can be reduced to reduce the friction on the spindle 2, and when the spindle 2 rotates, the temperature rise of the spindle 2 can be reduced to reduce the temperature of the spindle 2, thereby ensuring the normal operation of the spindle rotating device 1, improving the working efficiency and prolonging the service life of the spindle 2.

It should be noted that the first sealing member 41 and the second sealing member 42 may be high temperature sealing rings, and both have good sealing performance, so as to ensure the sealing state of the working chamber 321, and also to withstand the high temperature generated after the main shaft 2 rotates at high speed.

In order to make the sealed working chamber 321 and the first gas passage 211 in a negative pressure state, the spindle rotating device 1 further includes an air extracting member 6, and the mounting portion 31 is provided with a second gas passage 311 communicating with the working chamber 321. Wherein, the gas-extracting part 6 is arranged at one end of the second gas passage 311 far away from the working chamber 321 and is communicated with the second gas passage 311. When the spindle rotation device 1 operates, the air pumping member 6 pumps air into the second air passage 311, so that the air in the working chamber 321 and the air in the first air passage 211 are both pumped out, and the inside of the spindle 2 is in a negative pressure state, so that the wafer is adsorbed on the spindle 2 and rotates together with the spindle 2 to be coated with glue.

After the wafer is coated with the glue, a cleaning solution needs to be added to clean the wafer surface, wherein a part of the cleaning solution enters the working chamber 321 along with the first gas channel 211, and the normal operation of the working chamber 321 is affected when the liquid accumulation in the working chamber 321 becomes large, so that the cleaning solution in the working chamber 321 needs to be discharged. In order to solve the above problem, referring to fig. 3, the spindle rotation device 1 further includes a sealing cover 7, the mounting portion 31 is further provided with a liquid passage 312 communicated with the working chamber 321, and the sealing cover 7 is disposed at one end of the liquid passage 312 far away from the working chamber 321 and detachably connected to the mounting member 3. When the spindle rotating apparatus 1 is operated, the sealing cover 7 is coupled to the mounting member 3 to seal the liquid passage 312 so that the working chamber 321 maintains a sealed state. When the operation of the spindle rotation device 1 is stopped, the sealing cover 7 is detached from the mounting member 3, so that the liquid in the working chamber 321 can be discharged from the liquid passage 312 to ensure the cleanness of the working chamber 321, and the spindle rotation device 1 can be normally operated.

Since there is liquid in the working chamber 321 when the spindle rotation device 1 is working, when the liquid flows into the second gas channel 311, the liquid will affect the pumping element 6, and thus affect the whole wafer gluing process. To solve the above problem, referring to fig. 2 again, the first gas channel 211 has a first opening communicated with the sealed cavity 5, the liquid channel 312 has a second opening communicated with the sealed cavity 5, and when the spindle rotating device 1 works by positioning the first opening above the second opening along the central axis a, the gas in the working cavity 321 can be pumped out from the first gas channel 211, and the liquid in the working cavity 321 cannot enter the first gas channel 211 to affect the normal operation of the air pumping element 6. When the operation of the spindle rotation device 1 is stopped, the liquid accumulated in the working chamber 321 can be discharged through the lower liquid passage 312.

In some embodiments, referring again to fig. 3, the inner wall of the fluid passage 312 is internally threaded, and the sealing cap 7 includes an end portion 71 and a stem portion 72. The end portion 71 is located outside the mounting member 3 and attached to the mounting member 3, the rod portion 72 is located inside the liquid passage 312 and provided with an external thread matched with the internal thread, and the rod portion 72 is in threaded connection with the inner wall surface of the liquid passage 312. The rod portion 72 of the sealing cover 7 is in threaded connection with the liquid passage 312, so that the connection between the sealing cover 7 and the liquid passage 312 is more stable, and the sealing cover 7 can be prevented from falling off from the liquid passage 312 in the operation process of the spindle rotating device 1, so as to ensure the normal operation of the spindle rotating device 1.

In other embodiments, referring to fig. 4, the sealing cover 7 includes a clip member 73, one end of the clip member 73 is located in the liquid passage 312, and the other end of the clip member 73 is located outside the mounting member 3 and is snap-connected to the mounting member 3. Sealed lid 7 is connected through the surface block of joint spare 73 with installed part 3 and realizes the break-make of sealed lid 7 control liquid channel 312, can guarantee the normal work of smooth discharge and main shaft rotary device 1 of liquid in the working chamber 321, and the block between joint spare 73 and the installed part 3 is connected and is made sealed dismantlement of lid 7 more convenient simultaneously, and the manual operation of being convenient for reduces the manpower consumption.

Referring to fig. 2 again, the spindle rotating device 1 further includes a first fixing member 8, the first fixing member 8 is sleeved on the spindle 2, the first fixing member 8 is located on a side of the first sealing member 41 departing from the first shaft 21, and the first fixing member 8 abuts against the second sealing member 42. The first fixing member 8 is used for pressing the second sealing member 42 from the lower end of the second sealing member 42, so as to fix the position of the second sealing member 42, and ensure the sealing performance of the working chamber 321. Meanwhile, the first fixing member 8 may prevent the up-and-down play of the first fixing member 8, so that the main shaft 2 may be rotated normally.

In order to allow the spindle 2 to normally rotate in the mounting member 3, the spindle rotating device 1 further includes a first bearing 9 and a second fixing member 10. The first bearing 9 is located on one side of the first fixing piece 8 departing from the second sealing piece 42, the first bearing 9 is sleeved on the second shaft body 22, the outer ring of the first bearing 9 is abutted to the first fixing piece 8, and the first bearing 9 is connected with the mounting portion 31. The first bearing 9 is sleeved on the second shaft body 22, so that the rotation of the main shaft 2 is facilitated, the friction of the main shaft 2 is reduced, and the rotation temperature of the main shaft 2 is reduced. The second fixing part is located at one end of the first bearing 9 deviating from the first fixing part 8, the second fixing part 10 is abutted to the inner ring of the first bearing 9, and the second fixing part 10 is sleeved on the second shaft body 22. The second fixing member 10 is used for fixing the first bearing 9, so that the first fixing member 8 and the second sealing member 42 on the first bearing 9 are fixed, and the installation of parts on the whole second shaft body 22 is more compact and stable. Meanwhile, the first fixing piece 8 acts on the outer ring of the first bearing 9, and the second fixing piece 10 acts on the inner ring of the first bearing 9, so that the first bearing 9 is stressed uniformly, normal work of the first bearing 9 is guaranteed, and the service life of the first bearing 9 is prolonged.

The main shaft rotating device 1 further comprises a second bearing 11, a third fixing piece 12 and a fourth fixing piece 13, the second bearing 11 is located on one side, away from the connecting portion 32, of the first sealing piece 41, the second bearing 11 is sleeved on the first shaft body 21, the second bearing 11 is connected with the mounting portion 31, rotation of the main shaft 2 can be facilitated, friction on the main shaft 2 is reduced, and therefore the temperature of rotation of the main shaft 2 is reduced. The third fixing member 12 is located outside the mounting member 3, the third fixing member 12 abuts against the mounting member 3 and the outer ring of the second bearing 11, the fourth fixing member 13 is located between the second bearing 11 and the first sealing member 41, the fourth fixing member 13 is sleeved on the first shaft body 21, and the fourth fixing member 13 abuts against the inner ring of the second bearing 11. The fourth fixing member 13 is used for fixing the position of the second bearing 11, so that the second bearing 11 does not move downwards to affect the normal rotation of the main shaft 2, the third fixing member 12 is located outside the mounting member 3 and used for limiting and fixing the position of the second bearing 11, the third fixing member 12 is matched with the fourth fixing member 13 so that the second bearing 11 does not move upwards, and the third fixing member 12 can prevent colloid or liquid outside the device from entering the device through the upper end of the second bearing 11 to pollute the device. The third fixing piece 12 acts on the outer ring of the second bearing 11, and the fourth fixing piece 13 acts on the inner ring of the second bearing 11, so that the stress of the second bearing 11 is uniform, the normal work of the second bearing 11 is ensured, and the service life of the second bearing 11 is prolonged.

It should be noted that both the first bearing 9 and the second bearing 11 may be angular contact bearings, which can bear a large load when the main shaft 2 rotates, thereby ensuring smooth operation of the main shaft rotating device 1.

In the description of the present application, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. The specific meaning of the above terms in this application will be understood to be a specific case for those of ordinary skill in the art. Further, in the description of the present application, "a plurality" means two or more unless otherwise specified. "and/or" describes the association relationship of the associated object, indicating that there may be three relationships, for example, a and/or B, which may indicate: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present application and is not to be construed as limiting the scope of the present application, so that the present application is not limited thereto, and all equivalent variations and modifications can be made to the present application.

Claims (10)

1. A spindle rotation device, comprising:

the spindle comprises a first shaft body and a second shaft body which are distributed along the central axis direction of the spindle, the first shaft body is connected with the second shaft body, and the outer diameter of the first shaft body is larger than that of the second shaft body;

the mounting part comprises a mounting part and a connecting part connected with the mounting part, the mounting part is sleeved on the first shaft body and the second shaft body, a gap is formed between the mounting part and the second shaft body, the connecting part is positioned in the gap and is arranged at intervals with the first shaft body along the central axis direction, so that a sealing cavity is formed by enclosing the first shaft body, the second shaft body, the mounting part and the connecting part, and a working cavity penetrating to the surface of the connecting part facing the second shaft body is arranged on the connecting part;

seal assembly, including first sealing member and second sealing member, first sealing member with the second sealing member is all established the second axle body is last and is followed the axis direction distributes in the both sides of working chamber, first sealing member is located the sealing chamber, and with first axle body the second axle body connecting portion with the equal butt of installation department, the second sealing member with the second axle body connecting portion reach the equal butt of installation department.

2. The spindle rotation apparatus as claimed in claim 1, wherein the first shaft body is provided with a first gas passage communicating with the working chamber, the mounting portion is provided with a second gas passage communicating with the working chamber, the spindle rotation apparatus further comprising:

and the air pumping piece is arranged at one end, far away from the working cavity, of the second air channel and is communicated with the second air channel.

3. The spindle rotation apparatus as claimed in claim 2, wherein the mounting portion is further provided with a fluid passage communicating with the working chamber, the spindle rotation apparatus further comprising:

the sealing cover is arranged at one end, far away from the working cavity, of the liquid channel and detachably connected with the mounting piece.

4. The spindle rotating apparatus according to claim 3, wherein an inner thread is provided on an inner wall surface of the liquid passage, and the sealing cover comprises:

the end part is positioned outside the mounting part and attached to the mounting part, the rod part is positioned in the liquid channel and is provided with an external thread matched with the internal thread, and the rod part is in threaded connection with the inner wall surface of the liquid channel.

5. The spindle rotation apparatus as claimed in claim 3, wherein the sealing cover comprises:

the joint spare, the one end of joint spare is located in the liquid channel, the other end of joint spare is located outside the installed part and with the installed part block is connected.

6. The spindle rotating apparatus according to claim 3, wherein the first gas passage has a first opening communicating with the seal chamber, the liquid passage has a second opening communicating with the seal chamber, the central axis direction is a vertical direction, and the first opening is located above the second opening in the central axis direction.

7. The spindle rotating apparatus according to claim 1, further comprising:

the first fixing piece is sleeved on the main shaft, the first fixing piece is located on one side, deviating from the first shaft body, of the first sealing piece, and the first fixing piece is abutted to the second sealing piece.

8. The spindle rotating apparatus as claimed in claim 7, further comprising:

the first bearing is positioned on one side, away from the second sealing element, of the first fixing piece, the first bearing is sleeved on the second shaft body, the outer ring of the first bearing is abutted against the first fixing piece, and the first bearing is connected with the mounting part;

the second fixing piece is fixedly arranged at one end, deviating from the first fixing piece, of the first bearing, the second fixing piece is abutted to the inner ring of the first bearing, and the second fixing piece is sleeved on the second shaft body.

9. The spindle rotating apparatus according to claim 1, further comprising:

the second bearing is located the first sealing member deviates from one side of connecting portion, the second bearing cover is established on the first axis body, the second bearing with the installation department is connected.

10. The spindle rotating apparatus according to claim 9, further comprising:

the third fixing piece is positioned outside the mounting piece and is abutted against the mounting piece and the outer ring of the second bearing;

and the fourth fixing piece is positioned between the second bearing and the first sealing piece, the fourth fixing piece is sleeved on the first shaft body, and the fourth fixing piece is abutted to the inner ring of the second bearing.

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