CN217247582U - Tail gas silicon slag filtering device for metal silicon reduction furnace - Google Patents

Tail gas silicon slag filtering device for metal silicon reduction furnace Download PDF

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Publication number
CN217247582U
CN217247582U CN202220301691.9U CN202220301691U CN217247582U CN 217247582 U CN217247582 U CN 217247582U CN 202220301691 U CN202220301691 U CN 202220301691U CN 217247582 U CN217247582 U CN 217247582U
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tail gas
silicon
wall
pipe
reduction furnace
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陈忠焰
王晓明
段会喜
胡晶
姚登华
李汝利
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Xinjiang Zhonggui Technology Co ltd
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Xinjiang Zhonggui Technology Co ltd
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y02A50/2351Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust

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Abstract

The utility model provides a tail gas silicon slag filtering device for a metal silicon reduction furnace. The tail gas silicon slag filtering device for the metal silicon reduction furnace comprises: the filter mechanism and the two replacing mechanisms are arranged on the workbench; filtering mechanism is including chassis, reduction furnace, two electrodes, silicon core, raw materials joining pipe, rose box, electrical heating board, two netted alloy boards, tail gas pipe and solenoid valve one, chassis fixed mounting is at the top of workstation, reduction furnace fixed mounting is at the top on chassis, the technical problem of the utility model provides a can filter through its inside netted alloy board silica flour that contains in to tail gas in letting in the rose box through tail gas in the silicon metal reduction furnace, can carry out quick replacement's tail gas silicon slag filter equipment for silicon metal reduction furnace to it after netted alloy board uses for a long time simultaneously.

Description

Tail gas silicon slag filtering device for metal silicon reduction furnace
Technical Field
The utility model belongs to the technical field of the tail gas treatment, especially, relate to a tail gas silicon slag filter equipment for metallic silicon reduction furnace.
Background
With the continuous development of times, China has made a rapid development in the industrial field, wherein, the metallic silicon plays an important role in partial industrial production, the metallic silicon is also called as crystalline silicon or industrial silicon, the main purpose of the metallic silicon is to be used as an additive of non-ferrous alloy, the metallic silicon is a product smelted by quartz and coke in an electric heating furnace, the content of the main component silicon element is about 98 percent, the other impurities are iron, aluminum, calcium and the like, the tail gas of the metallic silicon reduction furnace needs to be specially treated when the metallic silicon reduction furnace is used The inner wall is provided with a mechanism consisting of tungsten, niobium and tantalum metal or metal alloy or metal silicide thereof, when the polysilicon reduction furnace tail gas carrying silicon micropowder passes through the mesh device and the reduction furnace tail gas pipe, the silicon micropowder, silicon tetrachloride and hydrogen are converted into trichlorosilane together under the catalytic action of the tungsten, niobium and tantalum metal or metal alloy or metal silicide thereof, and meanwhile, hydrogen chloride in the tail gas reacts with the silicon micropowder to form silicon tetrachloride and trichlorosilane, so that a small amount of silicon micropowder or/and hydrogen chloride in the reduction furnace tail gas can be effectively removed.
However, the above structure has a disadvantage that when the metal alloy plate is used to filter the exhaust gas in the metal silicon reduction furnace, the surface of the metal alloy plate can fully react with the silicon powder after long-term use, so that the silicon powder cannot be effectively filtered.
Therefore, there is a need to provide a new filtering device for silicon slag in the tail gas of a metallic silicon reduction furnace to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides a technical problem provide a can filter through its inside netted alloy board silica flour that contains in to tail gas in letting in the filter box with tail gas in the metallic silicon reduction furnace, can carry out quick replacement's tail gas silica fume filter equipment for metallic silicon reduction furnace to it after netted alloy board is used for a long time simultaneously.
In order to solve the technical problem, the tail gas silicon slag filtering device for the metal silicon reduction furnace provided by the utility model comprises a workbench, wherein a filtering mechanism and two replacing mechanisms are arranged on the workbench; the filtering mechanism comprises a chassis, a reducing furnace, two electrodes, a silicon core, a raw material feeding pipe, a filtering box, an electric heating plate, two reticular alloy plates, a tail gas pipe and a first electromagnetic valve, wherein the chassis is fixedly arranged at the top of a workbench, the reducing furnace is fixedly arranged at the top of the chassis, the two electrodes are fixedly arranged on the inner wall of the bottom of the reducing furnace, the silicon core is fixedly arranged on the two electrodes, the raw material feeding pipe is fixedly arranged at the bottom of the reducing furnace, the bottom end of the raw material feeding pipe penetrates through the chassis and the workbench, the filtering box is fixedly arranged at the top of the workbench, the electric heating plate is fixedly arranged on the outer wall of one side of the filtering box, the two reticular alloy plates are arranged in the filtering box, one side of each reticular alloy plate extends out of the filtering box and is in sliding connection with the filtering box, and the tail gas pipe is fixedly arranged on the outer wall of one side of the filtering box, one end of the tail gas pipe is fixedly connected with the outer wall of one side of the reduction furnace, and the first electromagnetic valve is fixedly arranged on the tail gas pipe;
the replacing mechanism comprises a fixed block, a square groove, an installation block, a rotating cavity, a rectangular through hole, a threaded sleeve, a threaded rod, a rectangular block, a toothed ring, a motor and a gear, wherein the fixed block is fixedly installed on the outer wall of one side of the filter box, the square groove is formed in the top of the fixed block, the installation block is fixedly installed on one side of the reticular alloy plate, the rotating cavity is formed in the installation block, the rectangular through hole is formed in the bottom of the installation block, the rectangular through hole is communicated with the rotating cavity, the threaded sleeve is rotatably installed on the inner wall of the top of the rotating cavity, the threaded rod is threadedly installed in the threaded sleeve, the bottom of the threaded rod extends into the rectangular through hole, the rectangular block is fixedly installed at the bottom of the threaded rod, the bottom of the rectangular block extends into the square groove and is slidably connected with the square groove, the toothed ring is fixedly installed on the threaded sleeve, the motor is fixedly installed on the inner wall of the top of the rotating cavity, the gear is fixedly arranged on an output shaft of the motor and is meshed with the gear ring.
As a further scheme of the utility model, fixed mounting has the aqueduct on one side inner wall of rose box, one side fixed mounting of aqueduct has a plurality of atomizer, the top fixed mounting of workstation has the water storage tank, the top fixed mounting of workstation has high pressure water pump, fixed mounting has the Z shape flow pipe on the play water end of high pressure water pump, the one end of Z shape flow pipe extends to in the rose box, one side fixed connection of one end and aqueduct of Z shape flow pipe, fixed mounting has the inlet tube on the intake of high pressure water pump, the one end of inlet tube and one side outer wall fixed connection of water storage tank.
As a further proposal of the utility model, the top fixed mounting on chassis has the cooling hood, the top fixed mounting of cooling hood has the cooling water to join the pipe, fixed mounting has the cooling water discharge pipe on one side outer wall of cooling hood.
As a further scheme of the utility model, fixed mounting has the annular packing pad on one side outer wall of installation piece, one side of annular packing pad contacts with one side outer wall of rose box, fixed mounting has the pulling handle on one side outer wall of installation piece.
As a further scheme of the utility model, the sliding tray has been seted up on one side inner wall of rectangle opening, fixed mounting has a grade pole on one side outer wall of rectangle piece, the one end of grade pole extend to in the sliding tray and with sliding tray sliding connection.
As a further scheme of the utility model, fixed mounting has solenoid valve two on the raw materials joining pipe, the bottom fixed mounting of rose box has the drain pipe, the drain pipe runs through the workstation, fixed mounting has solenoid valve three on the drain pipe, the top fixed mounting of rose box has the blast pipe.
Compared with the prior art, the utility model provides a tail gas silicon slag filter equipment for metallic silicon reduction furnace has following beneficial effect:
1. the utility model has the advantages that the filtering mechanism is arranged, so that the silicon powder in the tail gas produced by the silicon metal reduction furnace can be filtered through the reticular alloy plate, and the effect of filtering the tail gas produced by the silicon metal reduction furnace can be achieved;
2. the utility model discloses a set up and change the mechanism, change the mechanism and make and carry out quick replacement to it after netted alloy board uses for a long time, have and can carry out quick replacement's effect to the netted alloy board that filtration efficiency is slow.
Drawings
To facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic front sectional view of the tail gas silicon slag filtering device for the metallic silicon reduction furnace of the present invention;
FIG. 2 is an enlarged schematic view of portion A of FIG. 1;
fig. 3 is an assembly view of the mounting block and the annular sealing gasket of the present invention.
In the figure: 1. a work table; 2. a chassis; 3. a reduction furnace; 4. an electrode; 5. a silicon core; 6. a raw material feeding pipe; 7. a filter box; 8. an electrical heating plate; 9. a mesh-like alloy plate; 10. a tail gas pipe; 11. a first electromagnetic valve; 12. a fixed block; 13. a square groove; 14. mounting blocks; 15. a rotation chamber; 16. a rectangular through opening; 17. a threaded sleeve; 18. a threaded rod; 19. a rectangular block; 20. a toothed ring; 21. a motor; 22. a gear; 23. a water conduit; 24. a water storage tank; 25. a high pressure water pump; 26. a cooling jacket; 27. an annular seal; 28. a gear lever.
Detailed Description
Please refer to fig. 1, fig. 2 and fig. 3 in combination, wherein fig. 1 is a schematic front sectional view of an exhaust gas silicon slag filtering device for a metallic silicon reduction furnace according to the present invention; FIG. 2 is an enlarged schematic view of portion A of FIG. 1; fig. 3 is an assembly view of the mounting block and the annular gasket of the present invention. The tail gas silicon slag filtering device for the metal silicon reduction furnace comprises a workbench 1, wherein a filtering mechanism and two replacing mechanisms are arranged on the workbench 1; the filtering mechanism comprises a base plate 2, a reducing furnace 3, two electrodes 4, a silicon core 5, a raw material adding pipe 6, a filtering box 7, an electric heating plate 8, two reticular alloy plates 9, a tail gas pipe 10 and a first electromagnetic valve 11, wherein the base plate 2 is fixedly arranged at the top of a workbench 1, the reducing furnace 3 is fixedly arranged at the top of the base plate 2, the two electrodes 4 are fixedly arranged on the inner wall of the bottom of the reducing furnace 3, the silicon core 5 is fixedly arranged on the two electrodes 4, the raw material adding pipe 6 is fixedly arranged at the bottom of the reducing furnace 3, the bottom end of the raw material adding pipe 6 penetrates through the base plate 2 and the workbench 1, the filtering box 7 is fixedly arranged at the top of the workbench 1, the electric heating plate 8 is fixedly arranged on the outer wall of one side of the filtering box 7, the two reticular alloy plates 9 are arranged in the filtering box 7, one side of the reticular alloy plates 9 extends out of the filtering box 7 and is in sliding connection with the filtering box 7, the tail gas pipe 10 is fixedly arranged on the outer wall of one side of the filter box 7, one end of the tail gas pipe 10 is fixedly connected with the outer wall of one side of the reduction furnace 3, and the electromagnetic valve I11 is fixedly arranged on the tail gas pipe 10;
the change mechanism is including fixed block 12, square groove 13, installation piece 14, rotation chamber 15, rectangle opening 16, threaded sleeve 17, threaded rod 18, rectangle piece 19, ring gear 20, motor 21 and gear 22, fixed block 12 fixed mounting is on one side outer wall of rose box 7, square groove 13 sets up the top at fixed block 12, installation piece 14 fixed mounting is in one side of netted alloy plate 9, it sets up on installation piece 14 to rotate chamber 15, rectangle opening 16 sets up the bottom at installation piece 14, rectangle opening 16 is linked together with rotation chamber 15, threaded sleeve 17 rotates and installs on the top inner wall of rotation chamber 15, threaded rod 18 screw thread is installed in threaded sleeve 17, the bottom of threaded rod 18 extends to in rectangle opening 16, rectangle piece 19 fixed mounting is in the bottom of threaded rod 18, the bottom of rectangle piece 19 extends to in square groove 13 and with square groove 13 sliding connection, the gear ring 20 is fixedly arranged on the threaded sleeve 17, the motor 21 is fixedly arranged on the inner wall of the top of the rotating cavity 15, the gear 22 is fixedly arranged on an output shaft of the motor 21, and the gear 22 is meshed with the gear ring 20.
As shown in fig. 1, a water guide pipe 23 is fixedly installed on the inner wall of one side of the filter box 7, a plurality of atomizing spray heads are fixedly installed on one side of the water guide pipe 23, a water storage tank 24 is fixedly installed on the top of the workbench 1, a high-pressure water pump 25 is fixedly installed on the top of the workbench 1, a Z-shaped water supply pipe is fixedly installed on the water outlet end of the high-pressure water pump 25, one end of the Z-shaped water supply pipe extends into the filter box 7, one end of the Z-shaped water supply pipe is fixedly connected with one side of the water guide pipe 23, a water inlet pipe is fixedly installed on the water inlet end of the high-pressure water pump 25, and one end of the water inlet pipe is fixedly connected with the outer wall of one side of the water storage tank 24;
through leading 23, atomizer, water storage tank 24, high pressure water pump 25, Z shape delivery pipe and inlet tube mutually supporting, form and can filter the fixed granule in the tail gas through spraying water smoke to rose box 7 inside, avoided containing a large amount of solid particles in the tail gas can produce the influence to netted alloy plate 9.
As shown in fig. 1, a cooling cover 26 is fixedly installed on the top of the chassis 2, a cooling water feeding pipe is fixedly installed on the top of the cooling cover 26, and a cooling water discharging pipe is fixedly installed on the outer wall of one side of the cooling cover 26;
through the mutual cooperation of the cooling cover 26, the cooling water feeding pipe and the cooling water discharging pipe, the reduction furnace 3 can be cooled by adding cooling water into the cooling cover 26, and the phenomenon that the reduction furnace 3 cannot work normally due to overhigh internal temperature is avoided.
As shown in fig. 2 and 3, an annular sealing gasket 27 is fixedly mounted on an outer wall of one side of the mounting block 14, one side of the annular sealing gasket 27 is in contact with an outer wall of one side of the filter box 7, and a pulling handle is fixedly mounted on an outer wall of one side of the mounting block 14;
the annular sealing gasket 27 and the pulling handle are matched with each other, so that the joint of the mounting block 14 and the filter box 7 can be kept sealed through the annular sealing gasket 27, and unfiltered exhaust gas is prevented from being discharged through a gap at the joint.
As shown in fig. 2, a sliding groove is formed on an inner wall of one side of the rectangular through opening 16, a blocking rod 28 is fixedly mounted on an outer wall of one side of the rectangular block 19, and one end of the blocking rod 28 extends into the sliding groove and is slidably connected with the sliding groove;
through sliding tray and shelves pole 28 mutually supporting, form and to carry on spacingly through shelves pole 28 to rectangular block 19, avoided rectangular block 19 to move apart from rectangle through-hole 16 that the distance is too big.
As shown in fig. 1, a second electromagnetic valve is fixedly installed on the raw material adding pipe 6, a drain pipe is fixedly installed at the bottom of the filter box 7, the drain pipe penetrates through the workbench 1, a third electromagnetic valve is fixedly installed on the drain pipe, and an exhaust pipe is fixedly installed at the top of the filter box 7;
through solenoid valve two, drain pipe, solenoid valve three and blast pipe mutually supporting, the formation can be discharged the waste water and the tail gas of 7 insides of rose box through drain pipe and blast pipe, has avoided forming a large amount of ponding in the rose box 7 and can't discharge with tail gas.
The utility model provides a tail gas silicon slag filter equipment for metallic silicon reduction furnace's theory of operation as follows:
the first step is as follows: the reticular alloy plate 9 can be made of tungsten, niobium, tantalum metal or metal alloy thereof, when the tail gas in the reduction furnace 3 needs to be filtered, firstly, the electromagnetic valve I11 is opened to enable the tail gas in the reduction furnace 3 to enter the filter box 7 through the tail gas pipe 10, at the moment, the high-pressure water pump 25 is started firstly, the high-pressure water pump 25 sends water in the water storage tank 24 into the water guide pipe 23 through the water inlet pipe and the Z-shaped water delivery pipe and sprays the water out through the atomizing nozzle to form water mist, the water mist filters partial solid particles contained in the tail gas, then, the electric heating plate 8 is started, the electric heating plate 8 is heated to a certain range to enable the reticular alloy plate 9 to have catalytic activity in a heating state, when the tail gas is contacted with the reticular alloy plate 9, the tail gas carrying silicon powder is converted into trichlorosilane together with silicon tetrachloride and hydrogen under the catalytic action of the reticular alloy plate 9, meanwhile, hydrogen chloride in the tail gas reacts with the silicon powder to form silicon tetrachloride and trichlorosilane, so that a small amount of silicon powder in the tail gas of the reduction furnace 3 can be effectively removed;
the second step is as follows: after the reticular alloy plate 9 is used for a long time, a large amount of dirt is attached to the surface of the reticular alloy plate to influence normal use, the reticular alloy plate needs to be replaced at the moment, the motor 21 is started, the motor 21 drives the gear 22 to rotate, the gear 22 drives the toothed ring 20 to rotate, the toothed ring 20 drives the threaded sleeve 17 to rotate, the threaded sleeve 17 drives the threaded rod 18 to ascend, the threaded rod 18 drives the rectangular block 19 to ascend until the rectangular block 19 is separated from the square groove 13, in the moving process of the rectangular block 19, the rectangular block 19 and the rectangular through hole 16 are both square, a limiting relation is formed between the rectangular block 19 and the rectangular through hole 16, then an operator pulls the pulling handle to take the reticular alloy plate 9 out of the filter box 7, and if reverse operation needs to be installed.
It should be noted that the device structure and the accompanying drawings of the present invention mainly describe the principle of the present invention, and in the design principle, the settings of the power mechanism, the power supply system, the control system, etc. of the device are not completely described, and on the premise that the skilled person understands the principle of the present invention, the details of the power mechanism, the power supply system, and the control system can be clearly known, the control mode of the application file is automatically controlled by the controller, and the control circuit of the controller can be realized by simple programming of the skilled person in the art;
the standard parts used in the method can be purchased from the market, and can be customized according to the description of the specification and the description of the attached drawings, the specific connection mode of each part adopts conventional means such as mature bolts, rivets, welding and the like in the prior art, the machinery, parts and equipment adopt conventional models in the prior art, and the structure and the principle of the parts are known by technical manuals or conventional experimental methods for technicians in the field.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments, or a direct or indirect use of these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents, which are to be included within the scope of the invention as defined in the claims.

Claims (6)

1. The utility model provides a tail gas silicon slag filter equipment for metallic silicon reduction furnace which characterized in that includes:
the filter mechanism and the two replacing mechanisms are arranged on the workbench;
the filtering mechanism comprises a chassis, a reducing furnace, two electrodes, a silicon core, a raw material feeding pipe, a filtering box, an electric heating plate, two reticular alloy plates, a tail gas pipe and a first electromagnetic valve, wherein the chassis is fixedly arranged at the top of a workbench, the reducing furnace is fixedly arranged at the top of the chassis, the two electrodes are both fixedly arranged on the inner wall of the bottom of the reducing furnace, the silicon core is fixedly arranged on the two electrodes, the raw material feeding pipe is fixedly arranged at the bottom of the reducing furnace, the bottom end of the raw material feeding pipe penetrates through the chassis and the workbench, the filtering box is fixedly arranged at the top of the workbench, the electric heating plate is fixedly arranged on the outer wall of one side of the filtering box, the two reticular alloy plates are both arranged in the filtering box, one side of each reticular alloy plate extends out of the filtering box and is in sliding connection with the filtering box, and the tail gas pipe is fixedly arranged on the outer wall of one side of the filtering box, one end of the tail gas pipe is fixedly connected with the outer wall of one side of the reduction furnace, and the first electromagnetic valve is fixedly arranged on the tail gas pipe;
the replacing mechanism comprises a fixed block, a square groove, an installation block, a rotating cavity, a rectangular through hole, a threaded sleeve, a threaded rod, a rectangular block, a toothed ring, a motor and a gear, wherein the fixed block is fixedly installed on the outer wall of one side of the filter box, the square groove is formed in the top of the fixed block, the installation block is fixedly installed on one side of the reticular alloy plate, the rotating cavity is formed in the installation block, the rectangular through hole is formed in the bottom of the installation block, the rectangular through hole is communicated with the rotating cavity, the threaded sleeve is rotatably installed on the inner wall of the top of the rotating cavity, the threaded rod is threadedly installed in the threaded sleeve, the bottom of the threaded rod extends into the rectangular through hole, the rectangular block is fixedly installed at the bottom of the threaded rod, the bottom of the rectangular block extends into the square groove and is slidably connected with the square groove, the toothed ring is fixedly installed on the threaded sleeve, the motor is fixedly installed on the inner wall of the top of the rotating cavity, the gear is fixedly arranged on an output shaft of the motor and is meshed with the gear ring.
2. The apparatus for filtering the silicon slag as a tail gas for a metallic silicon reducing furnace according to claim 1, wherein: fixed mounting has the aqueduct on one side inner wall of rose box, one side fixed mounting of aqueduct has a plurality of atomizer, the top fixed mounting of workstation has the water storage tank, the top fixed mounting of workstation has high pressure water pump, fixed mounting has Z shape flow pipe on the play water end of high pressure water pump, the one end of Z shape flow pipe extends to in the rose box, one side fixed connection of one end and aqueduct of Z shape flow pipe, fixed mounting has the inlet tube on the intake of high pressure water pump, the one end of inlet tube and one side outer wall fixed connection of water storage tank.
3. The apparatus for filtering the silicon slag as a tail gas for a metallic silicon reducing furnace according to claim 1, wherein: the cooling device is characterized in that a cooling cover is fixedly mounted at the top of the chassis, a cooling water adding pipe is fixedly mounted at the top of the cooling cover, and a cooling water discharging pipe is fixedly mounted on the outer wall of one side of the cooling cover.
4. The silicon slag filter device of claim 1, wherein the silicon slag filter device comprises: the filter box is characterized in that an annular sealing gasket is fixedly mounted on the outer wall of one side of the mounting block, one side of the annular sealing gasket is in contact with the outer wall of one side of the filter box, and a pulling handle is fixedly mounted on the outer wall of one side of the mounting block.
5. The apparatus for filtering the silicon slag as a tail gas for a metallic silicon reducing furnace according to claim 1, wherein: the sliding groove has been seted up on one side inner wall of rectangle opening, fixed mounting has a grade pole on one side outer wall of rectangle piece, the one end of grade pole extend to in the sliding groove and with sliding groove sliding connection.
6. The apparatus for filtering the silicon slag as a tail gas for a metallic silicon reducing furnace according to claim 1, wherein: the automatic water supply device is characterized in that a second electromagnetic valve is fixedly mounted on the raw material adding pipe, a drain pipe is fixedly mounted at the bottom of the filter box and penetrates through the workbench, a third electromagnetic valve is fixedly mounted on the drain pipe, and an exhaust pipe is fixedly mounted at the top of the filter box.
CN202220301691.9U 2022-02-15 2022-02-15 Tail gas silicon slag filtering device for metal silicon reduction furnace Active CN217247582U (en)

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Application Number Priority Date Filing Date Title
CN202220301691.9U CN217247582U (en) 2022-02-15 2022-02-15 Tail gas silicon slag filtering device for metal silicon reduction furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220301691.9U CN217247582U (en) 2022-02-15 2022-02-15 Tail gas silicon slag filtering device for metal silicon reduction furnace

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117361536A (en) * 2023-12-04 2024-01-09 内蒙古耀煜新能源科技有限公司 Reducing furnace tail gas emission control equipment for production of polycrystalline silicon

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117361536A (en) * 2023-12-04 2024-01-09 内蒙古耀煜新能源科技有限公司 Reducing furnace tail gas emission control equipment for production of polycrystalline silicon
CN117361536B (en) * 2023-12-04 2024-01-30 内蒙古耀煜新能源科技有限公司 Reducing furnace tail gas emission control equipment for production of polycrystalline silicon

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