CN217230303U - Photosensitive material waste liquid safety processing device - Google Patents
Photosensitive material waste liquid safety processing device Download PDFInfo
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- CN217230303U CN217230303U CN202220764593.9U CN202220764593U CN217230303U CN 217230303 U CN217230303 U CN 217230303U CN 202220764593 U CN202220764593 U CN 202220764593U CN 217230303 U CN217230303 U CN 217230303U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/30—Wastewater or sewage treatment systems using renewable energies
- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
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Abstract
The utility model provides a photosensitive material waste liquid safety processing device, which comprises a waste liquid tank, a liquid inlet pipe and a liquid discharge pipe, wherein the liquid inlet pipe and the liquid discharge pipe are respectively arranged at the top and the bottom of the waste liquid tank; the light source of the photocatalytic reactor adopts ultraviolet rays or visible light with the wavelength of about 400nm, which can decompose the azide compounds into stable products. The utility model discloses utilize circulation line to set up the photocatalytic reactor on the waste liquid jar, utilize azide can decompose into the characteristic of stable result under ultraviolet ray or visible light irradiation, reached and carried out the solution that illumination decomposed photoresist and azide photosensitizer to the waste liquid with different methods in different use, effectively solved and probably brought the safety problem such as burning fire in the photosensitizer production process, the hidden danger that contains photosensitizer solvent recovery concentration in-process heating in the coproduction process and bring also consequently obtains solving.
Description
Technical Field
The utility model relates to a photoresist technical field especially relates to a photosensitive material waste liquid safety processing apparatus.
Background
In recent years, liquid crystal displays have been rapidly developed, and organic light emitting OLEDs and quantum dot displays have been widely used. In particular, OLED transparent displays on glass substrates or flexible substrates are rapidly finding application. Photoresists mainly composed of a phenol resin and an azide group-containing photosensitizer are still used for semiconductor production, LED production, and the like. After the photoresist is coated and baked on a processed substrate, the processed substrate is exposed and developed through a photomask, a loop shape is formed on the substrate, and then the photoresist is used as a protective film to carry out dry or wet etching, ion implantation, electroplating and other processes.
Photoresists comprising azides are used in large quantities in the fields of displays as well as semiconductor and chip packaging. The photoresist is generally applied by spin coating or slit coating, and a large part of the photoresist is discharged as waste. In the simultaneous coating, a large amount of organic solvent is used for cleaning the edge and the back of the substrate, so that organic waste liquid is formed, and the organic solvent needs to be distilled, concentrated and recovered. The azide is unstable to light and heat due to its characteristics, and is severely decomposed to generate toxic gas particularly in a high-concentration or solid state by heating below 100 ℃, thereby endangering the personal safety. The possibility of combustion and explosion poses a threat to normal production, and reliable safety measures are of paramount importance for the production of hazardous materials that are explosive or highly toxic due to heating, similar to unstable azides and other photosensitive materials.
In addition, the heating of materials containing such materials in the production process, the accumulation of materials in the waste liquid can bring unforeseeable safety hazards. Because of the irreplaceability of such azide materials, this requires that reliable safety measures be taken during the production and use of the azide materials.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that to prior art's defect, provide a can effectively improve the production of azide and use security's photosensitive material waste liquid safety processing apparatus.
The utility model discloses a solve above-mentioned technical problem and adopt following technical scheme:
the utility model provides a photosensitive material waste liquid safety processing device, which comprises a waste liquid tank, a liquid inlet pipe and a liquid discharge pipe which are respectively arranged at the top and the bottom of the waste liquid tank, wherein the lower end of the waste liquid tank is connected with the top of the waste liquid tank through a circulating pipeline, and the circulating pipeline is sequentially provided with a circulating pump and a photocatalytic reactor; the light source of the photocatalytic reactor adopts ultraviolet rays or visible light with the wavelength of about 400nm, which can decompose azide compounds into stable products.
Further, a heat exchanger is arranged on the circulating pipeline between the circulating pump and the photocatalytic reactor.
Furthermore, a liquid inlet electromagnetic valve is arranged on the pipeline of the liquid inlet pipe, and a liquid discharge electromagnetic valve is arranged on the pipeline of the liquid discharge pipe.
Further, a stirring shaft is arranged in the waste liquid tank, a stirring motor in transmission connection with the stirring shaft is arranged at the top of the waste liquid tank, and the stirring shaft is an axial-flow type blade.
Further, a liquid level meter is arranged in the waste liquid tank, and a temperature sensor is arranged at a position, away from the liquid level meter, of the side wall of the waste liquid tank.
Furthermore, the waste liquid tanks are at least two groups, are arranged in parallel relative to the circulating pipeline, and share one group of circulating pipeline and the circulating pump, the heat exchanger and the photocatalytic reactor on the circulating pipeline.
Further preferably, the front end of the circulation pipeline is connected with the lower end of the corresponding waste liquid tank through a branch pipeline and a first electromagnetic valve respectively, and the rear end of the circulation pipeline is connected with the top of the corresponding waste liquid tank through a branch pipeline and a second electromagnetic valve respectively.
Further preferably, the liquid inlet pipe is connected with the top of the corresponding waste liquid tank through a branch pipeline and a third electromagnetic valve respectively arranged on the branch pipeline.
Furthermore, the plurality of liquid discharge pipes are respectively connected with the bottoms of the corresponding waste liquid tanks through branch pipes and fourth electromagnetic valves respectively arranged on the branch pipes.
Further, the photocatalytic reactor adopts a spiral photochemical reactor or a tubular photochemical reactor.
The utility model adopts the above technical scheme, compare with prior art, have following technological effect:
the utility model discloses utilize circulation line to set up the photocatalytic reactor on the waste liquid jar, utilize azide can decompose into the characteristic of stable result under ultraviolet ray or 400nm left and right sides visible light shines, reached through carrying out the solution that illumination decomposed photoresist and azide photosensitizer to the waste liquid with different methods in different use, photosensitizer solute and microparticle in the waste water waste solvent of photosensitizer production in-process have effectively been solved and have probably brought the safety problem such as burning fire everywhere deposit and when to a certain degree, the potential safety hazard that contains near concentrated photosensitizer deposit of photosensitizer solvent recovery concentration in-process gas-liquid interface and bring through the heating in the while production process also consequently obtains solving.
Drawings
FIG. 1 is a schematic view of a waste liquid tank in a safety device for processing waste liquid of photosensitive material of the present invention;
FIG. 2 is a schematic view of a parallel connection structure of two waste liquid tanks in the device for safely treating waste liquid of photosensitive material of the present invention;
FIG. 3 is a schematic view of a photocatalytic reactor in the device for safely treating waste liquid of photosensitive material according to the present invention;
FIG. 4 is a decomposition curve diagram of a first light decomposition of the diazo compound by using the device for safely treating waste liquid of photosensitive material of the present invention;
FIG. 5 is a decomposition curve diagram of the irradiation decomposition of the diazo compound II by using the device for safely treating the waste liquid of photosensitive material of the present invention;
wherein the reference symbols are:
1-a waste liquid tank, 2-a liquid inlet pipe, 3-a liquid inlet electromagnetic valve, 4-a circulating pipeline, 5-a first electromagnetic valve, 6-a circulating pump, 7-a heat exchanger, 8-a photocatalytic reactor, 9-a second electromagnetic valve, 10-a liquid discharge pipe, 11-a liquid discharge electromagnetic valve, 12-a stirring shaft, 13-a liquid level meter, 14-a temperature sensor, 15-a third electromagnetic valve, 16-a fourth electromagnetic valve, 17-a shell, 18-an emission lamp tube, 19-a first-stage reaction pipe, 20-a second-stage reaction pipe and 21-a third-stage reaction pipe.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to the accompanying drawings.
In some embodiments, as shown in fig. 1, the problem of safety is solved that photosensitizer dissolved substances and microparticles in waste water and waste solvent in the photosensitizer production process are deposited everywhere and to some extent may cause combustion and fire. The utility model provides a photosensitive material waste liquid safety processing apparatus for contain the photosensitizer mainly for azide and go into safe processing to waste water waste solvent, this safety processing apparatus mainly includes waste liquid jar 1, circulation pipeline 4 and circulating pump 6 and photocatalytic reactor 8, adopt this processing apparatus in the collection of the photosensitive agent waste liquid that contains in the photoresist use and circulation illumination before the solvent recovery distillation is concentrated after the photosensitizer decomposes, there is not the problem of photosensitizer decomposition in the technology, production and the safe operation of use technology to the photoresist provide very big convenience.
Specifically, the top and the bottom of the waste liquid tank 1 are respectively provided with a liquid inlet pipe 2 and a liquid outlet pipe 10, the lower end of the waste liquid tank 1 is connected with the top of the waste liquid tank 1 through a circulating pipeline 4, and the circulating pipeline 4 is sequentially provided with a circulating pump 6 and a photocatalytic reactor 8. The light source of the photocatalytic reactor 8 adopts ultraviolet rays or visible light with the wavelength of about 400nm which can decompose azide compounds into stable products, and utilizes the characteristic that the azide compounds can be decomposed into the stable products under the irradiation of the ultraviolet rays or the visible light with the wavelength of about 400nm, so that the solution scheme that the photoresist and the azide compounds photosensitizer are decomposed by irradiating waste liquid by different methods in different using processes is achieved, and meanwhile, the potential safety hazard brought by the deposition of concentrated photosensitizer near a gas-liquid interface and the heating in the recovery and concentration processes of the solvent containing the photosensitizer in the production process is also solved.
As one preferred embodiment, as shown in fig. 1, in order to improve the decomposition efficiency of the azide compound under the irradiation of ultraviolet light or visible light of about 400nm, the temperature of the azide compound circulating in the circulating line 4 is controlled, a heat exchanger 7 is provided in the circulating line 4 between the circulating pump 6 and the photocatalytic reactor 8, and the azide compound flowing through the circulating line 4 is heat-exchanged by the heat exchanger 7 to increase or decrease the temperature of the azide compound.
As a preferred embodiment, as shown in fig. 1, in order to realize the discharge flow rate and discharge flow rate of the waste liquid containing the photosensitizer in the waste liquid tank 1 and to perform the circulating photodecomposition treatment on the waste liquid containing the photosensitizer to the maximum extent, a liquid inlet electromagnetic valve 3 is arranged on the pipeline of the liquid inlet pipe 2, and a liquid discharge electromagnetic valve 11 is arranged on the pipeline of the liquid discharge pipe 10, the liquid inlet electromagnetic valve 3 controls the photoresist waste liquid in the using process to be discharged into the waste liquid tank 1, and the liquid discharge electromagnetic valve 11 discharges the safe waste liquid subjected to the decomposition treatment in the waste liquid tank 1 to the waste liquid tank 1, and the safe waste liquid is sent to the next recycling process.
As one preferred embodiment, as shown in fig. 1, in order to improve the processing efficiency of the photolysis entering the circulation pipeline 4, a stirring shaft 12 is arranged in the waste liquid tank 1, a stirring motor in transmission connection with the stirring shaft 12 is arranged at the top, and the stirring shaft 12 adopts an axial flow type blade. The waste liquid in the waste liquid tank 1 is fully stirred and mixed by the stirring motor and the axial-flow type blade, and the axial-flow type blade can be guided into the circulating pipeline 4 from top to bottom, so that dead angles of incapable flowing circulation in the waste liquid tank 1 are avoided.
As one preferred embodiment, as shown in fig. 1, in order to monitor the liquid level height and temperature of the photosensitizer waste liquid in the waste liquid tank 1 in real time, a liquid level meter 13 is disposed in the waste liquid tank 1, and a temperature sensor 14 is disposed at a position far from the liquid level meter 13 on the side wall thereof.
In some embodiments, as shown in fig. 2, the waste liquid tank 1 is at least two groups, and each group is arranged in parallel with respect to the circulation pipeline 4 and shares one group of the circulation pipeline 4 and the circulation pump 6, the heat exchanger 7 and the photocatalytic reactor 8 thereon. When one group of waste liquid tanks 1 is used for receiving and storing waste liquid containing photosensitizer, the other group of waste liquid tanks 1 storing waste liquid containing photosensitizer are matched with a photocatalytic reactor 8 on a circulating pipeline 4 to carry out circulating photodecomposition treatment on the waste liquid containing photosensitizer. Thereby greatly improving the treatment efficiency of the waste liquid.
Correspondingly, in order to match two groups of waste liquid tanks 1, the connection structure relationship of a group of circulation pipelines 4 is correspondingly adjusted, the front ends of the circulation pipelines 4 are respectively connected with the corresponding lower ends of the waste liquid tanks 1 through branch pipelines and first electromagnetic valves 5, and the rear ends of the circulation pipelines 4 are respectively connected with the corresponding tops of the waste liquid tanks 1 through branch pipelines and second electromagnetic valves 9. The working state of the corresponding waste liquid tank 1 is controlled by respectively controlling the opening and closing of the two groups of first electromagnetic valves 5 and the two groups of second electromagnetic valves 9.
In addition, the liquid inlet pipe 2 is connected with the top of the corresponding waste liquid tank 1 through a branch pipeline and a third electromagnetic valve 15 respectively arranged on the branch pipeline. The plurality of liquid discharge pipes 10 are respectively connected with the bottom of the corresponding waste liquid tank 1 through branch pipes and fourth electromagnetic valves 16 respectively arranged on the branch pipes.
In some of these embodiments, the photocatalytic reactor 8 employs a spiral photochemical reactor or a tubular photochemical reactor. Preferably, as shown in fig. 3, the photocatalytic reactor 8 is a tubular photochemical reactor, and mainly includes a housing 17, a plurality of emission lamps 18 respectively disposed on the inner side wall of the housing 17, and a transparent photolysis reaction tube disposed in the middle of the housing 17, the plurality of emission lamps 18 are disposed outside the photolysis reaction tube, and the light irradiation direction of the emission lamps is directed to the photolysis reaction tube, a liquid inlet of the photolysis reaction tube is connected to the upstream circulation pipeline 4, a liquid outlet of the photolysis reaction tube is connected to the downstream circulation pipeline 4, and the housing 17 is made of a mirror surface stainless steel plate material, which can increase the reflection of light, so that the waste liquid in the photolysis reaction tube can fully contact with the light source. The photolysis reaction tube is composed of a plurality of first-stage reaction tubes 19, second-stage reaction tubes 20 and third-stage reaction tubes 21 which are connected in parallel and are arranged in a grading manner, the number of the reaction tubes at each stage is determined according to the actual situation, and when the waste liquid tank 1 is larger, the number of the reaction tubes can be increased, so that the working efficiency is improved.
The working principle is as follows: when the photosensitive material waste liquid safety processing device is used, firstly, waste liquid containing a photosensitive agent is conveyed into a waste liquid tank 1 through a liquid inlet pipe 2, when the waste liquid is switched to another group of waste liquid tank 1 when reaching a preset liquid level, a stirring shaft 12 in the waste liquid tank 1 is started to stir, the waste liquid is introduced into a photolysis reaction pipe in a photocatalytic reactor 8 under the action of a circulating pump 6 in the stirring process, the waste liquid reacts under the irradiation of a plurality of emission lamp tubes 18 on the inner wall of a shell 17, then the waste liquid is conveyed into a reaction kettle 1 through a circulating pipeline 4 to be stirred again, the stirred material is conveyed into the photolysis reaction pipe in the shell 17 again to react, the photosensitive agent is repeatedly circulated until the photosensitive agent in the waste liquid is fully decomposed, and finally the waste liquid is discharged from a liquid discharge pipe 10 at the bottom of the waste liquid tank 1. As shown in FIG. 4 and FIG. 5, the decomposition graphs of the two waste liquids by irradiation with light using the apparatus for safely treating a photosensitive material waste liquid show that the blue color on the right side is a photosensitizer raw material and can be completely decomposed after irradiation with light (two different products).
The present invention has been described in detail with reference to the specific embodiments, but the present invention is only by way of example and is not limited to the specific embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are intended to be within the scope of the present invention. Accordingly, variations and modifications in equivalents may be made without departing from the spirit and scope of the invention, which is intended to be covered by the following claims.
Claims (10)
1. A photosensitive material waste liquid safety processing device comprises a waste liquid tank (1), and a liquid inlet pipe (2) and a liquid discharge pipe (10) which are respectively arranged at the top and the bottom of the waste liquid tank (1), and is characterized in that the lower end of the waste liquid tank (1) is connected with the top of the waste liquid tank (1) through a circulating pipeline (4), and a circulating pump (6) and a photocatalytic reactor (8) are sequentially arranged on the circulating pipeline (4); the light source of the photocatalytic reactor (8) adopts ultraviolet light or 400nm visible light which can decompose the azide into stable products.
2. The photosensitive material waste liquid safety processing device according to claim 1, wherein a heat exchanger (7) is provided on the circulation line (4) between the circulation pump (6) and the photocatalytic reactor (8).
3. The apparatus for safely treating waste liquid of photosensitive material according to claim 1, wherein the liquid inlet solenoid valve (3) is disposed on the liquid inlet pipe (2), and the liquid outlet solenoid valve (11) is disposed on the liquid outlet pipe (10).
4. The device for safely treating the photosensitive material waste liquid according to claim 1, wherein a stirring shaft (12) is arranged in the waste liquid tank (1), a stirring motor in transmission connection with the stirring shaft (12) is arranged at the top of the waste liquid tank, and the stirring shaft (12) adopts an axial flow type blade.
5. A photosensitive material waste liquid safety processing apparatus according to claim 1, wherein a liquid level meter (13) is provided in the waste liquid tank (1), and a temperature sensor (14) is provided at a position of a side wall thereof away from the liquid level meter (13).
6. The photosensitive material waste liquid safety processing device according to claim 2, wherein the waste liquid tanks (1) are at least two groups, and are all arranged in parallel relative to the circulation pipeline (4), and share one group of the circulation pipeline (4) and the circulation pump (6), the heat exchanger (7) and the photocatalytic reactor (8) thereon.
7. A safety processing device for waste liquid of photosensitive material according to claim 6, wherein the front end of said circulation pipeline (4) is connected to the lower end of the corresponding waste liquid tank (1) through a branch pipeline and a first electromagnetic valve (5), and the rear end is connected to the top of the corresponding waste liquid tank (1) through a branch pipeline and a second electromagnetic valve (9).
8. The apparatus for safely processing photosensitive material waste liquid according to claim 6, wherein the liquid inlet pipes (2) are connected to the top of the corresponding waste liquid tank (1) through branch pipes and third electromagnetic valves (15) respectively disposed on the branch pipes.
9. The apparatus for safely processing a waste liquid of a photosensitive material according to claim 1, wherein a plurality of said liquid discharge pipes (10) are connected to the bottom of the corresponding waste liquid tank (1) through a branch pipe and a fourth electromagnetic valve (16) respectively provided on the branch pipe.
10. The apparatus for safely treating waste liquid of photosensitive material according to claim 1, wherein the photocatalytic reactor (8) is a spiral photochemical reactor or a tubular photochemical reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220764593.9U CN217230303U (en) | 2022-04-03 | 2022-04-03 | Photosensitive material waste liquid safety processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220764593.9U CN217230303U (en) | 2022-04-03 | 2022-04-03 | Photosensitive material waste liquid safety processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217230303U true CN217230303U (en) | 2022-08-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220764593.9U Active CN217230303U (en) | 2022-04-03 | 2022-04-03 | Photosensitive material waste liquid safety processing device |
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|---|---|
| CN (1) | CN217230303U (en) |
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- 2022-04-03 CN CN202220764593.9U patent/CN217230303U/en active Active
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