CN217229400U - Handling device and production line - Google Patents

Handling device and production line Download PDF

Info

Publication number
CN217229400U
CN217229400U CN202123126881.6U CN202123126881U CN217229400U CN 217229400 U CN217229400 U CN 217229400U CN 202123126881 U CN202123126881 U CN 202123126881U CN 217229400 U CN217229400 U CN 217229400U
Authority
CN
China
Prior art keywords
horizontal
base
motor
module
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202123126881.6U
Other languages
Chinese (zh)
Inventor
王昭棚
袁玲
周辉
苏芝旭
尹建刚
高云峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Original Assignee
Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Hans Semiconductor Equipment Technology Co Ltd filed Critical Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority to CN202123126881.6U priority Critical patent/CN217229400U/en
Application granted granted Critical
Publication of CN217229400U publication Critical patent/CN217229400U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Warehouses Or Storage Devices (AREA)

Abstract

The utility model provides a carrying device and a production line, the carrying device comprises a beam assembly, a horizontal moving mechanism, a lifting mechanism and a material taking mechanism, the horizontal moving mechanism is arranged on two sides of the beam assembly, the horizontal moving mechanism comprises a first horizontal module and a second horizontal module, the second horizontal module is arranged on the first horizontal module to drive the second horizontal module to move along a horizontal preset direction; the beam assembly is arranged on the second horizontal module to drive the beam assembly to move along the same horizontal preset direction; the lifting mechanism is arranged on the beam assembly, and the material taking mechanism is arranged on the lifting mechanism. The utility model discloses a handling device has solved the problem that current handling device can't satisfy long stroke high speed requirement.

Description

Handling device and production line
Technical Field
The utility model relates to an automatic technical field especially relates to a handling device and production line.
Background
With the improvement of economic level of people and the update of liquid crystal panel technology, products such as household liquid crystal televisions, vehicle-mounted screens, mobile phone screens and the like meet great demands, so that the capacity of a panel factory is driven to be continuously increased, and the equipment demand for processing the panel is greatly improved. The stability, quality and precision of the equipment directly affect the yield and production efficiency of the panel. In the whole process of panel processing, the panels can be carried by various motion mechanisms due to different product processing heights of different workshop section equipment, the production capacity is continuously improved along with the continuous increase of the sizes of the produced panels, and the requirements of more workshop sections on the stroke and the speed of the transport mechanisms are also improved. Conventional transport mechanism often adopts ball screw and servo motor's transmission mode, but ball screw has the restriction of draw ratio, and the longer then speed is slower of stroke, can't satisfy the requirement of long stroke high speed, and the transmission mode that satisfies the long stroke requirement among the prior art includes synchronous belt drive and linear electric motor drive, but the transmission mode positioning accuracy of synchronous belt is low, and linear electric motor motion module cost is too high.
SUMMERY OF THE UTILITY MODEL
The utility model discloses among the technical problem that will solve: the problem that the existing carrying device cannot meet the requirement of long stroke and high speed is solved.
The embodiment of the utility model provides a carrying device, including beam assembly, horizontal migration mechanism, elevating system and feeding agencies, the horizontal migration mechanism is provided with on both sides of the beam assembly, the horizontal migration mechanism includes first horizontal module and second horizontal module, be provided with the second horizontal module on the first horizontal module to drive the second horizontal module to move along a horizontal preset direction; the second horizontal module is provided with the beam assembly so as to drive the beam assembly to move along the same horizontal preset direction; the lifting mechanism is arranged on the beam assembly, and the material taking mechanism is arranged on the lifting mechanism.
Optionally, the beam assembly comprises a first mounting frame, a mounting plate, a fixed connector and a floating connector, one end of the first mounting frame is mounted on the second horizontal module on one side through the fixed connector, and the other end of the first mounting frame is mounted on the second horizontal module on the other side through the floating connector; the mounting panel is located on the first mounting bracket, elevating system is located on the mounting panel.
Optionally, the floating connection piece includes a first base, a second base, a guide rail and a slider, the first base is located at one end of the first mounting rack, and the second base is located on the second horizontal module; the guide rail is arranged on the second base, and the extending direction of the guide rail is vertical to the extending direction of the second horizontal module; the first base is movably arranged on the guide rail through the sliding block;
the fixed connecting piece comprises a third base and a fourth base, the third base is located the first mounting frame is far away from one end of the first base, the fourth base is located the other end of the second horizontal module, and the third base is arranged on the fourth base.
Optionally, the first horizontal module comprises a first motor, a first lead screw, a first slide rail, a first slide seat and a first substrate, the first motor is connected with the first lead screw, the first slide seat is connected with the first lead screw and arranged on the first slide rail, the first substrate is mounted on the first slide seat, and the first motor is used for driving the first lead screw to rotate so as to drive the first substrate to move along a horizontal preset direction;
the second horizontal module comprises a second motor, a second screw rod, a second slide rail and a second slide seat, and the second motor and the second slide rail are both arranged on the first substrate; the second motor with the second lead screw is connected, the second slide with the second lead screw is connected and set up in on the second slide rail, the crossbeam subassembly set up in on the second slide, the second motor is used for the drive the second lead screw rotates, in order to drive the crossbeam subassembly is along the removal of same level direction of predetermineeing.
Optionally, the lifting mechanism includes a first lifting module and a second lifting module, the first lifting module is disposed on the beam assembly, the first lifting module includes a third motor, a third lead screw, a third slide rail, a third slide seat and a second substrate, the third motor is connected to the third lead screw, the third slide seat is connected to the third lead screw and disposed on the third slide rail, the second substrate is mounted on the third slide seat, and the third motor is configured to drive the third lead screw to rotate so as to drive the second substrate to move in the vertical direction;
the second lifting module comprises a fourth motor, a fourth screw rod, a fourth slide rail and a fourth slide seat, and the fourth motor and the fourth slide rail are arranged on the second substrate; the fourth motor is connected with the fourth lead screw, the fourth slide is connected with the fourth lead screw and arranged on the fourth slide rail, the material taking mechanism is arranged on the fourth slide, and the fourth motor is used for driving the fourth lead screw to rotate so as to drive the material taking mechanism to move along the vertical direction.
Optionally, the material taking mechanism comprises a connecting plate, a second mounting frame and a plurality of sucker assemblies, and the connecting plate is arranged on the lifting mechanism; the second mounting frame is connected with the connecting plate; a plurality of sucking disc subassembly interval set up in on the second mounting bracket.
Optionally, a reinforcing rod is arranged on the second mounting frame, one end of the reinforcing rod is connected with the connecting plate, and the other end of the reinforcing rod is connected with one end, far away from the connecting plate, of the second mounting frame.
Optionally, the sucking disc subassembly includes sucking disc and vacuum connecting pipe, the sucking disc with vacuum connecting pipe connects, vacuum connecting pipe set up in on the second mounting bracket.
Optionally, the carrying device further comprises a plurality of photoelectric detection sensors, and the horizontal moving mechanism, the beam assembly, the lifting mechanism and the material taking mechanism are all provided with the photoelectric detection sensors.
On the other hand, the embodiment of the utility model provides a still provide a production line, include handling device.
In the embodiment of the utility model, the problem that the conventional lead screw module cannot realize long-stroke transportation due to the requirement of the length-diameter ratio is solved by arranging the second horizontal module on the first horizontal module, and meanwhile, the speed is overlapped due to the simultaneous movement of the first horizontal module and the second horizontal module, so that the speed is improved compared with the conventional lead screw module; horizontal moving mechanisms arranged on two sides of the beam assembly form a gantry structure, so that the beam assembly runs stably. The lifting mechanism is arranged on the beam assembly, so that long-stroke high-speed transportation in the vertical direction can be realized, and the transportation problem of a large-fall workshop section on a panel production line is solved.
Drawings
Fig. 1 is a schematic structural diagram of a carrying device according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a beam assembly of a carrying device according to an embodiment of the present invention;
FIG. 3 is an enlarged view at A in FIG. 2;
fig. 4 is a schematic structural view of a horizontal moving mechanism of a conveying apparatus according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a lifting mechanism of a conveying device according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a material taking mechanism of a conveying device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In order to explain the technical means of the present invention, the following description will be given by way of specific examples.
As shown in fig. 1-5, the carrying device of an embodiment of the present invention includes a beam assembly 10, a horizontal moving mechanism 20, an elevating mechanism 30 and a material taking mechanism 40, the two sides of the beam assembly 10 are provided with the horizontal moving mechanism 20, the horizontal moving mechanism 20 includes a first horizontal module 21 and a second horizontal module 22, the first horizontal module 21 is provided with the second horizontal module 22 to drive the second horizontal module 22 to move along a horizontal preset direction. The beam assembly 10 is disposed on the second horizontal module 22 to drive the beam assembly 10 to move along the same horizontal preset direction. The lifting mechanism 30 is disposed on the beam assembly 10, and the material taking mechanism 40 is disposed on the lifting mechanism 30 to move along with the lifting mechanism 30 in the vertical direction.
The utility model discloses handling device is at the during operation, and when first horizontal module 21 drive second horizontal module 22 removed, second horizontal module 22 drives beam assembly 10 simultaneously and removes, under the stack of two speeds and two strokes for beam assembly 10 carries out the removal of long stroke high speed on the horizontal direction. Elevating system 30 drive is got the material subassembly and is removed along vertical direction, gets the material subassembly and absorbs the panel, carries the panel.
The second horizontal module 22 is arranged on the first horizontal module 21, so that the problem that the conventional screw rod module cannot realize long-stroke carrying due to the requirement of the length-diameter ratio is solved, and meanwhile, the first horizontal module 21 and the second horizontal module 22 move simultaneously, and the speed is increased compared with the conventional screw rod module due to the speed superposition; horizontal moving mechanisms 20 are arranged on two sides of the beam assembly 10 to form a gantry structure, so that the beam assembly 10 runs stably. The lifting mechanism 30 is arranged on the beam assembly 10, can realize long-stroke high-speed transportation in the vertical direction, and solves the transportation problem of a large-fall workshop section on a panel production line.
As shown in fig. 2 and 3, in some embodiments of the present invention, the beam assembly 10 includes a first mounting frame 11, a mounting plate 12, a fixed connector and a floating connector, wherein one end of the first mounting frame 11 is installed on the second horizontal module 22 at one side through the fixed connector, and the other end of the first mounting frame 11 is installed on the second horizontal module 22 at the other side through the floating connector. The mounting plate 12 is located on the first mounting frame 11, and the lifting mechanism 30 is located on the mounting plate 12.
As shown in fig. 3, in some embodiments of the present invention, the floating connection member includes a first base 13, a second base 14, a guide rail 15 and a slider, the first base 13 is located at one end of the first mounting frame 11, and the second base 14 is located on the second horizontal module 22. The guide rail 15 is disposed on the second base 14, and an extending direction of the guide rail 15 is perpendicular to an extending direction of the second horizontal module 22. The first base 13 is movably mounted on the guide rail 15 by the slider. Through setting up guide rail 15 and slider for the mounting bracket can carry out the displacement adjustment along the extending direction of guide rail 15, avoids horizontal migration mechanism 20 card pause, improves horizontal migration mechanism 20 compatibility, reduces the fault rate.
The fixed connecting piece comprises a third base 16 and a fourth base 17, the third base 16 is located at one end, away from the first base 13, of the first mounting frame 11, the fourth base 17 is located on the other second horizontal module 22, and the third base 16 is arranged on the fourth base 17.
As shown in fig. 1 and 4, in some embodiments of the present invention, the first horizontal module 21 includes a first motor 211, a first screw rod, a first slide rail 212, a first slide 213 and a first substrate 214, the first motor 211 is connected to the first screw rod, the first slide 213 is connected to the first screw rod and is disposed on the first slide rail 212, the first substrate 214 is installed on the first slide 213, and the first motor 211 is used to drive the first screw rod to rotate so as to drive the first substrate 214 to move along a horizontal preset direction. Specifically, the first substrate 214 is a cantilever profile, one end of the first substrate 214 is connected to the first slide 213, and the other end of the first substrate 214 is suspended.
The second horizontal module 22 includes a second motor, a second screw, a second slide rail 221 and a second slide carriage 222, and the second motor and the second slide rail 221 are both disposed on the first substrate 214. The second motor is connected to the second lead screw, the second slide base 222 is connected to the second lead screw and disposed on the second slide rail 221, the beam assembly 10 is disposed on the second slide base 222, and the second motor is used for driving the second lead screw to rotate so as to drive the beam assembly 10 to move along the same horizontal preset direction.
As shown in fig. 1 and 5, in some embodiments of the present invention, the lifting mechanism 30 includes a first lifting module 31 and a second lifting module 32, the first lifting module 31 is disposed on the beam assembly 10, and specifically, the first lifting module 31 is disposed on the mounting plate 12. The first lifting module 31 comprises a third motor 311, a third screw rod, a third slide rail 312, a third slide seat and a second substrate 313, the third motor 311 is connected with the third screw rod, the third slide seat is connected with the third screw rod and arranged on the third slide rail 312, the second substrate 313 is arranged on the third slide seat, and the third motor 311 is used for driving the third screw rod to rotate so as to drive the second substrate 313 to move along the vertical direction.
The second lifting module 32 includes a fourth motor 321, a fourth screw rod, a fourth slide rail 322, and a fourth slide carriage 323, and the fourth motor 321 and the fourth slide rail 322 are disposed on the second substrate 313. The fourth motor 321 is connected to the fourth screw rod, the fourth slide 323 is connected to the fourth screw rod and is disposed on the fourth slide rail 322, the material taking mechanism 40 is disposed on the fourth slide 323, and the fourth motor 321 is configured to drive the fourth screw rod to rotate so as to drive the material taking mechanism 40 to move in the vertical direction.
When the first lifting module 31 drives the second lifting module 32 to move, the second lifting module 32 drives the material taking mechanism 40 to move simultaneously, and under the superposition of two speeds and two strokes, the material taking mechanism 40 moves at a long stroke and a high speed in the vertical direction, so that the carrying problem of a large-fall workshop section on a panel production line is solved.
As shown in fig. 1 and 6, in some embodiments of the present invention, the material taking mechanism 40 includes a connecting plate 41, a second mounting frame 42 and a plurality of suction cup assemblies 43, the connecting plate 41 is disposed on the lifting mechanism 30, specifically on the second lifting module 32, and specifically, the connecting plate 41 is connected to the fourth sliding seat 323. The second mounting bracket 42 is connected to the connecting plate 41. A plurality of the sucker components 43 are arranged on the second mounting rack 42 at intervals, and specifically, a plurality of the sucker components 43 are arranged on the second mounting rack 42 at intervals according to the size of the panel.
As shown in fig. 6, in some embodiments of the present invention, a reinforcing rod 44 is disposed on the second mounting frame 42, one end of the reinforcing rod 44 is connected to the connecting plate 41, and the other end of the reinforcing rod 44 is connected to an end of the second mounting frame 42 away from the connecting plate 41, so as to increase the connection strength between the second mounting frame 42 and the connecting plate 41.
As shown in fig. 6, in some embodiments of the present invention, the suction cup assembly 43 comprises a suction cup and a vacuum connection pipe, the suction cup is connected to the vacuum connection pipe, and the vacuum connection pipe is disposed on the second mounting frame 42.
As shown in fig. 1-6, in some embodiments of the present invention, the carrying device further includes a plurality of photoelectric detection sensors 5, and the photoelectric detection sensors 5 are disposed on the horizontal moving mechanism 20, the beam assembly 10, the lifting mechanism 30, and the material taking mechanism 40.
On the other hand, the production line according to an embodiment of the present invention includes the carrying device according to any one of the above embodiments.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: modifications of the technical solutions described in the embodiments or equivalent replacements of some technical features may still be made. Such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.

Claims (10)

1. A carrying device is characterized by comprising a beam assembly, a horizontal moving mechanism, a lifting mechanism and a material taking mechanism, wherein the horizontal moving mechanism is arranged on two sides of the beam assembly and comprises a first horizontal module and a second horizontal module, and the second horizontal module is arranged on the first horizontal module so as to drive the second horizontal module to move along a horizontal preset direction; the beam assembly is arranged on the second horizontal module to drive the beam assembly to move along the same horizontal preset direction; the lifting mechanism is arranged on the beam assembly, and the material taking mechanism is arranged on the lifting mechanism.
2. The carrying device as claimed in claim 1, wherein the cross beam assembly comprises a first mounting frame, a mounting plate, a fixed connector and a floating connector, one end of the first mounting frame is mounted on the second horizontal module on one side through the fixed connector, and the other end of the first mounting frame is mounted on the second horizontal module on the other side through the floating connector; the mounting panel is located on the first mounting bracket, elevating system is located on the mounting panel.
3. The transfer device of claim 2, wherein the floating connector comprises a first base, a second base, a rail, and a slider, the first base being located at one end of the first mounting rack, the second base being located on the second horizontal module; the guide rail is arranged on the second base, and the extending direction of the guide rail is vertical to the extending direction of the second horizontal module; the first base is movably arranged on the guide rail through the sliding block;
the fixed connecting piece comprises a third base and a fourth base, the third base is located the first mounting frame is far away from one end of the first base, the fourth base is located the other end of the second horizontal module, and the third base is arranged on the fourth base.
4. The conveying apparatus according to claim 1, wherein the first horizontal module comprises a first motor, a first lead screw, a first slide rail, a first slide seat and a first base plate, the first motor is connected to the first lead screw, the first slide seat is connected to the first lead screw and disposed on the first slide rail, the first base plate is mounted on the first slide seat, and the first motor is configured to drive the first lead screw to rotate so as to drive the first base plate to move along a horizontal preset direction;
the second horizontal module comprises a second motor, a second screw rod, a second slide rail and a second slide seat, and the second motor and the second slide rail are both arranged on the first substrate; the second motor with the second lead screw is connected, the second slide with the second lead screw is connected and set up in on the second slide rail, the crossbeam subassembly set up in on the second slide, the second motor is used for the drive the second lead screw rotates, in order to drive the crossbeam subassembly is along the removal of same level direction of predetermineeing.
5. The conveying apparatus according to claim 1, wherein the lifting mechanism comprises a first lifting module and a second lifting module, the first lifting module is disposed on the beam assembly, the first lifting module comprises a third motor, a third screw, a third slide rail, a third slide carriage and a second substrate, the third motor is connected to the third screw, the third slide carriage is connected to the third screw and disposed on the third slide rail, the second substrate is mounted on the third slide carriage, and the third motor is configured to drive the third screw to rotate so as to drive the second substrate to move in a vertical direction;
the second lifting module comprises a fourth motor, a fourth screw rod, a fourth slide rail and a fourth slide seat, and the fourth motor and the fourth slide rail are arranged on the second substrate; the fourth motor is connected with the fourth lead screw, the fourth slide is connected with the fourth lead screw and arranged on the fourth slide rail, the material taking mechanism is arranged on the fourth slide, and the fourth motor is used for driving the fourth lead screw to rotate so as to drive the material taking mechanism to move along the vertical direction.
6. The handling device of claim 1, wherein the material extracting mechanism comprises an attachment plate, a second mounting frame, and a plurality of sucker assemblies, the attachment plate being disposed on the lifting mechanism; the second mounting frame is connected with the connecting plate; a plurality of sucking disc subassembly interval set up in on the second mounting bracket.
7. The carrying device as claimed in claim 6, wherein a reinforcing rod is arranged on the second mounting frame, one end of the reinforcing rod is connected with the connecting plate, and the other end of the reinforcing rod is connected with one end of the second mounting frame far away from the connecting plate.
8. The handling device of claim 6, wherein the suction cup assembly comprises a suction cup and a vacuum connection tube, the suction cup being connected to the vacuum connection tube, the vacuum connection tube being disposed on the second mounting frame.
9. The handling device of claim 1, further comprising a plurality of photoelectric detection sensors, wherein the photoelectric detection sensors are disposed on the horizontal movement mechanism, the beam assembly, the lifting mechanism, and the material taking mechanism.
10. A production line, characterized by comprising a handling device according to any one of claims 1-9.
CN202123126881.6U 2021-12-13 2021-12-13 Handling device and production line Active CN217229400U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123126881.6U CN217229400U (en) 2021-12-13 2021-12-13 Handling device and production line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123126881.6U CN217229400U (en) 2021-12-13 2021-12-13 Handling device and production line

Publications (1)

Publication Number Publication Date
CN217229400U true CN217229400U (en) 2022-08-19

Family

ID=82825892

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123126881.6U Active CN217229400U (en) 2021-12-13 2021-12-13 Handling device and production line

Country Status (1)

Country Link
CN (1) CN217229400U (en)

Similar Documents

Publication Publication Date Title
CN107335835B (en) Numerical control equipment for processing hinge holes of plate-type customized furniture
CN109795868A (en) A kind of auxiliary material-pulling device of transmission equipment
CN114427082B (en) Continuous type coating equipment substrate frame
CN217229400U (en) Handling device and production line
CN201952003U (en) Magazine circulation device and system thereof
CN113335924A (en) Conveying device for material frame
CN110817283A (en) Electric lifting transfer mechanism
CN216784977U (en) Conveying device for material frame
CN202465511U (en) Sheet unloading device for composite curved surface toughened glass production equipment
CN215401200U (en) Three-axis servo automatic feeding equipment
CN211441589U (en) Double-workbench side wall hanging mechanism and spray printing equipment
CN202465498U (en) Sheet discharging device used for compound curved surface toughened glass production equipment
CN221051136U (en) Spacing paper recycling and arranging mechanism
CN210285919U (en) Servo transfer mechanism
CN110817270A (en) Pneumatic lifting transfer mechanism
CN218370341U (en) OPENCELL production line back plate positioning and fixing mechanism
CN217626229U (en) Single-shaft Z-shaped high-speed carrying mechanism
CN205157450U (en) Differentiate tin quality mechanism fast
CN220068177U (en) Double-rail single-shaft single-drive moving mechanism
CN212892644U (en) Automatic pick-up equipment
CN216889921U (en) Cantilever truss multistage telescopic transfer robot
CN220364024U (en) Multi-station transfer device for machining
CN219340915U (en) Double-speed reflux device for plate cutting
CN212126692U (en) Conveying equipment
CN220950130U (en) Multi-station transfer mechanism

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant