CN217214660U - Accessory storage unit and accessory storage assembly - Google Patents
Accessory storage unit and accessory storage assembly Download PDFInfo
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- CN217214660U CN217214660U CN202221004781.8U CN202221004781U CN217214660U CN 217214660 U CN217214660 U CN 217214660U CN 202221004781 U CN202221004781 U CN 202221004781U CN 217214660 U CN217214660 U CN 217214660U
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Abstract
The utility model discloses a unit is deposited to accessory. The accessory storage unit can be placed on a placement surface. The accessory storage unit includes a first end and a second end. An access opening is formed in the first end. A stacking port is formed on the second end. The first inner cavity is communicated with the placing opening and comprises a first cavity bottom surface. The first cavity bottom surface can be parallel to the resting surface. And a second inner cavity, the second inner cavity communicates with the stacking port. The second lumen can receive the first end and enable the first end to abut against a lumen wall secured to the second lumen. The utility model discloses in can effectively promoting board maintenance process, the security of depositing of quartzy accessory practices thrift and deposits area and simple structure, low cost. Simultaneously the utility model also provides an subassembly is deposited to accessory.
Description
Technical Field
The utility model relates to a unit is deposited to accessory, its quartz accessory that can be used to bear the weight of chip processing setting. The utility model discloses still relate to and have the subassembly of depositing including above-mentioned accessory storage unit.
The machine is a machine for carrying out
Background
In chip processing, after ion implantation, it is necessary to eliminate lattice damage and activate implanted ions by rapid thermal annealing of the machine, and in maintenance of the machine, it is necessary to periodically replace consumables such as the quartz column supporting the wafer, the jewel ball and the holder for rolling the turntable of the quartz disk, and the lamp tube to maintain normal use of the machine. In the maintenance process, the disc and the circular ring-shaped quartz accessory are required to be taken out from the machine table and stored outside temporarily, the existing storage is horizontally placed on the ground or the table top, the accessory area is large, the number of independent units is large, the required horizontal laying area is large, the independent units are limited by the operation space, the independent units are mostly stacked, and the disc and the circular ring-shaped quartz accessory are easy to damage in the storage process.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a unit is deposited to accessory, it can effectively promote board maintenance process, and area and simple structure, low cost are deposited in saving to the security of depositing of quartzy accessory.
Another object of the present invention is to provide an accessory storage assembly, which is particularly suitable for the maintenance of a machine, and the storage of quartz accessories, which is simple in structure and easy to carry.
The invention provides an accessory storage unit. The accessory storage unit can be placed on a placement surface. The accessory storage unit includes an extension direction in which the accessory storage unit includes a first end and a second end.
An access opening is formed in the first end. A stacking port is formed on the second end. The first end includes an outer circumferential surface. A first cavity, the first cavity is communicated with the placing opening and comprises a first cavity bottom surface. The first chamber bottom face can be parallel to the resting face. And a second lumen communicating with the stacking port. The second lumen can receive the first end and enable the first end to abut against a lumen wall secured to the second lumen.
In one embodiment of the accessory storage unit of the present invention, the second inner chamber includes a second chamber top surface. The second cavity top face can be parallel to the first cavity bottom face. The first end can abut against the top surface of the second cavity.
In another embodiment of the accessory storage unit of the present invention, a through hole is formed outside the accessory storage unit. The through hole is communicated with the second inner cavity and is close to the top surface of the second inner cavity.
In another embodiment of the accessory storage unit of the present invention, the through holes are multiple through holes. Each group of through holes is 3-4. A plurality of through-holes in every group through-hole set gradually along the direction of encircleing of outer circumferencial face. The plurality of groups of through holes are arranged in the accessory storage unit along the radial direction of the accessory storage unit. The diameter of the through hole is phi 2 mm-phi 3 mm.
In another embodiment of the accessory storage unit of the present invention, the edge shape of the second inner cavity circumferential surface corresponds to the edge shape of the outer circumferential surface, and the outer circumferential surface can be attached to the inner cavity circumferential surface or a gap of 0.1mm to 0.2mm is formed between the outer circumferential surface and the inner cavity circumferential surface.
In a further embodiment of the accessory storage unit of the present invention, the wall of the first interior space is inclined to the outer circumferential surface at a predetermined angle. The connecting edge of the cavity wall of the first inner cavity and the bottom surface of the first cavity is an arc-shaped chamfer. The setting angle is 110-100 degrees.
In another embodiment of the accessory storage unit of the present invention, the first cavity bottom surface is a circular surface. The diameter of the circular surface is phi 300 mm-phi 356 mm. Phi 360 mm-400 mm. The outer circumferential surface is a cylindrical surface. The diameter of the cylindrical surface is phi 300 mm-phi 378 mm. Phi 380 mm-420 mm. The depth of the first inner cavity is 30 mm-32 mm. 35 mm-40 mm.
In another embodiment of the accessory storage unit of the present invention, the second inner chamber is a cylindrical inner chamber. The top surface of the second cavity is a circular surface. The diameter of the circular top surface of the second cavity is phi 350 mm-phi 378 mm. Phi 380 mm-420 mm. The depth of the second inner cavity is 15 mm-18 mm. 20 mm-30 mm.
In yet another embodiment of the accessory storage unit of the present invention, the outer face of the second end forms a step face. The bottom surface of the stepped surface is parallel to the bottom surface of the first cavity. The bottom surface of the stepped surface is a circular bottom surface. The diameter of the round bottom surface is phi 375 mm-phi 395 mm. Phi 400 mm-420 mm.
In another aspect of the present invention, there is also provided an accessory storage assembly, including the accessory storage unit of the present invention, wherein the first end of any one of the accessory storage units can be stacked in the second inner cavity of any other one of the accessory storage units, so that the plurality of accessory storage units can be arranged along a stacking direction. The stacking direction can be perpendicular to the resting face.
Drawings
Fig. 1 is a schematic structural view for explaining an accessory storage unit according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view illustrating an accessory storage unit according to an embodiment of the present invention.
Fig. 3 is a schematic diagram illustrating a structure of an accessory storage unit according to another embodiment of the present invention.
Fig. 4 is a schematic view for explaining a structure of the accessory storage unit according to an embodiment of the present invention when the accessory storage units are stacked.
FIG. 5 is a schematic view illustrating a partial structure of an accessory storage unit according to an embodiment of the present invention
Fig. 6 is a schematic view for explaining a structure of an accessory storage unit according to still another embodiment of the present invention.
Detailed Description
In order to clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will be described with reference to the accompanying drawings, wherein the same reference numerals in the drawings denote the same or similar components.
"exemplary" means "serving as an example, instance, or illustration" herein, and any illustration, embodiment, or steps described as "exemplary" herein should not be construed as a preferred or advantageous alternative.
For the sake of simplicity, the drawings only schematically show the parts relevant to the present exemplary embodiment, and they do not represent the actual structure and the true scale of the product.
An embodiment of the present invention provides an accessory storage unit. As shown in fig. 1, the accessory storage unit 10 can be placed on a placement surface 90. The accessory storage unit 10 includes an extension direction Y1, and in the extension direction Y1 the accessory storage unit 10 includes a first end 11 and a second end 12. As shown in fig. 1 and 2, an inlet opening 20 is formed at the first end 11. A stacking port 30 is formed in the second end 12. The first end 11 includes an outer circumferential surface 13.
As shown in fig. 1 and 2, the accessory storage unit 10 of the present invention includes: a first lumen 21. The first interior cavity 21 communicates with the access opening 20 and includes a first cavity floor 22. The first cavity floor 22 can be parallel to the resting surface 90. And a second lumen 31. The second inner chamber 31 communicates with the stacking port 30.
As shown in fig. 3, the second interior cavity 31 of the accessory storage unit 10 can receive the first end 11 and allow the first end 11 to abut against a wall secured to the second interior cavity 31. Thus, when a plurality of accessory storage units 10 are stored in a stacked manner, as shown in fig. 3. The first end 11-1 of the further accessory storage unit 10-1 can abut against the wall of the second interior 31 of the accessory storage unit 10, so that a stacking of a plurality of accessory storage units is achieved.
As shown in fig. 4, the accessory storage unit 10 of the present invention contains a quartz tray 81, the storage unit 10-1 contains a quartz rotary table 82, and the storage unit 10-2 can be stacked in sequence according to the stacking direction D after containing other quartz parts, so as to safely and stably contain the quartz accessories and save space.
As shown in fig. 1 and 2, in one embodiment of the accessory storage unit 10 of the present invention, the second interior cavity 31 includes a second cavity top surface 32. The second cavity top surface 32 can be parallel to the first cavity bottom surface 22. The first end 11 can abut against the second chamber top surface 32. Thereby allowing the access opening 20 to rest fully against the second chamber top surface 32 and increasing stacking stability.
As shown in fig. 5, in another embodiment of the accessory storage unit of the present invention, a through hole 40 is formed outside the accessory storage unit 10. The through hole 40 communicates with the second cavity 31 and is adjacent to the second cavity top surface 32. So that when the second end of the accessory storage unit 10 is stacked on the first end of the accessory storage unit 10-1, the sealing pressure caused between the second interior chamber of the accessory storage unit 10 and the first interior chamber 31 of the accessory storage unit 10-1 can be effectively released through the through-hole 40, thereby facilitating a quick stacking operation and making it possible to stack a plurality of accessory storage units more smoothly.
As shown in fig. 6, in another embodiment of the accessory storage unit of the present invention, the through holes are a plurality of sets of through holes 41, 42. The number of the through holes in each group of the through holes 41 and 42 is 3-4. The plurality of through holes 43, 44, 45 in each set of through holes 41 are arranged in sequence in the circling direction R1 of the outer circumferential face 13. The plural sets of through holes 41 are provided in the accessory storage unit 10 in the radial direction of the accessory storage unit 10. The diameter of the through hole 40 or the through holes 43, 44 and 45 in each group is phi 2 mm-phi 3 mm. Thereby facilitating the release of pressure in the enclosed space between the accessory storage units when the plurality of accessory storage units are stacked.
As shown in fig. 5, in another embodiment of the accessory storage unit of the present invention, the edge shape of the inner cavity circumferential surface 14 of the second inner cavity 31 corresponds to the edge shape of the outer circumferential surface 13, and the outer circumferential surface 13 can be attached to the inner cavity circumferential surface 14 or a gap of 0.1mm to 0.2mm is formed between the outer circumferential surface and the inner cavity circumferential surface 14. Thereby facilitating the detachment of the plurality of accessory storage units after stacking.
In yet another embodiment of the accessory storage unit of the present invention, as shown in fig. 5, the cavity wall 23 of the first interior cavity 21 is inclined toward the outer circumferential surface 13 at a set angle a 1. The connecting edge of the cavity wall 23 of the first inner cavity 21 and the first cavity bottom surface 22 is an arc-shaped chamfer. The angle a1 is set to 110-100 °. Thereby facilitating storage of the quartz fittings.
In yet another embodiment of the accessory storage unit 10 of the present invention, the first cavity bottom surface 22 is a circular surface. The diameter of the circular surface is phi 300 mm-phi 356 mm. Phi 360 mm-400 mm. The outer circumferential surface 13 is a cylindrical surface. The diameter of the cylindrical surface is phi 300 mm-phi 378 mm. Phi 380 mm-420 mm. The depth of the first inner cavity 21 is 30 mm-32 mm. 35 mm-40 mm. Thereby saving space and being more convenient for storing the quartz fittings.
In another embodiment of the accessory storage unit 10 of the present invention, the second cavity 31 is a cylindrical cavity. The second chamber top surface 32 is a circular surface. The second chamber top surface 32 is a circular surface having a diameter of 350mm to 378 mm. Phi 380 mm-420 mm. The depth of the second inner cavity 31 is 15 mm-18 mm. 20 mm-30 mm. Thereby saving space and being more convenient for storing the quartz fittings.
In yet another embodiment of the accessory storage unit 10 of the present invention, the outer surface of the second end 12 forms a step surface 15. The bottom face of the stepped surface 15 is parallel to the first cavity bottom face 22. The bottom surface of the stepped surface 15 is a circular bottom surface. The diameter of the round bottom surface is phi 375 mm-phi 395 mm. Phi 400 mm-420 mm. Thereby saving space and being more convenient for storing the quartz fittings.
In another aspect of the present invention, as shown in fig. 4, there is provided an accessory storage assembly, including the accessory storage units of the present invention, wherein the first end 11 of any one accessory storage unit can abut against the second inner cavity 31 of any other accessory storage unit, so that a plurality of accessory storage units 10 can be arranged along a stacking direction D. The stacking direction D can be perpendicular to the placement surface 90. Thereby enabling stacking of multiple accessory storage assemblies.
It should be understood that although the present description has been described in terms of various embodiments, not every embodiment includes only individual features, which are described herein for clarity purposes only, and those skilled in the art will recognize that the embodiments described herein can be combined as a whole to form other embodiments as would be understood by those skilled in the art.
The above list of details is only for the practical implementation of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the present invention should be included in the scope of the present invention.
Claims (10)
1. An accessory storage unit, wherein the accessory storage unit is capable of being placed on a placement surface; the accessory storage unit includes a storage unit for storing accessories,
an extension direction in which the accessory storage unit includes a first end and a second end;
forming a port in said first end; forming a stacking port on said second end; said first end including an outer circumferential surface;
a first cavity, said first cavity communicating with said access opening and comprising a first cavity floor; the first cavity bottom surface can be parallel to the placing surface; and
a second lumen, said second lumen communicating with said stacking port; the second lumen can receive the first end and enable the first end to abut against a lumen wall secured to the second lumen.
2. The accessory storage unit of claim 1, wherein the second interior cavity comprises a second cavity top surface; the second cavity top surface can be parallel to the first cavity bottom surface; the first end can abut against the top surface of the second cavity.
3. The accessory storage unit according to claim 2, wherein a through hole is formed outside the accessory storage unit; the through hole is communicated with the second inner cavity and is close to the top surface of the second inner cavity.
4. The accessory storage unit of claim 3, wherein the through-holes are a plurality of sets of through-holes; each group of through holes is 3-4; a plurality of through holes in each group of through holes are sequentially arranged along the surrounding direction of the outer circumferential surface; the multiple groups of through holes are arranged on the accessory storage unit along the radial direction of the accessory storage unit; the diameter of the through hole is phi 2 mm-phi 3 mm.
5. The accessory storage unit of claim 1, wherein the second inner peripheral surface has an edge shape corresponding to an edge shape of the outer peripheral surface, the outer peripheral surface being capable of fitting against the inner peripheral surface or forming a gap of 0.1mm to 0.2mm with the inner peripheral surface.
6. The accessory storage unit of claim 1, wherein the wall of the first interior cavity is sloped at a set angle to the outer circumferential surface; the connecting edge of the cavity wall of the first inner cavity and the bottom surface of the first cavity is an arc-shaped chamfer; the set angle is 110-100 degrees.
7. The accessory storage unit of claim 1, wherein the first cavity floor is a circular surface; the diameter of the circular surface is phi 300 mm-phi 356 mm; phi 360 mm-400 mm; the outer circumferential surface is a cylindrical surface; the diameter of the cylindrical surface is phi 300 mm-phi 378 mm; phi 380 mm-phi 420 mm; the depth of the first inner cavity is 30-32 mm; 35 mm-40 mm.
8. The accessory storage unit of claim 2, wherein the second interior cavity is a cylindrical interior cavity; the top surface of the second cavity is a circular surface; the diameter of the round top surface of the second cavity is phi 350 mm-phi 378 mm; phi 380 mm-phi 420 mm; the depth of the second inner cavity is 15 mm-18 mm; 20 mm-30 mm.
9. The accessory storage unit of claim 1, wherein the exterior face of the second end forms a stepped face; the bottom surface of the stepped surface is parallel to the bottom surface of the first cavity; the bottom surface of the step surface is a circular bottom surface; the diameter of the round bottom surface is phi 375 mm-phi 395 mm; phi 400 mm-420 mm.
10. An accessory storage assembly comprising a plurality of accessory storage units according to any one of claims 1 to 9; wherein the first end of any one of the accessory storage units is capable of being stacked in the second interior cavity of any other accessory storage unit so that the plurality of accessory storage units can be arranged in a stacking direction; the stacking direction can be perpendicular to the placement surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221004781.8U CN217214660U (en) | 2022-04-27 | 2022-04-27 | Accessory storage unit and accessory storage assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221004781.8U CN217214660U (en) | 2022-04-27 | 2022-04-27 | Accessory storage unit and accessory storage assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217214660U true CN217214660U (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221004781.8U Active CN217214660U (en) | 2022-04-27 | 2022-04-27 | Accessory storage unit and accessory storage assembly |
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| Country | Link |
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| CN (1) | CN217214660U (en) |
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- 2022-04-27 CN CN202221004781.8U patent/CN217214660U/en active Active
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Address after: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee after: Yuexin Semiconductor Technology Co.,Ltd. Address before: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee before: Guangzhou Yuexin Semiconductor Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |