CN217206878U - Vacuum pump with special-shaped sealing structure - Google Patents
Vacuum pump with special-shaped sealing structure Download PDFInfo
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- CN217206878U CN217206878U CN202220828468.XU CN202220828468U CN217206878U CN 217206878 U CN217206878 U CN 217206878U CN 202220828468 U CN202220828468 U CN 202220828468U CN 217206878 U CN217206878 U CN 217206878U
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Abstract
The utility model relates to a vacuum pump with prevent inside and outside leakage abnormal shape seal structure. The vacuum pump includes: motor element, gear box subassembly, pump body subassembly, heterotypic seal structure unit mount be in the heterotypic seal groove that the cavity was seted up down and go up the cavity with in the both ends face seal groove after the cavity combination down. The utility model discloses set up heterotypic seal groove structure between adjacent height cavity, including assorted heterotypic sealing member with it for sealed nothing internal leakage after the cavity assembly about, solved the problem that the vacuum pump high pressure chamber is gaseous to the low pressure chamber is revealed, when the ultimate vacuum degree that increases the vacuum pump complete machine, reduced and done work to revealing gas repetition, reduced the consumption.
Description
Technical Field
The utility model relates to a vacuum pump technical field especially relates to a heterotypic seal structure vacuum pump.
Background
The vacuum industry is an important basic link in the technical field of national industry, and is widely applied to the industries of national defense science and technology, steel industry, film coating, microelectronic information, semiconductors, biological medicines, chemical industry, food, environmental protection and the like. The comprehensive performance of the vacuum equipment is related to the production capacity and research and development capacity of national overall high and new technology equipment, in recent years, the reintegration of national resource structures puts higher requirements on cleanness, no pollution and artificial intelligence, the vacuum pump equipment develops towards the direction of high quality, high efficiency and high automation to be a necessary trend, the precision vacuum pump is necessary vacuum source equipment in the general semiconductor industry, the chemical industry and the medical and pharmaceutical industry, and the requirements on the ultimate vacuum degree and the power of the equipment are very strict due to the particularity of the use industry.
Prior art CN206845467U discloses a leak-proof roots vacuum pump, which comprises a pump body and a motor assembly, wherein a main oil storage chamber, a driving shaft, a driven shaft and a transmission assembly are arranged in the pump body, synchronous rotation is realized between the driving shaft and the driven shaft through the transmission assembly, the motor assembly comprises a motor power output shaft and a motor flange, the motor assembly is mounted on one side of the pump body close to the main oil storage chamber through the motor flange, a shaft penetrating hole for the power output shaft to penetrate is arranged on the motor flange, a shaft coupling is connected between the motor power output shaft and the driving shaft, the driving shaft penetrates through the main oil storage chamber, a sealing assembly is arranged between the motor power output shaft and the shaft penetrating hole, and the sealing assembly adopts a magnetic mechanical sealing element.
However, the adjacent high-low pressure cavities of the vacuum pump in the prior art are prevented from being internally leaked and sealed to form the workpiece machining surface, even if the machining surface precision is high, the leakage between the adjacent high-low pressure cavities can be caused, the ultimate vacuum degree of the vacuum pump is finally reduced, the leaked gas is repeatedly worked, and the power consumption is increased.
How to overcome above-mentioned prior art scheme not enough, make adjacent high low pressure cavity totally enclosed, solve the problem that high pressure chamber gas reveals to the low pressure chamber, increase the ultimate vacuum degree of vacuum pump complete machine simultaneously, reduce to revealing that gas is repeated to do work, reduce the consumption, become the subject that this technical field is waited to solve urgently.
SUMMERY OF THE UTILITY MODEL
For overcoming above-mentioned prior art not enough, solve because the adjacent high low pressure cavity of vacuum pump in, leak a series of problems that became invalid and produce outward, the utility model provides a heterotypic seal structure vacuum pump specifically adopts following technical scheme:
a vacuum pump of profiled sealing construction, the vacuum pump comprising: the pump comprises a motor assembly, a gear box assembly, a pump body assembly and a special-shaped sealing structure assembly;
the pump body assembly includes: the device comprises a driving shaft, a driven shaft, an upper cavity, a lower cavity, a high-pressure side bearing plate and a low-pressure side bearing plate;
the gear box assembly is arranged on the high-pressure side bearing plate through a gear box flange;
the upper cavity is arranged on the lower cavity through a side flange, and the high-pressure side bearing plate and the low-pressure side bearing plate are fixedly connected with the cavity through the upper bearing plate flange;
the motor assembly is arranged on one side of the gear box through a motor flange;
the special-shaped sealing structure assembly is arranged in a special-shaped sealing groove formed in the lower cavity and two end face sealing grooves formed after the upper cavity and the lower cavity are combined.
Further, the profiled sealing structure assembly comprises: the sealing gasket comprises a first fluororubber special-shaped sealing element, a second fluororubber special-shaped sealing element, a third fluororubber special-shaped sealing element, a first PTFE sealing gasket, a second PTFE sealing gasket, a third PTFE sealing gasket, a fourth PTFE sealing gasket and an O-shaped ring.
Further, first fluorine rubber abnormal shape sealing member, second fluorine rubber abnormal shape sealing member, third fluorine rubber abnormal shape sealing member, first PTFE sealed pad, the sealed pad of second PTFE, the sealed pad of third PTFE, the sealed pad of fourth PTFE are installed in the abnormal shape seal groove that the cavity was seted up down, 0 type circle is installed go up the cavity with in the both ends face seal groove after the cavity combination down.
Furthermore, the number of the first fluorine rubber special-shaped sealing elements is two, the first fluorine rubber special-shaped sealing elements are n-shaped on the plane and are respectively arranged in special-shaped sealing grooves formed in the two sides of the lower cavity close to the side flange;
the second fluorine rubber special-shaped sealing element is in a comb shape on the plane, is arranged in the special-shaped sealing groove formed between the driving shaft and the side flange adjacent to the driving shaft in the lower cavity, and the protruding comb teeth of the second fluorine rubber special-shaped sealing element extend towards the inside of the vacuum respectively and are positioned between the adjacent high-pressure cavity and low-pressure cavity;
the third special-shaped rubber sealing element is comb-shaped on the plane, is arranged in the special-shaped sealing groove formed between the driven shaft and the side flange adjacent to the driven shaft in the lower cavity, and the protruding comb teeth of the third special-shaped rubber sealing element extend towards the inside of the vacuum and are positioned between the adjacent high-pressure cavity and low-pressure cavity;
the third PTFE sealing gasket and the fourth PTFE sealing gasket are in a straight shape on the plane and are arranged in the special-shaped sealing groove formed between the driving shaft and the driven shaft.
Further, first fluorine rubber abnormal shape sealing member tip is equipped with semicircle type recess, installs go up the cavity with in the both ends face seal groove after the cavity combination down O type circle with semicircle type recess laminating is sealed.
Further, the depth of the special-shaped sealing groove formed in the lower cavity is 1.4 mm.
Further, motor element passes through the motor flange and installs in the gear box and be close to main oil storage chamber one side, motor element's power output shaft fixedly connected with first shaft coupling.
Further, the gearbox assembly includes: a driving gear and a driven gear which are respectively fixed on the driving shaft and the driven shaft, a second coupling and an oil distributing disc.
Furthermore, the second coupler is installed on the driving shaft, and a first coupler fixed on a power output shaft of the motor assembly is connected with the second coupler on the driving shaft.
Furthermore, the driving shaft and the driven shaft are in meshing transmission and synchronous rotation through the driving gear and the driven gear.
The technical scheme of the utility model the following beneficial effect has been obtained: the special-shaped sealing groove structure is arranged between the adjacent high-low cavities, and the special-shaped sealing piece matched with the special-shaped sealing groove structure is arranged, so that the upper cavity and the lower cavity are sealed without internal leakage after being assembled, the problem that gas in a high-pressure cavity of the vacuum pump leaks to a low-pressure cavity is solved, the repeated work on the leaked gas is reduced while the limit vacuum degree of the whole vacuum pump is increased, and the power consumption is reduced.
Drawings
Fig. 1 is a schematic view of the vacuum pump structure of the present invention.
Fig. 2 is the schematic diagram of the internal structure of the vacuum pump of the present invention.
Fig. 3 is the local enlarged schematic view of the sealing structure of the vacuum pump of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby. It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure herein.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The utility model discloses a specific embodiment relates to a heterotypic seal structure vacuum pump. Referring to fig. 1 and 2, the vacuum pump includes: the gear pump comprises a motor component 1, a gear box component 2, a pump body component 3 and a special-shaped sealing structure component 4. The pump body assembly 3 includes: a driving shaft 31, a driven shaft 32, an upper cavity 33, a lower cavity 34, a high-pressure side bearing plate 35 and a low-pressure side bearing plate 36; the gearbox assembly 2 is mounted on the high pressure side bearing plate 35 through a gearbox flange; the upper cavity 31 is mounted on the lower cavity 32 through a side flange, and the high-pressure side bearing plate 33 and the low-pressure side bearing plate 34 are fixedly connected with the cavity through the upper flange of the bearing plate.
Motor element 1 passes through the motor flange and installs in the gear box and be close to main oil storage chamber 21 one side, motor element 1's power output shaft fixedly connected with first shaft coupling 11.
The gearbox assembly 2 comprises: a driving gear 23 and a driven gear 24 respectively fixed on the driving shaft 31 and the driven shaft 32, a second coupling 22 and an oil distributing plate 25.
The second coupler 22 is installed on the driving shaft 31, and the first coupler 11 fixed on the power output shaft of the motor assembly 1 is connected with the second coupler 22 on the driving shaft 31; the driving shaft 31 and the driven shaft 32 are in meshed transmission and synchronous rotation with the driving gear 23 and the driven gear 24, so that the work of the vacuum pump is realized.
The special-shaped sealing structure assembly 4 is arranged in a special-shaped sealing groove formed in the lower cavity 34 and in two end face sealing grooves formed after the upper cavity 33 and the lower cavity 34 are combined.
The heterotypic seal structure subassembly includes: a first fluorine rubber profile seal 41, a second fluorine rubber profile seal 42, a third fluorine rubber profile seal 43, a first PTFE seal 44, a second PTFE seal 45, a third PTFE seal 46, a fourth PTFE seal 47, and an O-ring 48.
First fluorine rubber abnormal shape sealing member 41, second fluorine rubber abnormal shape sealing member 42, third fluorine rubber abnormal shape sealing member 43, first PTFE sealed pad 44, second PTFE sealed pad 45, third PTFE sealed pad 46, fourth PTFE sealed pad 47 install in the abnormal shape seal groove that cavity 34 seted up down, O type circle 48 is installed go up cavity 33 with in the both ends face seal groove after cavity 34 makes up down.
Referring to fig. 2, the first fluorine rubber special-shaped sealing elements 41 are two in number, are n-shaped on a plane, have a hollow main body in the middle, and are respectively disposed in the special-shaped sealing grooves formed on the two sides of the lower cavity 34 close to the side flanges to enhance the sealing effect.
The second special-shaped fluorine rubber sealing element 42 is comb-shaped on the plane, is arranged in a special-shaped sealing groove formed between the driving shaft 31 and a side flange adjacent to the driving shaft 31, the protruding comb teeth of the second special-shaped fluorine rubber sealing element 42 extend to the inside of the vacuum respectively and are positioned between adjacent high-pressure and low-pressure cavities, and sealing between the adjacent high-pressure and low-pressure cavities is realized
The third fluorine rubber abnormal shape sealing member 43, it presents the comb shape on the plane, set up in cavity 34 is located down the driven shaft 32 with in the abnormal shape seal groove that sets up between the adjacent side flange of driven shaft 32, just the protruding broach of third fluorine rubber abnormal shape sealing member 43 extends to vacuum inside respectively, is located between adjacent high, low pressure cavity, makes and realizes sealedly between the adjacent high low cavity.
The third PTFE seal gasket 46 and the fourth PTFE seal gasket 47 are in a straight shape on a plane, and are disposed in the special-shaped seal groove formed between the driving shaft 31 and the driven shaft 32 in the lower cavity 34.
Referring to fig. 3, a semicircular groove is formed at an end of the first fluorine rubber profiled sealing element 41, and the O-rings 48 installed in the sealing grooves at two end surfaces of the combined upper cavity 33 and the combined lower cavity 34 are attached to the semicircular groove for sealing. The depth of the special-shaped sealing groove formed in the lower cavity 34 is 1.4 mm.
As described above, the present invention is only a preferred embodiment, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be considered as the protection scope of the present invention.
Claims (10)
1. A vacuum pump of profiled sealing construction, the vacuum pump comprising: the gear pump comprises a motor assembly (1), a gear box assembly (2), a pump body assembly (3) and a special-shaped sealing structure assembly (4);
the pump body assembly (3) comprises: a driving shaft (31), a driven shaft (32), an upper cavity (33), a lower cavity (34), a high-pressure side bearing plate (35) and a low-pressure side bearing plate (36);
the gearbox assembly (2) is mounted on the high-pressure side bearing plate (35) through a gearbox flange;
the upper cavity (33) is mounted on the lower cavity (34) through a side flange, and the high-pressure side bearing plate (35) and the low-pressure side bearing plate (36) are fixedly connected with the cavity through upper bearing plate flanges;
the motor assembly (1) is arranged on one side of the gear box through a motor flange;
the special-shaped sealing structure assembly (4) is arranged in a special-shaped sealing groove formed in the lower cavity (34) and in two end face sealing grooves formed after the upper cavity (33) and the lower cavity (34) are combined.
2. A vacuum pump according to claim 1, wherein the profiled sealing structure assembly comprises: the sealing gasket comprises a first fluorine rubber special-shaped sealing element (41), a second fluorine rubber special-shaped sealing element (42), a third fluorine rubber special-shaped sealing element (43), a first PTFE sealing gasket (44), a second PTFE sealing gasket (45), a third PTFE sealing gasket (46), a fourth PTFE sealing gasket (47) and an O-shaped ring (48).
3. The vacuum pump according to claim 2, wherein the first fluorine rubber profile sealing element (41), the second fluorine rubber profile sealing element (42), the third fluorine rubber profile sealing element (43), the first PTFE sealing gasket (44), the second PTFE sealing gasket (45), the third PTFE sealing gasket (46) and the fourth PTFE sealing gasket (47) are arranged in profile sealing grooves formed in the lower cavity (34), and the O-rings (48) are arranged in two end face sealing grooves formed after the upper cavity (33) and the lower cavity (34) are combined.
4. A vacuum pump according to claim 3, characterized in that said first fluorine rubber profiled sealing elements (41) are provided in two, n-shaped in plan, respectively arranged in profiled sealing grooves provided on both sides of said lower chamber (34) close to the lateral flanges;
the second fluorine rubber special-shaped sealing element (42) presents a comb shape on a plane, is arranged in a special-shaped sealing groove which is formed between the driving shaft (31) and a side flange adjacent to the driving shaft (31) and is positioned in the lower cavity (34), and protruding comb teeth of the second fluorine rubber special-shaped sealing element (42) extend towards the inside of the vacuum respectively and are positioned between the adjacent high-pressure cavity and low-pressure cavity;
the third special-shaped rubber sealing element (43) is comb-shaped on the plane, is arranged in a special-shaped sealing groove formed between the driven shaft (32) and a side flange adjacent to the driven shaft (32) of the lower cavity (34), and the protruding comb teeth of the third special-shaped rubber sealing element (43) extend towards the inside of vacuum respectively and are positioned between the adjacent high-pressure cavity and the adjacent low-pressure cavity;
the third PTFE sealing gasket (46) and the fourth PTFE sealing gasket (47) are in a straight shape on the plane, and are arranged in the special-shaped sealing groove formed between the driving shaft (31) and the driven shaft (32) of the lower cavity (34).
5. The vacuum pump according to claim 3, wherein a semicircular groove is formed at an end of the first fluorine rubber profile-shaped sealing member (41), and the O-shaped ring (48) installed in the sealing groove at the two end faces of the combined upper cavity (33) and lower cavity (34) is in fit sealing with the semicircular groove.
6. A vacuum pump according to claim 3, characterized in that the depth of the profiled sealing groove formed in the lower cavity (34) is 1.4 mm.
7. Vacuum pump according to claim 1, characterized in that the motor assembly (1) is mounted on the side of the gear box close to the main oil storage chamber (21) through a motor flange, and a first coupling (11) is fixedly connected to the power output shaft of the motor assembly (1).
8. A vacuum pump according to claim 1, wherein the gearbox assembly (2) comprises: a driving gear (23) and a driven gear (24) which are respectively fixed on the driving shaft (31) and the driven shaft (32), a second coupling (22) and an oil distributing disc (25).
9. Vacuum pump according to claim 8, characterized in that the second coupling (22) is mounted on the drive shaft (31), the first coupling (11) fixed to the power take-off shaft of the motor assembly (1) being connected to the second coupling (22) on the drive shaft (31).
10. Vacuum pump according to claim 9, characterized in that said driving shaft (31) and said driven shaft (32) are in synchronous rotation by means of meshing transmission between said driving gear (23) and said driven gear (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220828468.XU CN217206878U (en) | 2022-04-11 | 2022-04-11 | Vacuum pump with special-shaped sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220828468.XU CN217206878U (en) | 2022-04-11 | 2022-04-11 | Vacuum pump with special-shaped sealing structure |
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| Publication Number | Publication Date |
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| CN217206878U true CN217206878U (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220828468.XU Active CN217206878U (en) | 2022-04-11 | 2022-04-11 | Vacuum pump with special-shaped sealing structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115853774A (en) * | 2022-04-11 | 2023-03-28 | 北京通嘉宏瑞科技有限公司 | Vacuum pump with special-shaped sealing structure for preventing internal and external leakage and manufacturing method thereof |
-
2022
- 2022-04-11 CN CN202220828468.XU patent/CN217206878U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115853774A (en) * | 2022-04-11 | 2023-03-28 | 北京通嘉宏瑞科技有限公司 | Vacuum pump with special-shaped sealing structure for preventing internal and external leakage and manufacturing method thereof |
| CN115853774B (en) * | 2022-04-11 | 2023-12-01 | 北京通嘉宏瑞科技有限公司 | Vacuum pump with special-shaped sealing structure capable of preventing internal leakage and external leakage and manufacturing method thereof |
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