CN217179877U - Repeated positioning precision detection device for galvanometer - Google Patents
Repeated positioning precision detection device for galvanometer Download PDFInfo
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- CN217179877U CN217179877U CN202220685137.5U CN202220685137U CN217179877U CN 217179877 U CN217179877 U CN 217179877U CN 202220685137 U CN202220685137 U CN 202220685137U CN 217179877 U CN217179877 U CN 217179877U
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Abstract
The application provides a mirror that shakes relocation precision detection device includes: the reflecting spectroscope is used for receiving the laser beam and dividing the laser beam into a test laser beam and a reference laser beam, wherein the test laser beam is emitted into a light inlet of the vibrating mirror; the base plate is arranged on one side of the reflecting spectroscope and is provided with a plurality of PSD sensors, one surface of the base plate, which is provided with the plurality of PSD sensors, faces to the light outlet of the vibrating mirror, the PSD sensor irradiated by the reference laser beam is a reference sensor, and the PSD sensors outside the reference sensor are irradiated by the test laser beam emitted by the light outlet of the vibrating mirror; and the galvanometer controller is connected with the galvanometer and is used for controlling the galvanometer to scan among the PSD sensors. The method and the device can accurately and truly calculate the repeated scanning positioning precision of the galvanometer to be measured.
Description
Technical Field
The utility model relates to a laser marking and processing technology field, concretely relates to mirror that shakes repeated positioning accuracy detection device.
Background
At present, laser processing is widely applied to industries such as automobiles, electronics, electrical appliances, aviation, metallurgy, mechanical manufacturing and the like, in particular to the fields of precision processing, micro-machining and the like. By utilizing the characteristic of interaction between the laser beam and the material, the processing technologies such as welding, cutting, marking, punching and the like can be completed, and the laser processing device is widely applied to laser processing. The repeated positioning precision of the galvanometer is one of important indexes of the performance of the galvanometer, and the repeated positioning precision of the galvanometer is high or low, so that the repeated positioning precision of laser processing equipment is directly influenced. Therefore, it is important to detect the repeated positioning accuracy of the galvanometer.
At present, the conventional method for detecting the repeated positioning accuracy of the galvanometer is to continuously scan a marking pattern through the galvanometer, measure the width of a track line of the marking pattern, and calculate the difference between a laser spot and the marking line to obtain the offset of the displacement of the marking line of the galvanometer in the test time period, so as to indirectly calculate the repeated positioning accuracy of the laser galvanometer.
However, the detection process is completely affected by human labor and subjective judgment, and is affected by the measurement environment, the measurement process is interfered by air, temperature, dust, vibration and the like, and the actually measured result has a large error.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome above-mentioned technique not enough, provide a mirror that shakes repeated positioning accuracy detection device, solve among the prior art testing process and receive artificial interference and easily disturbed by measurement environmental impact, measure the great technical problem of the result error that comes out.
In order to achieve the above technical purpose, the technical scheme of the utility model provide a mirror that shakes relocation precision detection device is provided, include:
the reflecting spectroscope is used for receiving the laser beam and dividing the laser beam into a test laser beam and a reference laser beam, wherein the test laser beam is emitted into a light inlet of the vibrating mirror;
the substrate is arranged on one side of the reflecting spectroscope and is provided with a plurality of PSD (position sensitive detector) sensors, one surface of the substrate, which is provided with the plurality of PSD sensors, faces to a light outlet of the vibrating mirror, the PSD sensor irradiated by the reference laser beam is a reference sensor, and the PSD sensor outside the reference sensor is irradiated by the test laser beam emitted by the light outlet of the vibrating mirror;
and the galvanometer controller is connected with the galvanometer and is used for controlling the galvanometer to scan among the PSD sensors.
Compared with the prior art, the beneficial effects of the utility model include:
the utility model provides a mirror that shakes repetitive positioning accuracy detection device divides the test laser beam into two, adds the benchmark laser in the device, when the mirror that shakes is analyzed to shake the repetitive scanning positioning accuracy, will shake test laser and benchmark laser contrastive analysis of mirror control to can easily remove the interference such as dust, air, temperature, humidity, the mirror that shakes in the detection environment, can be more accurate, more true calculate the repetitive scanning positioning accuracy who is shaken the mirror. The conventional method for detecting the repeated positioning accuracy of the galvanometer is to continuously scan a marking graph through the galvanometer, measure the width of a track line of the marking graph, and calculate the difference value between a laser spot and the marking line to obtain the displacement offset of the marking line of the galvanometer in the testing time period, so as to indirectly calculate the repeated positioning accuracy of the laser galvanometer.
The utility model provides a mirror that shakes relocation precision detection device detects the mirror that shakes and scans the region of location more in a flexible way, and the quantity of the PSD sensor on the accessible adjustment base plate, detectable play mirror that shakes positioning precision when different scanning size and position to more detailed understanding is measured the performance of mirror that shakes. The repeated scanning, positioning and detecting process of the galvanometer does not need manual participation and measurement, and the computer analyzes and calculates according to the collected data to obtain the repeated scanning and positioning error of the galvanometer to be detected and automatically generate the repeated scanning and positioning error data and the chart of the galvanometer to be detected. Save galvanometer detection time, improve machining efficiency. And related personnel can timely and visually know the precision and the performance of repeated scanning and positioning of the galvanometer. And the utility model discloses a mirror that shakes repeated positioning accuracy detection device shakes is in a plurality of through the test laser beam that mirror controller control shakes sent the scanning between the PSD sensor can reduce the interference that measuring process received air, temperature, dust, vibration well, has fine stability.
According to some embodiments of the present invention, the PSD sensor is arranged in a matrix form on the substrate.
According to some embodiments of the present invention, the number of the PSD sensors is 9, and the PSD sensors are arranged in a 3 × 3 matrix on the substrate.
According to some embodiments of the present invention, further comprising: and the data acquisition unit is connected with the PSD sensor and is used for acquiring the electric signal of the PSD sensor.
According to some embodiments of the present invention, the data collector comprises:
the signal amplification unit is used for carrying out signal amplification on the electric signal;
and the filtering unit is connected with the signal amplifying unit and is used for filtering the electric signals.
According to the utility model discloses a some embodiments, mirror that shakes relocation precision detection device still includes: the reflecting mirror is arranged on the other side of the reflecting spectroscope and used for reflecting the laser beam to the reflecting spectroscope.
According to the utility model discloses a some embodiments, mirror that shakes relocation precision detection device still includes: and the laser emitter is arranged on one side of the reflector and is used for emitting the laser beam.
According to some embodiments of the invention, the angle-adjustable mirror comprises a first mirror and a second mirror.
According to some embodiments of the invention, the reflective beamsplitter is at a 45 ° setting from horizontal.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which the abstract is intended to be fully consistent with one of the figures of the specification:
fig. 1 is a schematic structural diagram of a device for detecting repeated positioning accuracy of a galvanometer according to an embodiment of the present invention.
Description of reference numerals: the device comprises a reflecting beam splitter 110, a substrate 120, a PSD sensor 130, a data collector 140, a galvanometer 150, a galvanometer controller 160, a first reflecting mirror 171, a second reflecting mirror 172 and a laser emitter 180.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If there is a description of first and second for the purpose of distinguishing technical features only, this is not to be understood as indicating or implying a relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of technical features indicated.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
The utility model provides a mirror repeated positioning accuracy detection device shakes is divided into two with the test laser beam, adds benchmark laser in the device, when mirror repeated scanning positioning accuracy shakes in the analysis, will shake test laser and benchmark laser contrastive analysis of mirror control to can easily remove dust, air, temperature, humidity in the testing environment, shake interference such as mirror, can be more accurate, more true calculate by the repeated scanning positioning accuracy who shakes the mirror.
The embodiments of the present invention will be further explained with reference to the drawings.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a device for detecting repeated positioning accuracy of a galvanometer according to an embodiment of the present invention.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors.
The device for detecting the repeated positioning accuracy of the galvanometer 150 provided by the embodiment has more flexible detection of the repeated scanning and positioning area of the galvanometer 150, and can detect the positioning accuracy of the galvanometer 150 in different scanning sizes and positions by adjusting the number of the PSD sensors 130 on the substrate 120, so as to know the performance of the galvanometer 150 to be detected in more detail. The repeated scanning, positioning and detecting process of the galvanometer 150 does not need manual participation and measurement, and the computer analyzes and calculates according to the collected data to obtain the repeated scanning and positioning error of the galvanometer 150 to be detected and automatically generate the repeated scanning and positioning error data and the chart of the galvanometer 150 to be detected. The detection time of the galvanometer 150 is saved, and the processing efficiency is improved. And the related personnel can timely and intuitively know the precision and the performance of the repeated scanning and positioning of the galvanometer 150.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. The PSD sensors 130 are arranged in a matrix on the substrate 120, and may be a 2 × 2 matrix, a 3 × 3 matrix, a 4 × 4 matrix, or other types of matrices, which is not limited in this embodiment.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. And the data collector 140 is connected with the PSD sensor, and the data collector 140 is configured to collect an electrical signal of the PSD sensor.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. The data collector 140 includes: the signal amplification unit is used for amplifying the signal of the electric signal; and the filtering unit is connected with the signal amplifying unit and is used for filtering the electric signals.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. And an angle-adjustable reflecting mirror disposed at the other side of the reflective beam splitter 110, for reflecting the laser beam onto the reflective beam splitter 110.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. And an angle-adjustable reflecting mirror disposed at the other side of the reflective beam splitter 110, for reflecting the laser beam onto the reflective beam splitter 110. And the laser transmitter 180 is arranged on one side of the reflector, and the laser transmitter 180 is used for emitting laser beams.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. And an angle-adjustable reflecting mirror disposed at the other side of the reflective beam splitter 110, for reflecting the laser beam onto the reflective beam splitter 110. The angle-adjustable mirror includes a first mirror 171 and a second mirror 172.
In one embodiment, the galvanometer repositioning accuracy detecting device comprises: a reflection beam splitter 110 for receiving the laser beam and splitting the laser beam into a test laser beam and a reference laser beam, the test laser beam being incident into the light inlet of the galvanometer 150; a substrate 120 disposed on one side of the reflective beam splitter 110 and provided with a plurality of PSD sensors 130, wherein one surface of the substrate 120 provided with the plurality of PSD sensors 130 faces a light outlet of the vibrating mirror 150, the PSD sensor 130 irradiated by the reference laser beam is a reference sensor, and the PSD sensor 130 out of the reference sensor is irradiated by the test laser beam emitted from the light outlet of the vibrating mirror 150; and the galvanometer controller 160 is connected with the galvanometer, and the galvanometer controller 160 is used for controlling the galvanometer to scan among the PSD sensors. The reflective beamsplitter 110 is positioned at 45 to the horizontal.
The above description of the present invention does not limit the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the scope of the claims of the present invention.
Claims (9)
1. The utility model provides a galvanometer repositioning accuracy detection device which characterized in that includes:
the reflecting spectroscope is used for receiving the laser beam and dividing the laser beam into a test laser beam and a reference laser beam, wherein the test laser beam is emitted into a light inlet of the vibrating mirror;
the base plate is arranged on one side of the reflecting spectroscope and is provided with a plurality of PSD sensors, one surface of the base plate, which is provided with the plurality of PSD sensors, faces to the light outlet of the vibrating mirror, the PSD sensor irradiated by the reference laser beam is a reference sensor, and the PSD sensors outside the reference sensor are irradiated by the test laser beam emitted by the light outlet of the vibrating mirror;
and the galvanometer controller is connected with the galvanometer and is used for controlling the galvanometer to scan among the PSD sensors.
2. The apparatus as claimed in claim 1, wherein the PSD sensors are arranged in a matrix on the substrate.
3. The apparatus as claimed in claim 1, wherein the number of the PSD sensors is 9, and the PSD sensors are arranged in a 3 × 3 matrix on the substrate.
4. The galvanometer repositioning accuracy detecting device of claim 1, further comprising: and the data acquisition unit is connected with the PSD sensor and is used for acquiring the electric signal of the PSD sensor.
5. The galvanometer repositioning accuracy detecting device of claim 4, wherein the data collector comprises:
the signal amplification unit is used for carrying out signal amplification on the electric signal;
and the filtering unit is connected with the signal amplifying unit and is used for filtering the electric signals.
6. The galvanometer repositioning accuracy detecting device of claim 1, further comprising: the reflecting mirror is arranged on the other side of the reflecting spectroscope and used for reflecting the laser beam to the reflecting spectroscope.
7. The galvanometer repositioning accuracy detecting device of claim 6, further comprising: and the laser emitter is arranged on one side of the reflector and is used for emitting the laser beam.
8. The apparatus as claimed in claim 6, wherein the angle-adjustable mirror comprises a first mirror and a second mirror.
9. The apparatus as claimed in claim 1, wherein the reflecting beam splitter is disposed at an angle of 45 ° with respect to the horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220685137.5U CN217179877U (en) | 2022-03-25 | 2022-03-25 | Repeated positioning precision detection device for galvanometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220685137.5U CN217179877U (en) | 2022-03-25 | 2022-03-25 | Repeated positioning precision detection device for galvanometer |
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| Publication Number | Publication Date |
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| CN217179877U true CN217179877U (en) | 2022-08-12 |
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| CN202220685137.5U Active CN217179877U (en) | 2022-03-25 | 2022-03-25 | Repeated positioning precision detection device for galvanometer |
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- 2022-03-25 CN CN202220685137.5U patent/CN217179877U/en active Active
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