CN217173942U - Pulling assembly for crystal growth and pulling device for crystal growth - Google Patents
Pulling assembly for crystal growth and pulling device for crystal growth Download PDFInfo
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- CN217173942U CN217173942U CN202220208890.5U CN202220208890U CN217173942U CN 217173942 U CN217173942 U CN 217173942U CN 202220208890 U CN202220208890 U CN 202220208890U CN 217173942 U CN217173942 U CN 217173942U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The application relates to the field of crystal growth equipment, in particular to a crystal growth pulling assembly and a crystal growth pulling device. The crystal growth lifting assembly comprises a flexible shaft, an auxiliary furnace chamber and an air inlet pipe, wherein the flexible shaft can freely shuttle in the auxiliary furnace chamber, and the auxiliary furnace chamber is used for accommodating a crystal rod; the auxiliary furnace chamber is provided with an air inlet, and the direction of the opening of the air inlet on the inner wall of the auxiliary furnace chamber is in the axial direction of the flexible shaft; the cross-sectional area of the air inlet on the inner wall of the auxiliary furnace chamber is larger than that of the air inlet on the outer wall of the auxiliary furnace chamber; the air inlet pipe is communicated with the auxiliary furnace chamber through an air inlet. An air inlet with an opening facing to the axial direction of the flexible shaft is arranged on the inner wall of the auxiliary furnace chamber, and the sectional area of the air inlet on the inner wall of the auxiliary furnace chamber is larger than that of the air inlet on the outer wall of the auxiliary furnace chamber; the turbulence degree of the gas entering the auxiliary furnace chamber is reduced to a great extent, and the disturbance of the gas to the flexible shaft is reduced, so that the influence of the crystal rod on the quality due to shaking in the lifting process is avoided.
Description
Technical Field
The application relates to the field of crystal growth equipment, in particular to a crystal growth pulling assembly and a crystal growth pulling device.
Background
In the process of growing silicon single crystals by using a tungsten wire rope flexible shaft as a pulling shaft, the phenomenon of crystal disturbance (or shaking) generally exists. When the crystal is disturbed or a plurality of problems are generated, for example, the resistivity, the intrinsic quality of the crystal such as crystal micro defects and the like, and the extrinsic shape of the single crystal, the stability of crystal growth and the like are adversely affected.
SUMMERY OF THE UTILITY MODEL
An object of an embodiment of the present invention is to provide a pulling module for body growth and a pulling apparatus for crystal growth, which aim to solve the problem that a conventional crystal rod is easily disturbed.
The application provides a crystal growth lifting assembly, which comprises a flexible shaft, an auxiliary furnace chamber and an air inlet pipe, wherein the flexible shaft can freely shuttle in the auxiliary furnace chamber, and the auxiliary furnace chamber is used for accommodating a crystal rod; the auxiliary furnace chamber is provided with an air inlet, and the direction of the opening of the air inlet on the inner wall of the auxiliary furnace chamber is the axial direction of the flexible shaft; the cross-sectional area of the air inlet on the inner wall of the auxiliary furnace chamber is larger than that of the air inlet on the outer wall of the auxiliary furnace chamber; the air inlet pipe is communicated with the auxiliary furnace chamber through the air inlet hole.
An air inlet with an opening facing to the axial direction of the flexible shaft is arranged on the inner wall of the auxiliary furnace chamber, and the sectional area of the air inlet on the inner wall of the auxiliary furnace chamber is larger than that of the air inlet on the outer wall of the auxiliary furnace chamber; the turbulence degree of the gas entering the auxiliary furnace chamber is reduced to a great extent, and the disturbance of the gas to the flexible shaft is reduced, so that the influence of the crystal rod on the quality due to shaking in the lifting process is avoided.
In some embodiments of the present application, the air inlet hole is an annular hole, and the annular hole is arranged in the auxiliary furnace chamber by taking the flexible shaft as a collar.
In some embodiments of the present application, the cross-sectional area of the air intake hole gradually increases in a direction from the outer wall of the sub-furnace chamber to the inner wall of the sub-furnace chamber.
In some embodiments of the present application, the air inlet hole extends in the same direction as the flexible shaft in the wall body of the auxiliary furnace chamber.
In some embodiments of the present application, the auxiliary furnace chamber is provided with a plurality of air inlets, and the plurality of air inlets are distributed at intervals along the axial direction of the flexible shaft.
In some embodiments of the present application, the air intake holes are stepped holes.
In some embodiments of the present application, the crystal growth pulling assembly further comprises a buffer chamber connected to the auxiliary furnace chamber, and the gas inlet pipe and the gas inlet hole are both communicated with the buffer chamber.
In some embodiments of the present application, the air inlet holes are chamfered at the edge of the inner wall of the sub-furnace chamber, and/or the air inlet holes are chamfered at the edge of the outer wall of the sub-furnace chamber.
In some embodiments of the present application, the flexible shaft is a tungsten wire rope.
The application also provides a crystal growth pulling device, which comprises a driving assembly and the crystal growth pulling assembly; the driving assembly is connected with the flexible shaft and used for driving the flexible shaft to rotate and to do linear motion along the axial direction of the flexible shaft.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic diagram illustrating the internal structure of a pull assembly for crystal growth provided in an embodiment of the present application;
fig. 2 shows an enlarged schematic view at a in fig. 1.
Icon: 100-a pulling assembly for crystal growth; 101-an upper chamber; 102-a support cylinder; 103-a bellows; 104-a support plate; 105-a lateral adjustment bolt; 106-horizontal adjusting bolt; 110-secondary furnace chamber; 111-inlet holes; 120-flexible shaft; 130-an air inlet pipe; 140-buffer chamber.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present application, it is to be understood that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like, refer to the orientation or positional relationship as shown in the drawings, or as conventionally placed in use of the product of the application, or as conventionally understood by those skilled in the art, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore should not be considered as limiting the present application.
Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should also be noted that, unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
Examples
Fig. 1 is a schematic diagram illustrating an internal structure of a crystal growth pulling assembly 100 according to an embodiment of the present disclosure, and referring to fig. 1, the embodiment provides a crystal growth pulling assembly 100.
The crystal growth pulling assembly 100 comprises an upper chamber 101, a secondary furnace chamber 110, a flexible shaft 120 and an air inlet pipe 130; go up cavity 101 and be connected with the rotation driving subassembly, the rotation driving subassembly is connected with the tray, is provided with linear drive subassembly and the silk wheel subassembly of book on the tray. The rotary driving assembly drives the supporting disc and the component arranged on the supporting disc to rotate.
The main function of the upper chamber 101 is to support components such as the linear drive assembly and the wire reel assembly.
The flexible shaft 120 penetrates through the auxiliary furnace chamber 110 and the upper chamber 101 to be connected with a wire winding wheel of the wire winding wheel assembly; the other end is connected with a heavy hammer with seed crystals. The flexible shaft 120 can freely shuttle in the auxiliary furnace chamber 110 and the upper chamber 101.
As shown in fig. 1, the upper chamber 101 is provided with a support cylinder 102, the upper end of the support cylinder 102 is connected with a bellows 103, the top of the upper chamber 101 is provided with a support plate 104, and the support plate 104 is movably connected with the upper chamber 101; specifically, the support plate 104 is connected to the upper chamber 101 by a lateral adjustment bolt 105 and a horizontal adjustment bolt 106. The upper end of the bellows 103 is connected to the support plate 104, and the lower end of the bellows 103 is connected to the support cylinder 102.
Holes for the flexible shaft 120 to pass through are formed in the support cylinder 102, the corrugated pipe 103 and the support plate 104, and the flexible shaft 120 can freely shuttle in the support cylinder 102, the corrugated pipe 103 and the support plate 104.
In this embodiment, the flexible shaft 120 is a tungsten wire rope, and it is understood that in other embodiments of the present application, the material of the flexible shaft 120 may be other conductive materials, which is not limited in this application. Further, the structure of the upper chamber 101, the specific structure of the linear driving assembly, the wire winding wheel assembly and the rotational driving assembly are not limited in this application and may be set according to the function thereof.
The upper chamber 101 communicates with the sub-furnace chamber 110, and the gas inlet pipe 130 supplies a gas, for example, argon gas, to the sub-furnace chamber 110.
Fig. 2 is an enlarged schematic view of a portion a in fig. 1, and referring to fig. 2, an air inlet hole 111 is formed in the auxiliary furnace chamber 110; the sub-oven chamber 110 communicates with the intake duct 130 through the intake hole 111. The gas inlet pipe 130 supplies gas into the sub-furnace 110 through the gas inlet holes 111.
In the present application, the direction of the opening of the air inlet 111 on the inner wall of the auxiliary furnace chamber 110 is the axial direction of the flexible shaft 120; in the using process, the flexible shaft 120 extends in the vertical direction under the action of the crystal rod and the heavy hammer, so that the opening of the air inlet hole 111 on the inner wall of the auxiliary furnace chamber 110 faces the vertical direction, that is, the air flow of the air inlet hole 111 enters the auxiliary furnace chamber 110 in a vertically downward mode. The sectional area of the inlet holes 111 on the inner wall of the sub-furnace chamber 110 is larger than that of the inlet holes 111 on the outer wall of the sub-furnace chamber 110. In other words, the area of the opening of the inlet holes 111 on the inner wall of the sub-furnace chamber 110 is larger than the area of the opening of the inlet holes 111 on the outer wall of the sub-furnace chamber 110.
The gas inlet pipe 130 is used for introducing gas into the auxiliary furnace chamber 110 through the gas inlet holes 111, the gas inlet holes 111 are arranged in the above mode, the turbulence degree of the gas can be greatly reduced, and the disturbance of the gas flow to the flexible shaft 120 is reduced, so that the crystal rod is prevented from shaking, and various problems caused by the disturbance of the flexible shaft 120 are greatly improved, such as adverse effects on the internal quality of crystals, such as resistivity, crystal micro-defects and the like, and the external shape of the crystals, the growth stability of the crystals and the like.
Referring to fig. 1, in the present embodiment, the air inlet holes 111 are annular holes, and the air inlet holes 111 are annularly disposed in the auxiliary furnace chamber 110 along the circumferential direction of the flexible shaft 120. In the process that the air inlet pipe 130 introduces air into the auxiliary furnace chamber 110 through the air inlet holes 111, air flow enters the auxiliary furnace chamber 110 from the circumferential direction of the flexible shaft 120, and the phenomenon that the flexible shaft 120 shakes due to large difference of air flow conditions around the flexible shaft 120 is avoided.
It can be understood that, in other embodiments of the present application, the air inlet holes 111 are not limited to annular holes, for example, the air inlet holes 111 are distributed along the circumference of the flexible shaft 120 at intervals, air is introduced from the air inlet holes 111 distributed along the circumference of the flexible shaft 120 at intervals, and the flexible shaft 120 can be prevented from shaking due to large difference in air flow around the flexible shaft 120. The present application does not limit the number of the intake holes 111, and may be, for example, two, three, four, or more; the shape and size of each air intake hole 111 may be the same or different.
In addition, in comparison with the embodiment in which the number of the air intake holes 111 is large, in the embodiment in which there is only one annular hole, or a small number of the air intake holes 111, it is convenient to clean the inside of the air intake holes 111. And the air flow is separated into a small amount of air flow in the air inlet hole 111, so that the air flow is prevented from causing large disturbance after being turbulent in the air inlet hole 111.
Based on the above, the cross-sectional area of the inlet hole 111 on the inner wall of the sub-furnace 110 is larger than the cross-sectional area of the inlet hole 111 on the outer wall of the sub-furnace 110, and on this basis, the inlet hole 111 has at least the following embodiments:
first, the sectional area of the inlet hole 111 is gradually increased along the direction from the outer wall of the sub-furnace chamber 110 to the inner wall of the sub-furnace chamber 110; in other words, the intake hole 111 is trumpet-shaped; the air is gradually released in the pore canal of the air inlet hole 111, so as to avoid the interference to the flexible shaft 120.
Secondly, the inlet holes 111 are stepped holes along the direction from the outer wall of the sub-furnace chamber 110 to the inner wall of the sub-furnace chamber 110, and the change relationship of the hole diameters is increased in a stepwise manner.
Thirdly, the aperture of the inlet hole 111 is increased, then decreased, and then increased along the direction from the outer wall of the sub-furnace chamber 110 to the inner wall of the sub-furnace chamber 110.
It should be noted that the relationship of the apertures of the inlet holes 111 is not limited to the above arrangement, and the relationship of the apertures of the inlet holes 111 may be arranged in other manners on the basis that the sectional area of the inlet holes 111 on the inner wall of the sub-furnace chamber 110 is larger than the sectional area of the inlet holes 111 on the outer wall of the sub-furnace chamber 110.
In some embodiments of the present application, the extending direction of the air inlet holes 111 in the wall of the auxiliary furnace chamber 110 is the same as the direction of the flexible shaft 120; in other words, the intake holes 111 are arranged from top to bottom; after the gas enters the auxiliary furnace chamber 110, the gas flow flows from top to bottom, and a small amount of gas flows to the upper chamber 101 from bottom to top; the extending direction of the air inlet hole 111 is the same as the direction of the flexible shaft 120, so that the turbulence caused by the change of the direction of the air in the air inlet hole 111 can be avoided, and the disturbance of the air flow to the flexible shaft 120 is reduced.
In other embodiments of the present application, the extending direction of the air inlet holes 111 in the wall of the auxiliary furnace chamber 110 and the flexible shaft 120 may be different, for example, the opening of the air inlet holes 111 on the outer surface of the wall of the auxiliary furnace chamber 110 is perpendicular to the axial direction of the flexible shaft 120, and so on.
In the embodiment of the present application, in order to clean the gas inlet holes 111, the gas inlet holes 111 are chamfered at the edge of the inner wall of the sub-furnace chamber 110, and/or the gas inlet holes 111 are chamfered at the edge of the outer wall of the sub-furnace chamber 110. It should be noted that the foregoing "and/or" means that both the conditions of "the air inlet holes 111 are chamfered at the edge of the inner wall of the auxiliary furnace chamber 110" and "the air inlet holes 111 are chamfered at the edge of the outer wall of the auxiliary furnace chamber 110" may be satisfied, or alternatively satisfied.
In some embodiments of the present application, the crystal growth pulling assembly 100 further comprises a buffer chamber 140, the buffer chamber 140 is connected to the sub-furnace chamber 110, and the gas inlet pipe 130 and the gas inlet holes 111 are both in communication with the buffer chamber 140. The gas in the gas inlet pipe 130 firstly enters the buffer chamber 140, and then enters the sub-furnace chamber 110 through the gas inlet hole 111.
In the embodiment of the present application, the buffer chamber 140 is located at the upper end of the sub-furnace chamber 110, and the buffer chamber 140 is connected to the upper chamber 101 and the sub-furnace chamber 110. It is understood that in other embodiments of the present application, the buffer chamber 140 may not be connected to the upper chamber 101.
After the gas in the gas inlet pipe 130 is buffered in the buffer chamber 140, the gas enters the auxiliary furnace chamber 110 through the gas inlet holes 111, so that the turbulence degree of the gas entering the auxiliary furnace chamber 110 can be reduced to a great extent, and the disturbance of the gas on the flexible shaft 120 is reduced.
The embodiment of the present application does not limit the shape and size of the buffer chamber 140. It is understood that in other embodiments of the present application, the buffer chamber 140 is not essential, and the buffer chamber 140 may not be provided, and the intake pipe 130 directly communicates with the intake hole 111.
The crystal growth pulling assembly 100 provided by the embodiments of the present application has at least the following advantages:
an air inlet hole 111 with an opening facing the axial direction of the flexible shaft 120 is formed in the inner wall of the auxiliary furnace chamber 110, and the sectional area of the air inlet hole 111 on the inner wall of the auxiliary furnace chamber 110 is larger than that of the air inlet hole 111 on the outer wall of the auxiliary furnace chamber 110; the turbulence degree of the gas entering the auxiliary furnace chamber 110 is greatly reduced, and the disturbance of the gas on the flexible shaft 120 is reduced, so that the influence on the quality caused by the shaking of the crystal rod in the lifting process is avoided.
For the embodiment in which the cross-sectional area of the inlet holes 111 gradually increases along the direction from the outer wall of the sub-furnace chamber 110 to the inner wall of the sub-furnace chamber 110, the inlet holes 111 are substantially flared, which is beneficial to cleaning the inside of the inlet holes 111.
The application also provides a crystal growing pulling device, which comprises a driving component and the crystal growing pulling component 100;
the driving component is connected with the flexible shaft 120 and is used for driving the flexible shaft 120 to rotate and do linear motion along the axial direction.
The driving assembly comprises a rotary driving assembly and a linear driving assembly; the rotary driving component is connected with the tray, and the tray is provided with a linear driving component and a wire winding wheel component. The rotary driving assembly drives the supporting disc and the component arranged on the supporting disc to rotate. The linear driving assembly drives the flexible shaft 120 to lift.
The crystal growth pulling assembly 100 comprises an upper chamber 101, an auxiliary furnace chamber 110, a flexible shaft 120 and an air inlet pipe 130; go up cavity 101 and be connected with the rotation driving subassembly, the rotation driving subassembly is connected with the tray, is provided with linear drive subassembly and the silk wheel subassembly of book on the tray. The rotary driving assembly drives the supporting disc and the component arranged on the supporting disc to rotate. The linear driving assembly drives the flexible shaft 120 to lift.
It can be understood that the crystal growing pulling device has the advantages of the crystal growing pulling assembly 100, greatly reduces the turbulence degree of gas entering the auxiliary furnace chamber 110, and reduces the disturbance of the gas on the flexible shaft 120, thereby avoiding the influence of shaking on the quality of a crystal rod in the pulling process.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A crystal growing pulling assembly, comprising:
a flexible shaft;
the flexible shaft can freely shuttle in the auxiliary furnace chamber, and the auxiliary furnace chamber is used for accommodating a crystal rod; the auxiliary furnace chamber is provided with an air inlet, and the direction of the opening of the air inlet on the inner wall of the auxiliary furnace chamber is the axial direction of the flexible shaft; the cross-sectional area of the air inlet on the inner wall of the auxiliary furnace chamber is larger than that of the air inlet on the outer wall of the auxiliary furnace chamber; and
and the air inlet pipe is communicated with the auxiliary furnace chamber through the air inlet hole.
2. A pulling assembly as set forth in claim 1 wherein the gas inlet is an annular opening and the annular opening is disposed in the secondary chamber about the flexible shaft.
3. A crystal growth pull assembly as set forth in claim 2 wherein the cross-sectional area of the gas inlet is progressively increased in a direction from the outer wall of the auxiliary chamber to the inner wall of the auxiliary chamber.
4. A pulling assembly as set forth in claim 2 wherein the gas inlet extends in the same direction as the flexible shaft in the wall of the auxiliary furnace chamber.
5. A pulling assembly as set forth in claim 1 wherein the secondary chamber is provided with a plurality of air inlets spaced axially along the flexible shaft.
6. A pull assembly for crystal growth as set forth in claim 1 wherein the gas inlet holes are stepped holes.
7. A crystal growing pulling assembly as defined in claim 1, further comprising a buffer chamber connected to the sub-furnace chamber, the gas inlet tube and the gas inlet hole both communicating with the buffer chamber.
8. A pulling assembly as set forth in any one of claims 1 to 7 wherein the gas inlet holes are chamfered at the edge of the inner wall of the auxiliary furnace chamber and/or the gas inlet holes are chamfered at the edge of the outer wall of the auxiliary furnace chamber.
9. A pulling assembly for crystal growth as defined in any one of claims 1 to 7, wherein the flexible shaft is a tungsten wire rope.
10. A crystal growth pulling apparatus, characterized by comprising a driving assembly and the crystal growth pulling assembly according to any one of claims 1 to 9;
the driving assembly is connected with the flexible shaft and used for driving the flexible shaft to rotate and to do linear motion along the axial direction of the flexible shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220208890.5U CN217173942U (en) | 2022-01-25 | 2022-01-25 | Pulling assembly for crystal growth and pulling device for crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220208890.5U CN217173942U (en) | 2022-01-25 | 2022-01-25 | Pulling assembly for crystal growth and pulling device for crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217173942U true CN217173942U (en) | 2022-08-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220208890.5U Active CN217173942U (en) | 2022-01-25 | 2022-01-25 | Pulling assembly for crystal growth and pulling device for crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217173942U (en) |
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- 2022-01-25 CN CN202220208890.5U patent/CN217173942U/en active Active
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