CN217149405U

CN217149405U - Automatic joint device for built-in feeding of hard shaft single crystal furnace

Info

Publication number: CN217149405U
Application number: CN202220657687.6U
Authority: CN
Inventors: 汪佳; 田野; 宋涛
Original assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Current assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
Priority date: 2022-03-24
Filing date: 2022-03-24
Publication date: 2022-08-09
Anticipated expiration: 2032-03-24

Abstract

The utility model discloses an automatic joint device for built-in feeding of a hard shaft single crystal furnace, which comprises a rotary connecting device, wherein the upper end of the rotary connecting device is connected with the bottom of a hard shaft seed crystal shaft, and the lower end of the rotary connecting device is connected with an arc female head; female head of arc, female head of arc is at the bottom of the area cylindricly, and the inside of the female head of arc is injectd and is formed the inner chamber, and the bottom of inner chamber is the obconical, and the centre bore has been seted up at the bottom center of the female head of arc, and the inside wall of centre bore forms first spigot, and the first breach that holds bracing piece top connector and pass through is seted up to the lateral wall of the female head of arc, and the second breach has been seted up at the middle part of first breach to the bottom of the female head of arc, and second breach and centre bore intercommunication, the width of first breach is L1, and the width of second breach is L2, the connector top diameter of bracing piece is D1, and L1, L2 and D1 satisfy: l1 > D1 > L2.

Description

Automatic joint device for built-in feeding of hard shaft single crystal furnace

Technical Field

The utility model relates to a hard shaft single crystal furnace embeds reinforced technical field specifically is a hard shaft single crystal furnace embeds reinforced automatic piecing devices.

Background

The hard shaft seed crystal shaft of the hard shaft single crystal furnace is connected with the supporting shaft of the built-in feeder through the joint device, the traditional supporting shaft is in a round rod shape and is connected with the joint device through the pin hole at the upper end of the traditional supporting shaft, the operation is troublesome, and the manual operation is usually carried out by ascending an operator.

Meanwhile, the height of the auxiliary chamber of the single crystal furnace from the ground is more than 1 meter, the length of the built-in feeder is more than 1.5 meters, and the weight after feeding is more than 150Kg, so that the built-in feeder is connected with the seed shaft at the position which is more than 2.5 meters away from the ground, and certain difficulty and danger exist in connecting the hard shaft seed shaft with the built-in feeder.

SUMMERY OF THE UTILITY MODEL

The technical insufficiency exists, the utility model aims to provide a hard shaft single crystal furnace built-in feeding automatic joint device to solve the problem provided in the background art.

In order to solve the technical problem, the utility model adopts the following technical scheme:

the utility model provides a hard shaft single crystal furnace built-in feeding automatic joint device, include

The upper end of the rotary connecting device is connected with the bottom of the hard shaft seed crystal shaft, the lower end of the rotary connecting device is connected with the arc female head, and the rotary connecting device is used for offsetting the rotary motion of the hard shaft seed crystal shaft;

the support rod comprises an arc female head, a support rod and a support rod, wherein the arc female head is cylindrical with a bottom, an inner cavity for accommodating a connecting head at the top of the support rod is limited in the arc female head, the bottom of the inner cavity is in an inverted conical shape, a center hole is formed in the center of the bottom of the arc female head, and a first guide surface is formed on the inner side wall of the center hole;

the first breach that holds bracing piece top connector and pass through is seted up to the lateral wall of the female head of arc, and the second breach has been seted up at the middle part of first breach in the bottom of the female head of arc, second breach and centre bore intercommunication, the width of first breach is L1, and the width of second breach is L2, and the connector top diameter at bracing piece top is D1, and L1, L2 and D1 satisfy: l1 > D1 > L2.

Preferably, the rotary connecting device comprises a seed shaft connecting block, a bearing fixing shaft, a thrust bearing, a bearing seat and a transition block which are coaxially arranged from top to bottom, the seed shaft connecting block is in threaded connection with the bottom of the hard shaft seed shaft, the thrust bearing and the bearing fixing shaft are located in the bearing seat, the bearing fixing shaft sequentially penetrates through the thrust bearing and the bearing seat from top to bottom and is abutted to the transition block, and the bearing fixing shaft is fixed on the transition block through two bolts in a threaded manner.

Preferably, the transition block is in a circular plate shape, the diameter of the transition block is larger than the outer diameter of the flange surface of the bearing seat, and an arc-shaped female head is detachably fixed below the transition block. The support rod is used for connecting the built-in feeder with the arc female head, and the outer diameter of the arc female head is equal to the diameter of the transition block.

Preferably, the bracing piece includes connector, transition pole and the body of rod, the body of rod stretches into to built-in charging means in, and the bottom of the body of rod can be dismantled and be fixed with the quartz cone, the body of rod is connected through the transition pole in the bottom center department of connector, the diameter of transition pole is less than the diameter of the body of rod, connector, transition pole and body of rod integrated into one piece.

Preferably, the top of connector is outwards protruding along the circumference and is formed and keep off the ring, the cross-sectional area that keeps off the ring is greater than the upper surface of connector, the connector has the second spigot surface in keeping off the ring below, the second spigot surface matches with first spigot surface and suits.

Preferably, the second guide surface is a smooth transition arc surface.

Preferably, the second guide surface is an outwardly convex arc surface, or the second guide surface is an inwardly concave arc surface.

Preferably, the height of the first notch is equal to the height of the side wall of the arc-shaped female head.

Preferably, the diameter of the central hole is D, and L1, L2, D and D1 satisfy: l1 > D1 > L2 > D.

The beneficial effects of the utility model reside in that:

(1) the utility model discloses a hard axle single crystal growing furnace embeds reinforced automatic piecing devices, the female head of arc cooperation specific shape's bracing piece is used, and the lateral wall of the female head of arc is seted up and is held the first breach that the bracing piece top connector passes through, and the bottom of the female head of arc is seted up the second breach at the middle part of first breach, the second breach communicates with the centre bore, and the width of first breach is greater than the connector top diameter at bracing piece top, and the height of first breach equals the height of the lateral wall of the female head of arc, and the sectional area of first breach is great, when the bracing piece slightly inclines, also can get into from first breach and second breach, simultaneously because the inside of the female head of arc limits the formation inner chamber makes the connector of bracing piece have the motion space of upper and lower section distance, its effect is, has the adjustment space when the back shaft of built-in charging means puts into the female head of arc, and play the cushioning effect when hard axle seed crystal axle and built-in charging means excessively descend, the inverted cone of the bottom of inner chamber simultaneously is described, so can realize the self-centering of bracing piece.

(2) The utility model discloses a hard axle single crystal growing furnace embeds reinforced automatic piecing devices can realize the automatic carry of built-in charging means and break away from, and degree of automation is high, reduces the aerial work and brings danger for personnel, reduces the pollution that the built-in charging means of artificial contact brought simultaneously.

(3) The rotary connecting device can offset the rotary motion of the hard shaft seed shaft, does not damage the built-in feeder, does not influence the service life of the hard shaft seed shaft, and is convenient for the hard shaft seed shaft to be connected with the built-in feeder in the built-in feeding process of the hard shaft single crystal furnace.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is an exploded view of a feeding automatic joint device arranged in a hard shaft single crystal furnace according to an embodiment of the present invention;

FIG. 2 is a front view of an automatic joint device for feeding materials in a hard shaft single crystal furnace according to an embodiment of the present invention;

FIG. 3 is a cross-sectional view of the automated joint assembly of the present invention installed on a hard shaft seed shaft;

fig. 4 is a side view of the hard shaft single crystal furnace after an automatic joint device for built-in charging provided by the embodiment of the invention explodes;

FIG. 5 is a perspective view of the female head of the present invention;

FIG. 6 is a top view of the female arcuate head of the present invention;

fig. 7 is a schematic structural diagram of a transition block in the present invention;

fig. 8 is a schematic structural view of the middle support rod of the present invention.

Description of reference numerals:

the device comprises an arc female head 1, a transition block 2, a thrust bearing 3, a bearing fixing shaft 4, a bearing seat 5, a seed crystal shaft connecting block 6, a support rod 7 and a hard shaft seed crystal shaft 8;

the first notch 11, the second notch 12, the central hole 13, the first guide surface 131, the third bolt 14 and the second threaded hole 15;

a first threaded hole 21 and a third threaded hole 22;

an upper flange 31, a ball 32, a lower flange 33;

a second bolt 41;

the connecting head 71, the transition rod 72, the rod body 73, the quartz cone 74, the baffle ring 711 and the second guide surface 712.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Example (b):

the rotating and lifting mechanism of the hard shaft single crystal furnace is fixed with the frame, the auxiliary furnace chamber is not allowed to move when the hard shaft seed crystal shaft 8 descends into the auxiliary furnace chamber, and in addition, the hard shaft seed crystal shaft 8 must be accompanied with rotating motion in the ascending and descending processes to avoid the scratch on the outer surface of the shaft and influence the vacuum sealing.

As shown in fig. 1-8, the present invention provides an automatic joint device for feeding material inside a hard shaft single crystal furnace, which comprises a rotary connection device (not shown) and an arc female head 1 arranged from top to bottom.

The upper end of the rotary connecting device is connected with the bottom of the hard shaft seed crystal shaft 8, the lower end of the rotary connecting device is connected with the arc female head 1, and the rotary connecting device is used for offsetting the rotary motion of the hard shaft seed crystal shaft 8;

referring to fig. 1, 2, 4 and 5, the arc female head 1 is cylindrical with a bottom, an inner cavity for accommodating a top connector of a support rod is defined inside the arc female head 1, the bottom of the inner cavity is in an inverted cone shape, a central hole 13 is formed in the center of the bottom of the arc female head 1, and a first guide surface 131 is formed on the inner side wall of the central hole 13.

In order to facilitate the support rod 7 to be placed into the arc female head 1, a first notch 11 for accommodating the connector 71 at the top of the support rod 7 to pass through is formed in the side wall of the arc female head 1, a second notch 12 is formed in the middle of the first notch 11 at the bottom of the arc female head 1, the second notch 12 is communicated with the central hole 13, the opening of the first notch 11 is gradually reduced in the direction from the outer side wall of the arc female head 1 to the central axis, in other words, the width of the first notch 11 is gradually reduced from outside to inside, and therefore the connector 71 can conveniently enter the arc female head 1 and can play a role in guiding; similarly, the opening of the second notch 12 gradually becomes smaller in the direction from the outer side wall of the arc-shaped female head 1 to the central axis.

Referring to fig. 6, the width of the first notch 11 is L1, the width of the second notch 12 is L2, the diameter of the top of the connecting head 71 at the top of the supporting rod 7 is D1, the diameter of the central hole 13 is D, and L1, L2, D and D1 satisfy the following conditions: l1 > D1 > L2 > D, so that the connecting head 71 can be accessed from the first notch 11 but can not be accessed from the second notch 12, and the connecting head 71 is limited in the central hole 13 and can not fall from the central hole 13. Referring to fig. 4, a plurality of second threaded holes 15 are uniformly formed in the side wall of the arc female head 1, and the arc female head 1 penetrates through the second threaded holes 15 through a plurality of third bolts 14 to be in threaded connection with the transition block 2.

In some embodiments of the present invention, referring to fig. 1 to 3, the rotary connection device includes a seed shaft connection block 6, a bearing fixing shaft 4, a thrust bearing 3, a bearing seat 5 and a transition block 2 coaxially arranged from top to bottom, the seed shaft connection block 6 is in threaded connection with the bottom of a hard shaft seed shaft 8, the thrust bearing 3 and the bearing fixing shaft 4 are located in the bearing seat 5, the bearing fixing shaft 4 sequentially passes through the thrust bearing 3 and the bearing seat 5 from top to bottom and abuts against the transition block 2, and the bearing fixing shaft 4 is screwed on the transition block 2 through a second bolt 41.

Further, referring to fig. 1, 3 and 4, the thrust bearing 3 includes an upper flange 31, a ball 32 and a lower flange 33, the upper flange 31 of the thrust bearing 3 is in transition fit with the bearing fixing shaft 4, the lower flange 33 of the thrust bearing 3 is in transition fit with the inner circle of the bearing seat 5, the lower flange 33 of the thrust bearing 3 has a gap with the side wall of the bearing fixing shaft 4, and when the bearing fixing shaft 4 is screwed on the transition block 2 by the second bolt 41, a gap exists between the bearing seat 5 and the transition block 2.

It can be understood that the seed shaft connecting block 11, the bearing seat 5 and the lower flange 33 form a whole, the transition block 2, the bearing fixing shaft 4 and the upper flange 31 form a whole, and the two whole realize free rotation movement through the ball 32, so as to counteract the rotation movement of the hard shaft seed shaft 8.

In some embodiments of the present invention, referring to fig. 1, fig. 2 and fig. 7, the transition block 2 is in a circular plate shape, the diameter of the transition block 2 is greater than the outer diameter of the flange surface of the bearing seat 5, and the arc-shaped female head 1 is detachably fixed below the transition block 2. Furthermore, three threaded holes 21 corresponding to the second bolts 41 are formed in the center of the transition block 2, three threaded holes 22 are uniformly formed in the periphery of the transition block 2 at the edge far away from the first notch 11, the threaded holes 22 correspond to the threaded holes 15 one by one, the support rod 7 is used for connecting a built-in feeder with the arc-shaped female head 1, and the outer diameter of the arc-shaped female head 1 is equal to the diameter of the transition block 2.

In some embodiments of the present invention, referring to fig. 2 and 8, the support rod 7 includes a connector 71, a transition rod 72 and a rod 73, the rod 73 extends into the built-in feeder, and the bottom of the rod 73 can be disassembled and fixed with a quartz cone 74, the bottom center of the connector 71 is connected to the rod 73 through the transition rod 72, the diameter of the transition rod 72 is smaller than the diameter of the rod 73, the connector 71, the transition rod 72 and the rod 73 are integrally formed, the top of the connector 71 forms a baffle ring 711 along the circumferential outward protrusion, the connector 71 has a second guide surface 712 below the baffle ring 711, and the second guide surface 712 matches with the first guide surface 131.

In order to facilitate the self-centering of the support rod 7 after being placed in the arc female head 1, the second guide surface 712 is a smooth transitional arc surface. For example, the second guide surface 712 is an outwardly convex arc surface, or the second guide surface 712 is an inwardly concave arc surface.

The height of the first breach 11 highly equals with the height of the lateral wall of the female head of arc 1, and the sectional area of first breach 11 is great, when bracing piece 7 inclines slightly, also can follow and get into in first breach 11 and the second breach 12, simultaneously because the inside of the female head of arc 1 is injectd and is formed the inner chamber and is made the connector 71 of bracing piece 7 have the motion space of one section distance from top to bottom, and its effect is, and the back shaft when built-in charging means puts into the female head 1 of arc and has the adjustment space to and play the cushioning effect when hard shaft seed axle excessively descends with built-in charging means, the obconical of the bottom of inner chamber simultaneously, so can realize the self-centering of bracing piece 7.

The working principle is as follows:

at first, open the side door of the auxiliary furnace chamber of the single crystal furnace, will the utility model discloses a hard axle single crystal furnace embeds reinforced automatic piecing devices passes through seed shaft connecting block 6 and 8 bottom threaded connections of hard axle seed shaft to the rotation through hard axle seed shaft 8 makes first breach 11 orientation auxiliary furnace chamber direction of opening the door. Then the built-in feeder is brought to the opening position of the auxiliary furnace chamber through the rotation of the single crystal furnace and the lifting mechanism and moves up or down until the built-in feeder moves to the first notch 11 and the connector 71 to be aligned visually, the built-in feeder is driven by the rotation and lifting mechanism to move horizontally into the auxiliary furnace chamber, and at the moment, the transition rod 72 enters the arc-shaped female head 1 through the first notch 11 until the support rod 7 is concentric with the arc-shaped female head 1. The rotatory upward movement of hard axle seed axle 8 can drive the utility model discloses a hard axle single crystal growing furnace embeds reinforced automatic piecing devices and shifts up simultaneously, and first spigot 131 and second spigot 712 can contact, drive built-in charging means simultaneously and break away from rotatory and hoist mechanism, and rotatory and hoist mechanism withdraw from vice furnace chamber, realize hard axle seed axle 8 and built-in charging means's connection promptly.

After the feeding is completed, a side door of an auxiliary furnace chamber of the single crystal furnace is opened, the first notch 11 faces the opening direction of the auxiliary furnace chamber through the rotation of the hard shaft seed shaft 8, the rotation and lifting mechanism can enter the auxiliary furnace chamber, the hard shaft seed shaft 8 rotates and moves downwards to drive the built-in feeder to move downwards together until the built-in feeder is contacted with the rotation and lifting mechanism, the support rod 7 stops moving downwards, then the first guide surface 131 and the second guide surface 712 are separated from a certain distance, at the moment, the rotation and lifting mechanism drives the built-in feeder to move outwards of the auxiliary furnace chamber, meanwhile, the transition rod 72 can penetrate through the first notch 11, and the separation of the hard shaft seed shaft 8 and the built-in feeder is realized.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. An automatic joint device for feeding in a hard shaft single crystal furnace is characterized by comprising

The upper end of the rotary connecting device is connected with the bottom of the hard shaft seed crystal shaft, and the lower end of the rotary connecting device is connected with the arc female head;

the arc female head is cylindrical with a bottom, an inner cavity for accommodating the connecting head at the top of the supporting rod is limited and formed inside the arc female head, the bottom of the inner cavity is in an inverted cone shape, a center hole is formed in the center of the bottom of the arc female head, a first guide surface is formed on the inner side wall of the center hole,

the first breach that holds bracing piece top connection head and pass through is seted up to the lateral wall of the female head of arc, the second breach has been seted up at the middle part of first breach to the bottom of the female head of arc, second breach and centre bore intercommunication, the width of first breach is L1, and the width of second breach is L2, the tie head top diameter of bracing piece is D1, and L1, L2 and D1 satisfy: l1 > D1 > L2.

2. The automatic joint device for built-in feeding of the hard shaft single crystal furnace is characterized in that the rotary connecting device comprises a seed shaft connecting block, a bearing fixing shaft, a thrust bearing, a bearing seat and a transition block which are coaxially arranged from top to bottom, the seed shaft connecting block is in threaded connection with the bottom of the hard shaft seed shaft, the thrust bearing and the bearing fixing shaft are located in the bearing seat, the bearing fixing shaft sequentially penetrates through the thrust bearing and the bearing seat from top to bottom and is abutted against the transition block, and the bearing fixing shaft is fixed on the transition block through a bolt and a second thread.

3. The automatic joint device for the built-in feeding of the hard shaft single crystal furnace is characterized in that the transition block is in a circular plate shape, the diameter of the transition block is larger than the outer diameter of the flange surface of the bearing seat, an arc female head is detachably fixed below the transition block, and the outer diameter of the arc female head is equal to the diameter of the transition block.

4. The automatic joint device for built-in feeding of the hard shaft single crystal furnace as claimed in claim 1, wherein the supporting rod comprises a connector, a transition rod and a rod body, the rod body extends into the built-in feeder, a quartz cone is detachably connected to the bottom of the rod body, the bottom center of the connector is connected with the rod body through the transition rod, the diameter of the transition rod is smaller than that of the rod body, and the connector, the transition rod and the rod body are integrally formed.

5. The automatic joint device for the built-in feeding of the hard shaft single crystal furnace is characterized in that the top of the connecting head protrudes outwards along the circumference to form a retaining ring, the connecting head is provided with a second guide surface below the retaining ring, and the second guide surface is matched with the first guide surface.

6. The automatic joint device for the built-in feeding of the hard shaft single crystal furnace is characterized in that the second guide surface is a smooth transition arc surface.

7. The automatic joint device for the built-in feeding of the hard shaft single crystal furnace as claimed in claim 6, wherein the second guide surface is an outwardly convex arc surface, or the second guide surface is an inwardly concave arc surface.

8. The automatic joint device for the built-in feeding of the hard shaft single crystal furnace as claimed in claim 6, wherein the height of the first notch is equal to the height of the side wall of the arc-shaped female head.

9. The automatic joint device for the built-in charging of the hard shaft single crystal furnace is characterized in that the diameter of the central hole is D, and the diameters of the central hole and the central hole are L1, L2, D and D1, so that the following requirements are met: l1 > D1 > L2 > D.