CN217149404U

CN217149404U - Silicon carbide crystal growth furnace convenient for material taking

Info

Publication number: CN217149404U
Application number: CN202220491534.9U
Authority: CN
Inventors: 田野; 吴亚娟
Original assignee: Xuzhou Meixin Semiconductor Material Technology Co ltd; Jiangsu Jixin Semiconductor Silicon Research Institute Co Ltd
Current assignee: Xuzhou Meixin Semiconductor Material Technology Co ltd; Jiangsu Jixin Semiconductor Silicon Research Institute Co Ltd
Priority date: 2022-03-07
Filing date: 2022-03-07
Publication date: 2022-08-09
Anticipated expiration: 2032-03-07

Abstract

The utility model discloses a silicon carbide crystal growth furnace convenient for material taking, which comprises a growth furnace, a supporting seat is arranged outside the growth furnace, a C-shaped frame is arranged on the upper surface of the supporting seat, a second motor and a U-shaped plate are fixedly connected to the inner wall of the C-shaped frame, a limiting shaft is connected to the opposite side of the inner wall of the U-shaped plate in a limiting rotation mode, the output end of the second motor penetrates through the U-shaped plate and is fixedly connected with one end of the limiting shaft, a top of the growth furnace is communicated with a limiting pipe, the upper surface of the limiting pipe is connected with a protective pipe in an attaching mode, a limiting disc is arranged in the protective pipe, a steel cable is fixedly connected to the upper surface of the limiting disc, one end of the steel cable far away from the limiting disc is fixedly connected with the limiting shaft, a fixed block is fixedly connected to the lower surface of the limiting disc, a crystal bar is communicated with the bottom of the C-shaped frame, the crystal bar is driven by the limiting disc to enter the protective pipe, and is separated from the growth furnace under the driving of a first fluted disc and a second fluted disc, the effect of conveniently and safely taking out the crystal bar crystallized in the growth furnace is achieved.

Description

Silicon carbide crystal growth furnace convenient for material taking

Technical Field

The utility model relates to a crystal growing furnace technical field specifically is a carborundum crystal growing furnace convenient to get material.

Background

The crystal growth furnace is a process test instrument used in the technical field of electronics and communication, has the maximum temperature of 3000 ℃, the maximum power of 12000 watts, the maximum length of a single crystal which can be grown of 190mm, the diameter of 2-25mm, the growth rate of 0.02-20mm/hr and the rotation rate of 5-60rpm, and is suitable for preparing oxides, photonic crystal metals, alloys, compounds and various single crystal samples, and a crystallized crystal bar needs to be lifted out of the growth furnace.

When a crystal bar after crystallization is lifted by a traditional silicon carbide crystal growing furnace, the stability of the crystal bar in rotation is difficult to guarantee, the problem that the crystal bar is inconvenient to take out due to shaking is caused, and the damage to the crystal can be even caused.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a carborundum crystal growth furnace convenient to get material is convenient for get the material, and can not cause the damage to the crystal.

In order to realize the purpose, the utility model relates to a silicon carbide crystal growing furnace which is convenient for taking materials, comprising a growing furnace, a supporting seat is arranged on the outer side of the growth furnace, a C-shaped frame is arranged on the upper surface of the supporting seat, a second motor and a U-shaped plate are fixedly connected to the inner wall of the C-shaped frame, the opposite side of the inner wall of the U-shaped plate is in limit rotation connection with a limit shaft, the output end of the motor II penetrates through the U-shaped plate and is fixedly connected with one end of the limit shaft, the top of the growth furnace is communicated with a limiting pipe, the upper surface of the limiting pipe is connected with a protective pipe in a fitting manner, a limiting disc is arranged in the protective tube, the upper surface of the limiting disc is fixedly connected with a steel cable, one end of the steel cable far away from the limiting disc is fixedly connected with a limiting shaft, the lower fixed surface of spacing dish is connected with the fixed block, the lower fixed surface of fixed block is connected with the crystal bar, the top through connection of protection tube is in the bottom of C type frame.

Further, the upper surface of supporting seat fixedly connected with motor one, the output shaft fixedly connected with fluted disc one of motor one, the meshing of fluted disc one is connected with fluted disc two, the centre of a circle department through connection of fluted disc two has the rotation post, spacing hole and spacing downthehole wall and the spacing rotation of rotation post bottom are seted up to the supporting seat upper surface and are connected, the top and the C type frame fixed connection of rotation post.

Furthermore, the upper surface of the limiting pipe is fixedly connected with a limiting block, the limiting block is arc-shaped, and one side of the limiting block, which is close to the protection pipe, and the inner wall of the limiting pipe are on the same curved surface.

Preferably, the circle centers of the protection tube and the limiting tube are on the same vertical line.

Preferably, the arc-shaped profile of the limiting disc is provided with four clamping grooves, the four clamping grooves are distributed in an annular array mode on the arc-shaped profile of the limiting disc, the inner walls of the clamping grooves are connected with rollers in a limiting rotation mode, and the arc-shaped profiles of the rollers are connected with the inner walls of the protection tubes in a limiting sliding mode.

Preferably, the top of the inner wall of the C-shaped frame is fixedly connected with a U-shaped block, the bottom of the U-shaped block is fixedly connected with a fixed pulley, and the steel cable is movably connected with the fixed pulley.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a spacing pipe, the stopper, a supporting seat, motor one, fluted disc two, rotate the post, C type frame, motor two, spacing axle, the U template, the steel cable, U type piece, the fixed pulley, spacing dish, the common cooperation of gyro wheel and protection tube, reached the effect that makes things convenient for personnel to take out the excellent safety of crystal after the crystallization in the growth furnace, solved traditional carborundum crystal growth furnace when lifting by crane the crystal bar after the crystallization, be difficult to guarantee the stability of crystal bar in the rotation, lead to the crystal bar to rock the problem that causes inconvenient taking out.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic structural plan view of the present invention;

FIG. 3 is a schematic structural view of the support base of the present invention;

fig. 4 is a schematic structural view of the second position of the middle limiting disc and the motor of the present invention.

In the figure: 1. a growing furnace; 2. a limiting pipe; 3. a limiting block; 4. a supporting base; 5. a first motor; 6. a first fluted disc; 7. a second fluted disc; 8. rotating the column; 9. a C-shaped frame; 10. a second motor; 11. a limiting shaft; 12. a U-shaped plate; 13. a wire rope; 14. a U-shaped block; 15. a fixed pulley; 16. a limiting disc; 17. a roller; 18. a fixed block; 19. crystal bar; 20. and (5) protecting the tube.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 4, the utility model provides a silicon carbide crystal growing furnace convenient for material taking, which comprises a growing furnace body 1, a supporting seat 4 is arranged outside the growing furnace body 1, a C-shaped frame 9 is arranged on the upper surface of the supporting seat 4, a motor two 10 and a U-shaped plate 12 are fixedly connected on the inner wall of the C-shaped frame 9, a limiting shaft 11 is connected on the opposite side of the inner wall of the U-shaped plate 12 in a limiting rotation manner, the output end of the motor two 10 passes through the U-shaped plate 12 and is fixedly connected with one end of the limiting shaft 11, a limiting pipe 2 is connected on the top of the growing furnace body 1 in a through manner, a protective pipe 20 is connected on the upper surface of the limiting pipe 2 in an attaching manner, a limiting disc 16 is arranged in the protective pipe 20, a steel cable 13 is fixedly connected on the upper surface of the limiting disc 16, one end of the steel cable 13 far away from the limiting disc 16 is fixedly connected with the limiting shaft 11, a fixed block 18 is fixedly connected on the lower surface of the limiting disc 16, a crystal bar 19 is fixedly connected on the lower surface of the fixed block 18, the top end of the protection tube 20 is connected to the bottom of the C-shaped frame 9.

Through the reversal of two 10 motors, reach the effect that drives spacing axle 11 and carry out rolling steel cable 13 to reach and drive spacing dish 16 and carry out the effect that rises perpendicularly, at this moment, crystal bar 19 follows spacing dish 16 and rises in step, and finally crystal bar 19 breaks away from growth furnace body 1 completely and gets into in protection tube 20, reaches the effect of getting the material fast.

The upper surface of the supporting seat 4 is fixedly connected with a first motor 5, an output shaft of the first motor 5 is fixedly connected with a first fluted disc 6, the first fluted disc 6 is meshed with a second fluted disc 7, a circle center of the second fluted disc 7 is connected with a rotating column 8 in a penetrating manner, the second fluted disc 7 is fixedly connected with the rotating column 8, the upper surface of the supporting seat 4 is provided with a limiting hole, the inner wall of the limiting hole is connected with the bottom end of the rotating column 8 in a limiting rotating manner, and the top end of the rotating column 8 is fixedly connected with a C-shaped frame 9.

Through starter motor one 5, output shaft drive fluted disc one 6 of motor one 5 rotates, fluted disc one 6 begins the rotation and drives two 7 fluted discs 7 that the meshing is connected and rotate, the rotation of two 7 fluted disc drives rotation post 8 and rotates, thereby reach and drive C type frame 9 and carry out the pivoted effect, make C type frame 9 drive the stable 1 top that leaves of growth furnace body of brilliant stick 19 in protection tube 20 and the protection tube 20, two 10 corotation of control motor afterwards, relax steel cable 13, steel cable 13 drives brilliant stick 19 and moves down and break away from protection tube 20, reach the effect of conveniently getting the material.

The upper surface fixed connection of spacing pipe 2 has stopper 3, and stopper 3 shape is the arc, and stopper 3 is close to one side of protection tube 20 and is on same curved surface with spacing 2 inner walls of pipe. In other words, the side of the limiting block 3 close to the protective tube 20 coincides with the upward extending surface of the inner wall of the limiting tube 2.

Through 3 shapes of stopper for the arc and stopper 3 be close to one side of protection tube 20 and spacing 2 inner walls of pipe for the setting of inner wall at same curved surface, make things convenient for to aim at between protection tube 20 and the spacing pipe 2.

The circle centers of the protection tube 20 and the limiting tube 2 are on the same vertical line, and the circle centers of the protection tube 20 and the limiting tube 2 are on the same vertical line, so that the crystal bar 19 can vertically enter and exit the protection tube 20 and the limiting tube 2 conveniently, and the crystal bar 19 can be taken out conveniently.

The clamping grooves are formed in the arc-shaped profile of the limiting disc 16, the clamping grooves are four in number, the four clamping grooves are distributed in an annular array mode on the arc-shaped profile of the limiting disc 16, the inner walls of the four clamping grooves are connected with idler wheels 17 in a limiting rotating mode, and the arc-shaped profile of the idler wheels 17 is connected with the inner walls of the protection tubes 20 in a limiting sliding mode.

Through four draw-in grooves that the annular array distributes and the gyro wheel 17 of spacing rotation connection in the draw-in groove, reached spacing dish 16 and carried out spacing gliding effect in protective tube 20, reduced the frictional force when spacing dish 16 removes, promoted the stability that spacing dish 16 removed in protective tube 20 simultaneously greatly, reached the effect of avoiding the vibrations of crystal bar 19.

The top of the inner wall of the C-shaped frame 9 is fixedly connected with a U-shaped block 14, the bottom of the U-shaped block 14 is fixedly connected with a fixed pulley 15, and a steel cable 13 is movably connected with the fixed pulley 15.

The force required when the bottom steel cable 13 pulls the crystal bar 19 is reduced through the movable connection of the steel cable 13 and the fixed pulley 15, and the effect of saving labor is achieved.

The working principle is as follows: when the silicon carbide crystal growth furnace convenient for taking materials is used, firstly, the motor II 10 is started, the output shaft of the motor II 10 is controlled to rotate reversely, the motor II 10 drives the limiting shaft 11 to rotate synchronously, the limiting shaft 11 drives the steel cable 13 to wind, the steel cable 13 passes through the U-shaped block 14 fixedly connected to the top of the inner wall of the C-shaped frame 9 and the fixed pulley 15 fixedly connected to the bottom of the U-shaped block 14, the force required when the bottom steel cable 13 pulls the crystal bar 19 is reduced, the labor-saving effect is achieved, the limiting disc 16 fixedly connected with the steel cable 13 is vertically pulled upwards by the other end of the steel cable 13, meanwhile, the limiting disc 16 passes through the four clamping grooves distributed in an annular array and the idler wheels 17 in limiting rotation connection in the clamping grooves, the effect that the limiting disc 16 slides in the protective tube 20 is achieved, the friction force when the limiting disc 16 moves is reduced, and the stability of the limiting disc 16 in the protective tube 20 is greatly improved, the effect of avoiding the crystal bar 19 from vibrating is achieved. The limiting disc 16 drives the crystal bar 19 to enter the protection tube 20 completely under the continuous pulling of the steel cable 13.

Starting motor 5 afterwards, motor 5's output shaft drives fluted disc 6 and rotates, fluted disc 6 begins to rotate and drives the fluted disc two 7 that the meshing is connected and rotate, the rotation of fluted disc two 7 drives rotation post 8 and rotates, thereby reach and drive C type frame 9 and carry out the pivoted effect, make C type frame 9 drive the stable growth furnace body 1 top that leaves of crystal bar 19 in protection tube 20 and the protection tube 20, two 10 corotation of control motor afterwards, relax steel cable 13, steel cable 13 drives crystal bar 19 and moves down and break away from protection tube 20, reach the effect of conveniently getting the material.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a carborundum crystal growth furnace convenient to get material, includes growth furnace body (1), its characterized in that: the growth furnace is characterized in that a supporting seat (4) is arranged on the outer side of the growth furnace body (1), a C-shaped frame (9) is arranged on the upper surface of the supporting seat (4), a second motor (10) and a U-shaped plate (12) are fixedly connected to the inner wall of the C-shaped frame (9), a limiting shaft (11) is rotatably connected to the opposite side of the inner wall of the U-shaped plate (12) in a limiting mode, the output end of the second motor (10) penetrates through the U-shaped plate (12) and is fixedly connected with one end of the limiting shaft (11), the top of the growth furnace body (1) is connected with the limiting pipe (2) in a penetrating mode, the upper surface of the limiting pipe (2) is connected with a protective pipe (20) in a bonding mode, a limiting disc (16) is arranged in the protective pipe (20), a steel cable (13) is fixedly connected to the upper surface of the limiting disc (16), one end, far away from the limiting disc (16), of the steel cable (13) is fixedly connected with the limiting shaft (11), a fixed block (18) is fixedly connected to the lower surface of the limiting disc (16), the lower surface of the fixed block (18) is fixedly connected with a crystal bar (19), and the top end of the protection tube (20) is connected to the bottom of the C-shaped frame (9) in a penetrating mode.

2. The silicon carbide crystal growth furnace convenient for taking materials as claimed in claim 1, wherein: the last fixed surface of supporting seat (4) is connected with motor (5), the output shaft fixedly connected with fluted disc (6) of motor (5), the meshing of fluted disc (6) is connected with fluted disc two (7), the centre of a circle department through connection of fluted disc two (7) has rotation post (8), spacing hole and spacing downthehole wall have been seted up to supporting seat (4) upper surface and have been rotated post (8) bottom spacing rotation and be connected, the top and the C type frame (9) fixed connection that rotate post (8).

3. The silicon carbide crystal growth furnace convenient for taking materials as claimed in claim 1, wherein: the upper surface fixed connection of spacing pipe (2) has stopper (3), stopper (3) shape is the arc, one side that stopper (3) are close to protection tube (20) is on same curved surface with spacing pipe (2) inner wall.

4. The silicon carbide crystal growth furnace convenient for taking materials as claimed in claim 1, wherein: the circle centers of the protection tube (20) and the limiting tube (2) are on the same vertical line.

5. The silicon carbide crystal growth furnace convenient for taking materials as claimed in claim 1, wherein: the arc profile of spacing dish (16) is last to have seted up the draw-in groove, the draw-in groove has four and four draw-in grooves to distribute for annular array on the arc profile of spacing dish (16), four equal spacing rotation is connected with gyro wheel (17) on the inner wall of draw-in groove, the arc profile and the spacing sliding connection of protection tube (20) inner wall of gyro wheel (17).

6. The silicon carbide crystal growth furnace convenient for taking materials as claimed in claim 1, wherein: the top fixedly connected with U type piece (14) of C type frame (9) inner wall, U type piece (14) bottom fixedly connected with fixed pulley (15), steel cable (13) and fixed pulley (15) swing joint.