CN117346541B - Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer - Google Patents
Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer Download PDFInfo
- Publication number
- CN117346541B CN117346541B CN202311642082.5A CN202311642082A CN117346541B CN 117346541 B CN117346541 B CN 117346541B CN 202311642082 A CN202311642082 A CN 202311642082A CN 117346541 B CN117346541 B CN 117346541B
- Authority
- CN
- China
- Prior art keywords
- material containing
- groove
- side wall
- hanging
- feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 91
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 23
- 239000010439 graphite Substances 0.000 title claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 14
- 239000010703 silicon Substances 0.000 title claims abstract description 14
- 238000005087 graphitization Methods 0.000 title claims description 24
- 239000000463 material Substances 0.000 claims abstract description 120
- 238000003825 pressing Methods 0.000 claims description 29
- 238000004804 winding Methods 0.000 claims description 18
- 230000000149 penetrating effect Effects 0.000 claims description 15
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 7
- 230000000087 stabilizing effect Effects 0.000 claims description 4
- 238000000462 isostatic pressing Methods 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 12
- 230000005484 gravity Effects 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0065—Lifts, e.g. containing the bucket elevators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of graphitizing furnaces, in particular to a graphitizing furnace feeding mechanism of isostatic pressure graphite for manufacturing a semiconductor large silicon wafer, which comprises a graphitizing furnace, wherein one side of the graphitizing furnace is provided with a stair, one side of the top end of the graphitizing furnace is provided with an electric control rotating support, the electric control rotating support is in an inverted L-shaped arrangement, the top end of the electric control rotating support is fixedly provided with a feeding driving mechanism, the feeding driving mechanism is arranged above a lifting connecting mechanism, the feeding driving mechanism is connected with the lifting connecting mechanism through a rope, the bottom end of the lifting connecting mechanism is hung with a material containing frame, and the circumferential side wall of the lifting connecting mechanism is provided with a transverse rod.
Description
Technical Field
The invention relates to the technical field of graphitization furnaces, in particular to a graphitization furnace feeding mechanism of isostatic pressing graphite for manufacturing a semiconductor large silicon wafer.
Background
The graphitization furnace is a device for high-temperature material treatment, is commonly used for graphitization and carbonization treatment, and is also required for manufacturing large semiconductor silicon wafers, and can enable single crystal silicon to grow, and can enable the single crystal silicon to keep higher purity and good crystallization quality through precise temperature and atmosphere control.
When the vertical graphitizing furnace is used for carrying out growth treatment on monocrystalline silicon, because the furnace mouth of the vertical graphitizing furnace is arranged at the top end of the equipment, the graphitizing furnace needs to manually climb stairs to carry out manual discharging or uses a crane to carry out feeding, the manual feeding efficiency is low, the feeding position cannot be controlled, the graphitizing furnace has poor effect of heating graphitizing treatment on monocrystalline silicon, the crane feeding is generally connected with a material containing disc by adopting a hook, the material containing disc is placed into the furnace of the graphitizing furnace, the operation is simple, but the connection of the hook and the material containing disc still needs to be manually loosened, and when the crane feeding is carried out, the material containing disc cannot deviate when entering the furnace mouth, otherwise, the material containing disc cannot enter, so manual assistance is often needed, and in order to solve the problems, the graphitizing furnace feeding mechanism of the isostatic pressing graphite for manufacturing the semiconductor large silicon wafers is provided.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a graphitization furnace feeding mechanism of isostatic graphite for manufacturing a semiconductor large silicon wafer.
In order to achieve the above purpose, the invention adopts the following technical scheme: the graphitizing furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon chips comprises a graphitizing furnace, wherein one side of the graphitizing furnace is provided with a stair, one side of the top end of the graphitizing furnace is provided with an electric control rotating support, and the electric control rotating support is in inverted L-shaped arrangement, so the top end of the electric control rotating support is fixedly provided with a feeding driving mechanism, the feeding driving mechanism is arranged above a lifting connecting mechanism, the feeding driving mechanism is connected with the lifting connecting mechanism through a rope, the bottom end of the lifting connecting mechanism is articulated with a material containing frame, the circumferential side wall of the lifting connecting mechanism is provided with a cross rod, the cross rod is arranged in an annular array around the circumferential side wall of the lifting connecting mechanism, one end of the cross rod, which is far away from the lifting connecting mechanism, is rotationally provided with a stable limiting mechanism, and the stable limiting mechanism is used for limiting and fixing the material containing frame, the stability of the material containing frame is ensured during feeding, during working, as the furnace mouth of the vertical graphitizing furnace is arranged at the top end of the equipment, the graphitizing furnace needs to manually climb stairs to manually discharge materials or use a crane to feed materials during feeding, the manual feeding efficiency is low, the feeding position cannot be controlled, the graphitizing furnace has poor effect of heating graphitizing treatment of monocrystalline silicon, the crane feeding generally adopts a hook to hook a material containing disc, the material containing disc is placed into the furnace of the graphitizing furnace, the operation is simple, but the connection of the hook and the material containing disc still needs to be manually loosened, and when the crane feeding, the material containing disc cannot deviate when entering the furnace mouth, otherwise, the material containing disc cannot enter, so manual assistance is often needed, the technical scheme can solve the problems, and the specific working mode is as follows, then place the bed hedgehopping platform of flourishing work or material rest on ground for flourishing material platen and ground have the interval, then open the bell of graphitization stove, rethread operation electric cabinet, make automatically controlled rotation support degree of rotation (rotate to graphitization stove one side promptly), then operate the electric cabinet and start servo motor, make the rope descend, thereby make lifting connection mechanism descend, when lifting connection mechanism descends to the height of the hooking fixture block on flourishing work or material rest top, with hanging the narrow limit alignment of hanging the hanging piece in the connection mechanism and hanging the No. two through grooves of fixture block, then continue descending the rope, make hanging the hanging piece insert in the No. one through groove, rotate the horizontal pole this moment, make hanging the hanging piece degree of rotation, then operate again, the electric cabinet starts servo motor, make the line roller roll up the rope, make hanging the hanging piece joint in the anticreep groove, the connecting rod lower extreme is completely laminated in Cheng Liao lateral walls, through the connecting rod of circumference array spacing the hanging piece with flourishing work or material rest, after hanging the hanging connection mechanism descends the material rest from the center, the hanging piece is hung in the graphite stove, make hanging the hanging piece insert in the No. one through the groove, then rotate the electric cabinet is rotated to the place the graphite support, make the falling silicon crystal rest continuously, make the falling material rest from the top of graphitization stove, make the control roll is carried out in the place, then the top of the graphite stove is kept in the place, the place of the lifting connection of the graphite stove, the lifting frame is stable, the lifting frame is carried out, the lifting the top of the graphite material rest is in the place, the top of the graphite is in the place, the lifting the graphite is in the lifting.
When the material containing frame enters the furnace of the graphitizing furnace, the state of the connecting rod is jointed with the side wall of the material containing platen by the limiting surface, the sliding rollers at the upper end and the lower end of the connecting rod are tightly attached to the inner wall of the furnace chamber, so that when the material containing frame enters the furnace mouth under the condition of position deviation, correction can still be completed before falling to the bottom, the material containing frame is positioned at the center position in the furnace, after the material containing frame falls to the bottom, the descending rope is continued, the pressing sleeve, the cross rod and the stable limiting mechanism are enabled to continuously descend along with the rope, the sliding rollers only slide up and down, the side wall is provided with a rubber pad, friction force of the rubber pad enables the pressing sleeve, the cross rod and the stable limiting mechanism not to rotate in the furnace, and when the pressing sleeve, the cross rod and the stable limiting mechanism descend, the driving block and the driving groove are matched, so that the hanging block rotates, unlocking is completed, and the servo motor is started to rotate through the electric control box, so that the winding operation of the winding roller is completed.
Preferably, the feeding driving mechanism comprises a servo motor fixedly mounted on the lower side of the inverted-L-shaped top end of the electric control rotating support, a wire winding roller rotatably mounted on the lower side of the inverted-L-shaped top end of the electric control rotating support, and a rope wound on the wire winding roller, wherein an output shaft of the servo motor is fixedly connected with one end of the wire winding roller, and the wire winding roller is located right above a feed inlet of the graphitizing furnace.
The electric control rotating support consists of a stepping motor and a fixed support, the stepping motor is electrically connected with the electric cabinet, the rotating angle of the stepping motor is the same, and a feeding driving mechanism on the fixed support is located right above a feeding hole of the graphitizing furnace and on one side of the graphitizing furnace, so that connection feeding of the material containing frame and the lifting connecting mechanism is facilitated, and winding and unwinding of a rope can be controlled through rotation of the servo motor.
Preferably, the lifting connection mechanism comprises a pressing sleeve fixedly connected with one end of the rope, a movable cavity is formed in the bottom end of the pressing sleeve, a driving groove is formed in the inner wall of the movable cavity, the driving groove is an annular groove, an annular cavity formed between the upper side wall and the lower side wall of the annular groove is wavy, the wavy edge of the upper side wall of the annular groove and the wavy edge of the lower side wall of the annular groove have a phase difference, a guide column is movably arranged in the movable cavity, a driving block is welded on the circumferential side wall of the guide column, the driving block is movably mounted in the driving groove, a connecting column is welded at the bottom end of the guide column, and a hanging block is welded at one end, far away from the guide column, of the connecting column.
The fluctuation of the wave of the driving groove is four sections, namely, each section of stroke from a high point to a low point on the driving groove of the driving block, so that the guide post and the pressing sleeve rotate in degree, the hanging block is subjected to gravity to fall down, the driving block on the side wall of the guide post is positioned at the bottom end of the wave-shaped driving groove, after the hanging block bottoms out, the pressing sleeve is pressed down by gravity, and the pressing sleeve is pressed down through the friction force of the stable limiting mechanism and the inner wall of the furnace, the guide post drives the hanging block to rotate, thereby unlocking of the hanging block and the material containing frame can be realized, the trouble of manual unlocking and disassembly is omitted, and accordingly, the working efficiency is improved.
Preferably, inclined planes are formed on two sides of one end, far away from the connecting column, of the hanging block, ball grooves are formed in positions, located between the two groups of inclined planes, of the bottom end of the hanging block, the ball grooves are symmetrically formed on two sides of the bottom end of the hanging block, and balls are arranged in the two groups of ball grooves.
The ball is arranged at the bottom end of the hanging block, so that the contact area between the hanging block and the bottom contact is small after the hanging block is in bottoming, the pressing sleeve is pressed down, the guide post is driven to drive the hanging block to smoothly rotate and switch, and the unlocking efficiency and the unlocking reliability are improved.
Preferably, the material containing frame comprises a material containing platen, a material containing groove is formed in the material containing platen, the material containing groove is arranged in an annular array with respect to the top end of the material containing platen, a hanging fixture block is welded at the central position of the top end of the material containing platen, a first penetrating groove is formed in the side wall of the lower end of the hanging fixture block, a second penetrating groove is formed in the side wall of the upper end of the hanging fixture block, the first penetrating groove and the second penetrating groove are communicated, anti-falling grooves are formed in two sides of the top end of the first penetrating groove on the hanging fixture block, and a heightening platform is welded at the bottom end of the material containing platen.
The width of the hanging block is matched with and inserted into the second through groove, the length of the hanging block is smaller than the width of the first through groove, the hanging block can rotate in the first through groove, when the hanging block lifts the material containing frame, the hanging block is located in the anti-falling groove, the hanging block is prevented from falling off from the first through groove, and the material containing frame falls off in the lifting process.
Preferably, the stabilizing and limiting mechanism comprises a rotating lug arranged at one end of the cross rod far away from the pressing sleeve, an elastic component is arranged on the rotating lug, a connecting rod is rotatably arranged on the rotating lug through the elastic component, a limiting surface is arranged at one side of the bottom end of the connecting rod, which is close to the material containing bedplate, and is twisted by the elastic component to be clung to the side wall of the Cheng Liao bedplate, a rolling groove is formed in one side of the two ends of the connecting rod far away from the material containing bedplate, and a sliding roller is rotatably arranged in the rolling groove.
After the lifting connection mechanism is connected with the material containing frame, the limiting surfaces of the plurality of groups of connecting rods of the annular array are tightly attached to the side wall of the Cheng Liao bedplate through the elastic assembly, so that the material containing frame is limited, after the material containing frame is lifted, the material containing frame is prevented from inclining, single crystal silicon is prevented from scattering, meanwhile, when the limiting surfaces of the plurality of groups of connecting rods of the annular array are tightly attached to the side wall of the Cheng Liao bedplate, the upper ends of the limiting surfaces of the plurality of groups of connecting rods of the annular array incline outwards, the annular maximum diameter surrounded by the upper ends of the plurality of groups of connecting rods of the annular array is larger than the diameter of a feeding port of the graphitizing furnace, when the material containing frame is placed into a furnace chamber of the graphitizing furnace, the feeding port extrudes the upper ends of the plurality of connecting rods, so that the connecting rods rotate until the upper ends and the lower ends of the plurality of the connecting rods are vertically attached to the inner wall of the furnace chamber of the graphitizing furnace, the plurality of groups of connecting rods of the annular array are enabled to be vertically and stably placed down, so that when the connecting rods of the plurality of connecting rods are not attached to the material containing frame, the material containing frame can still stably descend, and the graphite furnace can be stably and the graphite can not vertically rotate.
Preferably, the elastic component includes the rotation groove that the connecting rod middle-end was seted up, rotate the inslot portion and rotate and install the pivot, just pivot both ends and rotation ear welding, the torsional spring has been cup jointed to pivot circumference outer wall, just torsional spring one end and pivot lateral wall fixed connection, just the torsional spring other end and rotation inslot wall fixed connection.
Preferably, the graphitizing furnace is provided with the electric cabinet on one side, just the electric cabinet is electric connection with automatically controlled rotation support and servo motor, controls automatically controlled rotation support and servo motor through the electric cabinet, gets the material blowing when realizing the feeding.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, after the lifting connecting mechanism is connected with the material containing frame, the limiting surfaces of the plurality of groups of connecting rods of the annular array are tightly attached to the side wall of the Cheng Liao bedplate through the elastic component, so that the material containing frame is limited, and therefore, the material containing frame has higher stability after being lifted, and the situation that monocrystalline silicon is scattered due to inclination of the material containing frame is avoided.
2. When the material containing frame is placed in the furnace chamber of the graphitizing furnace, the upper ends of the plurality of groups of connecting rods are extruded by the feeding holes, so that the connecting rods rotate until the upper ends and the lower ends of the plurality of groups of connecting rods are vertically clung to the inner wall of the furnace chamber of the graphitizing furnace, at the moment, the ropes can be vertically and stably placed down through the limiting of the plurality of groups of connecting rods, and when the lower ends of the connecting rods do not limit the material containing frame in a binding mode, the material containing frame can still stably descend to the center position of the furnace chamber, and therefore the feeding position is higher in accuracy.
3. After the feeding is completed, the rope continuously moves downwards to enable the hanging block to touch the bottom, the pressing sleeve is pressed downwards by gravity, the pressing sleeve cannot rotate through the friction force between the stable limiting mechanism and the inner wall of the furnace, when the pressing sleeve is pressed downwards, the guide post drives the hanging block to rotate, so that unlocking of the hanging block and the material containing frame can be achieved, the trouble of manual unlocking and disassembling is omitted, and the working efficiency is improved.
4. The ball is arranged at the bottom end of the hanging block, so that the contact area between the hanging block and the bottom contact is small after the hanging block is in bottoming, the pressing sleeve is pressed down, the guide post is driven to drive the hanging block to smoothly rotate and switch, and the unlocking efficiency and the unlocking reliability are improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is an enlarged schematic view of the structure A in FIG. 1 according to the present invention;
FIG. 3 is a schematic diagram of a rotary take-out structure of an electronically controlled rotary support in accordance with the present invention;
FIG. 4 is a schematic diagram of an explosion structure of a hoisting connection mechanism and a hooking fixture block in the invention;
FIG. 5 is a schematic diagram of an explosion structure of the stabilizing and spacing mechanism of the present invention;
fig. 6 is a schematic structural view of a material containing rack in the present invention.
In the figure: 1. a graphitizing furnace; 2. stairs; 3. an electric control rotating bracket; 4. a feed drive mechanism; 5. hoisting the connecting mechanism; 6. a material containing frame; 7. a cross bar; 8. a stable limit mechanism; 9. a servo motor; 10. a wire winding roller; 11. a rope; 12. pressing down the sleeve; 13. a movable cavity; 14. a driving groove; 15. a guide post; 16. a driving block; 17. a connecting column; 18. hanging a hanging block; 19. an inclined plane; 20. a ball groove; 21. a ball; 22. a material containing bedplate; 23. a material containing groove; 24. a clamping block is hung; 25. a first through groove; 26. a second through groove; 27. an anti-drop groove; 28. a raising platform; 29. rotating the ear; 30. a connecting rod; 31. a limiting surface; 32. a rolling groove; 33. a slide roller; 34. a rotating groove; 35. a rotating shaft; 36. a torsion spring; 37. an electric control box.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art.
The graphitizing furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon chips shown in figures 1 to 6 comprises a graphitizing furnace 1, wherein one side of the graphitizing furnace 1 is provided with a stair 2, one side of the top end of the graphitizing furnace 1 is provided with an electric control rotating support 3, the electric control rotating support 3 is in an inverted L shape, the top end of the electric control rotating support 3 is fixedly provided with a feeding driving mechanism 4, the feeding driving mechanism 4 is arranged above a lifting connecting mechanism 5, the feeding driving mechanism 4 is connected with the lifting connecting mechanism 5 through a rope 11, the bottom end of the lifting connecting mechanism 5 is hung with a material containing frame 6, the circumferential side wall of the lifting connecting mechanism 5 is provided with a cross rod 7, the cross rod 7 is arranged in an annular array around the circumferential side wall of the lifting connecting mechanism 5, one end of the cross rod 7 far away from the lifting connecting mechanism 5 is rotatably provided with a stable limiting mechanism 8, the stable limiting mechanism 8 limits and fixes the material containing frame 6, the stability of the material containing frame 6 is ensured during feeding, during working, because the furnace mouth of the vertical graphitizing furnace 1 is arranged at the top end of the equipment, the graphitizing furnace 1 needs to manually climb stairs to manually discharge or use a crane to feed during feeding, the manual feeding efficiency is low, the feeding position cannot be controlled, the graphitizing furnace 1 has poorer effect on heating graphitizing monocrystalline silicon, the crane feeding generally adopts a hanging hook to connect a material containing disc, the hanging hook is placed into the furnace of the graphitizing furnace 1, the operation is simple, but the connection of the hanging hook and the material containing disc still needs to be manually loosened, the material containing disc cannot deviate when entering the furnace mouth during feeding of the crane, otherwise, the material containing disc cannot enter, and manual assistance is often needed, monocrystalline silicon is placed in the material containing groove 23 on the material containing frame 6, then the raising platform 28 of the material containing frame 6 is placed on the ground, so that a distance exists between the material containing platen 22 and the ground, then the furnace cover of the graphitization furnace 1 is opened, the electric control box 37 is operated, the electric control rotating support 3 is rotated by 90 degrees (namely, the electric control box 37 is rotated to one side of the graphitization furnace 1), then the servo motor 9 is started by operating the electric control box 37, the rope 11 is lowered, and the lifting connecting mechanism 5 is lowered.
As a further embodiment of the invention, the feeding driving mechanism 4 comprises a servo motor 9 fixedly arranged at the lower side of the inverted-L-shaped top end of the electric control rotating bracket 3, a winding roller 10 rotatably arranged at the lower side of the inverted-L-shaped top end of the electric control rotating bracket 3, and a rope 11 wound on the winding roller 10, wherein an output shaft of the servo motor 9 is fixedly connected with one end of the winding roller 10, and the winding roller 10 is positioned right above a feed inlet of the graphitizing furnace 1.
In this embodiment, automatically controlled rotation support 3 comprises step motor and fixed bolster, and step motor and electric cabinet 37 are electric connection, and step motor's turned angle is 90 degrees for feeding actuating mechanism 4 on the fixed bolster is located directly over graphitization stove 1 feed inlet and graphitization stove 1 one side, and the connection material loading of holding frame 6 and hoisting coupling mechanism 5 of being convenient for can control the roll-up and the play of rope 11 through servo motor 9 rotation.
As a further embodiment of the invention, the hoisting connecting mechanism 5 comprises a pressing sleeve 12 fixedly connected with one end of the rope 11, a movable cavity 13 is formed at the bottom end of the pressing sleeve 12, a driving groove 14 is formed in the inner wall of the movable cavity 13, the driving groove 14 is an annular groove, an annular cavity formed between the upper side wall and the lower side wall of the annular groove is wave-shaped, the wave-shaped edge of the upper side wall of the annular groove is in phase difference with the wave-shaped edge of the lower side wall, a guide column 15 is movably arranged in the movable cavity 13, a driving block 16 is welded on the circumferential side wall of the guide column 15, the driving block 16 is movably arranged in the driving groove 14, a connecting column 17 is welded at the bottom end of the guide column 15, and a hanging block 18 is welded at one end of the connecting column 17 far from the guide column 15.
In this embodiment, the undulation of the wave of the driving groove 14 is four sections, that is, each section of travel of the driving block 16 from the high point to the low point on the driving groove 14, so that the guide post 15 and the pressing sleeve 12 rotate by 90 degrees, the hanging block 18 is dropped by gravity, so that the driving block 16 on the side wall of the guide post 15 is positioned at the bottom end of the wavy driving groove 14, after the hanging block 18 touches the bottom, the pressing sleeve 12 is pressed down by gravity, and the pressing sleeve 12 drives the hanging block 18 to rotate through the friction force between the stable limiting mechanism 8 and the inner wall of the furnace, when the pressing sleeve 12 is pressed down, so that the unlocking of the hanging block 18 and the material containing frame 6 can be realized, the trouble of manual unlocking and disassembly is omitted, and thus the working efficiency is improved.
As a further embodiment of the present invention, inclined planes 19 are formed on both sides of one end of the hanging block 18 far from the connecting column 17, ball grooves 20 are formed at positions between the two sets of inclined planes 19 at the bottom end of the hanging block 18, the ball grooves 20 are symmetrically formed on both sides of the bottom end of the hanging block 18, and balls 21 are arranged in both sets of ball grooves 20.
In this embodiment, the ball 21 is disposed at the bottom end of the hanging block 18, so that after the hanging block 18 bottoms out, the contact area between the hanging block and the bottom is smaller, and thus the pressing sleeve 12 is pressed down to enable the guide post 15 to drive the hanging block 18 to smoothly rotate and switch, so that the unlocking efficiency and the unlocking reliability are improved.
As a further embodiment of the present invention, the material containing rack 6 includes a material containing platen 22, a material containing groove 23 is formed on the material containing platen 22, the material containing groove 23 is arranged in an annular array with respect to the top end of the material containing platen 22, a hanging fixture block 24 is welded at the central position of the top end of the material containing platen 22, a first penetrating groove 25 is formed on the side wall of the lower end of the hanging fixture block 24, a second penetrating groove 26 is formed on the side wall of the upper end of the hanging fixture block 24, the first penetrating groove 25 and the second penetrating groove 26 are arranged in a communicating manner, an anti-falling groove 27 is formed on both sides of the top end of the first penetrating groove 25 on the hanging fixture block 24, and a raised platform 28 is welded at the bottom end of the material containing platen 22.
In this embodiment, the width of the hanging block 18 is matched with and inserted into the second through groove 26, and the length of the hanging block 18 is smaller than the width of the first through groove 25, so that the hanging block 18 can rotate in the first through groove 25, and when the hanging block 18 lifts the material containing frame 6, the hanging block 18 is located in the anti-falling groove 27, so that the hanging block 18 is prevented from falling off from the first through groove 25, and the material containing frame 6 falls off in the lifting process.
As a further embodiment of the invention, the stabilizing and limiting mechanism 8 comprises a rotating lug 29 arranged at one end of the cross rod 7 far away from the pressing sleeve 12, an elastic component is arranged on the rotating lug 29, a connecting rod 30 is rotatably arranged on the rotating lug 29 through the elastic component, a limiting surface 31 is arranged at one side of the bottom end of the connecting rod 30 near the material containing bedplate 22, the limiting surface 31 is twisted by the elastic component to be clung to the side wall of the Cheng Liao bedplate 22, rolling grooves 32 are formed at one sides of two ends of the connecting rod 30 far away from the material containing bedplate 22, and a sliding roller 33 is rotatably arranged in the rolling grooves 32.
In this embodiment, after the lifting connection mechanism 5 is connected with the material containing frame 6, the limiting surfaces 31 of the plurality of groups of connecting rods 30 in the annular array are tightly attached to the side wall of the platen 22 of Cheng Liao through the elastic component, so that the material containing frame 6 is limited, thereby having higher stability after the material containing frame 6 is lifted, avoiding the situation that monocrystalline silicon is scattered due to the inclination of the material containing frame 6, simultaneously, when the limiting surfaces 31 of the plurality of groups of connecting rods 30 in the annular array are tightly attached to the side wall of the platen 22 of Cheng Liao, the upper ends of the plurality of groups of connecting rods 30 in the annular array are outwards inclined, so that the annular maximum diameter enclosed by the upper ends of the plurality of groups of connecting rods 30 in the annular array is larger than the diameter of the feed inlet of the graphitization furnace 1, when the material containing frame 6 is placed in the furnace chamber of the graphitizing furnace 1, the feeding port extrudes the upper ends of the plurality of groups of connecting rods 30, so that the connecting rods 30 rotate until the upper ends and the lower ends of the plurality of groups of connecting rods 30 are vertically clung to the inner wall of the furnace chamber of the graphitizing furnace 1, because the plurality of groups of connecting rods 30 of the annular array are clung to the inner wall of the furnace chamber, the ropes 11 are vertically and stably lowered, when the lower ends of the connecting rods 30 do not carry out attaching limitation on the material containing frame 6, the material containing frame 6 can still stably descend for feeding, the side walls of the sliding rollers 33 are provided with rubber pads, and the plurality of groups of connecting rods 30 of the annular array only vertically descend in the furnace chamber of the graphitizing furnace 1 and cannot rotate.
As a further embodiment of the present invention, the elastic component includes a rotating groove 34 formed at the middle end of the connecting rod 30, a rotating shaft 35 is rotatably mounted in the rotating groove 34, two ends of the rotating shaft 35 are welded to the rotating lug 29, a torsion spring 36 is sleeved on the outer circumferential wall of the rotating shaft 35, one end of the torsion spring 36 is fixedly connected with the side wall of the rotating shaft 35, and the other end of the torsion spring 36 is fixedly connected with the inner wall of the rotating groove 34.
As a further embodiment of the invention, an electric control box 37 is arranged on one side of the graphitizing furnace 1, and the electric control box 37 is electrically connected with the electric control rotating support 3 and the servo motor 9, in this embodiment, the electric control box 37 is used for controlling the electric control rotating support 3 and the servo motor 9, so as to realize material taking and discharging during material feeding.
The working principle of the invention is as follows: placing monocrystalline silicon into a material containing groove 23 on a material containing frame 6, placing a lifting platform 28 of the material containing frame 6 on the ground so that a distance exists between a material containing platen 22 and the ground, opening a furnace cover of a graphitization furnace 1, operating an electric cabinet 37 so that an electric control rotating bracket 3 rotates 90 degrees (namely to one side of the graphitization furnace 1), operating the electric cabinet 37 to start a servo motor 9 so that a rope 11 descends, lowering a lifting connecting mechanism 5, aligning a narrow edge of a hanging block 18 in the lifting connecting mechanism 5 with a second through groove 26 of the hanging block 24 when the lifting connecting mechanism 5 descends to the height of the hanging block 24 at the top end of the material containing frame 6, continuing to descend the rope 11 so that the hanging block 18 is inserted into the first through groove 25, rotating a cross rod 7 so that the hanging block 18 rotates 90 degrees, then operating again, the servo motor 9 is started by the electric cabinet 37, the rope 11 is coiled by the coiling roller 10, the hanging block 18 is clamped in the anti-falling groove 27, the lower end of the connecting rod 30 is completely attached to the side wall of the Cheng Liao bedplate 22, the holding bedplate 22 is limited by the connecting rod 30 in a circumferential array, the phenomenon that the hanging block 18 lifts the holding frame 6 from the center and then the holding frame 6 is unstable in the lifting process, left and right shaking occurs, single crystal silicon is scattered from the holding frame 6, the rope 11 continues to be coiled, the holding frame 6 is lifted to be higher than the top end of the graphitization furnace 1, the electric control rotating bracket 3 is controlled by the electric cabinet 37 to rotate by 90 degrees, the holding frame 6 is moved to be right above the furnace mouth of the graphitization furnace 1, and then the servo motor 9 is started to lower the rope 11, so that the holding frame 6 falls into the furnace of the graphitization furnace 1.
When the material containing frame 6 enters the graphitizing furnace 1, the state of the connecting rod 30 is jointed with the side wall of the material containing platen 22 by the limiting surface 31, and the sliding rollers 33 at the upper end and the lower end of the connecting rod 30 are tightly jointed with the inner wall of the furnace chamber, so that when the material containing frame 6 enters the furnace mouth under the condition of position deviation, deviation correction can still be completed before the material containing frame 6 falls down, the material containing frame 6 is positioned at the center position in the furnace, after the material containing frame 6 falls down, the descending rope 11 is continuously descended, the lower pressing sleeve 12, the cross rod 7 and the stable limiting mechanism 8 continuously descend along with the rope 11, the sliding rollers 33 only slide up and down, rubber pads are arranged on the side walls, friction force of the rubber pads enables the lower pressing sleeve 12, the cross rod 7 and the stable limiting mechanism 8 not to rotate in the furnace, and accordingly when the lower pressing sleeve 12, the cross rod 7 and the stable limiting mechanism 8 descend, the driving block 16 and the driving groove 14 are matched, the hanging block 18 rotates 90 degrees at the moment, unlocking is completed, the servo motor 9 is started through the electric cabinet 37, and the rope winding roller 10 is enabled to rotate, and the winding operation is completed.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the foregoing embodiments, but rather, the foregoing embodiments and description illustrate the principles of the invention, and that various changes and modifications may be effected therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (7)
1. The utility model provides a big silicon chip of semiconductor manufacturing is with graphitization stove feed mechanism of isostatic pressing graphite, its characterized in that includes graphitization stove (1), graphitization stove (1) one side is provided with stair (2), just graphitization stove (1) top one side is provided with automatically controlled rotation support (3), just automatically controlled rotation support (3) are the setting of falling L, automatically controlled rotation support (3) top fixed mounting has feeding actuating mechanism (4), feeding actuating mechanism (4) set up in lifting by crane coupling mechanism (5) top, just feeding actuating mechanism (4) are connected through rope (11) with lifting by crane coupling mechanism (5), just lifting by crane coupling mechanism (5) bottom articulates flourishing work or material rest (6), be provided with horizontal pole (7) on lifting by crane coupling mechanism (5) circumference lateral wall, just horizontal pole (7) are around lifting by crane coupling mechanism (5) circumference lateral wall is annular array setting, one end rotation that lifting by crane coupling mechanism (5) kept away from is installed stable stop gear (8), just stable stop gear (8) carries out the flourishing work or material rest (6) when guaranteeing that flourishing work or material rest (6) are held by crane stability;
the stabilizing and limiting mechanism (8) comprises a rotating lug (29) arranged at one end, far away from the lower pressing sleeve (12), of the cross rod (7), an elastic component is arranged on the rotating lug (29), a connecting rod (30) is installed through rotation of the elastic component, one side, close to the material containing table plate (22), of the bottom end of the connecting rod (30) is provided with a limiting surface (31), the limiting surface (31) is twisted to be clung to the side wall of the Cheng Liao table plate (22) through the elastic component, rolling grooves (32) are formed in one side, far away from the material containing table plate (22), of the two ends of the connecting rod (30), and sliding rollers (33) are installed in the rolling grooves (32).
2. The feeding mechanism of the graphitizing furnace for manufacturing isostatic graphite for manufacturing large semiconductor silicon chips according to claim 1, wherein the feeding driving mechanism (4) comprises a servo motor (9) fixedly installed on the lower side of the inverted-L-shaped top end of the electric control rotating support (3), a wire winding roller (10) rotatably installed on the lower side of the inverted-L-shaped top end of the electric control rotating support (3), and a rope (11) wound on the wire winding roller (10), an output shaft of the servo motor (9) is fixedly connected with one end of the wire winding roller (10), and the wire winding roller (10) is located right above a feeding port of the graphitizing furnace (1).
3. The graphitizing furnace feeding mechanism of isostatic graphite for manufacturing a semiconductor large silicon wafer according to claim 2, wherein the lifting connecting mechanism (5) comprises a pressing sleeve (12) fixedly connected with one end of a rope (11), a movable cavity (13) is formed in the bottom end of the pressing sleeve (12), a driving groove (14) is formed in the inner wall of the movable cavity (13), the driving groove (14) is an annular groove, an annular cavity formed between the upper side wall and the lower side wall of the annular groove is wavy, the wavy edge of the upper side wall of the annular groove has a phase difference with the wavy edge of the lower side wall, a guide post (15) is movably arranged in the movable cavity (13), a driving block (16) is welded on the circumferential side wall of the guide post (15), the driving block (16) is movably mounted in the driving groove (14), a connecting post (17) is welded on the bottom end of the guide post (15), and a hanging block (18) is welded on one end of the connecting post (17) far away from the guide post (15).
4. The graphitizing furnace feeding mechanism of isostatic graphite for manufacturing a large semiconductor silicon wafer according to claim 3, wherein inclined planes (19) are formed on two sides of one end, far away from the connecting column (17), of the hanging block (18), ball grooves (20) are formed at positions, located between the two groups of inclined planes (19), of the bottom ends of the hanging block (18), the ball grooves (20) are symmetrically formed on two sides of the bottom ends of the hanging block (18), and balls (21) are arranged in the two groups of ball grooves (20).
5. The graphitizing furnace feeding mechanism of isostatic graphite for manufacturing a semiconductor large silicon wafer according to claim 4, wherein the material containing frame (6) comprises a material containing platen (22), a material containing groove (23) is formed in the material containing platen (22), the material containing groove (23) is arranged in an annular array with respect to the top end of the material containing platen (22), a hanging clamping block (24) is welded at the central position of the top end of the material containing platen (22), a first penetrating groove (25) is formed in the side wall of the lower end of the hanging clamping block (24), a second penetrating groove (26) is formed in the side wall of the upper end of the hanging clamping block (24), the first penetrating groove (25) and the second penetrating groove (26) are communicated, anti-falling grooves (27) are formed in two sides of the top end of the first penetrating groove (25) on the hanging clamping block (24), and a backing table (28) is welded at the bottom end of the material containing clamping block (22).
6. The graphitizing furnace feeding mechanism of isostatic graphite for manufacturing a semiconductor large silicon wafer according to claim 5, wherein the elastic component comprises a rotating groove (34) formed in the middle end of the connecting rod (30), a rotating shaft (35) is rotatably arranged in the rotating groove (34), two ends of the rotating shaft (35) are welded with the rotating lugs (29), a torsion spring (36) is sleeved on the circumferential outer wall of the rotating shaft (35), one end of the torsion spring (36) is fixedly connected with the side wall of the rotating shaft (35), and the other end of the torsion spring (36) is fixedly connected with the inner wall of the rotating groove (34).
7. The graphitizing furnace feeding mechanism of the isostatic graphite for manufacturing the semiconductor large silicon wafer according to claim 6, wherein an electric control box (37) is arranged on one side of the graphitizing furnace (1), and the electric control box (37) is electrically connected with the electric control rotating support (3) and the servo motor (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311642082.5A CN117346541B (en) | 2023-12-04 | 2023-12-04 | Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311642082.5A CN117346541B (en) | 2023-12-04 | 2023-12-04 | Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117346541A CN117346541A (en) | 2024-01-05 |
| CN117346541B true CN117346541B (en) | 2024-01-26 |
Family
ID=89371382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311642082.5A Active CN117346541B (en) | 2023-12-04 | 2023-12-04 | Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117346541B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001310177A (en) * | 2000-02-23 | 2001-11-06 | Nippon Steel Corp | Method and furnace for melting treatment of waste |
| JP2004317057A (en) * | 2003-04-17 | 2004-11-11 | Kawasaki Heavy Ind Ltd | Supply device for melting furnace |
| WO2011003656A1 (en) * | 2009-07-06 | 2011-01-13 | Siemens Aktiengesellschaft | Device for positioning a material basket |
| CN212763503U (en) * | 2020-07-14 | 2021-03-23 | 吉林炭素有限公司 | Special electric furnace unloading clamp for inner series furnace |
| CN214734553U (en) * | 2021-05-14 | 2021-11-16 | 宜宾金石新材料科技有限公司 | Recarburizer graphitization furnace convenient for heat accumulation |
| CN216385044U (en) * | 2021-11-17 | 2022-04-26 | 江苏鸿凌达科技有限公司 | Vertical graphitizing furnace |
| CN115930602A (en) * | 2022-12-13 | 2023-04-07 | 肇庆市宏华电子科技有限公司 | Bell jar furnace for processing ceramic circuit element |
-
2023
- 2023-12-04 CN CN202311642082.5A patent/CN117346541B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001310177A (en) * | 2000-02-23 | 2001-11-06 | Nippon Steel Corp | Method and furnace for melting treatment of waste |
| JP2004317057A (en) * | 2003-04-17 | 2004-11-11 | Kawasaki Heavy Ind Ltd | Supply device for melting furnace |
| WO2011003656A1 (en) * | 2009-07-06 | 2011-01-13 | Siemens Aktiengesellschaft | Device for positioning a material basket |
| CN212763503U (en) * | 2020-07-14 | 2021-03-23 | 吉林炭素有限公司 | Special electric furnace unloading clamp for inner series furnace |
| CN214734553U (en) * | 2021-05-14 | 2021-11-16 | 宜宾金石新材料科技有限公司 | Recarburizer graphitization furnace convenient for heat accumulation |
| CN216385044U (en) * | 2021-11-17 | 2022-04-26 | 江苏鸿凌达科技有限公司 | Vertical graphitizing furnace |
| CN115930602A (en) * | 2022-12-13 | 2023-04-07 | 肇庆市宏华电子科技有限公司 | Bell jar furnace for processing ceramic circuit element |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117346541A (en) | 2024-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2020042687A1 (en) | Unloading robot for industrial production | |
| CN111942885B (en) | Clamping and transferring device for lithium battery material production | |
| CN117346541B (en) | Graphitization furnace feeding mechanism of isostatic graphite for manufacturing large semiconductor silicon wafer | |
| JP2640683B2 (en) | Single crystal rod pulling device | |
| CN210085624U (en) | Lifting device for quartz crucible of single crystal furnace | |
| CN109737742B (en) | Rotatable dumping type electric crucible furnace | |
| CN110712990B (en) | Feeding equipment and feeding method | |
| CN114193723A (en) | Injection mold is used in production of metal garland packing | |
| CN113390679A (en) | Movable automatic grain sampling equipment | |
| CN218261670U (en) | Rotating and lifting device for artificial crystal furnace | |
| CN116411351B (en) | Silicon carbon material apparatus for producing | |
| CN215624526U (en) | Steel billet transfer device for steel rolling in steel mill | |
| CN215393327U (en) | Automatic welding equipment is used in production of hanging plate movable door leaf | |
| CN216097778U (en) | Pneumatic centering machine capable of being adjusted stably | |
| CN216066135U (en) | Welding tool for suspension plate valve frame | |
| CN117902485A (en) | Building material hoisting platform and hoisting device | |
| CN220843838U (en) | Automatic discharging device of movable storage bin | |
| CN220999723U (en) | Metal product heat treatment material feeding unit | |
| CN220645104U (en) | Concrete placement's operation rack | |
| CN211992157U (en) | Novel refractory material production device | |
| CN217265868U (en) | Vertical quenching furnace material frame lifting mechanism | |
| CN216272785U (en) | Wire drawing mechanism assembling structure of wire drawing machine frame | |
| CN219810244U (en) | Distribution system for mechanized control of lime vertical kiln production line | |
| CN219562313U (en) | Automatic feeding device from top to bottom of numerical control machining center | |
| CN218465371U (en) | Precast block hoisting accessory |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |