CN217132659U - Raw material sampling device is used in photoresist production - Google Patents
Raw material sampling device is used in photoresist production Download PDFInfo
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- CN217132659U CN217132659U CN202220374034.7U CN202220374034U CN217132659U CN 217132659 U CN217132659 U CN 217132659U CN 202220374034 U CN202220374034 U CN 202220374034U CN 217132659 U CN217132659 U CN 217132659U
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- peristaltic pump
- photoresist
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Abstract
The utility model discloses a raw material sampling device for photoresist production, which comprises a production storage box, a sampling platform and a multi-channel peristaltic pump, wherein a plurality of sampling channels are formed on the side surface of the production storage box from top to bottom, a vessel placing shelf is arranged on the other side of the length direction of the sampling platform, the vessel placing shelf comprises a vertical plate, a plurality of supporting plates and a plurality of vessel placing plates, the supporting plates and the vessel placing plates are alternatively fixed on the vertical plate, the other ends of a plurality of hoses of the multi-channel peristaltic pump are respectively arranged by passing through the supporting plates, the utility model discloses a lateral part of the production storage box is provided with a plurality of sampling channels to be matched with the multi-channel peristaltic pump for use, so that the photoresist at different positions in the production storage box can be conveniently sampled, and further, operators can conveniently know the conditions of the photoresist at different positions in the production storage box, compared with the traditional sampling device, the utility model discloses higher practicality has.
Description
Technical Field
The utility model relates to a photoresist apparatus for producing especially relates to a raw materials sampling device is used in photoresist production.
Background
The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist.
At present, current photoresist adopts the storage section of thick bamboo to save more in process of production, can take place certain precipitation phenomenon in the storage process, and sampling device is relatively fixed at the sampling point when using, and is inconvenient to sample simultaneously a plurality of sampling points. For this reason, a new scheme needs to be designed to give improvement.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to solve the not enough of existence among the background art, so the utility model discloses a raw materials sampling device is used in photoresist production.
The technical scheme is as follows: the utility model provides a raw materials sampling device is used in photoresist production, is including production storage case, sample platform and multichannel peristaltic pump, form a plurality of sample passageways from top to bottom in the side of production storage case, the multichannel peristaltic pump sets up length direction one side at sample platform, a plurality of hose one end that the multichannel peristaltic pump includes are connected respectively with a plurality of sample passageways, sample platform's length direction opposite side is provided with the household utensils and places the layer frame, the household utensils are placed the layer frame and are placed the board including vertical board, a plurality of backup pads and a plurality of household utensils, and a plurality of backup pads and a plurality of household utensils and place the board and fix in turn on vertical board, a plurality of hose other ends that the multichannel peristaltic pump included pass a plurality of backup pads setting respectively.
Further, the multi-channel peristaltic pump is a three-channel peristaltic pump.
Further, a vessel positioning groove is formed in the upper surface of the vessel placing plate.
Further, a metering control valve is arranged at the joint of the hose and the sampling channel.
Further, the surface molding of backup pad has the groove of stepping down, just it has the rubber circle to paste in the groove of stepping down, the hose is followed the rubber circle and is passed.
The utility model discloses realize following beneficial effect:
the utility model discloses a lateral part at production storage case sets up a plurality of sampling passageways and multichannel peristaltic pump cooperation and uses, can conveniently take a sample to the photoresist of production storage incasement different positions, and then makes things convenient for operating personnel to know the photoresist situation of production storage incasement different positions, compares in traditional sampling device, the utility model discloses higher practicality has.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is the utility model discloses a board overall structure sketch map is placed to household utensils.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Examples
Referring to fig. 1-2, a raw materials sampling device is used in photoresist production, including production storage case 10, sampling platform 20 and multichannel peristaltic pump 30, form a plurality of sample passageways 11 from top to bottom in the side of production storage case, the multichannel peristaltic pump sets up in sample platform's length direction one side, a plurality of hoses 31 one end that the multichannel peristaltic pump includes are connected respectively with a plurality of sample passageways, sample platform's length direction opposite side is provided with household utensils and places layer frame 50, the household utensils are placed layer frame and are included vertical plate 51, a plurality of backup pads 53 and a plurality of household utensils and place board 52, and a plurality of backup pads and a plurality of household utensils are placed the board and are fixed on vertical plate in turn, a plurality of hose other ends that the multichannel peristaltic pump includes pass a plurality of backup pads setting respectively.
As the utility model discloses preferred embodiment does, the multichannel peristaltic pump is three channel peristaltic pump, and it is corresponding to it, the utility model discloses a production storage case lateral part need be formed with three sampling channel, and three sampling channel needs to be according to the equidistance setting from top to bottom, can guarantee like this to take a sample respectively to the photoresist of different positions.
In one embodiment, a vessel positioning groove 56 is formed on the upper surface of the vessel placing plate, so that the vessel can be accurately positioned when placed, and the vessel can accurately receive the photoresist collected by the hose.
In one embodiment, a metering control valve 40 is installed at the connection between the hoses and the sampling channel, and when a plurality of hoses included in the multi-channel peristaltic pump are used for pumping a certain amount of photoresist, the metering control valve is automatically closed, and the multi-channel peristaltic pump cannot continue to sample the photoresist in the production storage tank.
In one embodiment, the surface of the supporting plate is formed with a relief groove 54, and a rubber ring 55 is attached to the relief groove, so that the hose can pass through the rubber ring, the supporting plate and the hose can be conveniently installed, and the hose can be prevented from shaking.
When specifically using, operating personnel will place a plurality of household utensils in proper order on a plurality of household utensils place the platform earlier, then a plurality of metering control valves open, and multichannel peristaltic pump begins work and takes a sample to the photoresist of producing each position in the storage case through a plurality of hoses, and the photoresist that a plurality of hoses were taken a sample will fall into to deposit in a plurality of household utensils.
It is emphasized below that all the electrical accessories of the present invention are known structures, and are not described herein in detail.
The above embodiments are only for illustrating the technical conception and the features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All changes and modifications that come within the spirit of the invention are desired to be protected.
Claims (5)
1. The utility model provides a raw materials sampling device is used in photoresist production, a serial communication port, including production storage case, sample platform and multichannel peristaltic pump, form a plurality of sample passageways from top to bottom in the side of production storage case, multichannel peristaltic pump sets up length direction one side at sample platform, a plurality of hose one end that multichannel peristaltic pump includes are connected respectively with a plurality of sample passageways, sample platform's length direction opposite side is provided with household utensils and places the layer frame, the household utensils are placed the layer frame and are placed the board including vertical board, a plurality of backup pads and a plurality of household utensils and place the board and fix in turn on vertical board, a plurality of hose other ends that multichannel peristaltic pump included pass a plurality of backup pads setting respectively.
2. The apparatus of claim 1, wherein the multi-channel peristaltic pump is a three-channel peristaltic pump.
3. The apparatus for sampling raw material for photoresist production according to claim 1, wherein the ware positioning groove is formed on the upper surface of the ware placing plate.
4. The apparatus of claim 1, wherein a metering control valve is installed at the connection of the hose and the sampling channel.
5. The raw material sampling device for photoresist production according to claim 1, wherein a relief groove is formed on the surface of the support plate, a rubber ring is attached to the relief groove, and the hose passes through the rubber ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220374034.7U CN217132659U (en) | 2022-02-23 | 2022-02-23 | Raw material sampling device is used in photoresist production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220374034.7U CN217132659U (en) | 2022-02-23 | 2022-02-23 | Raw material sampling device is used in photoresist production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217132659U true CN217132659U (en) | 2022-08-05 |
Family
ID=82621793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220374034.7U Active CN217132659U (en) | 2022-02-23 | 2022-02-23 | Raw material sampling device is used in photoresist production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217132659U (en) |
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2022
- 2022-02-23 CN CN202220374034.7U patent/CN217132659U/en active Active
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