CN217126891U - Photoresist multi-station filling equipment - Google Patents
Photoresist multi-station filling equipment Download PDFInfo
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- CN217126891U CN217126891U CN202220404997.7U CN202220404997U CN217126891U CN 217126891 U CN217126891 U CN 217126891U CN 202220404997 U CN202220404997 U CN 202220404997U CN 217126891 U CN217126891 U CN 217126891U
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Abstract
The utility model discloses a photoresist multi-station filling device, which comprises a vibration platform, a container clamping mechanism and a filling mechanism, wherein two hollow seats for placing containers are arranged on the table surface of the vibration platform; container fixture includes two flexible drive assembly, two activity grip blocks and two fixed grip blocks, and filling mechanism includes frame, photoresist storage tank, lift drive assembly and two filling guns, and two filling guns are installed on lift drive assembly and just are relative with two cavity seats respectively, and photoresist storage tank and two filling guns pass through the bifurcation pipe connection, the utility model discloses an install two cavity seats and container clamping mechanism cooperation on vibration platform, when placing the container and press from both sides tightly, guarantee the container vibration when can also making filling mechanism carry out the filling, can improve the filling efficiency to the photoresist like this, compare with current filling mode, the utility model discloses higher use value has.
Description
Technical Field
The utility model relates to a filling equipment technical field especially relates to a photoresist multistation filling equipment.
Background
The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist. The photoresist used in the manufacture of silicon wafers is coated on the surface of the silicon wafer in a liquid state and then dried to form a film.
In the silicon wafer manufacturing process, the photoresist needs to be filled into a designated container before being sprayed and then coated on the silicon wafer through the container, however, because the photoresist is sticky, in order to ensure that the photoresist is filled quickly, an operator needs to shake manually during filling, so that the filling efficiency is relatively low, and the labor intensity of the operator is increased.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to solve the not enough of existence among the background art, so the utility model discloses a photoresist multistation filling equipment.
The technical scheme is as follows: a photoresist multi-station filling device comprises a vibration platform, a container clamping mechanism and a filling mechanism, wherein two hollow seats for placing containers are arranged on the table surface of the vibration platform;
the container clamping mechanism comprises two telescopic driving assemblies, two movable clamping blocks and two fixed clamping blocks, the two telescopic driving assemblies are arranged outside two sides of the vibration platform in the length direction, driving shafts of the two telescopic driving assemblies respectively extend into a hollow seat and are connected with the movable clamping blocks, and the two fixed clamping blocks are respectively arranged on the inner walls of the adjacent sides of the two hollow grooves and are respectively right opposite to the movable clamping blocks;
filling mechanism includes frame, photoresist storage tank, lift drive assembly and two filling guns, the frame sets up in vibration platform's width direction one side outside, the drive of lift drive assembly sets up the top below in the frame, and just two filling guns are installed on lift drive assembly and are just relative with two cavity seats respectively, the photoresist storage tank sets up in vibration platform's length direction one side outside, just the photoresist storage tank passes through the bifurcation tube coupling with two filling guns.
Further, vibration platform includes vibrating motor and platform body, the platform body is installed and is connected at vibrating motor's output, and two cavity seat installations are on the platform body.
Further, arc-shaped grooves matched with the container are formed in the clamping surfaces of the movable clamping block and the fixed clamping block, and protective rubber is attached to the inner wall of each arc-shaped groove.
Furthermore, the telescopic driving assembly comprises a height-supporting platform and a first servo electric cylinder, the first servo electric cylinder is installed on the height-supporting platform, and a driving shaft of the first servo electric cylinder extends into the hollow seat to be connected with the movable clamping block.
Furthermore, the lifting driving assembly comprises a second servo electric cylinder and a lifting support, the second servo electric cylinder is arranged below the top of the rack, and the lifting support is connected with a driving shaft of the second servo electric cylinder.
Further, the branch pipeline comprises a main pipeline and two branch pipelines integrally communicated with the main pipeline, the main pipeline is connected with the photoresist storage tank, and the two branch pipelines are respectively connected with the two filling guns.
Furthermore, a metering pump is respectively arranged at the joint of the two filling guns and the two branch pipelines.
The utility model discloses realize following beneficial effect:
the utility model discloses an install two hollow seats and the cooperation of container clamping mechanism on vibration platform, when placing the clamp tightly to the container, guarantee the container vibration when also making filling mechanism carry out the filling, can improve the filling efficiency to the photoresist like this, compare with current filling mode, the utility model discloses higher use value has.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
Fig. 1 is a schematic view of the overall structure of the present disclosure;
fig. 2 is a schematic side view of the movable clamping block disclosed in the present invention;
fig. 3 is a schematic side view of the fixing clamping block of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Examples
Referring to fig. 1-3, a photoresist multi-station filling apparatus comprises a vibration platform 10, a container holding mechanism 20 and a filling mechanism 30, wherein two hollow seats 40 for placing containers are mounted on the table surface of the vibration platform;
the container clamping mechanism comprises two telescopic driving assemblies 21, two movable clamping blocks 22 and two fixed clamping blocks 23, the two telescopic driving assemblies are arranged outside two sides of the vibration platform in the length direction, driving shafts of the two telescopic driving assemblies respectively extend into a hollow seat and are connected with the movable clamping blocks, and the two fixed clamping blocks are respectively arranged on the inner walls of the adjacent sides of the two hollow grooves and are respectively right opposite to the movable clamping blocks;
the filling mechanism comprises a rack 31, a photoresist storage tank 36, a lifting driving assembly and two filling guns 34, wherein the rack is arranged outside one side of the width direction of the vibration platform, the lifting driving assembly is arranged below the top of the rack in a driving mode, the two filling guns are arranged on the lifting driving assembly and are respectively right opposite to the two hollow seats, the photoresist storage tank is arranged outside one side of the length direction of the vibration platform, and the photoresist storage tank and the two filling guns are connected through a branch pipeline 37.
In one embodiment, the vibration platform comprises a vibration motor 11 and a platform body 12, the platform body is installed at the output end of the vibration motor and connected, two hollow seats are installed on the platform body, when the vibration motor works, the platform body also vibrates along with the vibration motor, and thus the bottom of a container placed in the hollow seats vibrates, and thus the filling efficiency of photoresist can be improved.
In one embodiment, the clamping surfaces of the movable clamping block and the fixed clamping block are respectively provided with an arc-shaped groove 50 matched with the container, and the inner wall of each arc-shaped groove is adhered with a protective rubber 60, so that the container can be better clamped, and the effect of protecting the container can be achieved.
In one embodiment, the telescopic driving assembly comprises a cushion elevation platform 211 and a first servo electric cylinder 212, wherein the first servo electric cylinder is installed on the cushion elevation platform, a driving shaft of the first servo electric cylinder extends into the hollow seat to be connected with the movable clamping block, and the movable clamping block is matched with the fixed clamping block to clamp a container placed in the hollow seat under the driving of the first servo electric cylinder.
In one embodiment, the lifting driving assembly comprises a second servo electric cylinder 32 and a lifting support 33, the second servo electric cylinder is mounted below the top of the frame, the lifting support is connected with a driving shaft of the second servo electric cylinder, and the lifting support and the two filling guns can perform lifting actions under the driving of the second servo electric cylinder, so that the filling guns can be located in the container to perform photoresist filling operation.
In one embodiment, the branch pipeline comprises a main pipeline 371 and two branch pipelines 372 integrally communicated with the main pipeline, the main pipeline is connected with the photoresist storage tank, and the two branch pipelines are respectively connected with the two filling guns.
As the utility model discloses the preferred is, a measuring pump 35 is installed respectively with the junction of two branch pipelines to two filling guns, when filling photoresist in two filling guns are to the container, can guarantee that the photoresist volume in every container is the same.
When the filling machine is used specifically, an operator or a mechanical arm firstly places a container of photoresist to be filled in two hollow seats, and clamps the container by respectively driving two movable clamping blocks to act and two fixed clamping blocks through two servo electric cylinders, after the step is finished, the servo electric cylinder II drives the lifting support and the two filling guns to descend until the heads of the two filling guns are positioned in the container, then two metering pumps work and quantitatively extract the photoresist in the photoresist storage tank to be filled into the two containers, when the two filling guns fill the photoresist into the container, the vibrating motor works to vibrate the platform body, so that the photoresist can be efficiently filled, after the quantitative photoresist is filled into the two containers, the servo electric cylinder II drives the lifting support and the two filling guns to reset, the servo electric cylinder I drives the two movable clamping guns to reset, at this time, the operator or the manipulator carries the two containers away.
It is emphasized below that the present invention requires a PLC controller for overall control when in use.
The above embodiments are only for illustrating the technical conception and the features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All changes and modifications that come within the spirit of the invention are desired to be protected.
Claims (7)
1. The photoresist multi-station filling equipment is characterized by comprising a vibration platform, a container clamping mechanism and a filling mechanism, wherein two hollow seats for placing containers are arranged on the table surface of the vibration platform;
the container clamping mechanism comprises two telescopic driving assemblies, two movable clamping blocks and two fixed clamping blocks, the two telescopic driving assemblies are arranged outside two sides of the vibration platform in the length direction, driving shafts of the two telescopic driving assemblies respectively extend into a hollow seat and are connected with the movable clamping blocks, and the two fixed clamping blocks are respectively arranged on the inner walls of the adjacent sides of the two hollow grooves and are respectively right opposite to the movable clamping blocks;
the filling mechanism comprises a rack, a photoresist storage tank, a lifting driving assembly and two filling guns, wherein the rack is arranged outside one side of the width direction of the vibration platform, the lifting driving assembly is arranged below the top of the rack in a driving mode, the two filling guns are arranged on the lifting driving assembly and are respectively right opposite to the two hollow seats, the photoresist storage tank is arranged outside one side of the length direction of the vibration platform, and the photoresist storage tank is connected with the two filling guns through a branch pipeline.
2. A photoresist multistation filling apparatus according to claim 1, wherein the vibration platform comprises a vibration motor and a platform body, the platform body is mounted at the output end of the vibration motor and connected, and two hollow seats are mounted on the platform body.
3. A photoresist multistation filling apparatus according to claim 1, characterized in that the clamping surfaces of the movable clamping block and the fixed clamping block are formed with arc grooves matched with the container, and the inner wall of each arc groove is pasted with protective rubber.
4. A photoresist multi-station filling equipment according to claim 1, wherein the telescopic driving assembly comprises a first elevating platform and a first servo electric cylinder, the first servo electric cylinder is installed on the elevating platform, and a driving shaft of the first servo electric cylinder extends into the hollow seat to be connected with the movable clamping block.
5. The photoresist multi-station filling equipment according to claim 1, wherein the lifting driving assembly comprises a second servo electric cylinder and a lifting support, the second servo electric cylinder is installed below the top of the rack, and the lifting support is connected with a driving shaft of the second servo electric cylinder.
6. The photoresist multistation filling equipment according to claim 1, characterized in that the branch pipeline comprises a main pipeline and two branch pipelines integrally communicated with the main pipeline, the main pipeline is connected with the photoresist storage tank, and the two branch pipelines are respectively connected with two filling guns.
7. A multi-station photoresist filling apparatus according to claim 6, wherein a metering pump is respectively installed at the joints of the two filling guns and the two branch pipelines.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220404997.7U CN217126891U (en) | 2022-02-23 | 2022-02-23 | Photoresist multi-station filling equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220404997.7U CN217126891U (en) | 2022-02-23 | 2022-02-23 | Photoresist multi-station filling equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217126891U true CN217126891U (en) | 2022-08-05 |
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ID=82643983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220404997.7U Active CN217126891U (en) | 2022-02-23 | 2022-02-23 | Photoresist multi-station filling equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217126891U (en) |
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2022
- 2022-02-23 CN CN202220404997.7U patent/CN217126891U/en active Active
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