CN217114346U - Wafer box is with pressing box pushing equipment - Google Patents

Wafer box is with pressing box pushing equipment Download PDF

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Publication number
CN217114346U
CN217114346U CN202220918466.XU CN202220918466U CN217114346U CN 217114346 U CN217114346 U CN 217114346U CN 202220918466 U CN202220918466 U CN 202220918466U CN 217114346 U CN217114346 U CN 217114346U
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China
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pressing
box
rack
along
wafer
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CN202220918466.XU
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Chinese (zh)
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徐靖宇
林坚
王彭
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Honghu Suzhou Semiconductor Technology Co ltd
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Honghu Suzhou Semiconductor Technology Co ltd
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Abstract

The utility model relates to a wafer box is with pressing box pushing equipment, which comprises a frame, first pressure box mechanism and second pressure box mechanism, first pressure box mechanism is including pressing the box motor, first briquetting and first rack, press the box motor to be connected the setting through first lead screw and first screw-nut and first rack along Y axle direction drive along the drive end of Y axle positive direction one side, first rack and inboard first briquetting meshing setting, second pressure box mechanism includes second rack and second briquetting, the second rack meshes the setting with inboard second briquetting, first briquetting is connected along one side of Y axle positive direction through stay cord and second briquetting along one side of Y axle positive direction. The utility model relates to a wafer box is with pressing box pushing equipment, can realize pressing the box processing to the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the structural arrangement of the material pushing mechanism, the material pushing processing can be carried out on the wafer displaced in the wafer box.

Description

Wafer box is with pressing box pushing equipment
Technical Field
The utility model relates to a wafer processing correlation technique field especially relates to a wafer box is with pressing box pushing equipment.
Background
A wafer is a very expensive product and must be protected from damage during the placement process. The wafer cassette is a device for loading wafers and sapphire in the industry. The wafer box generally needs to be pressed after being placed in place, so that the wafer box is prevented from generating position deviation and other conditions in the machining process, but the pressing operation in the prior art is generally realized by manually shifting the pressing block.
In view of the above-mentioned drawbacks, the present designer has made active research and innovation to create a wafer cassette pushing mechanism, which has industrial application value.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model aims at providing a wafer box is with pressing box pushing equipment.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a wafer box pressing and pushing mechanism comprises a rack, a first box pressing mechanism and a second box pressing mechanism, wherein the first box pressing mechanism is arranged on one side of the rack along the negative direction of an X axis, the second box pressing mechanism is arranged on one side of the rack along the positive direction of the X axis, the first box pressing mechanism comprises a box pressing motor, a first pressing block and a first rack, a driving end of the box pressing motor along one side of the positive direction of the Y axis is in driving connection with the first rack along the direction of the Y axis through a first lead screw and a first lead screw nut, the first rack is meshed with a first pressing block on the inner side, the second box pressing mechanism comprises a second rack and a second pressing block, the second rack is meshed with a second pressing block on the inner side, one side of the first pressing block along the positive direction of the Y axis is connected with one side of the second pressing block along the positive direction of the Y axis through a pull rope, the pushing mechanism is further arranged on the rack and comprises a pushing motor, The pushing motor is connected with the rotating block through a second screw rod and a second screw rod nut along the driving end on one side of the positive direction of the Y axis, the rotating block is connected with the rotating shaft, the rotating shaft is installed on the rack through a bearing, and the bottom of the rotating shaft is connected with the pushing block through a connecting rod.
As a further improvement of the utility model, the pushing mechanism is located the second and presses the frame of box mechanism along Y axle negative direction one side.
As a further improvement, the rotating block is provided with an induction sheet, and the rotating block is provided with a sensor matched with the induction sheet along the frame on one side of the positive direction of the Y axis.
As a further improvement, the top of the first pressing block and the second pressing block is provided with a pressing tongue, and the bottom of the first pressing block and the bottom of the second pressing block are provided with gears.
As a further improvement of the present invention, the first rack moves along the Y axis direction on the first sliding groove in the frame, and the second rack moves along the Y axis direction on the second sliding groove in the frame.
As a further improvement of the utility model, the outside of the first box pressing mechanism is provided with a first protective cover, and the outside of the second box pressing mechanism is provided with a second protective cover.
As a further improvement of the utility model, the middle position along the Y-axis direction on the first protection cover is also provided with a handle.
As a further improvement of the utility model, a rope pulling groove for placing the pull rope is also arranged on the frame.
Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:
the utility model relates to a wafer box is with pressing box pushing equipment, can realize pressing the box to handle the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the structural arrangement of the material pushing mechanism, the material pushing processing can be carried out on the wafer displaced in the wafer box.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view of a cassette pressing and pushing mechanism for a wafer cassette according to the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1 with the first and second protective covers removed;
FIG. 3 is a front view of FIG. 2;
fig. 4 is a schematic structural diagram of the pushing mechanism in fig. 2 or 3.
In the drawings, the meanings of the reference numerals are as follows.
1 frame 2 first protective cover
3 first box pressing mechanism 4 handle
5 second protective cover 6 second box pressing mechanism
7 pushing mechanism 8 presses box motor
9 first pressing block of pull rope 10
11 first rack 12 first sliding groove
13 draw rope groove 14 second rack
15 second press block 16 second sliding groove
17 pushing motor 18 second screw nut
19 rotating block 20 induction sheet
21 sensor 22 bearing
23 rotating shaft 24 connecting rod
25 push block
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in figures 1 to 4 of the drawings,
a box pressing and pushing mechanism for a wafer box comprises a machine frame 1, a first box pressing mechanism 3 and a second box pressing mechanism 6, wherein the first box pressing mechanism 3 is arranged on one side of the machine frame 1 along the negative direction of an X axis, the second box pressing mechanism 6 is arranged on one side of the machine frame 1 along the positive direction of the X axis, the first box pressing mechanism 3 comprises a box pressing motor 8, first briquetting 10 and first rack 11, the drive end of pressing box motor 8 along Y axle positive direction one side is connected the setting through first lead screw and first screw-nut and first rack 11 along Y axle direction drive, first rack 11 sets up with inboard first briquetting 10 meshing, second pressing box mechanism 6 includes second rack 14 and second briquetting 15, second rack 14 sets up with inboard second briquetting 15 meshing, first briquetting 10 is connected along one side of Y axle positive direction through stay cord 9 and second briquetting 15 along one side of Y axle positive direction.
Preferably, the frame 1 is further provided with a material pushing mechanism 7.
Preferably, the pushing mechanism 7 is located on the frame 1 on one side of the second box pressing mechanism 6 along the negative direction of the Y axis.
Preferably, the pushing mechanism 7 includes a pushing motor 17, a rotating block 19, a rotating shaft 23 and a pushing block 25, the driving end of the pushing motor 17 along one side of the positive direction of the Y axis is connected with the rotating block 19 through a second lead screw and a second lead screw nut 18, the rotating block 19 is connected with the rotating shaft 23, the rotating shaft 23 is mounted on the frame 1 through a bearing 22, and the bottom of the rotating shaft 23 is connected with the pushing block 25 through a connecting rod 24.
Preferably, the rotating block 19 is further provided with a sensing piece 20, and the frame 1 on one side of the rotating block 19 along the positive direction of the Y axis is provided with a sensor 21 matched with the sensing piece 20.
Preferably, the top of each of the first pressing block 10 and the second pressing block 15 is provided with a pressing tongue, and the bottom of each of the first pressing block 10 and the second pressing block 15 is provided with a gear.
Preferably, the first rack 11 moves in the Y-axis direction on a first slide groove 12 on the frame 1, and the second rack 14 moves in the Y-axis direction on a second slide groove 16 on the frame 1.
Preferably, the first protection cover 2 is arranged outside the first box pressing mechanism 3, and the second protection cover 5 is arranged outside the second box pressing mechanism 6.
Preferably, the first protective cover 2 is further provided with a handle 4 at a middle position along the Y-axis direction.
Preferably, the frame 1 is further provided with a rope groove 13 for placing the rope 9.
The utility model relates to a wafer box is with pressing box pushing equipment, after placing the wafer box, the work of drive pressure box motor 8 drives the first rack 11 of one side and removes along the negative direction of Y axle, and first briquetting 10 synchronous revolution pushes down below the wafer box. The power is transmitted to the second rack 14 at the other side through the pull rope 9 pressed in the pull rope groove 13, so that the second rack 14 moves along the positive direction of the Y axis, and the second rack 14 presses the other side of the wafer box.
In practice, if the wafer protrudes outward beyond the protruding sensing line, the second lead screw of the pushing motor 17 is pushed outward and pushes the protruding wafer to a normal position through the pushing block 25.
The utility model relates to a wafer box is with pressing box pushing equipment, can realize pressing the box processing to the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the structural arrangement of the material pushing mechanism, the material pushing processing can be carried out on the wafer displaced in the wafer box.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (8)

1. The wafer box pressing and pushing mechanism is characterized by comprising a rack (1), a first box pressing mechanism (3) and a second box pressing mechanism (6), wherein the first box pressing mechanism (3) is arranged on the rack (1) along one side of an X-axis negative direction, the second box pressing mechanism (6) is arranged on the rack (1) along one side of an X-axis positive direction, the first box pressing mechanism (3) comprises a box pressing motor (8), a first pressing block (10) and a first rack (11), the box pressing motor (8) is in driving connection with the first rack (11) along the Y-axis positive direction through a first lead screw and a first lead screw nut, the first rack (11) is meshed with the first pressing block (10) on the inner side, the second box pressing mechanism (6) comprises a second rack (14) and a second pressing block (15), second rack (14) and inboard second briquetting (15) meshing setting, first briquetting (10) are passed through stay cord (9) along one side of Y axle positive direction and are connected along one side of Y axle positive direction with second briquetting (15), still be provided with pushing equipment (7) on frame (1), pushing equipment (7) are including pushing away material motor (17), turning block (19), pivot (23) and ejector pad (25), push away material motor (17) and pass through second lead screw and second screw-nut (18) and be connected with turning block (19) along the drive end of Y axle positive direction one side, turning block (19) are connected with pivot (23), install in frame (1) through bearing (22) pivot (23), the bottom of pivot (23) is connected with ejector pad (25) through connecting rod (24).
2. The wafer cassette-pressing pusher mechanism according to claim 1, wherein the pusher mechanism (7) is provided on the frame (1) on the side of the second cassette-pressing mechanism (6) along the negative direction of the Y-axis.
3. The wafer cassette pushing mechanism as claimed in claim 1, wherein the rotating block (19) further has a sensing piece (20), and the frame (1) on one side of the rotating block (19) along the positive direction of the Y-axis is provided with a sensor (21) engaged with the sensing piece (20).
4. The wafer cassette pushing mechanism as claimed in claim 1, wherein the top of the first pressing block (10) and the top of the second pressing block (15) are both provided with a pressing tongue, and the bottom of the first pressing block (10) and the bottom of the second pressing block (15) are both provided with a gear.
5. The wafer cassette pushing mechanism according to claim 1, wherein the first rack (11) moves along the Y-axis direction on a first sliding groove (12) of the rack (1), and the second rack (14) moves along the Y-axis direction on a second sliding groove (16) of the rack (1).
6. The wafer cassette pressing and pushing mechanism as claimed in claim 1, wherein a first protection cover (2) is disposed outside the first cassette pressing mechanism (3), and a second protection cover (5) is disposed outside the second cassette pressing mechanism (6).
7. The wafer cassette pressing and pushing mechanism as claimed in claim 6, wherein a handle (4) is further provided on the first protection cover (2) at a middle position along the Y-axis direction.
8. The wafer cassette pressing and pushing mechanism as claimed in claim 1, wherein the frame (1) is further provided with a rope groove (13) for placing the rope (9).
CN202220918466.XU 2022-04-20 2022-04-20 Wafer box is with pressing box pushing equipment Active CN217114346U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220918466.XU CN217114346U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box pushing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220918466.XU CN217114346U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box pushing equipment

Publications (1)

Publication Number Publication Date
CN217114346U true CN217114346U (en) 2022-08-02

Family

ID=82584442

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220918466.XU Active CN217114346U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box pushing equipment

Country Status (1)

Country Link
CN (1) CN217114346U (en)

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