CN217114341U - Wafer box is with pressing box-packed putting - Google Patents

Wafer box is with pressing box-packed putting Download PDF

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Publication number
CN217114341U
CN217114341U CN202220916354.0U CN202220916354U CN217114341U CN 217114341 U CN217114341 U CN 217114341U CN 202220916354 U CN202220916354 U CN 202220916354U CN 217114341 U CN217114341 U CN 217114341U
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China
Prior art keywords
pressing
box
rack
wafer
frame
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CN202220916354.0U
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Chinese (zh)
Inventor
徐靖宇
林坚
王彭
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Honghu Suzhou Semiconductor Technology Co ltd
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Honghu Suzhou Semiconductor Technology Co ltd
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Abstract

The utility model relates to a wafer box is with pressing box-packed putting, press box mechanism including frame, first pressure box mechanism and second, be provided with first pressure box mechanism in the frame along one side of X axle negative direction, be provided with second pressure box mechanism in the frame along one side of X axle positive direction. The utility model relates to a wafer box is with pressing box device, can realize pressing the box processing to the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the drive structure setting of first pressure box mechanism and second pressure box mechanism interconnect, can reduce a driving motor's use, reduce cost.

Description

Wafer box is with pressing box-packed putting
Technical Field
The utility model relates to a wafer processing correlation technique field especially relates to a wafer box is with pressing box-packed putting.
Background
A wafer is a very expensive product and must be protected from damage during the placement process. The wafer cassette is a common device for holding wafers and sapphire in the industry. The wafer box generally needs to be pressed after being placed in place, so that the wafer box is prevented from generating position deviation and other conditions in the machining process, but the pressing operation in the prior art is generally realized by manually shifting the pressing block.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a wafer cassette pressing device, which has industrial application value.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the present invention provides a wafer cassette pressing device.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a wafer box pressing device comprises a frame, a first box pressing mechanism and a second box pressing mechanism, wherein the first box pressing mechanism is arranged on one side of the frame along the negative direction of an X axis, the second box pressing mechanism is arranged on one side of the frame along the positive direction of the X axis, the first box pressing mechanism comprises a box pressing driving motor, first pressure box activity briquetting and first rack, press box driving motor to pass through screw-nut coupling mechanism and first rack along the drive of Y axle positive direction one side and be connected the setting along the drive of Y axle direction, first rack and inboard first pressure box activity briquetting meshing setting, second pressure box mechanism includes that the second presses box activity briquetting and second rack, the second rack presses box activity briquetting meshing setting with inboard second, first pressure box activity briquetting is connected along one side of Y axle positive direction through stay cord and second pressure box activity briquetting.
As a further improvement, the first movable pressing block and the second movable pressing block are both provided with a retaining shell in the frame.
As a further improvement, the top of the box activity briquetting is all provided with the pressure tongue to first pressure box activity briquetting and second pressure box activity briquetting, and the bottom of box activity briquetting is all provided with the gear to first pressure box activity briquetting and second pressure.
As a further improvement of the present invention, the first rack moves along the Y axis direction in the first chute of the rack, and the second rack moves along the Y axis direction in the second chute of the rack.
As a further improvement, the first chute is provided with a first stop block along the rack on one side of the positive direction of the Y axis, and the second chute is provided with a second stop block along the rack on one side of the positive direction of the Y axis.
As a further improvement, the first outside of pressing the box mechanism is provided with first safety cover, and the second outside of pressing the box mechanism is provided with the second safety cover, and first safety cover and second safety cover are installed in the frame through construction bolt respectively.
As a further improvement of the utility model, the middle position along the Y-axis direction on the first protection cover is also provided with a handle.
As a further improvement of the utility model, a rope pulling groove for placing the pull rope is also arranged on the frame.
As a further improvement of the utility model, a rope pressing plate is arranged on the frame outside the rope pulling groove.
Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:
the utility model relates to a wafer box is with pressing box device, can realize pressing the box processing to the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the drive structure setting of first pressure box mechanism and second pressure box mechanism interconnect, can reduce a driving motor's use, reduce cost.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view of a wafer cassette pressing device according to the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1 with the first and second protective covers removed;
fig. 3 is a front view of fig. 2.
In the drawings, the meanings of the reference numerals are as follows.
1 frame 2 first protective cover
3 first box pressing mechanism 4 handle
5 second protective cover 6 second box pressing mechanism
7 mounting bolt 8 presses box driving motor
9 first pressure box movable pressing block 10 blocking shell
11 first chute 12 first rack
13 first stop block 14 second press box movable pressing block
15 second runner 16 second rack
17 second stop block 18 pull rope
19 rope pressing plate 20 rope pulling groove
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in figures 1 to 3 of the drawings,
a wafer box pressing device comprises a frame 1, a first box pressing mechanism 3 and a second box pressing mechanism 6, wherein the first box pressing mechanism 3 is arranged on one side of the frame 1 along the negative direction of an X axis, the second box pressing mechanism 6 is arranged on one side of the frame 1 along the positive direction of the X axis, the first box pressing mechanism 3 comprises a box pressing driving motor 8, first pressure box activity briquetting 9 and first rack 12, the drive end of pressing box driving motor 8 along Y axle positive direction one side passes through screw-nut coupling mechanism and first rack 12 and is connected the setting along the drive of Y axle direction, first rack 12 sets up with inboard first pressure box activity briquetting 9 meshing, second pressure box mechanism 6 includes that the second presses box activity briquetting 14 and second rack 16, second rack 16 and inboard second press box activity briquetting 14 meshing to set up, first pressure box activity briquetting 9 is connected along one side of Y axle positive direction through stay cord 18 and second pressure box activity briquetting 14 along one side of Y axle positive direction.
Preferably, the machine frame 1 outside the first pressing box movable pressing block 9 and the second pressing box movable pressing block 14 is provided with a blocking shell 10.
Preferably, the tops of the first pressing box movable pressing block 9 and the second pressing box movable pressing block 14 are both provided with pressing tongues, and the bottoms of the first pressing box movable pressing block 9 and the second pressing box movable pressing block 14 are both provided with gears.
Preferably, the first rack 12 moves in the Y-axis direction in the first slide groove 11 of the frame 1, and the second rack 16 moves in the Y-axis direction in the second slide groove 15 of the frame 1.
Preferably, the first slide groove 11 is provided with a first stopper 13 on the frame 1 on the side along the positive direction of the Y axis, and the second slide groove 15 is provided with a second stopper 17 on the frame 1 on the side along the positive direction of the Y axis.
Preferably, a first protective cover 2 is arranged on the outer side of the first box pressing mechanism 3, a second protective cover 5 is arranged on the outer side of the second box pressing mechanism 6, and the first protective cover 2 and the second protective cover 5 are respectively installed on the frame 1 through installation bolts 7.
Preferably, the first protection cover 2 is further provided with a handle 4 at an intermediate position along the Y-axis direction.
Preferably, the frame 1 is further provided with a rope groove 20 for placing the rope 18.
Preferably, a rope pressing plate 19 is further arranged on the frame 1 outside the rope pulling groove 20.
The utility model relates to a wafer box is with pressing box-packed putting, after placing the wafer box, press box driving motor 8 to begin work, drive the first rack 12 of one side and remove along the Y axle negative direction, first press box activity briquetting 9 synchronous revolution, push down below the wafer box. The power is transmitted to the second rack 16 on the other side through the draw cord 18 pressed in the draw cord groove 20, so that the second rack 16 moves along the positive direction of the Y axis, and the second rack 16 presses the other side of the wafer box.
The utility model relates to a wafer box is with pressing box device, can realize pressing the box processing to the wafer box fast automatically through first pressure box mechanism and second pressure box mechanism, easy operation, convenient to use; through the drive structure setting of first pressure box mechanism and second pressure box mechanism interconnect, can reduce a driving motor's use, reduce cost.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (9)

1. The wafer box pressing device is characterized by comprising a rack (1), a first box pressing mechanism (3) and a second box pressing mechanism (6), wherein the first box pressing mechanism (3) is arranged on the rack (1) along one side of an X-axis negative direction, the second box pressing mechanism (6) is arranged on the rack (1) along one side of an X-axis positive direction, the first box pressing mechanism (3) comprises a box pressing driving motor (8), a first box pressing movable pressing block (9) and a first rack (12), the box pressing driving motor (8) is in driving connection with the first rack (12) along the Y-axis positive direction through a screw nut connecting mechanism at the driving end of one side of the Y-axis positive direction, the first rack (12) is meshed with the first box pressing movable pressing block (9) on the inner side, the second box pressing mechanism (6) comprises a second box pressing movable pressing block (14) and a second rack (16), the second rack (16) and the second pressing box movable pressing block (14) on the inner side are meshed, and the first pressing box movable pressing block (9) is connected with the second pressing box movable pressing block (14) on one side in the positive direction of the Y axis through a pull rope (18) on one side in the positive direction of the Y axis.
2. The wafer cassette pressing device according to claim 1, wherein the rack (1) is provided with a blocking shell (10) outside the first pressing movable pressing block (9) and the second pressing movable pressing block (14).
3. The wafer cassette pressing device as claimed in claim 1, wherein the first cassette pressing movable pressing block (9) and the second cassette pressing movable pressing block (14) are provided with pressing tongues at the top, and the first cassette pressing movable pressing block (9) and the second cassette pressing movable pressing block (14) are provided with gears at the bottom.
4. A wafer cassette clamping device according to claim 1, wherein said first rack (12) moves in a first slide groove (11) of said frame (1) in the Y-axis direction, and said second rack (16) moves in a second slide groove (15) of said frame (1) in the Y-axis direction.
5. The wafer cassette pressing apparatus according to claim 4, wherein the first slide groove (11) is provided with a first stopper (13) on the frame (1) on the side of the positive Y-axis direction, and the second slide groove (15) is provided with a second stopper (17) on the frame (1) on the side of the positive Y-axis direction.
6. A wafer cassette pressing apparatus as claimed in claim 1, wherein a first protection cover (2) is provided on an outer side of the first cassette pressing mechanism (3), a second protection cover (5) is provided on an outer side of the second cassette pressing mechanism (6), and the first protection cover (2) and the second protection cover (5) are respectively mounted on the frame (1) by means of mounting bolts (7).
7. The wafer cassette clamping device according to claim 6, wherein a handle (4) is further provided at an intermediate position of the first protective cover (2) along the Y-axis direction.
8. The wafer cassette pressing device according to claim 1, wherein the frame (1) is further provided with a rope groove (20) for placing the rope (18).
9. The wafer box pressing device according to claim 8, wherein a rope pressing plate (19) is further provided on the frame (1) outside the rope pulling groove (20).
CN202220916354.0U 2022-04-20 2022-04-20 Wafer box is with pressing box-packed putting Active CN217114341U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220916354.0U CN217114341U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box-packed putting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220916354.0U CN217114341U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box-packed putting

Publications (1)

Publication Number Publication Date
CN217114341U true CN217114341U (en) 2022-08-02

Family

ID=82583602

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220916354.0U Active CN217114341U (en) 2022-04-20 2022-04-20 Wafer box is with pressing box-packed putting

Country Status (1)

Country Link
CN (1) CN217114341U (en)

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