CN217111314U

CN217111314U - Mechanism for improving air tightness of furnace tube of diffusion oxidation annealing furnace

Info

Publication number: CN217111314U
Application number: CN202122238519.1U
Authority: CN
Inventors: 谌宇豪; 李多伟
Original assignee: Trina Solar Suqian Photoelectric Co ltd
Current assignee: Trina Solar Suqian Photoelectric Co ltd
Priority date: 2021-09-15
Filing date: 2021-09-15
Publication date: 2022-08-02
Anticipated expiration: 2031-09-15

Abstract

The utility model discloses an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism relates to boiler tube gas tightness mechanism technical field, including sealing washer main part, extrusion layer and stainless steel gasket, the inboard of sealing washer main part is provided with the extrusion layer, the bottom fixed mounting on extrusion layer has stainless steel gasket, the inside on extrusion layer is provided with extrusion mechanism. The utility model discloses a sealing washer main part cup joints on annealing stove boiler tube, then the cooperation extrusion force that cup joints, use on the extrusion pad, then compress by the extrusion pad atress, make the elasticity pad press bag piece and rubber pad, the resilience force that produces when utilizing the extrusion and the elasticity of the inside atmospheric pressure of bag piece, thereby the extrusion layer is pushed back, increase the extrusion force on extrusion layer, improve the leakproofness of sealing washer, solved because the pressure of sealing washer and junction is not enough, lead to the relatively poor problem of sealing performance of the boiler tube sealing washer that sinks, be favorable to the sealing washer to increase the extrusion force, thereby improve the leakproofness of sealing washer.

Description

Mechanism for improving air tightness of furnace tube of diffusion oxidation annealing furnace

Technical Field

The utility model relates to a boiler tube gas tightness mechanism technical field, concretely relates to improve diffusion oxidation annealing stove boiler tube gas tightness mechanism.

Background

When the diffusion process is operated normally, the weight of the whole boat (210 quartz boat plus 1200 210 silicon wafers) in the furnace tube exceeds the standard, the furnace tube sinks, the sealing ring is extruded and deformed to cause poor air tightness and air leakage, so that the normal process cannot be performed, or the integral deviation of the sheet resistance is isolated after the process is finished, the furnace mouth 8.4mm sealing ring needs to be frequently replaced after the test service cycle is about 20 days, and the time-consuming parts cannot ensure the mass production of workshops.

The following problems exist in the prior art:

1. the sealing performance of the furnace tube sinking sealing ring is poor due to insufficient pressure of the sealing ring and the joint, and the sealing ring is easy to deform to cause the air leakage problem;

2. the intensity of sealing washer is lower, and long-time use leads to the sealing washer leak to appear easily, causes the sealing washer gas leakage to influence the problem of board stability.

SUMMERY OF THE UTILITY MODEL

The utility model provides a mechanism for improving the furnace tube air tightness of a diffusion oxidation annealing furnace, which aims to have the function of increasing the sealing performance and solve the problems that the sealing performance of a furnace tube sinking sealing ring is poor and the sealing ring is easy to deform to cause air leakage due to insufficient pressure of the sealing ring and a joint; wherein another kind of purpose is lower in order to solve the intensity of sealing washer, and long-time use leads to the sealing washer to appear the leak easily, causes the sealing washer gas leakage to influence the problem of board stability, in order to reach the increase strength, improve life's effect.

In order to solve the technical problem, the utility model discloses the technical scheme who adopts is:

the utility model provides an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism, includes sealing washer main part, extrusion layer and stainless steel gasket, the inboard of sealing washer main part is provided with the extrusion layer, the bottom fixed mounting on extrusion layer has the stainless steel gasket, the inside on extrusion layer is provided with extrusion mechanism, the inside fixed mounting of sealing washer main part has the strengthening layer.

The extrusion mechanism comprises a fixing groove, and an extrusion pad is fixedly mounted on the inner side of the fixing groove.

The inside fixed mounting of strengthening layer has the buffer layer, the side of buffer layer is provided with the press pad.

The utility model discloses technical scheme's further improvement lies in: the top fixed mounting of extrusion pad has the clutch blocks, the bottom fixed mounting of clutch blocks has the mounting pad.

The utility model discloses technical scheme's further improvement lies in: the bottom of the extrusion pad is fixedly provided with a rebound column, and the bottom of the rebound column is fixedly provided with a bottom pad.

The utility model discloses technical scheme's further improvement lies in: the inner part of the extrusion pad is provided with an elastic pad, the bottom of the elastic pad is fixedly provided with an air bag block, and the bottom of the air bag block is fixedly provided with a rubber pad.

The utility model discloses technical scheme's further improvement lies in: the inside fixed mounting of buffer layer has the elasticity post, the side fixed mounting of elasticity post has the blotter.

The utility model discloses technical scheme's further improvement lies in: the inside fixed mounting of press pad has the fluororubber layer, the bottom fixed mounting of fluororubber layer has the fibre reinforced plastic layer.

The utility model discloses technical scheme's further improvement lies in: the side of extrusion layer is provided with the connecting block, the outside setting of connecting block is in the inboard of fixed slot.

Owing to adopted above-mentioned technical scheme, the utility model discloses relative prior art, the technological progress who gains is:

1. the utility model provides an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism, cup joint on the stove boiler tube through the sealing washer main part, then the extrusion force that the cooperation cup jointed, use on the extrusion pad, then compress by the extrusion pad atress, make the elasticity pad press bag piece and rubber pad of calming anger, the resilience force that produces when utilizing the extrusion and the elasticity of the inside atmospheric pressure of bag piece, thereby the extrusion layer is pushed back, increase the extrusion force on extrusion layer, improve the leakproofness of sealing washer, solved because the pressure of sealing washer and junction is not enough, lead to the boiler tube to sink the relatively poor problem of sealing performance of sealing washer, be favorable to the sealing washer to increase the extrusion force, thereby improve the leakproofness of sealing washer.

2. The utility model provides an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism, extrude through buffer layer atress, it mutually supports to drive elastic column and cushion, utilize the elasticity of elastic column and the compliance of cushion, reach the function of buffering effort, thereby increase the intensity of sealing washer, then by the pliability on fluororubber layer and the high strength on fibre reinforcement plastic layer, the characteristic of high elasticity, further increase the intensity of sealing washer main part, thereby improve the life of sealing washer, the intensity of having solved the sealing washer is lower, long-time use, lead to the problem that the leak appears in the sealing washer easily, be favorable to increasing the intensity of sealing washer, thereby increase the life of sealing washer, the practicality of improvement sealing washer.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the structure of the extrusion layer of the present invention;

FIG. 3 is a schematic structural view of the extruding mechanism of the present invention;

FIG. 4 is a schematic view of the structure of the squeeze pad of the present invention;

FIG. 5 is a schematic view of the structure of the reinforced layer of the present invention;

fig. 6 is a schematic view of the pressing pad of the present invention.

In the figure: 1. a seal ring main body; 11. a strengthening layer; 12. a buffer layer; 121. an elastic column; 122. a cushion pad; 13. a pressing pad; 131. a fluororubber layer; 132. a fiber reinforced plastic layer; 2. extruding the layer; 20. connecting blocks; 21. an extrusion mechanism; 22. fixing grooves; 23. pressing the cushion; 231. a friction block; 232. a rebound post; 233. a bottom pad; 234. an elastic pad; 235. an air bag block; 3. a stainless steel gasket.

Detailed Description

The present invention will be described in further detail with reference to the following examples:

example 1

As shown in fig. 1-6, the utility model provides an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism, including sealing washer main part 1, extrusion layer 2 and stainless steel gasket 3, the inboard of sealing washer main part 1 is provided with extrusion layer 2, the bottom fixed mounting of extrusion layer 2 has stainless steel gasket 3, the inside of extrusion layer 2 is provided with extrusion mechanism 21, the inside fixed mounting of sealing washer main part 1 has strengthening layer 11, extrusion mechanism 21 includes fixed slot 22, the inboard fixed mounting of fixed slot 22 has extrusion pad 23, the bottom fixed mounting of extrusion pad 23 has rebound post 232, the bottom fixed mounting of rebound post 232 has base wad 233, the inside of extrusion pad 23 is provided with elastic pad 234, elastic pad 234 bottom fixed mounting has gasbag piece 235, the bottom fixed mounting of gasbag piece 235 has the rubber pad.

In this embodiment, cup joint on the annealing stove boiler tube through sealing washer main part 1, then the cooperation extrusion force that cup joints, use on extrusion pad 23, then compress by extrusion pad 23 atress, make cushion 234 press gasbag piece 235 and rubber pad, the resilience force that produces and the elasticity of the inside atmospheric pressure of gasbag piece 235 when utilizing the extrusion, thereby backstep extrusion layer 2, increase extrusion layer 2's extrusion force, improve the leakproofness of sealing washer, press rebound post 232 by extrusion pad 23 again, utilize elasticity to increase the resilience force, further improve extrusion layer 2's extrusion force, be favorable to the sealing washer to increase the leakproofness.

Example 2

As shown in fig. 1-6, on the basis of embodiment 1, the utility model provides a technical solution: preferably, the top of the pressing pad 23 is fixedly provided with a friction block 231, the bottom of the friction block 231 is fixedly provided with a mounting pad, the side surface of the pressing layer 2 is provided with a connecting block 20, and the outer side of the connecting block 20 is arranged at the inner side of the fixing groove 22.

In this embodiment, drive connecting block 20 joint in the inside of fixed slot 22 through extrusion layer 2, then cooperate the rubbing block 231 and the 20 outside mutual contact friction of connecting block to increase frictional resistance, make extrusion layer 2 fixed joint in the inside of sealing washer main part 1, be favorable to increasing the fixity ability of sealing washer.

Example 3

As shown in fig. 1-6, on the basis of embodiment 1, the utility model provides a technical solution: preferably, the buffer layer 12 is fixedly mounted inside the reinforcing layer 11, the pressing pad 13 is disposed on a side surface of the buffer layer 12, the elastic column 121 is fixedly mounted inside the buffer layer 12, the cushion pad 122 is fixedly mounted on a side surface of the elastic column 121, the fluororubber layer 131 is fixedly mounted inside the pressing pad 13, and the fiber reinforced plastic layer 132 is fixedly mounted at a bottom of the fluororubber layer 131.

In this embodiment, the buffer layer 12 is pressed to drive the elastic column 121 and the buffer pad 122 to cooperate with each other, and the elastic force of the elastic column 121 and the flexibility of the buffer pad 122 are utilized to achieve the function of buffering the acting force, so as to increase the strength of the seal ring, and then the flexibility of the fluororubber layer 131 and the characteristics of high strength and high elasticity of the fiber reinforced plastic layer 132 further increase the strength of the seal ring main body 1, thereby prolonging the service life of the seal ring.

The working principle of the mechanism for improving the gas tightness of the furnace tube of the diffusion oxidation annealing furnace is described in detail below.

As shown in fig. 1-6, the sealing ring main body 1 is sleeved on the furnace tube of the annealing furnace, then the extrusion force of the sleeving is matched and applied to the extrusion pad 23, then the extrusion pad 23 is compressed by the stress, so that the elastic pad 234 presses the air bag block 235 and the rubber pad, the resilience generated during the extrusion and the elasticity of the air pressure in the air bag block 235 are utilized, thereby the extrusion layer 2 is pushed back, the extrusion force of the extrusion layer 2 is increased, the sealing performance of the sealing ring is improved, the elastic column 232 is pressed by the extrusion pad 23, the resilience is increased by the elasticity, the extrusion force of the extrusion layer 2 is further improved, then the buffer layer 12 is extruded by the stress, the elastic column 121 and the buffer pad 122 are driven to be matched with each other, the function of buffering the action force is achieved by the elasticity of the elastic column 121 and the flexibility of the buffer pad 122, thereby the strength of the sealing ring is increased, and then the flexibility of the fluorine rubber layer 131 and the high-strength plastic layer 132 are matched, The high elasticity further increases the strength of the gasket body 1.

The present invention has been described in detail with reference to the above general description, but it will be apparent to one of ordinary skill in the art that modifications and improvements can be made to the invention. Therefore, modifications or improvements without departing from the spirit of the invention are within the scope of the invention.

Claims

1. The utility model provides an improve diffusion oxidation annealing stove boiler tube gas tightness mechanism, includes sealing washer main part (1), extrusion layer (2) and stainless steel gasket (3), the inboard of sealing washer main part (1) is provided with extrusion layer (2), the bottom fixed mounting on extrusion layer (2) has stainless steel gasket (3), its characterized in that: an extrusion mechanism (21) is arranged in the extrusion layer (2), and a strengthening layer (11) is fixedly arranged in the sealing ring main body (1);

the extrusion mechanism (21) comprises a fixing groove (22), and an extrusion pad (23) is fixedly mounted on the inner side of the fixing groove (22);

the reinforced layer (11) is fixedly provided with a buffer layer (12) inside, and the side surface of the buffer layer (12) is provided with a pressing pad (13).

2. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: the top fixed mounting of extrusion pad (23) has clutch blocks (231), the bottom fixed mounting of clutch blocks (231) has the mounting pad.

3. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: the bottom of extrusion pad (23) is fixed mounting has rebound post (232), the bottom fixed mounting of rebound post (232) has heelpiece (233).

4. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: the inside of extrusion pad (23) is provided with cushion (234), cushion (234) bottom fixed mounting has air bag piece (235), the bottom fixed mounting of air bag piece (235) has the rubber pad.

5. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: an elastic column (121) is fixedly mounted inside the buffer layer (12), and a cushion pad (122) is fixedly mounted on the side face of the elastic column (121).

6. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: the interior fixed mounting of pressing pad (13) has fluororubber layer (131), the bottom fixed mounting of fluororubber layer (131) has fibre reinforced plastic layer (132).

7. The mechanism for improving the airtightness of the furnace tube of the diffusion oxidation annealing furnace according to claim 1, wherein: the side of the extrusion layer (2) is provided with a connecting block (20), and the outer side of the connecting block (20) is arranged on the inner side of the fixing groove (22).