CN217110475U - Thermal insulation quartz fiber soft collar - Google Patents

Abstract

The application relates to a soft neck of heat preservation quartz fiber, it includes: the inner layer, the outer layer, the middle layer and the partition layer; the inner layer and the outer layer are sewn into a cylindrical structure through sewing threads; the middle layer is provided with a plurality of layers and is positioned between the inner layer and the outer layer, and the middle layer is made of quartz fiber cotton; an isolating layer is arranged between every two adjacent intermediate layers; the middle layer and the partition layer are both sewed on the inner layer and the outer layer through sewing threads. The utility model discloses compare and have higher structural strength in current product, owing to provide quartz fiber acupuncture felt and support as intensity, it has higher laminating degree and structural toughness, because the existence on partition layer, the cotton homogeneity of laying of quartz fiber is better, consequently, the effect that keeps warm is better, more be favorable to semiconductor manufacturing, be difficult for appearing collapsing and warping when filling the diffusion furnace fire door, it is good to fill laminating degree, long service life, can effectively promote furnace body heat preservation effect, promote the semiconductor processing quality.

Description

Thermal insulation quartz fiber soft collar

Technical Field

The application relates to the field of semiconductor manufacturing, in particular to a heat-preservation quartz fiber soft collar.

Background

The heat preservation soft collar is a heat preservation sheath applied to the field of semiconductor manufacturing, is used at a furnace mouth of a diffusion furnace, plays a role in heat preservation for the diffusion furnace, and aims to achieve a high heat preservation effect, and is safe and convenient to use, and the heat preservation material adopted in the heat preservation soft collar can meet the following requirements:

(1) the furnace body has good sealing property and heat insulation property, when the sealing property and the heat insulation property of the heat insulation material are poor, the heat of the furnace body is easy to dissipate, so that the temperature in the furnace body is uneven, energy is wasted, the diffusion condition of a substrate is influenced, and the quality of a semiconductor product is influenced;

(2) no pollution: the product is not polluted, and the health of the staff is not affected;

(3) the installation is convenient: the shutdown replacement time is reduced, and the production efficiency is improved;

(4) the service life of the heat insulation material should be as long as possible.

In the correlation technique, the quartz cotton is directly filled in the quartz soft collar, the quartz cotton is soft, the supporting effect is poor, and the quartz cotton is easy to generate local collapse and deformation when being used for a long time, so that the heat preservation effect is reduced, and the use is influenced.

Disclosure of Invention

The embodiment of the application provides a soft neck of heat preservation quartz fiber to quartz is directly filled to solve among the correlation technique the inside quartz cotton of soft neck, and the supporting effect is poor, and inside quartz cotton produces local collapse and deformation easily during long time use, causes the heat preservation effect to descend, influences the problem of using.

In order to achieve the above object, the utility model provides a following technical scheme: an insulating quartz fiber soft collar, comprising: the inner layer, the outer layer, the middle layer and the partition layer; the inner layer and the outer layer are sewn into a cylindrical structure through sewing threads, the inner layer and the outer layer are both made of quartz fiber cloth, and the quartz fiber cloth is made of quartz fiber yarns with epoxy type impregnating compounds soaked on the surfaces; the middle layer is provided with a plurality of layers and is positioned between the inner layer and the outer layer, and the middle layer is made of quartz fiber cotton; a partition layer is arranged between every two adjacent intermediate layers and is a quartz fiber needled felt; the middle layer and the partition layer are both sewed on the inner layer and the outer layer through sewing threads; the sewing thread is quartz fiber sewing thread.

In some embodiments, the quartz fiber sewing thread is made of a quartz fiber yarn coated with polytetrafluoroethylene emulsion on the surface.

In some embodiments, the thickness of the quartz fiber cloth is 0.2 to 1.0 mm.

In some embodiments, the thickness of the quartz fiber cloth is 0.5 to 0.7 mm.

In some embodiments, the quartz cellucotton has a diameter of 3 to 11 microns.

In some embodiments, the quartz cellucotton has a diameter of 5 to 9 microns.

In some embodiments, the thickness of the single layer of the quartz fiber cotton is 5-30 mm.

In some embodiments, the silica fiber needled felt has a thickness of 3 to 10 millimeters.

In some embodiments, the silica fiber needled felt is 5 millimeters thick.

In some embodiments, the surface structure of the quartz fiber cloth is satin, twill, or plain.

The beneficial effect that technical scheme that this application provided brought includes:

the embodiment of the application provides a soft neck of heat preservation quartzy, compare in current product, the utility model discloses soft neck of heat preservation quartzy has higher structural strength, owing to provide quartz fiber acupuncture felt and support as intensity, it possesses higher laminating degree and structural toughness, because the existence on partition layer, the cotton homogeneity of laying of quartz fiber is better, consequently, the heat preservation effect is better, more be favorable to semiconductor manufacturing, be difficult for appearing collapsing and warping when filling the diffusion furnace fire door, it is good to fill laminating degree, long service life, can effectively promote furnace body heat preservation effect, promote the semiconductor processing quality.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic overall structure diagram provided in an embodiment of the present application;

fig. 2 is a top view of fig. 1.

In the figure: 1. an inner layer; 2. an intermediate layer; 3. sewing thread; 4. a partition layer; 5. and (4) an outer layer.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making creative efforts shall fall within the protection scope of the present application.

Referring to fig. 1 to 2, an embodiment of the present application provides an insulation quartz fiber soft collar, which includes: an inner layer 1, an outer layer 5, an intermediate layer 2 and a partition layer 4; the inner layer 1 and the outer layer 5 are sewn into a cylindrical structure through sewing threads 3, the inner layer 1 and the outer layer 5 are both made of quartz fiber cloth, and the quartz fiber cloth is made of quartz fiber yarns with epoxy type impregnating compounds soaked on the surfaces; the middle layer 2 is provided with a plurality of layers, and the middle layer 2 is quartz fiber cotton; a partition layer 4 is arranged between every two adjacent intermediate layers 2, and the partition layer 4 is a quartz fiber needled felt; the middle layer 2 and the partition layer 4 are sewed on the inner layer 1 and the outer layer 5 through sewing threads 3; the sewing thread 3 is a quartz fiber sewing thread.

Quartz fiber cloth adopts continuous quartz fiber yarn to weave through arrow shaft loom and makes, and the surface of quartz fiber yarn is soaked with epoxy type treating compound, and the content of treating compound is 1.0 +/-0.2%, and quartz fiber sewing thread adopts continuous quartz fiber yarn to make through the coiling of coiling machine, compares in current product, the utility model discloses heat preservation quartz soft collar has higher structural strength, owing to provide quartz fiber acupuncture felt and support as intensity, it has higher laminating degree and structural toughness, because the existence of partition layer 4, the cotton homogeneity of laying of quartz fiber is better, therefore the heat preservation effect is better, more is favorable to semiconductor manufacturing, is difficult for appearing collapsing and warping when filling diffusion furnace fire door, fills laminating degree good, long service life, can effectively promote furnace body heat preservation effect, promotes the semiconductor processing quality.

The quartz fiber sewing thread is made of quartz fiber yarns coated with polytetrafluoroethylene emulsion on the surface.

The surface of the quartz fiber yarn is coated with polytetrafluoroethylene emulsion, the quartz fiber yarn is subjected to certain tension by a winding machine in the winding process, and the content of combustible substances in the quartz fiber sewing thread is 4.0 +/-1.0%.

The diameter of the quartz cellucotton is 3-11 microns, preferably 5-9 microns, optimally 7 microns, and the single-layer thickness of the quartz cellucotton is 5-30 mm, optimally 10 mm.

The thickness of the quartz fiber cloth is 0.2-1.0 mm, the thickness of the quartz fiber cloth is preferably 0.5-0.7 mm, and is optimally 0.5 mm, and the surface structure is plain weave, twill weave or satin weave.

The quartz fiber needled felt takes quartz glass fibers as a raw material, the carded chopped quartz fiber felt is needled by using the needling needles, fibers among the quartz fibers of the felt layer and between the quartz fibers of the felt layer and the reinforced quartz fiber base cloth are mutually entangled by using a mechanical method, and the fiber web is reinforced to form the felt-shaped non-woven cloth, wherein the thickness of the quartz fiber needled felt is 3-10 mm, and the optimal thickness is 5 mm.

In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A heat preservation quartz fiber soft collar is characterized in that the heat preservation quartz fiber soft collar comprises:

an inner layer (1);

the outer layer (5), the inner layer (1) and the outer layer (5) are sewn into a cylindrical structure through sewing threads (3), the inner layer (1) and the outer layer (5) are both made of quartz fiber cloth, and the quartz fiber cloth is made of quartz fiber yarns with epoxy type impregnating compounds soaked on the surfaces;

the middle layer (2) is provided with a plurality of layers and is positioned between the inner layer (1) and the outer layer (5), and the middle layer (2) is quartz fiber cotton;

the partition layer (4) is arranged between every two adjacent intermediate layers (2), and the partition layer (4) is a quartz fiber needled felt;

the middle layer (2) and the partition layer (4) are both sewed on the inner layer (1) and the outer layer (5) through sewing threads (3);

the sewing thread (3) is a quartz fiber sewing thread.

2. The thermal insulation quartz fiber soft collar as claimed in claim 1, wherein: the quartz fiber sewing thread is made of quartz fiber yarns coated with polytetrafluoroethylene emulsion on the surface.

3. The thermal insulation quartz fiber soft collar as claimed in claim 1, wherein: the thickness of the quartz fiber cloth is 0.2-1.0 mm.

4. The thermal insulation quartz fiber soft collar according to claim 3, wherein: the thickness of the quartz fiber cloth is 0.5-0.7 mm.

5. The thermal insulation quartz fiber soft collar as claimed in claim 1, wherein:

the diameter of the quartz fiber cotton is 3-11 micrometers.

6. The thermal insulation quartz fiber soft collar according to claim 5, wherein: the diameter of the quartz cellucotton is 5-9 microns.

7. The thermal insulation quartz fiber soft collar according to claim 5, wherein:

the thickness of the single layer of the quartz cellucotton is 5-30 mm.

8. The thermal insulation quartz fiber soft collar as claimed in claim 1, wherein: the thickness of the quartz fiber needled felt is 3-10 mm.

9. The thermal insulation quartz fiber soft collar according to claim 8, wherein: the thickness of the quartz fiber needled felt was 5 mm.

10. The thermal insulation quartz fiber soft collar as claimed in claim 1, wherein: the surface structure of the quartz fiber cloth is satin, twill or plain weave.

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