CN217097244U - Plane target fixing device - Google Patents
Plane target fixing device Download PDFInfo
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- CN217097244U CN217097244U CN202220489239.XU CN202220489239U CN217097244U CN 217097244 U CN217097244 U CN 217097244U CN 202220489239 U CN202220489239 U CN 202220489239U CN 217097244 U CN217097244 U CN 217097244U
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- vacuum
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Abstract
The utility model discloses a plane target fixing device aims at can the quick fixation plane target, reduces the probability that plane target damaged, its technical scheme: the utility model provides a plane target fixing device, includes electromagnet, still includes the vacuum chuck that a plurality of magnetic adsorption on electromagnet, vacuum chuck's bottom surface laminating is on electromagnet, vacuum chuck's top surface is equipped with a plurality of bleeder vent, bleeder vent and peripheral hardware vacuum pump connection for adsorb plane target, belong to target production technical field.
Description
Technical Field
The utility model belongs to the technical field of the target production, more specifically, relate to a plane target fixing device.
Background
With the large-scale development of LCD and photo-excited display, the demand for large-area ITO target material is increasing. The planar target material occupies a leading position in both international and domestic markets, so that the improvement of the production efficiency of the planar target material is particularly important. The conventional plane target material is ground on the plane, and the side edges of the conventional plane target material are ground, for large-area plane target materials and special-shaped plane target materials, the conventional clamping method comprises a bonding method, a cold pressing method and the like, and the conventional machining method and the conventional clamping device are adopted for machining, so that the clamping time is long, the target material is easy to crack, and the problem that the bonding material is difficult to clean in the subsequent process is solved.
For example, CN213470554U discloses a high-purity aluminum planar target grinding device, which comprises a workbench, wherein an electromagnetic chuck and a grinding assembly are arranged on the workbench, the grinding assembly is located on one side of the electromagnetic chuck, at least two positioning pieces are arranged on the electromagnetic chuck, each positioning piece comprises an iron block and an aluminum block which are fixedly connected, the electromagnetic chuck is in adsorption fit with the iron block through electromagnetic force, and the aluminum block is used for abutting against the side wall of the high-purity aluminum planar target.
The grinding device fixes the planar target material through the positioning piece, and the electromagnetic chuck is used for adsorbing the positioning piece, so that the convenience is improved; however, the positioning element may contact the side of the planar target, which may result in the failure to polish the side of the planar target, and the positioning element may contact the corner of the target, which may cause the planar target to collapse and be discarded.
SUMMERY OF THE UTILITY MODEL
The main object of the utility model is to provide a plane target fixing device, aim at can fix the plane target fast, reduce the probability that plane target damaged.
According to the utility model discloses an aspect provides a plane target fixing device, including electromagnet, but still include the vacuum chuck of a plurality of magnetic adsorption on electromagnet, vacuum chuck's bottom surface laminating is on electromagnet, vacuum chuck's top surface is equipped with a plurality of aspirating hole, aspirating hole and peripheral hardware vacuum pump connection for adsorb the plane target.
In the planar target fixing device, the vacuum chuck includes a first fixing block magnetically adsorbed on the electromagnetic chuck, and a vacuum seat fixed on the first fixing block, and the suction hole is formed in the top surface of the vacuum seat.
In the planar target fixing device, the top surface of the vacuum seat is provided with the sealing rubber ring, the sealing rubber ring encloses the air exhaust hole, and the sealing rubber ring protrudes upwards to support the planar target.
In the planar target fixing device, the top surface of the vacuum seat is further provided with a plurality of bosses which protrude upwards and are used for supporting the planar target, and the protruding height of each boss is smaller than or equal to that of the sealing rubber ring.
In the planar target fixing device, the bosses are all arranged in the sealing rubber ring.
In the above planar target fixing device, the boss is a circular boss.
In the planar target fixing device, a cavity is arranged in the vacuum seat, at least one through hole communicated with the cavity is arranged on the side surface of the vacuum seat, the air suction hole is communicated with the cavity, and the through hole is connected with an external vacuum pump.
In the planar target fixing device, the electromagnetic chuck is provided with at least two cylinders, the bottom of each cylinder is provided with a second fixing block which can be magnetically adsorbed on the electromagnetic chuck, piston rods of the cylinders are located at the top and can stretch up and down, and the piston rods of the two cylinders are respectively used for positioning two adjacent sides of the planar target.
In the planar target fixing device, the vacuum chucks are arranged in an array, and the distance between two adjacent vacuum chucks does not exceed 350 mm.
In the above planar target fixing device, the distance between the vacuum chuck close to the side edge of the planar target and the side edge is 8-120 mm.
The utility model discloses a technical scheme has following advantage or one of beneficial effect at least among the above-mentioned technical scheme:
the utility model discloses set up vacuum chuck on electromagnet and fix the plane target, then do not need the setting element to fix the plane target, make the side of plane target expose, make things convenient for the side to polish, and vacuum chuck can the magnetic adsorption on electromagnet, can be according to the not unidimensional change vacuum chuck position on electromagnet of plane target, ensure that vacuum chuck can give the sufficient holding power of plane target.
Drawings
The present invention will be further described with reference to the accompanying drawings and examples;
fig. 1 is a plan view of embodiment 1 of the present invention;
fig. 2 is a front view of embodiment 1 of the present invention;
fig. 3 is a plan view of a vacuum chuck according to embodiment 1 of the present invention;
fig. 4 is a front view of the vacuum chuck according to embodiment 1 of the present invention;
fig. 5 is a plan view of the planar target fixed according to embodiment 1 of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
The following disclosure provides many different embodiments or examples for implementing different aspects of the invention.
Example 1
Referring to fig. 1 to 5, in an embodiment of the present invention, a planar target fixing device includes an electromagnetic chuck 1, and further includes a plurality of vacuum chucks 2 capable of being magnetically adsorbed on the electromagnetic chuck 1, a bottom surface of each vacuum chuck 2 is attached to the electromagnetic chuck 1, a top surface of each vacuum chuck 2 is provided with a plurality of air exhaust holes 21, each air exhaust hole 21 is connected to an external vacuum pump, and each air exhaust hole 21 generates a suction force under the operation of the external vacuum pump, so as to adsorb a planar target;
the vacuum chuck 2 is arranged on the electromagnetic chuck 1 to fix the planar target, so that the planar target is fixed without a positioning piece, the side edge of the planar target can be exposed, the side edge can be conveniently polished, the vacuum chuck 2 can be magnetically adsorbed on the electromagnetic chuck 1, the position of the vacuum chuck 2 on the electromagnetic chuck 1 can be changed according to different sizes of the planar target, and the vacuum chuck 2 can be ensured to give enough supporting force to the planar target;
when the device is used, the vacuum chuck 2 is placed on the electromagnetic chuck 1 which is not started, then the position of the vacuum chuck 2 is distributed according to the size of the plane target material, then the electromagnetic chuck 1 is started to fix the vacuum chuck 2, then the plane target material is placed, and then the vacuum chuck 2 is started to adsorb the plane target material.
Specifically, the vacuum chuck 2 comprises a first fixing block 22 capable of being magnetically adsorbed on the electromagnetic chuck 1 and a vacuum seat 23 fixed on the first fixing block 22, and the suction holes 21 are arranged on the top surface of the vacuum seat 23; the vacuum seat 23 can be adsorbed on the electromagnetic chuck 1 through the first fixing block 22, so that the recognition is convenient;
in a specific embodiment, the first fixing block 22 is made of iron or iron alloy; the vacuum seat 23 may be welded to the first fixing block 22, or may be fixed to the first fixing block 22 by using a connector.
Preferably, the edge of the first fixing block 22 may be provided with a plurality of U-shaped open grooves, and when the electromagnetic chuck 1 is not provided, a mounting hole or a mounting groove may be provided on the worktable and connected using a bolt.
Preferably, a sealing rubber ring 24 is arranged on the periphery of the top surface of the vacuum seat 23, the sealing rubber ring 24 encloses the pumping hole 21, and the sealing rubber ring 24 protrudes upwards to support the planar target; when the sealing rubber ring 24 is in contact with the planar target, a sealed chamber is formed in the area encircled by the sealing rubber ring 24, at this time, the air suction hole 21 sucks air under the operation of the externally arranged vacuum pump, so that the sealed chamber is in a vacuum state to adsorb the planar target, and at this time, the sealing rubber ring 24 also plays a role in supporting the planar target.
When the negative pressure of the closed chamber is high, the planar target can apply high pressure to the sealing rubber ring 24, so that the sealing rubber ring 24 deforms seriously and is easy to incline or lose efficacy, and the like, therefore, the top surface of the vacuum seat 23 is also provided with a plurality of bosses (not shown in the figure) protruding upwards and used for supporting the planar target, and the protruding height of each boss is less than or equal to that of the sealing rubber ring 24; the plane target material can touch the boss when extruding the sealing rubber ring 24, and the plane target material can be kept horizontal under the support of the boss, so that the sealing rubber ring can not be excessively extruded.
Preferably, the bosses are all arranged in the sealing rubber ring 24, so that the position of the planar target corresponding to the sealing cavity can be prevented from being suspended, and the planar target has more stable supporting capability.
As a concrete manifestation of the embodiment, the boss is a circular boss.
In a specific embodiment, a cavity is arranged in the vacuum seat 23, at least one through hole 25 communicated with the cavity is arranged on the side surface of the vacuum seat 23, the air suction hole 21 is communicated with the cavity, and the through hole 25 is connected with an external vacuum pump; because the number of the air exhaust holes 21 is generally multiple, the through hole 25 and the cavity are designed for facilitating the connection of the peripheral vacuum pump, and the peripheral vacuum pump exhausts the air in the cavity, so that each air exhaust hole 21 communicated with the cavity can exhaust air.
The air suction holes 21 may be formed by directly punching the vacuum base 23, or by attaching air nozzles to the vacuum base 23.
In practical use, before side edges are polished, a zero point needs to be determined by tool setting, in order to save the operation that the tool setting is needed after a planar target is placed every time, at least two cylinders 3 are arranged on the electromagnetic chuck 1, a second fixed block 4 capable of being magnetically adsorbed on the electromagnetic chuck 1 is arranged at the bottom of each cylinder 3, and a piston rod of each cylinder 3 is positioned at the top and can stretch up and down; piston rods of the two cylinders 3 are respectively used for positioning two adjacent side edges of the planar target;
after the planar target is placed for the first time, tool setting operation needs to be carried out, at this time, the piston rod of the air cylinder 3 is tightly abutted against the corresponding side edge, the position is recorded and does not move any more, then the piston rod of the air cylinder 3 descends, and the peripheral machine tool starts to polish the side edge; when the next planar target is placed, the piston rods of the cylinders 3 extend out, and then the two adjacent side edges of the planar target are respectively abutted against the piston rods of the two cylinders 3, so that the positioning is finished without setting the tool again;
of course, when the size of the planar target is large, the number of the cylinders 3 corresponding to one side of the planar target is not necessarily one, and may be plural, so that the positioning effect is more excellent.
In a specific embodiment, the second fixing block 4 is made of iron or iron alloy; the cylinder 3 may be welded to the second fixing block 4, or may be fixed to the second fixing block 4 by using a connecting member.
In this embodiment, the vacuum chucks 2 are arranged in an array, and the distance between two adjacent vacuum chucks 2 is not more than 350mm, so that the problem that the planar target is cracked due to the fact that the suspended area of the planar target is too large and the vacuum base 23 cannot form a good support is avoided; in particular embodiments, when the size of the planar target is small, it may be only a single row or multiple rows; when the size of the planar target is large, the planar target can be in multiple rows and multiple columns, and the specific array mode can be arranged according to the actual situation.
Preferably, the distance between the vacuum chuck 2 close to the side edge of the planar target and the side edge is 8-120mm, so that the edge position of the planar target can be well supported under the condition of ensuring that the side edge polishing is not influenced;
more preferably, the vacuum chuck 2 near the side of the planar target is spaced from the side by 10-100 mm.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. The utility model provides a plane target fixing device, includes electromagnet (1), its characterized in that still includes but a plurality of magnetic adsorption vacuum chuck (2) on electromagnet (1), the bottom surface laminating of vacuum chuck (2) is on electromagnet (1), the top surface of vacuum chuck (2) is equipped with a plurality of aspirating hole (21), aspirating hole (21) and peripheral hardware vacuum pump connection for adsorb plane target.
2. The planar target fixing device according to claim 1, wherein the vacuum chuck (2) comprises a first fixing block (22) capable of being magnetically adsorbed on the electromagnetic chuck (1), and a vacuum seat (23) fixed on the first fixing block (22), and the suction holes (21) are disposed on the top surface of the vacuum seat (23).
3. The planar target fixing device according to claim 2, wherein a sealing rubber ring (24) is disposed on the top surface of the vacuum base (23), the sealing rubber ring (24) encloses the pumping hole (21), and the sealing rubber ring (24) protrudes upward for supporting the planar target.
4. The planar target fixing device according to claim 3, wherein the top surface of the vacuum base (23) is further provided with a plurality of bosses protruding upwards for supporting the planar target, and the protruding height of the bosses is less than or equal to that of the sealing rubber ring (24).
5. The planar target fixture according to claim 4, wherein the bosses are all disposed within a sealing rubber ring (24).
6. The planar target fixture of claim 4, wherein the boss is a circular boss.
7. The planar target fixing device according to claim 2, wherein a cavity is formed in the vacuum base (23), at least one through hole (25) communicated with the cavity is formed in a side surface of the vacuum base (23), the air suction hole (21) is communicated with the cavity, and the through hole (25) is connected with an external vacuum pump.
8. The planar target fixing device according to claim 1, wherein at least two cylinders (3) are disposed on the electromagnetic chuck (1), a second fixing block (4) capable of being magnetically adsorbed on the electromagnetic chuck (1) is disposed at the bottom of the cylinders (3), a piston rod of each cylinder (3) is located at the top and can be extended and retracted up and down, and the piston rods of the two cylinders (3) are respectively used for positioning two adjacent sides of the planar target.
9. The planar target fixture according to claim 1, wherein the vacuum chucks (2) are arranged in an array, and the distance between two adjacent vacuum chucks (2) is not more than 350 mm.
10. The planar target fixture according to claim 9, characterized in that the vacuum chuck (2) near the side of the planar target is spaced 8-120mm from the side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220489239.XU CN217097244U (en) | 2022-03-03 | 2022-03-03 | Plane target fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220489239.XU CN217097244U (en) | 2022-03-03 | 2022-03-03 | Plane target fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217097244U true CN217097244U (en) | 2022-08-02 |
Family
ID=82599900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220489239.XU Active CN217097244U (en) | 2022-03-03 | 2022-03-03 | Plane target fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217097244U (en) |
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2022
- 2022-03-03 CN CN202220489239.XU patent/CN217097244U/en active Active
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