CN217083960U - spectrometer - Google Patents
spectrometer Download PDFInfo
- Publication number
- CN217083960U CN217083960U CN202220337558.9U CN202220337558U CN217083960U CN 217083960 U CN217083960 U CN 217083960U CN 202220337558 U CN202220337558 U CN 202220337558U CN 217083960 U CN217083960 U CN 217083960U
- Authority
- CN
- China
- Prior art keywords
- base
- shielding element
- shielding
- spectral components
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003595 spectral effect Effects 0.000 claims abstract description 101
- 230000003287 optical effect Effects 0.000 claims abstract description 85
- 238000009434 installation Methods 0.000 claims description 21
- 238000001228 spectrum Methods 0.000 claims description 6
- 230000009467 reduction Effects 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 abstract description 13
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000005259 measurement Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Images
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
Description
技术领域technical field
本申请涉及光学测量装置的技术领域,尤其涉及一种光谱仪。The present application relates to the technical field of optical measurement devices, and in particular, to a spectrometer.
背景技术Background technique
光谱仪是应用光学原理,将成分复杂的光分解为光谱线的科学仪器。光谱仪可对物质的结构和成分进行观测、分析和处理,且具有分析精度高、测量范围大、速度快和样品用量少等优点。因此,举凡分子特性的分辨、浓度的量测、物质的鉴定、天体光谱的量测等都需要光谱仪的协助。此外,光谱仪更是广泛地被运用于冶金、地质、石油化工、医药卫生、环境保护、资源和水文勘测等各领域。A spectrometer is a scientific instrument that applies optical principles to decompose light with complex components into spectral lines. The spectrometer can observe, analyze and process the structure and composition of substances, and has the advantages of high analysis accuracy, large measurement range, fast speed and less sample consumption. Therefore, the resolution of molecular properties, the measurement of concentration, the identification of substances, and the measurement of celestial spectra all require the assistance of spectrometers. In addition, spectrometers are widely used in metallurgy, geology, petrochemical, medical and health, environmental protection, resources and hydrological surveying and other fields.
然而,由于光谱仪受到所输入的光学信号的初始频谱、光栅对于各波长光线的分光效率以及影像传感器对于各波长光线的感光效率等影响,会出现特定波长区段能量过强的状况,而无法达到预期的测量结果。However, since the spectrometer is affected by the initial spectrum of the input optical signal, the spectral efficiency of the grating for each wavelength of light, and the photosensitive efficiency of the image sensor for each wavelength of light, etc., there will be a situation where the energy in a specific wavelength range is too strong, which cannot be achieved. Expected measurement results.
实用新型内容Utility model content
本申请提供一种光谱仪,能够抑制光谱分量中光强度过高的部分。The present application provides a spectrometer capable of suppressing a portion of a spectral component with an excessively high light intensity.
本申请提供一种光谱仪,包括机座、光输入元件、分光元件、影像传感器以及遮挡元件。光输入元件设置于机座,用以接收光学信号。分光元件设置于机座,用以入射光输入元件所接收的光学信号,用以将光学信号分离成多个光谱分量。影像传感器设置于机座,且具有感测面,用以接收这些光谱分量,其中感测面具有在这些光谱分量的排列方向上延伸的虚拟中心线。遮挡元件根据光学影响因素设置于分光元件与影像传感器之间,且位于部分的这些光谱分量的投影路径上,遮挡部分的这些光谱分量,以抑制这些光谱分量中光强度过高的部分,其中遮挡元件在感测面上产生的阴影不落于虚拟中心线上。The present application provides a spectrometer, which includes a base, a light input element, a light splitting element, an image sensor and a shielding element. The optical input element is arranged on the base for receiving optical signals. The light splitting element is arranged on the base, and is used for incident light to input the optical signal received by the element, so as to separate the optical signal into a plurality of spectral components. The image sensor is disposed on the base and has a sensing surface for receiving the spectral components, wherein the sensing surface has a virtual centerline extending in the arrangement direction of the spectral components. The blocking element is arranged between the spectroscopic element and the image sensor according to the optical influence factor, and is located on the projection path of some of these spectral components, and blocks these spectral components of the part, so as to suppress the part with excessive light intensity in these spectral components, wherein the blocking element The shadow produced by the element on the sensing surface does not fall on the virtual centerline.
在本申请的一实施例中,感测面在机座上延伸且具有两端部,其中遮挡元件在感测面上产生的阴影不落于两端部。In an embodiment of the present application, the sensing surface extends on the base and has two ends, wherein the shadows generated by the shielding element on the sensing surface do not fall on the two ends.
在本申请的一实施例中,遮挡元件直接贴附于影像传感器上,或位于相对靠近机座或远离机座的位置。In an embodiment of the present application, the shielding element is directly attached to the image sensor, or is located relatively close to the base or far away from the base.
在本申请的一实施例中,光谱仪更包括安装组件。遮挡元件设置于安装组件上,且安装组件设置于机座,使得遮挡元件通过安装组件安装于机座上。In an embodiment of the present application, the spectrometer further includes a mounting assembly. The shielding element is arranged on the installation component, and the installation component is arranged on the machine base, so that the shielding element is installed on the machine base through the installation component.
在本申请的一实施例中,安装组件具有调整结构,调整遮挡元件相对机座或盖体的设置角度或设置位置,或在平行感测面的方向上调整遮挡元件的设置位置,或调整遮挡元件在盖体与机座间的设置位置。In an embodiment of the present application, the mounting assembly has an adjustment structure for adjusting the setting angle or setting position of the shielding element relative to the base or the cover body, or adjusting the setting position of the shielding element in a direction parallel to the sensing surface, or adjusting the shielding element The setting position of the component between the cover and the base.
在本申请的一实施例中,光学影响因素包括光学信号的初始频谱、分光元件对于各波长光线的分光效率以及影像传感器对于各波长光线的感光效率的至少其中之一。In an embodiment of the present application, the optical influencing factors include at least one of the initial spectrum of the optical signal, the spectral efficiency of the light splitting element for each wavelength of light, and the photosensitive efficiency of the image sensor for each wavelength of light.
在本申请的一实施例中,遮挡元件为不透光片、减光片或滤波片。In an embodiment of the present application, the shielding element is an opaque sheet, a dimming sheet or a filter.
在本申请的一实施例中,遮挡元件的形状根据光学影响因素所变化。In an embodiment of the present application, the shape of the shielding element is changed according to the optical influence factor.
在本申请的一实施例中,遮挡元件包括多个相异的遮挡片,根据光学影响因素可替换地设置于分光元件与影像传感器之间的固定位置上,其中这些遮挡片在形状、尺寸或是相对机座的倾斜角度上相异。In an embodiment of the present application, the shielding element includes a plurality of different shielding sheets, which can be alternatively arranged at fixed positions between the spectroscopic element and the image sensor according to optical influencing factors, wherein the shielding sheets are different in shape, size or It is different from the inclination angle relative to the base.
在本申请的一实施例中,光谱仪更包括安装组件,遮挡元件设置于安装组件上,其中安装组件设置于机座,使得遮挡元件通过安装组件安装于机座上。安装组件具有调整结构,调整遮挡元件相对机座或盖体的设置角度或设置位置,或在平行感测面的方向上调整遮挡元件的设置位置,或调整遮挡元件在盖体与机座间的设置位置。感测面在机座上延伸且具有两端部,其中遮挡元件在感测面上产生的阴影不落于两端部。光学影响因素包括光学信号的来源、分光元件对于不同波段的这些光谱分量的分光效率以及影像传感器对于不同波段的这些光谱分量的感光效率的至少其中之一。遮挡元件包括多个相异的遮挡片,根据光学影响因素可替换地设置于分光元件与影像传感器之间的固定位置上,其中这些遮挡片在形状、尺寸或是相对机座的倾斜角度上相异。In an embodiment of the present application, the spectrometer further includes an installation component, and the shielding component is disposed on the installation component, wherein the installation component is disposed on the base, so that the shielding component is installed on the base through the installation component. The installation assembly has an adjustment structure, which adjusts the setting angle or setting position of the shielding element relative to the base or the cover, or adjusts the setting position of the shielding element in the direction parallel to the sensing surface, or adjusts the position of the shielding element between the cover and the base. Set the location. The sensing surface extends on the base and has two ends, wherein the shadow generated by the shielding element on the sensing surface does not fall on the two ends. The optical influencing factors include at least one of the source of the optical signal, the spectral efficiency of the spectroscopic element for these spectral components in different wavelength bands, and the photosensitive efficiency of the image sensor for these spectral components in different wavelength bands. The shielding element includes a plurality of different shielding sheets, which can be alternatively arranged at a fixed position between the spectroscopic element and the image sensor according to the optical influencing factors, wherein these shielding sheets are different in shape, size or inclination angle relative to the base. different.
本申请另提供一种光谱仪,包括机座、光输入元件、反射镜、平面光栅、聚焦镜、影像传感器、遮挡元件以及安装组件。光输入元件设置于机座,用以接收光学信号。反射镜设置于机座,用以入射光输入元件所接收的光学信号并反射。平面光栅设置于机座,用以入射反射镜所反射的光学信号,用以将光学信号分离成多个光谱分量。聚焦镜设置于机座,用以聚焦平面光栅所分离的这些光谱分量。影像传感器设置于机座,且具有感测面,用以接收聚焦镜所聚焦的这些光谱分量,其中感测面在机座上延伸且具有在这些光谱分量的排列方向上延伸的虚拟中心线以及两端部。遮挡元件根据光学影响因素设置于聚焦镜与影像传感器之间。遮挡元件为不透光片且位于部分的这些光谱分量的投影路径上,遮挡部分的这些光谱分量,以抑制这些光谱分量中光强度过高的部分。遮挡元件在感测面上产生的阴影不落于虚拟中心线以及两端部上。安装组件设置于机座,且遮挡元件设置于安装组件上,使得遮挡元件通过安装组件安装于机座上。安装组件具有调整结构,调整遮挡元件相对机座的设置角度或设置位置。The present application further provides a spectrometer, which includes a base, a light input element, a reflector, a plane grating, a focusing mirror, an image sensor, a shielding element, and a mounting assembly. The optical input element is arranged on the base for receiving optical signals. The reflector is arranged on the base, and is used to reflect the optical signal received by the incident light input element. The plane grating is arranged on the base and is used for the incident optical signal reflected by the mirror to separate the optical signal into a plurality of spectral components. The focusing mirror is arranged on the base to focus the spectral components separated by the plane grating. The image sensor is arranged on the base and has a sensing surface for receiving the spectral components focused by the focusing mirror, wherein the sensing surface extends on the base and has a virtual centerline extending in the arrangement direction of the spectral components and both ends. The shielding element is arranged between the focusing mirror and the image sensor according to the optical influence factor. The shielding element is an opaque sheet and is located on the projection path of some of the spectral components, and shields the spectral components of the partial to suppress the portion of the spectral components with excessive light intensity. The shadow generated by the shielding element on the sensing surface does not fall on the virtual center line and both ends. The installation component is arranged on the machine base, and the shielding element is arranged on the installation component, so that the shielding component is installed on the machine base through the installation component. The installation assembly has an adjustment structure for adjusting the setting angle or setting position of the shielding element relative to the base.
综合上述,本申请提供的光谱仪,通过设置在分光元件以及影像传感器之间的遮挡元件,能够遮挡部分的光谱分量,以抑制光谱分量中光强度过高的部分。To sum up the above, the spectrometer provided by the present application can block part of the spectral components by means of the shielding element disposed between the spectroscopic element and the image sensor, so as to suppress the part of the spectral components with excessive light intensity.
附图说明Description of drawings
此处所说明的附图用来提供对本申请的进一步理解,构成本申请的一部分,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:The drawings described herein are used to provide further understanding of the present application and constitute a part of the present application. The schematic embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation of the present application. In the attached image:
图1绘示为本申请一实施例的光谱仪的立体图;1 is a perspective view of a spectrometer according to an embodiment of the present application;
图2绘示为图1的光谱仪的俯视图;FIG. 2 is a top view of the spectrometer of FIG. 1;
图3中的(A)绘示为表现图1的光谱仪的遮挡元件与影像传感器相对关系的示意图;(A) in FIG. 3 is a schematic diagram showing the relative relationship between the shielding element of the spectrometer of FIG. 1 and the image sensor;
图3中的(B)绘示为图1的光谱仪设置遮挡元件前后锥角变化的侧视图;(B) in FIG. 3 is a side view showing the change of cone angle before and after the blocking element is installed in the spectrometer of FIG. 1;
图4绘示为图1的光谱仪的光谱图;Fig. 4 is a spectrogram of the spectrometer of Fig. 1;
图5中的(A)绘示为表现图1的光谱仪未设置遮挡元件的俯视图;(A) in FIG. 5 is a top view showing that the spectrometer of FIG. 1 is not provided with a blocking element;
图5中的(B)绘示为表现图5中的(A)的光谱仪的光谱图;(B) in FIG. 5 is a spectrogram representing the spectrometer of (A) in FIG. 5 ;
图6中的(A)绘示为表现图1的光谱仪将遮挡元件靠近光学传感器设置的俯视图;(A) in FIG. 6 is a top view showing that the spectrometer of FIG. 1 arranges the shielding element close to the optical sensor;
图6中的(B)绘示为表现图6中的(A)的光谱仪的光谱图;(B) in FIG. 6 is a spectrogram showing the spectrometer of (A) in FIG. 6 ;
图7中的(A)绘示为表现图1的光谱仪将遮挡元件远离光学传感器设置的俯视图;(A) in FIG. 7 is a top view showing that the spectrometer of FIG. 1 disposes the shielding element away from the optical sensor;
图7中的(B)绘示为表现图7中的(A)的光谱仪的光谱图;(B) in FIG. 7 is a spectrogram representing the spectrometer of (A) in FIG. 7 ;
图8中的(A)绘示为表现图1的光谱仪未设置遮挡元件的侧视图;(A) in FIG. 8 is a side view showing that the spectrometer of FIG. 1 is not provided with a blocking element;
图8中的(B)绘示为表现图8中的(A)的光谱仪的光谱图;(B) in FIG. 8 is a spectrogram representing the spectrometer of (A) in FIG. 8 ;
图9中的(A)绘示为表现图1的光谱仪将遮挡元件设为第一高度的侧视图;(A) in FIG. 9 is a side view showing that the spectrometer of FIG. 1 sets the shielding element to the first height;
图9中的(B)绘示为表现图9中的(A)的光谱仪的光谱图;(B) in FIG. 9 is a spectrogram showing the spectrometer of (A) in FIG. 9 ;
图10中的(A)绘示为表现图1的光谱仪将遮挡元件设为第二高度的侧视图;(A) in FIG. 10 is a side view showing that the spectrometer of FIG. 1 sets the blocking element to the second height;
图10中的(B)绘示为表现图10中的(A)的光谱仪的光谱图;(B) in FIG. 10 is a spectrogram showing the spectrometer of (A) in FIG. 10 ;
图11绘示为表现图1的光谱仪将遮挡元件替换为另一形状的示意图;11 is a schematic diagram showing that the spectrometer of FIG. 1 replaces the shielding element with another shape;
图12绘示为表现图1的光谱仪将遮挡元件设置于影像传感器外侧的示意图;FIG. 12 is a schematic diagram showing that the spectrometer of FIG. 1 disposes the shielding element outside the image sensor;
图13绘示为表现图1的光谱仪将遮挡元件旋转第一角度的示意图;13 is a schematic diagram showing that the spectrometer of FIG. 1 rotates the shielding element by a first angle;
图14绘示为表现图1的光谱仪将遮挡元件设置为多个遮挡片,且其中第一遮挡片旋转第二角度的示意图;14 is a schematic diagram showing that the spectrometer of FIG. 1 sets the shielding element into a plurality of shielding pieces, and wherein the first shielding piece is rotated by a second angle;
图15绘示为表现图1的光谱仪将遮挡元件旋转第三角度的示意图;以及FIG. 15 is a schematic diagram showing that the spectrometer of FIG. 1 rotates the shielding element by a third angle; and
图16绘示为图1的光谱仪的组装方法的流程图。FIG. 16 is a flowchart illustrating an assembly method of the spectrometer of FIG. 1 .
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.
图1绘示为本申请一实施例的光谱仪的立体图,图2绘示为图1的光谱仪的俯视图。请参考图1及图2,光谱仪100包括机座110、光输入元件120、分光元件130、影像传感器140以及遮挡元件150。光输入元件120设置于机座110,用以接收光学信号L。分光元件130设置于机座110,用以入射光输入元件120所接收的光学信号L,用以将光学信号L分离成多个光谱分量S。在本实施例中,光谱仪100更可包括反射镜M1,设置于机座110,用以入射光输入元件120所接收的光学信号L并反射至分光元件130。分光元件130例如为平面光栅,用以入射反射镜M1所反射的光学信号L,用以将光学信号L分离成多个光谱分量S。在另一未绘示的实施例中,分光元件130亦可为凹面光栅,并不以此为限。影像传感器140设置于机座110,且具有感测面142,用以接收这些光谱分量S。在本实施例中,光谱仪100更可包括聚焦镜M2,设置于机座110,用以聚焦分光元件130所分离的这些光谱分量S。影像传感器140则可接收聚焦镜M2所聚焦的这些光谱分量S。遮挡元件150根据光学影响因素设置于分光元件130与影像传感器140之间,且位于部分的这些光谱分量S的投影路径上,遮挡部分的这些光谱分量S,以抑制这些光谱分量S中光强度过高的部分。在本实施例中,光学影响因素包括光学信号L的初始频谱、分光元件130对于各波长光线的分光效率、反射镜M1与聚焦镜M2的反射率,以及影像传感器140对于各波长光线的感光效率的至少其中之一。举例来说,光强度过高的光谱分量S指的是光强度大于某一阈值的光谱分量S,而此阈值可根据光学影响因素决定。FIG. 1 is a perspective view of a spectrometer according to an embodiment of the present application, and FIG. 2 is a top view of the spectrometer of FIG. 1 . Please refer to FIG. 1 and FIG. 2 , the
详细而言,遮挡元件150位于聚焦镜M2与影像传感器140之间,且可为不透光片、减光片或滤波片,以遮挡聚焦镜M2所聚焦的部分光谱分量S。此外,光谱仪100更可包括安装组件160。遮挡元件150设置于安装组件160上,且安装组件160设置于机座110,使得遮挡元件150通过安装组件160安装于机座110上。安装组件160亦可具有调整结构162,调整遮挡元件150相对机座110的设置角度或设置位置,或在平行感测面142的方向上调整遮挡元件150的设置位置,或调整遮挡元件150远离或靠近机座110。在本实施例中,调整结构162由至少一锁固件162A与至少一导槽162B所构成,以通过锁固件162A与导槽162B的配合,导引遮挡元件150在X方向或Z方向移动定位并固定。在另一未绘示的实施例中,遮挡元件150可直接贴附于影像传感器140上,或可沿着Y方向移动而位于相对靠近机座110或远离机座110的位置。In detail, the shielding
图3中的(A)绘示为表现图1的光谱仪的遮挡元件与影像传感器相对关系的示意图。请参考图3中的(A),感测面142具有在这些光谱分量S的排列方向上延伸的虚拟中心线A,其中遮挡元件150在感测面142上产生的阴影不落于虚拟中心线A上。虽然图3中的(A)中的虚拟中心线A以直线示意,但虚拟中心线A为各波长的光谱分量S的中心所连成的虚拟线,所以实际上依光型而可以为曲线。值得一提的是,由于遮挡元件150在感测面142上产生的阴影不落于光强度较高的虚拟中心线A上,所以能有数值孔径变小、提升所遮挡波段的解析度的效果。此外,感测面142在机座110上延伸且具有两端部142a。遮挡元件150在感测面142上产生的阴影还可不落于两端部142a。由于一般两端部142a上所接收到的光谱分量通常强度较弱。因此,通过遮挡元件150在感测面142上产生的阴影不落于两端部142a的特征,还能避免影响解析度降低。(A) in FIG. 3 is a schematic diagram showing the relative relationship between the shielding element and the image sensor of the spectrometer of FIG. 1 . Please refer to (A) in FIG. 3 , the
图3中的(B)绘示为图1的光谱仪设置遮挡元件前后锥角变化的侧视图。请参考图3中的(B),光谱仪100设置遮挡元件150后光路的锥角θ1小于置设置遮挡元件150前光路的锥角θ0,所以对应锥角θ1的光学解析度会大于对应锥角θ0的光学解析度。也就是说,在本实施例中(即,遮挡元件150非直接贴附于影像传感器140的情况),由于聚焦数值孔径因为遮挡元件150而缩小,所以能有数值孔径变小、成像像差较小,提升所遮挡波段的光学解析度的效果。(B) of FIG. 3 is a side view showing the change of cone angles before and after the shielding element is installed in the spectrometer of FIG. 1 . Please refer to (B) in FIG. 3 , the cone angle θ 1 of the optical path after the
图4绘示为图1的光谱仪的光谱图。请参考图4,光谱图包括两条光谱曲线C0与C1,其中光谱曲线C0呈现的是光谱仪100未设置遮挡元件150的实验数据,而光谱曲线C1呈现的是光谱仪100设置遮挡元件150的后的实验数据。由图上可看出,在波长区间ΔλA(约220~280nm的波长范围),相对光谱曲线C0,光谱曲线C1中光强度过高的部分明显被抑制,而不会超出影像传感器140的最大感光能力。因此,还能够进一步通过积分时间的方式拉高其他波长的光强度,进而提升整体光强度的平衡性。此外,在波长区间ΔλA的范围之外,光谱曲线C0、C1的光学解析度例如皆为0.5nm。然而,在波长区间ΔλA的范围内,光谱曲线C0的光学解析度例如为0.5nm,光谱曲线C1的光学解析度例如为0.3nm。也就是说,在波长区间ΔλA的范围内,光谱曲线C1所对应光学解析度较光谱曲线C0高。FIG. 4 is a spectrogram of the spectrometer of FIG. 1 . Please refer to FIG. 4 , the spectrogram includes two spectral curves C0 and C1 , wherein the spectral curve C0 represents the experimental data of the
图5中的(A)绘示为表现图1的光谱仪未设置遮挡元件的俯视图,图5中的(B)绘示为表现图5中的(A)的光谱仪的光谱图。请参考图5中的(A)与图5中的(B),为了方便说明,图5中的(A)仅示意地绘出聚焦镜M2、影像传感器140以及聚焦在感测面142上的光谱分量S,且图5中的(B)中的光谱曲线C2以直线表示(纵轴I为光强度,横轴λ为波长)。图6中的(A)绘示为表现图1的光谱仪将遮挡元件靠近光学传感器设置的俯视图,图6中的(B)绘示为表现图6中的(A)的光谱仪的光谱图。请对照参考图5中的(A)与图6中的(A),在图6中的(A)中设置了靠近光学传感器140的遮挡元件150A。再请对照参考图5中的(B)与图6中的(B),其结果是,相较于光谱曲线C2,光谱曲线C3中的波长区间Δλ0从光强度I0被抑制成光强度I1。(A) in FIG. 5 is a top view showing that the spectrometer in FIG. 1 is not provided with a shielding element, and (B) in FIG. 5 is a spectrogram showing the spectrometer in (A) in FIG. 5 . Please refer to (A) in FIG. 5 and (B) in FIG. 5 , for the convenience of description, (A) in FIG. The spectral component S, and the spectral curve C2 in FIG. 5(B) is represented by a straight line (the vertical axis I is the light intensity, and the horizontal axis λ is the wavelength). (A) in FIG. 6 is a top view showing the spectrometer in FIG. 1 with the shielding element disposed close to the optical sensor, and (B) in FIG. 6 is a spectrum diagram showing the spectrometer in (A) in FIG. 6 . Please refer to (A) in FIG. 5 and (A) in FIG. 6 , in (A) in FIG. 6 , a blocking
图7中的(A)绘示为表现图1的光谱仪将遮挡元件远离光学传感器设置的俯视图,图7中的(B)绘示为表现图7中的(A)的光谱仪的光谱图。请对照参考图6中的(A)与图7中的(A),相较于图6中的(A)的遮挡元件150A,图7中的(A)中设置了远离光学传感器140(即,相对靠近聚焦镜M2)的遮挡元件150B。再请对照参考图6中的(B)与图7中的(B),其结果是,相较于光谱曲线C3,光谱曲线C4中的波长区间Δλ1小于光谱曲线C4中的波长区间Δλ0。也就是说,遮挡元件150A与遮挡元件150B同样将光强度I0抑制成光强度I1,但所遮挡的波长范围不同。遮挡元件150A、150B在尺寸形状不变的前提下,愈往聚焦镜M2移动,遮的波段范围愈广(即,光谱遮的斜角愈缓)、遮的光强百分比愈高。相对地,遮挡元件150A、150B在尺寸形状不变的前提下,愈往影像传感器140移动遮的波段范围愈窄愈精准(即,光谱遮的斜角愈垂直)、遮的光强百分比愈低。FIG. 7(A) is a top view showing the spectrometer of FIG. 1 with the shielding element disposed away from the optical sensor, and FIG. 7(B) is a spectrogram showing the spectrometer of FIG. 7(A). Please refer to (A) in FIG. 6 and (A) in FIG. 7 , compared with the shielding
图8中的(A)绘示为表现图1的光谱仪未设置遮挡元件的侧视图,图8中的(B)绘示为表现图8中的(A)的光谱仪的光谱图。为了方便说明,图8中的(A)仅示意地绘出聚焦镜M2、影像传感器140以及聚焦在感测面142上的光谱分量S,且图8中的(B)中的光谱曲线C5以直线表示(纵轴I为光强度,横轴λ为波长)。图9中的(A)绘示为表现图1的光谱仪将遮挡元件设为第一高度的侧视图。图9中的(B)绘示为表现图9中的(A)的光谱仪的光谱图。请对照参考图8中的(A)与图9中的(A),在图9中的(A)中设置了第一高度(即,Y方向的尺寸)的遮挡元件150C,且第一高度与光谱分量S中心的高度大致相同。再请对照参考图8中的(B)与图9中的(B),其结果是,相较于光谱曲线C5,光谱曲线C6中的波长区间从光强度I0被抑制成光强度(即,大约抑制了50%的光强度)。(A) in FIG. 8 is a side view showing that the spectrometer in FIG. 1 is not provided with a shielding element, and (B) in FIG. 8 is a spectrogram showing the spectrometer in (A) in FIG. 8 . For the convenience of description, (A) in FIG. 8 only schematically depicts the focusing mirror M2, the
图10中的(A)绘示为表现图1的光谱仪将遮挡元件设为第二高度的侧视图,图10中的(B)绘示为表现图10中的(A)的光谱仪的光谱图。请对照参考图9中的(A)与图10中的(A),相较于图9中的(A)的遮挡元件150C,图10中的(A)中设置了第二高度(即,Y方向的尺寸)的遮挡元件150D,其中遮挡元件150D的第二高度小于遮挡元件150C的第一高度。再请对照参考图9中的(B)与图10中的(B),其结果是,光谱曲线C7中在波长区间Δλ1被抑制为光强度I’,且光强度I’高于光谱曲线C6的光强度I50%。也就是说,遮挡元件150C与遮挡元件150D同样抑制相同波长区间Δλ1的光强度,但所抑制的光强度百分比不同。遮挡元件150C、150D在尺寸形状、位置不变的前提下,遮挡元件150C的第一高度较高,遮的光强百分比也较高;反之,遮挡元件150D的第二高度较矮,遮的光强百分比也较低。请再参考图9中的(A)与图10中的(A),由于光谱分量S受到聚焦镜M2的聚焦,光谱分量S越靠近影像传感器140越窄(即,Y方向的尺寸),因此当遮挡元件150C、150D愈往影像传感器140移动,要通过高度改变来调整到所需抑制的光强百分比(例如20%)愈不容易。(A) in FIG. 10 is a side view showing the spectrometer in FIG. 1 with the blocking element set to the second height, and (B) in FIG. 10 is a spectrogram showing the spectrometer in (A) in FIG. 10 . . Please refer to (A) in FIG. 9 and (A) in FIG. 10 , compared with the shielding
图11绘示为表现图1的光谱仪将遮挡元件替换为另一形状的示意图。请对照参考图3中的(A)与图11,相较于图3中的(A)的遮挡元件150为规则形状,像是矩形,图11的遮挡元件150E为梯形。此外,遮挡元件150E亦可直接贴附于影像传感器140上,或者远离、靠近影像传感器140设置。在另一未绘示的实施例中,遮挡元件150E亦可根据光学影响因素选择渐变或其他变化不规则的形状。FIG. 11 is a schematic diagram showing that the spectrometer of FIG. 1 replaces the shielding element with another shape. Please refer to FIG. 3(A) and FIG. 11 . Compared with FIG. 3(A) , the shielding
图12绘示为表现图1的光谱仪将遮挡元件设置于影像传感器外侧的示意图。请参考图12,遮挡元件150F可设置于机座110上,自机座110以及影像传感器140的外侧向上延伸后,再向影像传感器140延伸,直到对应所要遮挡的波长区段的位置后,向下延伸。本领域技术人员亦可理解,延伸的角度不见得要是完全垂直或是水平,亦可视光学影响因素来决定延伸的角度。FIG. 12 is a schematic diagram showing that the spectrometer of FIG. 1 disposes the shielding element outside the image sensor. Referring to FIG. 12 , the shielding
图13绘示为表现图1的光谱仪将遮挡元件旋转第一角度的示意图。请对照参考图3中的(A)与图14,遮挡元件150G与图3中的(A)的遮挡元件150同样为矩形,但相对于遮挡元件150,遮挡元件150G在X-Y平面上旋转第一角度,其中第一角度为非90度的倍数。图14绘示为表现图1的光谱仪将遮挡元件设置为多个遮挡片,且其中第一遮挡片旋转第二角度的示意图。请参考图14,遮挡元件150H可包括第一遮挡片150H1以及第二遮挡片150H2。在本实施例中,第一遮挡片150H1在X-Z平面上旋转第二角度。由于遮挡元件150H愈靠近影像传感器140对于所遮的部分光谱分量S的波段范围愈精准的优点,而愈靠近聚焦镜M2有愈容易调整所需抑制的光强百分比的优点。因此,通过在聚焦镜M2与影像传感器140之间的不同位置上,设置第一遮挡片150H1以及第二遮挡片150H2的方式,可根据光学影像因素以及需求进行粗调节以及细调节,而获得所需的效果。此外,在另一未绘示的实施例中,遮挡元件150H可包括多个相异的遮挡片,并根据光学影响因素可替换地设置于分光元件130与影像传感器140之间的固定位置上。这些相异的遮挡片例如在形状、尺寸或是相对机座的倾斜角度上相异。当替换相异的遮挡片获得所需的光学效果后,还可通过点胶或是锁固固定于机座110上,以确保在后续使用时都能够维持一致的光学效果。FIG. 13 is a schematic diagram showing that the spectrometer of FIG. 1 rotates the shielding element by a first angle. Please refer to FIG. 3 (A) and FIG. 14 , the shielding
图15绘示为表现图1的光谱仪将遮挡元件旋转第三角度的示意图。请对照参考图10中的(A)与图15,遮挡元件150I与图10中的(A)的遮挡元件150D的高度尺寸相类似,但遮挡元件150I相对于机座110倾斜(即,相对Y-Z平面旋转第三角度)。虽然图13~图15分别绘示了遮挡元件相对于不同的单一平面旋转的情况,但再另一未绘示的实施例,遮挡元件亦可根据光学影响因素以及需求在两个以上的平面上倾斜或是旋转不同的角度,并不以此为限。FIG. 15 is a schematic diagram showing that the spectrometer of FIG. 1 rotates the shielding element by a third angle. 10(A) and FIG. 15, the height dimension of the shielding element 150I is similar to that of the
图16绘示为图1的光谱仪的组装方法的流程图。本领域技术人员可以理解,前述各实施例之光谱仪100的变化均可归纳出一种光谱仪的组装方法,且可根据需求改变设计或调整,均不以此为限。请参考图16与图1,以下将配合图1的光谱仪100说明图16的组装流程,其组装细节已于前述实施例中详述,在此将不再赘述。首先进行步骤S110,提供光谱仪100,包括机座110、光输入元件120、分光元件130以及影像传感器140。在本实施例中,在步骤S110中,可以先将上述或其他光学元件完成组装定位。接着进行步骤S120,提供光学信号L进入光输入元件120,其中光输入元件120将光学信号L分离成光谱分量S,影像传感器140接收这些光谱分量S而产生光谱信号(未绘示),光谱信号反应了光学影响因素。接着进行步骤S130,设置遮挡元件150于分光元件130与影像传感器140之间,且位于部分的这些光谱分量S的投影路径上。之后进行步骤S140,根据光谱信号,调整遮挡元件150的位置或将遮挡元件150替换成相异于遮挡元件150的另一遮挡元件(未绘示),以抑制光谱信号中光强度过高的部分,并使遮挡元件150在感测面142上产生的阴影不落于虚拟中心线A上。在本实施例中,遮挡元件150的位置可通过图1的安装组件160进行调整,或是直接采用人工或治具进行调整,皆不以此为限。值得一提的是,由于光谱仪基于每一批元件不同会产生个体化差异,本实施例通过光谱信号反应出光谱仪实际的光学影响因素,再配合调整或更换适当的遮挡元件来抑制光谱信号中光强度过高的部分,而能够减少光谱仪的个体化差异的影响。FIG. 16 is a flowchart illustrating an assembly method of the spectrometer of FIG. 1 . Those skilled in the art can understand that the variations of the
可选择地,继续进行步骤S150,固定遮挡元件150或另一遮挡元件于机座110上。也就是说,当调整遮挡元件150位置或替换相异的遮挡元件获得所需的光学效果后,还可通过点胶或是锁固固定于机座110上,以确保在后续使用时都能够维持一致的光学效果。当然,遮挡元件150或另一遮挡元件可直接或是间接透过安装组件160等构件固定于机座110上,在此亦不限制。Optionally, proceed to step S150 to fix the
综上所述,本申请提供的光谱仪,通过设置在分光元件以及影像传感器之间的遮挡元件,能够遮挡部分的光谱分量,以抑制光谱分量中光强度过高的部分。此外,本申请通过不同的遮挡元件的设置方式,能够克服各种光学影响因素中的不利影响,而有效地达到所需的光学效果。To sum up, the spectrometer provided by the present application can block part of the spectral components through the shielding element disposed between the spectroscopic element and the image sensor, so as to suppress the part of the spectral components with excessive light intensity. In addition, the present application can overcome the adverse effects of various optical influencing factors and effectively achieve the required optical effects through different arrangement of the shielding elements.
需要说明的是,在本文中,术语“包含”、“包括”或者其任何其他变体意在涵盖非排他性的包括,从而使得包括一系列要素的过程、方法、物品或者装置不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者装置所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括该要素的过程、方法、物品或者装置中还存在另外的相同要素。It should be noted that, herein, the terms "comprising", "comprising" or any other variation thereof are intended to encompass a non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements, It also includes other elements not expressly listed or inherent to such a process, method, article or apparatus. Without further limitation, an element qualified by the phrase "comprising a..." does not preclude the presence of additional identical elements in a process, method, article or apparatus that includes the element.
上面结合附图对本申请的实施例进行了描述,但是本申请并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,而不是限制性的,本领域的普通技术人员在本申请的启示下,在不脱离本申请宗旨和权利要求所保护的范围情况下,还可做出很多形式,均属于本申请的保护的内容。The embodiments of the present application have been described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific embodiments, which are merely illustrative rather than restrictive. Under the inspiration of this application, without departing from the scope of protection of the purpose of this application and the claims, many forms can be made, which all belong to the protection content of this application.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202220337558.9U CN217083960U (en) | 2022-02-18 | 2022-02-18 | spectrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202220337558.9U CN217083960U (en) | 2022-02-18 | 2022-02-18 | spectrometer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN217083960U true CN217083960U (en) | 2022-07-29 |
Family
ID=82544125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202220337558.9U Active CN217083960U (en) | 2022-02-18 | 2022-02-18 | spectrometer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN217083960U (en) |
-
2022
- 2022-02-18 CN CN202220337558.9U patent/CN217083960U/en active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3949160B2 (en) | Device for selecting and detecting at least two spectral ranges of a luminous flux | |
US7298471B2 (en) | Surface inspection apparatus and surface inspection method | |
TWI280349B (en) | Spectrum measurement apparatus | |
US7692780B2 (en) | Surface inspecting apparatus | |
JP4611591B2 (en) | Concentric spectrometer to reduce internal specular reflection | |
CN109297927B (en) | Adjusting device and method for spectrometer | |
KR20040100882A (en) | Spectroscopic Ellipsometer | |
CN102155990B (en) | A method for installing and adjusting an échelle grating spectrometer | |
EP0322654B1 (en) | Spectrometer using concave holographic diffraction grating | |
CN106441581A (en) | High-resolution linear array CCD direct-reading type spectrometer | |
CN109682471B (en) | A high-precision multi-dimensional spectrometer detector adjustment structure | |
US20050280806A1 (en) | Surface inspection apparatus, polarization illuminating device and light-receiving device | |
CN108458787B (en) | Echelle grating type space heterodyne Raman spectrometer light channel structure | |
CN217083960U (en) | spectrometer | |
CN109030360A (en) | Optical path adjustment method | |
US20010048526A1 (en) | Compact spectrometer | |
CN101802572B (en) | Spectrometer arrangement | |
CN112525344B (en) | A method for installing and adjusting a dispersive imaging spectrometer | |
TWM631373U (en) | Spectrometer | |
CN201138389Y (en) | Field of View Beam Splitter for Space Remote Sensing Imager | |
CN106289525B (en) | A kind of spectrometer of broad spectrum high resolution | |
CN116659662A (en) | Spectrometer and method for assembling the same | |
TW202334636A (en) | Spectrometer and assembling method thereof | |
JP2010160034A (en) | Soft x-ray spectrometer | |
US20040196460A1 (en) | Scatterometric measuring arrangement and measuring method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |