CN217063447U

CN217063447U - Flattening guide wheel motor and silicon wafer cutting equipment

Info

Publication number: CN217063447U
Application number: CN202220772337.4U
Authority: CN
Inventors: 史本岩; 区世权
Original assignee: Foshan Demate Intelligent Equipment Technology Co ltd
Current assignee: Foshan Demate Intelligent Equipment Technology Co ltd
Priority date: 2022-04-02
Filing date: 2022-04-02
Publication date: 2022-07-26
Anticipated expiration: 2032-04-02

Abstract

A flattening guide wheel motor and a silicon wafer cutting device are provided, the flattening guide wheel motor comprises: the motor comprises a motor shell, wherein an accommodating channel is arranged in the central axis direction of the motor shell, and an annular accommodating groove is arranged around the outer side of the accommodating channel; the driving module is arranged inside the annular accommodating groove; the rotating assembly is coaxially arranged in the accommodating channel and is connected with the driving module; a bearing assembly is disposed between the rotating assembly and the motor housing, the rotating assembly being rotatable relative to the motor housing. Compared with the prior art, the utility model provides a flattening guide pulley motor, its inner structure is compact, sets up rotating assembly's rotating shaft inside motor casing's holding passageway to it is direct fixed with drive module, has left out the connection structure of shaft coupling, shortens guide pulley motor's axial dimensions, has enlarged guide pulley motor's range of application, especially the application in comparatively flat plane space.

Description

Flattening guide wheel motor and silicon wafer cutting equipment

Technical Field

The utility model belongs to the technical field of mechanical equipment, concretely relates to flattening guide pulley motor and silicon chip cutting equipment.

Background

In a common silicon wafer cutting device, a guide wheel motor is externally connected with a rotating part through a coupling, after guide wheels are assembled on the rotating part, the cutting lines are arranged among a plurality of guide wheels and driven by the guide wheel motor to do reciprocating motion, and a silicon rod is cut into required wafer silicon wafers.

However, the rotating part of the existing guide wheel motor is arranged externally, so that the axial size of the assembled cutting equipment is overlarge, and the problem of limited application range of the cutting equipment is caused.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a flattening guide wheel motor has to solve the external setting of rotation piece of current guide wheel motor, make the axial dimensions of the cutting equipment of assembly too big, leaded to the limited problem of cutting equipment range of application.

The utility model discloses one of them embodiment provides a flattening guide pulley motor, a serial communication port, flattening guide pulley motor includes:

the motor comprises a motor shell, wherein an accommodating channel is arranged in the central axis direction of the motor shell, and an annular accommodating groove is arranged around the outer side of the accommodating channel;

the driving module is arranged inside the annular accommodating groove;

the rotating assembly is coaxially arranged in the accommodating channel and is connected with the driving module; the rotating assembly is rotatable relative to the motor housing;

the central shaft of the annular accommodating groove is superposed with the central axis of the motor shell.

In one embodiment, the rotating assembly comprises a rotating main shaft and a supporting seat arranged above the rotating main shaft; the rotating main shaft is rotatably embedded in the accommodating channel through a bearing assembly.

In one embodiment, a positioning cylinder is arranged on a supporting end surface of the supporting seat, and an installation screw hole is arranged on the supporting end surface and surrounds the outer side of the positioning cylinder; the connecting end surface of the supporting seat is provided with an annular concave position; the drive module is arranged in the annular concave position.

In one embodiment, the bottom of the motor shell is provided with a pit which is coaxial with the accommodating channel, and a mounting block is arranged in the pit; the mounting block is provided with a convex column extending towards the accommodating channel; the mounting block is internally provided with a cavity, and a through hole is formed in the central axis of the mounting block; an encoder is arranged in the cavity; a connecting shaft is arranged at the bottom of the rotating main shaft and penetrates through the through hole to the cavity; the connecting shaft is fixedly connected with a coded disc corresponding to the encoder through a screw.

In one embodiment, the motor further comprises a sealing cover fixedly arranged on the end surface of the motor shell; a positioning groove is formed in the end face, in contact with the supporting seat, of the sealing cover; a positioning lug is arranged on the end face of the supporting seat, which is in contact with the sealing cover, and the positioning lug is matched with the positioning groove in position; the sealing cover is positioned and installed with the positioning lug of the supporting seat through the positioning groove;

and/or a labyrinth seal gap is formed between the contact end surfaces of the sealing cover and the supporting seat.

In one embodiment, an annular clamping block is arranged on the contact end face of the sealing cover and the motor shell, and the sealing cover is positioned and assembled with the motor shell through the annular clamping block; the outer wall surface of the annular fixture block is coaxially provided with a groove, and a sealing ring is arranged in the groove; the sealing ring is an O-shaped ring.

In one embodiment, a sealing plate is arranged at the bottom of the motor shell and used for sealing the motor shell; a groove is formed in the contact end face of the motor shell and the seal plate, and a seal ring is arranged in the groove;

and/or a first cable connector penetrates through the sealing plate, and a wire in the first cable connector is electrically connected with the encoder;

and/or a second cable joint is arranged at the bottom of the motor shell and penetrates through the bottom of the annular accommodating groove; and the wire in the second cable joint is electrically connected with the driving module.

In one embodiment, a first air path is arranged inside the motor shell, and an air inlet of the first air path is positioned on the end face of the motor shell; a second air passage is arranged on the sealing cover, and an air outlet of the second air passage is positioned on the inner wall surface of the positioning groove; when the motor shell is fixed with the sealing cover; the first air path is communicated with the second air path to form an air supply loop;

and/or the air inlet of the first air path is connected with an air pipe joint; the air pipe joint supplies air to the air supply loop, the air flow enters the labyrinth seal gap from the air outlet of the second air path, and finally flows out from the gap between the supporting seat and the sealing cover to form air curtain seal, so that external pollutants are prevented from entering the interior of the motor.

In one embodiment, an annular flange plate is arranged on the outer side of the motor shell, and mounting holes are formed in the annular flange plate; the annular flange plate is used for fixing the guide wheel motor on the cutting equipment.

In one embodiment, the silicon wafer cutting equipment comprises the flattened guide wheel motor in any one of the embodiments.

The utility model discloses the embodiment provides a flattening guide pulley motor and silicon chip cutting equipment has following beneficial effect:

1. the utility model provides a pair of flattening guide pulley motor, its internal structure is compact, sets up rotating assembly's rotating shaft inside motor casing's holding passageway to it is direct fixed with the rotor subassembly, has saved the connection structure of shaft coupling with prior art, shortens guide pulley motor's axial dimensions, but has enlarged guide pulley motor's range of application, especially the application in flatter space.

2. The utility model provides a flat guide wheel motor, which is characterized in that a coaxial bearing assembly is arranged between a rotating assembly and a motor shell, and the bearing assembly bears the radial overturning force applied to the rotating assembly in the rotating process; the stable rotation of the rotating assembly is realized; and preventing the overlarge jumping amplitude of the tail end of the rotating main shaft from influencing the recording of the rotating angle of the rotating main shaft by the encoder.

3. The utility model provides a flattening guide pulley motor, through at the closing cap with be formed with the labyrinth seal clearance between the contact terminal surface of supporting seat to by the air pipe joint of motor casing terminal surface to air supply return circuit air feed, make the air current flow from the labyrinth seal clearance after through the air supply return circuit, blow off debris in the labyrinth seal clearance, and it is sealed to flow formation air curtain in the clearance department of supporting seat and closing cap, prevent that external pollutant from entering into inside the motor.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

Fig. 1 shows an overall axial view structure diagram of the present invention;

fig. 2 is a schematic overall axial view in another direction of the present invention;

fig. 3 is a schematic view of the overall front view structure of the present invention;

FIG. 4 is a schematic sectional view in the direction A-A in FIG. 3;

fig. 5 is a schematic axial view of the motor housing according to the present invention;

fig. 6 is a front view schematically illustrating the motor housing according to the present invention;

FIG. 7 is a schematic sectional view in the direction B-B in FIG. 6;

fig. 8 shows a schematic view of a rotor assembly structure of the present invention;

fig. 9 shows a schematic view of the stator assembly structure of the present invention;

fig. 10 is a schematic axial view of the rotating assembly of the present invention;

fig. 11 is a schematic view showing another direction structure of the rotating assembly of the present invention;

fig. 12 is a front view of the rotating assembly of the present invention;

FIG. 13 is a schematic cross-sectional view in the direction C-C in FIG. 12;

fig. 14 is a front view schematically showing the structure of the encoder and the mounting block according to the present invention;

FIG. 15 is a schematic cross-sectional view in the direction D-D in FIG. 14;

FIG. 16 is an axial view of the closure of the present invention;

fig. 17 is a front view of the closure of the present invention;

FIG. 18 is a schematic cross-sectional view in the direction E-E of FIG. 17;

fig. 19 is an enlarged schematic view of a portion F in fig. 4.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.

It should be noted that if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture, and if the specific posture is changed, the directional indications are changed accordingly.

In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, if the meaning of "and/or" and/or "appears throughout, the meaning includes three parallel schemes, for example," A and/or B "includes scheme A, or scheme B, or a scheme satisfying both schemes A and B. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

Referring to fig. 1 to 7, an embodiment of the present invention provides a flat guide wheel motor 100, where the flat guide wheel motor 100 includes:

a motor housing 110, wherein an accommodating channel 111 is formed in a central axis direction of the motor housing 110, and an annular accommodating groove 112 is formed around an outer side of the accommodating channel 111;

a driving module 120 disposed inside the annular receiving groove 112;

the rotating assembly 130 is coaxially arranged inside the accommodating channel 111, and the rotating assembly 130 is connected with the driving module 120; the rotating assembly 120 is rotatable relative to the motor housing 110.

In the present embodiment, the motor housing 110 is used as a main supporting structure of the stator motor 100, and the rotating assembly 130 is coaxially embedded inside the accommodating channel 111 of the motor housing 110, so that compared with the prior art, a coupling structure is omitted, the axial size of the stator motor 100 is shortened, and the applicable range of the stator motor 100 is expanded, especially the application in a narrow space.

Moreover, the motor housing 110 is an integrally formed structure, so that the motor housing 110 has better structural strength and good sealing performance; the driving module 120 is placed by providing the motor housing 110 with the annular receiving groove 112, and the rotating assembly 130 is placed by providing the receiving passage 111 in the motor housing 110. The driving module 120 drives the rotating assembly 130 installed in the receiving channel 111, so that the rotating assembly 130 can rotate relative to the motor housing 110.

Referring to fig. 8 and 9, in one embodiment, the driving module 120 includes a stator assembly 121, and the stator assembly 121 is annularly and fixedly disposed on an outer annular surface of the annular receiving groove 112; and

a rotor assembly 122, the rotor assembly 122 being annularly disposed inside the stator assembly 121 and being rotatable relative to the stator assembly 121.

In the present embodiment, the stator assembly 121 includes a cylindrical stator body 1211 and a stator coil 1212 provided in an up-down direction of the stator body 1211; wherein the stator body 1211 is fixedly connected with the outer annular surface of the annular receiving groove 112; the rotor assembly 122 includes a rotor body 1221 and a permanent magnet unit fixedly disposed outside the rotor body 1221; the rotor body 1221 is disposed in the direction of the inner ring surface close to the ring-shaped accommodation groove 112.

Wherein, the circumference of the rotor body 1221 is provided with a through connection hole, the rotor body 122 is fixed with the rotating component 130 by the screw through connection hole from bottom to top, and the firmness of the connection between the rotor body 122 and the rotating component 130 is ensured by installing a plurality of screws, thereby the rotating component 130 moves synchronously with the rotor component 122,

after the stator assembly 121 is powered on, the stator coil 1212 generates a magnetic moment to drive the rotor assembly 122, so that the rotor assembly 122 rotates relative to the stator assembly 121, and drives the rotating assembly 130 fixed to the rotor assembly 122, so that the rotating assembly 130 and the guide wheel fixed to the support assembly 130 rotate.

Referring to fig. 10-13, in one embodiment, the rotating assembly 130 includes a rotating main shaft 131 and a supporting base 132 disposed above the rotating main shaft 131; the rotating main shaft 131 is rotatably embedded in the accommodating channel 111 through a bearing assembly 140; the support seat 132 is fixedly connected with the rotor assembly 122.

In this embodiment, the rotating assembly 130 includes a rotating main shaft 131 and a supporting base 132 fixedly disposed above the rotating main shaft 131; the main rotating shaft 131 is cylindrical, and the lower end of the main rotating shaft 131 is a first shaft section 1311 with a smaller section radius; the supporting base 132 is in a circular truncated cone shape protruding upwards; the support seat 132 includes a support end surface 1321 for mounting the guide wheel and a connection end surface 1322 connected to the rotation main shaft 131.

Wherein, the rotating main shaft 131 is embedded in the accommodating passage 111, and a bearing assembly 140 is disposed between the first shaft section 1311 and the inner wall surface of the accommodating passage 111; the bearing assembly 140 is mainly used for bearing the radial overturning force applied to the rotating main shaft 131 in the rotating process, ensuring the stability of the rotating main shaft 131 in the rotating process and realizing the stable rotation of the rotating assembly; and preventing the excessive jumping amplitude at the tail end of the rotating main shaft 131 from influencing the rotation angle recording of the rotating main shaft 131 by the encoder 150.

An annular recess 1324 is formed in the connecting end surface 1322 of the support seat 132 along the connecting portion with the rotation main shaft 131, the rotor main body 122 is fixed in the annular recess 1324 by a screw provided from the bottom to the top, and when the rotor main body 122 is mounted, the outer wall surface of the rotor main body 122 abuts against the outer annular surface of the annular recess 1324, so that mounting and positioning can be achieved, mounting errors can be avoided, and the assembly accuracy can be further improved.

In one embodiment, a first annular bump is disposed on an inner wall surface of the accommodating channel 111, and the first annular bump is located on a radial plane of the accommodating channel 111; the bearing assembly 140 is received on the first annular projection; the end surface of the accommodating channel 111 is provided with a first locking block 113, and the locking end surface of the first locking block 113 is abutted against the top end of the bearing assembly 140 and used for locking and fixing the outer annular surface of the bearing assembly 140 on the first annular projection.

In this embodiment, a first annular protrusion is disposed on a radial plane of the inner wall of the accommodating channel 111; the first annular protrusion is used for carrying the bearing assembly 140, and ensures coaxial arrangement among the receiving channel 111, the bearing assembly 140 and the rotating main shaft 131, so as to prevent the rotating assembly 130 from tilting during rotation.

The first locking block 113 is a circular plate, a plurality of stepped holes are formed in the circumferential direction of the first locking block 113, and the first locking block 113 is fixed on the motor housing 110 between the accommodating channel 111 and the circular accommodating groove 112 by screws arranged in the stepped holes; the first locking piece 113 is used to lock and fix the outer annular surface of the bearing assembly 140 downward onto the first annular protrusion.

In one embodiment, the inner annular surface of the bearing assembly 140 is sleeved on the first shaft segment 1311 of the rotating main shaft 131, the end surface of the rotating main shaft 131 is provided with a second locking block 133, and the locking end surface of the second locking block 133 abuts against the bearing assembly 140 to lock and fix the inner annular surface of the bearing assembly 140 on the rotating main shaft 131.

In this embodiment, a first transition surface is formed between the main rotating shaft 131 and the first shaft section 1311, a second shaft section 1312 is disposed below the first shaft section, a second transition surface is formed between the first shaft section 1311 and the second shaft section 1312, the second locking block 133 is an annular plate, and a plurality of stepped holes are disposed in a circumferential direction of the second locking block 133; the second locking block 133 is sleeved on the second shaft section 1312, and the second locking block 133 is fixed on the second transition surface by arranging a screw in the stepped hole. The upper end of the inner annular surface of the bearing assembly 140 abuts the first transition surface, and the second locking piece 133 is used to lock and fix the inner annular surface of the bearing assembly 140 to the first shaft segment 1311.

In one embodiment, the bearing assembly 140 includes at least two bearing members, and the two bearing members are coaxially disposed.

In this embodiment, the bearing component in the bearing component 140 is a deep groove ball bearing, and the bearing component 140 is mainly used for bearing the radial overturning force applied to the rotating main shaft 131 during the rotating process, so as to ensure the stability of the rotating main shaft 131 during the rotating process and realize the stable rotation of the rotating component 130; and prevent the excessive jumping amplitude at the tail end of the rotating main shaft 131 from affecting the rotation angle detection of the rotating main shaft 131 by the encoder 150.

Referring to fig. 10, in one embodiment, a positioning cylinder 1323 is disposed on the supporting end surface 1321 of the supporting seat 132, and an installation screw hole is disposed on the supporting end surface 1321 around the outer side of the positioning cylinder 1323; the connecting end surface 1322 of the supporting seat 132 is provided with an annular concave position 1324; the rotor assembly is fixedly disposed within the annular recess 1324.

In this embodiment, support terminal surface 1321 and be used for installing the guide pulley, specifically, location cylinder 1323 is used for fixing a position guide pulley horizontal direction position in the installation, after the horizontal position of having fixed a position the guide pulley, sets up the screw through the position that corresponds the installation screw hole on the guide pulley, and then assembles the guide pulley on supporting terminal surface 1321.

In the application process, after the stator assembly is powered on, the stator coil 1212 generates a magnetic moment to drive the rotor assembly 122, so that the rotor assembly 122 rotates relative to the stator assembly 121, the rotating assembly 130 fixed to the stator assembly 121 is driven, the rotating assembly 130 and the guide wheels fixed to the supporting end surface 1321 rotate, the cutting lines arranged among the guide wheels move back and forth, and the fixed crystal bar is cut to obtain the required silicon wafer.

In one embodiment, the motor housing 110 has a recess at the bottom coaxial with the receiving channel 111, and a mounting block 114 is disposed in the recess; the mounting block 114 has a convex pillar 1141 extending to the receiving channel 111; the mounting block 114 is internally provided with a cavity, and a through hole is formed on the central axis of the mounting block 114; an encoder 150 is arranged in the cavity; a connecting shaft 134 is arranged at the bottom of the rotating main shaft 131 and penetrates through the through hole to the cavity; the connecting shaft 134 is fixedly connected with a code wheel 151 corresponding to the encoder 150 through a screw.

Referring to fig. 14-15, in the present embodiment, the mounting block 114 is an upward convex circular truncated cone structure; wherein the mounting block 114 is fixed in the recess by a screw, and the stud 1141 of the mounting block 114 is nested in the receiving channel 111. An encoder 150 is fixedly arranged in a cavity inside the convex column 1141, a connecting shaft 134 which is coaxial with the rotating main shaft 131 extends into the cavity through a through hole, and a code wheel 151 corresponding to the encoder 150 is fixed at the tail end of the connecting shaft 134 through a screw. When the rotating main shaft 131 rotates, the code wheel 151 also rotates synchronously, the rotating angle and the rotating speed of the code wheel 151 are detected in real time through the encoder 150, and then the related rotating data of the rotating assembly 130 can be obtained, and further, the cutting speed of the corresponding cutting line can be calculated according to the rotating data of the guide wheel fixed on the rotating assembly 130.

In one embodiment, the motor housing further comprises a cover 160 fixedly arranged on the end face of the motor housing 110; the end face of the cover 160 contacting with the support seat 132 is provided with a positioning groove 161; the end face of the supporting seat 132 contacting with the sealing cover 160 is provided with a positioning projection 1325, and the position of the positioning projection 1325 is matched with the position of the positioning groove 161; the cover 160 is positioned and installed with the positioning projection 1325 of the supporting seat 132 through the positioning groove 161;

and/or a labyrinth seal gap is formed between the contact end surfaces of the cover 160 and the support seat 132.

In this embodiment, the positioning protrusion 1325 and the positioning groove 161 cooperate with each other to ensure the rotation of the rotating assembly 130, and further achieve the position-limiting mounting of the sealing cover 130 and the supporting seat 132, so as to prevent the sealing cover 160 from being mounted in a misaligned position. And a labyrinth gap is formed between the contact end surfaces of the sealing cover 160 and the motor housing 110, so that the path of external impurities entering the guide wheel motor is prolonged.

Referring to fig. 16-18, in one embodiment, an annular fixture block 162 is disposed on a contact end surface of the cover 160 and the motor housing 110, and the cover 160 is positioned and assembled with the motor housing 110 through the annular fixture block 162; the outer wall surface of the annular fixture block 162 is coaxially provided with a groove, and a sealing ring is arranged in the groove; the sealing ring is an O-shaped ring.

In this embodiment, the cover 160 is fixedly mounted on the motor housing 110 by axially disposed screws; the sealing performance of the joint between the cap 160 and the motor housing 110 is improved by the grooves coaxial with the outer wall surface of the annular fixture block 162 and the O-ring disposed in the grooves, so as to prevent gas leakage or foreign substances from entering the interior of the motor.

And the annular fixture block 162 can bear axial acting force to prevent the axial acting force from being applied to the screw to cause the screw to deform or break.

Referring to fig. 2 to 4, in one embodiment, a sealing plate 170 is disposed at a bottom of the motor housing 110, and the sealing plate 170 is used for sealing the motor housing 110; a groove is arranged on the contact end surface of the motor shell 110 and the seal plate 170, and a seal ring is arranged in the groove;

and/or, a first cable connector 171 is arranged on the sealing plate 170 in a penetrating manner, and a wire in the first cable connector 171 is electrically connected with the encoder 150;

and/or a second cable joint 115 is arranged at the bottom of the motor housing 110, and the second cable joint 115 penetrates through the bottom of the annular accommodating groove 112; the wires in the second cable connector 115 are electrically connected to the stator assembly 121.

In this embodiment, the contact end surfaces of the motor housing 110 and the sealing plate 170 are provided with grooves coaxial with the motor housing 110, and O-rings are disposed in the grooves for improving the sealing performance of the joint between the sealing plate 170 and the motor housing 110 and preventing gas leakage or foreign substances from entering the interior of the motor.

And, after supplying power to stator assembly 121 through first cable joint 171, stator coil 1212 produces magnetic moment in order to drive rotor assembly 122, realize that rotor assembly 122 is rotary motion for stator assembly 121, drive the runner assembly 130 fixed with stator assembly 121, make runner assembly 130 and fix the guide pulley on supporting terminal surface 1321 rotate, thereby let the line of cut that sets up between a plurality of guide pulleys do the back and forth motion, cut fixed crystal bar, obtain required silicon chip.

Furthermore, the encoder 150 is powered through the second cable connector 115, when the rotating main shaft 131 rotates, the code wheel 151 also rotates synchronously, the rotating angle and the rotating speed of the code wheel 151 are detected in real time through the encoder 150, and then the related rotating data of the rotating assembly 130 can be obtained, and further, the cutting speed of the corresponding cutting line can be calculated according to the rotating data of the guide wheel fixed on the rotating assembly 130.

Referring to fig. 19, in one embodiment, a first air passage 116 is disposed inside the motor housing 110, and an air inlet of the first air passage 116 is located on an end surface of the motor housing 110; a second air passage 163 is arranged on the sealing cover 160, and an air outlet of the second air passage 163 is located on an inner wall surface of the positioning groove 161; when the motor housing 110 is secured to the cover 160; the first air passage 116 is communicated with the second air passage 163 to form an air supply loop;

and/or an air inlet of the first air path 116 is connected with an air pipe joint 117; the air pipe joint 117 supplies air to the air supply loop, the air flow enters the labyrinth seal gap from the air outlet of the second air path 163, and finally flows out from the gap between the support seat 132 and the sealing cover 160 to form air curtain seal, so that external pollutants are prevented from entering the interior of the motor.

In this embodiment, an air flow with a preset air pressure is supplied into the first air passage 116 through an air pipe joint 117 located at an end face of the motor housing 110, the air flow enters an air supply loop formed by the first air passage 116 and the second air passage 163, then flows out from an air outlet located at a side wall surface of the positioning groove 161 of the second air passage 163, enters a labyrinth seal gap formed between contact end faces of the sealing cover 160 and the supporting seat 132, blows out impurities and the like in the labyrinth seal gap, and finally flows out from a gap between the supporting seat 132 and the sealing cover 160 to form an air curtain seal, so as to prevent external pollutants from entering the interior of the motor.

Referring to fig. 5, in one embodiment, an annular flange plate 118 is disposed outside the motor housing 110, and the annular flange plate 118 is provided with a mounting hole; the annular flange plate 118 is used to secure the idler motor to the cutting apparatus.

In one embodiment, the silicon wafer cutting equipment comprises the flattening guide wheel motor in any one of the embodiments.

In this embodiment, a plurality of idler motors are secured to the cutting apparatus by an annular flange plate 118; through supplying power to drive module 120, stator module 121 wherein is after the circular telegram, stator coil 1212 produces the magnetic moment in order to drive rotor subassembly 122, it is rotary motion to realize rotor subassembly 122 for stator module 121, drive the runner assembly 130 fixed with stator module 121, make runner assembly 130 and fix the guide pulley on supporting terminal surface 1321 and rotate, thereby let the line of cut that sets up between a plurality of guide pulleys do the round trip movement, cut the crystal bar that is fixed, obtain required silicon chip.

The above only be the preferred embodiment of the utility model discloses a not consequently restriction the patent scope of the utility model, all be in the utility model discloses a under the design, utilize the equivalent structure transform of what the content of the description and the attached drawing was done, or direct/indirect application all includes in other relevant technical field the utility model discloses a patent protection is within range.

Claims

1. A flattening guide wheel motor, characterized in that, flattening guide wheel motor includes:

the driving module is arranged inside the annular accommodating groove;

2. The flattened idler motor of claim 1, wherein the rotating assembly includes a rotating spindle and a support base disposed above the rotating spindle; the rotating main shaft is rotatably embedded in the accommodating channel through a bearing assembly.

3. The flattened guide wheel motor according to claim 2, wherein a positioning cylinder is provided on a support end surface of the support base, and a mounting screw hole is provided on the support end surface around an outer side of the positioning cylinder; the connecting end surface of the supporting seat is provided with an annular concave position; the drive module is arranged in the annular concave position.

4. The flattened guide wheel motor according to claim 3, wherein a pit coaxial with the accommodating channel is formed in the bottom of the motor housing, and a mounting block is arranged in the pit; the mounting block is provided with a convex column extending towards the accommodating channel; the mounting block is internally provided with a cavity, and a through hole is formed in the central axis of the mounting block; an encoder is arranged in the cavity; a connecting shaft is arranged at the bottom of the rotating main shaft and penetrates through the through hole to the cavity; the connecting shaft is fixedly connected with a coded disc corresponding to the encoder through a screw.

5. The flattened guide wheel motor according to any one of claims 1-4, further comprising a cover fixedly disposed on an end surface of the motor housing; the end face of the sealing cover, which is in contact with the supporting seat, is provided with a positioning groove; the end face of the supporting seat, which is contacted with the sealing cover, is provided with a positioning lug, and the positioning lug is matched with the positioning groove in position; the sealing cover is positioned and installed with the positioning lug of the supporting seat through the positioning groove;

6. The flattened guide wheel motor as defined in claim 5, wherein an annular clamping block is provided on a contact end surface of the sealing cover and the motor housing, and the sealing cover is positioned and assembled with the motor housing through the annular clamping block; the outer wall surface of the annular fixture block is coaxially provided with a groove, and a sealing ring is arranged in the groove; the sealing ring is an O-shaped ring.

7. The flattened guide wheel motor according to claim 6, wherein a sealing plate is provided at a bottom of the motor housing for sealing the motor housing; a groove is formed in the contact end face of the motor shell and the seal plate, and a seal ring is arranged in the groove;

and/or a first cable joint penetrates through the sealing plate, and a wire in the first cable joint is electrically connected with the encoder;

8. The flattened guide wheel motor as claimed in claim 7, wherein a first air passage is provided inside the motor housing, and an air inlet of the first air passage is located on an end surface of the motor housing; a second air passage is arranged on the sealing cover, and an air outlet of the second air passage is positioned on the inner wall surface of the positioning groove; when the motor shell is fixed with the sealing cover; the first air path is communicated with the second air path to form an air supply loop;

and/or an air inlet of the first air path is connected with an air pipe connector; the air pipe joint supplies air to the air supply loop, the air flow enters the labyrinth seal gap from the air outlet of the second air path, and finally flows out from the gap between the supporting seat and the sealing cover to form air curtain seal, so that external pollutants are prevented from entering the interior of the motor.

9. The flattened guide wheel motor according to claim 8, wherein an annular flange plate is provided on an outer side of the motor housing, and the annular flange plate is provided with a mounting hole; the annular flange plate is used for fixing the guide wheel motor on the cutting equipment.

10. A silicon wafer dicing apparatus comprising the flattened guide wheel motor according to any one of claims 1 to 9.