CN217062824U

CN217062824U - Light beam shaping mechanism for radio frequency carbon dioxide laser

Info

Publication number: CN217062824U
Application number: CN202220834705.3U
Authority: CN
Inventors: 唐友清
Original assignee: Nanjing Crd Laser Technology Co ltd
Current assignee: Nanjing Crd Laser Technology Co ltd
Priority date: 2022-04-12
Filing date: 2022-04-12
Publication date: 2022-07-26
Anticipated expiration: 2032-04-12

Abstract

The utility model discloses a light beam shaping mechanism for a radio frequency carbon dioxide laser, which comprises a first reflector (1), a second reflector (2), a spatial filter (3), a third reflector (4), a fourth reflector (5) and a spherical lens (6) which are arranged along a light path in sequence, the laser device comprises a first reflector (1) used for changing the transmission direction of a rectangular laser beam output by a laser resonant cavity (7), a second reflector (2) used for compressing the divergence angle of the rectangular laser beam and changing the transmission direction for the second time, a spatial filter (3) used for filtering side lobes at the edge of the laser beam, a third reflector (4) used for compressing the divergence angle of the laser beam perpendicular to the generatrix direction of the third reflector and changing the transmission direction for the third time, a fourth reflector (5) used for changing the transmission direction for the fourth time, and a spherical lens (6) capable of enabling the shape of the laser beam to be smooth and forming a round collimated beam with approximate Gaussian distribution. The utility model discloses a mechanism can be circular light beam with the shaping of rectangular beam.

Description

Light beam shaping mechanism for radio frequency carbon dioxide laser

Technical Field

The utility model belongs to the technical field of the beam shaping technique and specifically relates to a can be used for radio frequency carbon dioxide laser's beam shaping mechanism for circular beam with the rectangular beam plastic of laser instrument output.

Background

In laser processing and laser applications, it is often necessary to shape the laser beam to a beam shape that meets the processing requirements. For example, in a radio frequency slab carbon dioxide laser, the cross section of a resonant cavity for generating laser in the slab laser is rectangular, so that the output laser beam is also rectangular, the rectangular laser beam cannot be directly used for laser processing and needs to be shaped, and the rectangular beam is converted into a circular beam by using a light path shaping technology to be output so as to meet the requirements of laser processing application.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the problem that prior art exists, provide a can be with the rectangular beam plastic of laser instrument output for the beam shaping mechanism of radio frequency carbon dioxide laser instrument of circular beam.

The utility model aims at solving through the following technical scheme:

a beam shaping mechanism for a radio frequency carbon dioxide laser is characterized in that: the beam shaping mechanism comprises a first reflector, a second reflector, a spatial filter, a third reflector, a fourth reflector and a spherical lens, wherein the first reflector, the second reflector, the spatial filter, the third reflector, the fourth reflector and the spherical lens are arranged outside a laser resonant cavity and are sequentially arranged along a light path, the first reflector is used for changing the transmission direction of a rectangular laser beam output by a laser output mirror of the laser resonant cavity, the second reflector is used for compressing the divergence angle of the rectangular laser beam and changing the transmission direction of the laser beam for the second time, the spatial filter is used for filtering side lobes at the edge of the laser beam, the third reflector is used for compressing the divergence angle of a laser beam perpendicular to the generatrix direction of the third reflector and changing the transmission direction of the laser beam for the third time, the fourth reflector is used for changing the transmission direction of the laser beam for the fourth time, and the laser beam can be round in shape and form a round collimated beam with approximate Gaussian distribution after passing through the spherical lens.

The first reflector and the second reflector are arranged on the outer side of the laser output mirror at the end part of the laser resonant cavity, the third reflector, the fourth reflector and the spherical lens are arranged on the outer side of the other end of the laser resonant cavity, and the spatial filter arranged beside the laser resonant cavity is positioned between the second reflector and the third reflector and is adjacent to the third reflector; the rectangular laser beam generated by the laser resonant cavity is horizontally output by the laser output mirror, then is reflected by the first reflector and the second reflector in sequence, then is reversely and horizontally incident to the spatial filter, and after the side lobe at the edge of the laser beam is eliminated by the spatial filter, is reflected by the third reflector in sequence and the fourth reflector in sequence, then is incident to the spherical lens, and finally the round laser beam after shaping is output by the spherical lens.

The first reflector and the second reflector are positioned on a first straight line, the second reflector, the spatial filter and the third reflector are positioned on a second straight line, the third reflector and the fourth reflector are positioned on a third straight line, and the first straight line and the third straight line which are parallel to each other are vertical to the second straight line; and the fourth reflector is positioned between the spherical lens and the laser resonant cavity.

The central axis of the first reflector is arranged at an angle of 45 degrees relative to the central axis of the laser output mirror, the central axis of the second reflector is arranged at an angle of 90 degrees relative to the central axis of the first reflector, and the central axis of the second reflector is arranged at an angle of 45 degrees relative to the central axis of the spatial filter, so that the conveying direction of rectangular laser beams horizontally output by the laser output mirror is changed by 180 degrees after the rectangular laser beams are reflected twice by the first reflector and the second reflector; the central axis of the third reflector is arranged at an angle of 45 degrees relative to the central axis of the spatial filter, and the central axis of the third reflector is parallel to the central axis of the fourth reflector, so that the laser beam passing through the spatial filter is reflected by 90 degrees through the third reflector and 90 degrees through the fourth reflector, and then the transmission path is changed, but the transmission direction is not changed.

The distance between the geometric center of the first reflector and the laser output mirror is 110mm, the distance between the geometric center of the first reflector and the geometric center of the second reflector is 86mm, the distance between the geometric center of the second reflector and the spatial filter is 550mm, the distance between the spatial filter and the third reflector is 350mm, the distance between the geometric center of the third reflector and the geometric center of the fourth reflector is 50mm, and the distance between the geometric center of the fourth reflector and the geometric center of the spherical lens is 100 mm.

The space filter is arranged at the focus position of the laser beam, a slit with uniform slit width is arranged on the space filter, and the long edge of the slit is vertical to the electrode plate in the laser resonant cavity; the width of the slit is 1.2-1.5 mm.

And the generatrix of the third reflector is vertical to the long side of the space filter slit.

The first reflector and the fourth reflector are plane reflectors, the plane reflectors are silicon-based total reflectors, and gold films capable of improving laser reflectivity are plated on the surfaces of the silicon-based total reflectors.

The second reflector adopts a concave spherical reflector, and the curvature radius of the concave spherical reflector is 800 mm; the third reflector adopts a concave cylindrical reflector, and the curvature radius of the concave cylindrical reflector is 700 mm.

One side of the spherical lens is a plane, the other side of the spherical lens is a sphere, and the laser beam reflected by the fourth reflector is input from the plane side of the spherical lens and output from the sphere side of the spherical lens.

Compared with the prior art, the utility model has the following advantages:

the utility model discloses a light beam shaping mechanism has realized the plastic of rectangular beam to circular beam through the optical components and parts that set gradually along light path first speculum, the second mirror, spatial filter, third speculum, fourth speculum and the spherical lens, arranges through specific structure promptly for the rectangular beam of radio frequency lath carbon dioxide laser output can convert circular beam into, satisfies the requirement to the laser beam shape in the actual production, so suitable using widely.

Drawings

Fig. 1 is a schematic structural diagram of a beam shaping mechanism for a radio frequency carbon dioxide laser according to the present invention.

Wherein: 1 — a first mirror; 2-a second reflector; 3-a spatial filter; 4-a third mirror; 5-a fourth mirror; 6-spherical lens; 7-laser resonator.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and examples.

As shown in fig. 1: the utility model provides a beam shaping mechanism for radio frequency carbon dioxide laser instrument, this beam shaping mechanism is including setting up in the laser cavity 7 outside and along first speculum 1, second speculum 2, spatial filter 3, third speculum 4, fourth speculum 5 and the spherical lens 6 that the light path set gradually, in the aspect of light path transmission and plastic: the laser beam transmission device comprises a planar first reflector 1, a concave spherical second reflector 2, a spatial filter 3, a concave cylindrical third reflector 4, a planar fourth reflector 5, a spherical lens 6 and a spherical lens 6, wherein the planar first reflector 1 is used for changing the transmission direction of a rectangular laser beam output by a laser output mirror of a laser resonant cavity 7, the concave spherical second reflector 2 is used for compressing the divergence angle of the rectangular laser beam and changing the transmission direction of the laser beam for the second time, the spatial filter 3 arranged at the focal position of the laser beam is used for filtering side lobes at the edge of the laser beam, the concave cylindrical third reflector 4 is used for compressing the divergence angle of the laser beam perpendicular to the generatrix direction of the concave spherical third reflector and changing the transmission direction of the laser beam for the third time, the planar fourth reflector 5 is used for changing the transmission direction of the laser beam for the fourth time, and the laser beam can round collimated beam which can round the shape of the laser beam and form approximate Gaussian distribution after being input from the planar side of the spherical lens 6 and output from the spherical side; in terms of distribution location: the first reflector 1 and the second reflector 2 are arranged on the outer side of a laser output mirror at the end part of a laser resonant cavity 7, the first reflector 1 and the second reflector 2 are positioned on a first straight line, the outer side of the other end of the laser resonant cavity 7 is provided with a third reflector 4, a fourth reflector 5 and a spherical lens 6, the fourth reflector 5 is positioned between the spherical lens 6 and the laser resonant cavity 7, and a spatial filter 3 arranged at the side of the laser resonant cavity 7 is positioned between the second reflector 2 and the third reflector 4 and is adjacent to the third reflector 4; the second reflector 2, the spatial filter 3 and the third reflector 4 are positioned on a second straight line, the third reflector 4 and the fourth reflector 5 are positioned on a third straight line, and the first straight line and the third straight line which are parallel to each other are vertical to the second straight line; the rectangular laser beam generated by the laser resonant cavity 7 is horizontally output by the laser output mirror, then is reflected by the first reflector 1 and is shaped and reflected by the second reflector 2 in sequence, then is reversely and horizontally incident to the spatial filter 3, and is reflected by the spatial filter 3 to eliminate side lobes on the edge of the laser beam so as to improve the quality of the laser beam, and then is reflected by the third reflector 4 and is reflected by the fourth reflector 5 in sequence, and then is incident to the spherical lens 6, and finally the shaped circular laser beam is output by the spherical lens 6.

Furthermore, the central axis of the first reflector 1 is arranged at an angle of 45 degrees with respect to the central axis of the laser output mirror, the central axis of the second reflector 2 is arranged at an angle of 90 degrees with respect to the central axis of the first reflector 1, and the central axis of the second reflector 2 is arranged at an angle of 45 degrees with respect to the central axis of the spatial filter 3, so that the conveying direction of the rectangular laser beam horizontally output by the laser output mirror after twice reflection by the first reflector 1 and the second reflector 2 is changed by 180 degrees; the central axis of the third reflector 4 is arranged at 45 degrees relative to the central axis of the spatial filter 3, and the central axis of the third reflector 4 is parallel to the central axis of the fourth reflector 5, so that the laser beam passing through the spatial filter 3 is reflected by the third reflector 4 for 90 degrees and reflected by the fourth reflector 5 for 90 degrees, and then the transmission path is changed without changing the transmission direction.

Further, the distance between the geometric center of the first mirror 1 and the laser output mirror is 110mm, the distance between the geometric center of the first mirror 1 and the geometric center of the second mirror 2 is 86mm, the distance between the geometric center of the second mirror 2 and the spatial filter 3 is 550mm, the distance between the spatial filter 3 and the third mirror 4 is 350mm, the distance between the geometric center of the third mirror 4 and the geometric center of the fourth mirror 5 is 50mm, and the distance between the geometric center of the fourth mirror 5 and the geometric center of the spherical lens 6 is 100 mm.

In terms of element selection, the first reflector 1 and the fourth reflector 5 are plane reflectors, the plane reflectors are silicon-based total reflectors, and the surfaces of the reflectors are plated with gold films capable of improving laser reflectivity; a slit with uniform slit width is arranged on the spatial filter 3, the long side of the slit is vertical to the electrode plate in the laser resonant cavity 7, and the width of the slit is 1.2-1.5 mm; the second reflector 2 adopts a concave spherical reflector with the curvature radius of 800 mm; the third reflector 4 is a concave cylindrical reflector with a curvature radius of 700mm, and a generatrix of the third reflector 4 is perpendicular to a long side of the slit of the spatial filter 3.

Examples

Use radio frequency lath carbon dioxide laser instrument to give specific embodiment for the light source below, further the detailed description the utility model provides a how a light path plastic is carried out to the rectangle laser beam of carbon dioxide laser instrument output to a beam shaping mechanism for radio frequency carbon dioxide laser instrument.

As shown in fig. 1, a laser resonant cavity 7 of a radio frequency slab carbon dioxide laser is horizontally arranged, a rectangular laser beam is horizontally output by a laser output mirror when the laser operates, the rectangular laser beam enters a first reflector 1 at an angle of 45 °, the distance between the geometric center of the first reflector 1 and the laser output mirror is 110mm, the first reflector 1 is a silicon-based total reflector, a gold film capable of improving the laser reflectivity is plated on the surface of a lens, and the first reflector 1 is used for deflecting the transmission direction of the rectangular laser beam by 90 °.

The rectangular laser beam is reflected by the first reflector 1 and then enters the second reflector 2 at an angle of 45 degrees, the distance between the geometric center of the first reflector 1 and the geometric center of the second reflector 2 is 86mm, the concave spherical reflector is selected as the second reflector 2 to compress the divergence angle of the rectangular laser beam, and the curvature radius of the second reflector 2 is 800 mm; the second reflecting mirror 2 is disposed at an angle of 45 ° to the advancing direction of the rectangular laser beam.

The rectangular laser beam is incident to the spatial filter 3 after being shaped and reflected by the second reflector 2, the width of a slit of the spatial filter 3 is 1.2-1.5mm, preferably 1.3mm, the long edge of the slit is perpendicular to an electrode plate in the laser resonant cavity 7, the spatial filter 3 is perpendicular to the advancing direction of the rectangular laser beam, the distance between the geometric center of the second reflector 2 and the spatial filter 3 is 550mm, the spatial filter 3 filters out side lobes of the rectangular laser beam to obtain a strip laser beam with better quality, the strip laser beam is incident to the third reflector 4 at an angle of 45 degrees, the distance between the spatial filter 3 and the geometric center of the third reflector 4 is 350mm, the curvature radius of the concave cylindrical reflector used as the third reflector 4 is 700mm, the generatrix of the third reflector 4 is perpendicular to the long side of the spatial filter slit, and the third reflector is used for compressing the divergence angle of the strip-shaped laser beam perpendicular to the generatrix direction.

The strip laser beam is reflected by the third reflector 4 and then enters the fourth reflector 5 at an angle of 45 degrees, the fourth reflector 5 is a silicon-based total reflector, the surface of the lens is plated with a gold film capable of improving the laser reflectivity, and the fourth reflector 5 is used for deflecting the transmission direction of the laser beam by 90 degrees.

The laser beam is reflected by the fourth reflector 5 and then vertically enters the spherical lens 6 along the horizontal direction, one side of the spherical lens 6 is a plane, the other side of the spherical lens 6 is a spherical surface, the laser beam reflected by the fourth reflector 5 is input from the plane side and output from the spherical side of the spherical lens 6, the focal length of the spherical lens 6 is 1300mm, and the spherical lens has the functions of enabling the shape of the light beam to be more round and enabling the light beam to have a certain convergence effect on the light intensity distribution of the light beam in the radial direction, so that a round collimated light beam with the light intensity distribution approximate to Gaussian distribution is formed, and the laser processing and application are facilitated.

The above embodiments are only for explaining the technical idea of the present invention, and the protection scope of the present invention cannot be limited thereby, and any modification made on the basis of the technical scheme according to the technical idea provided by the present invention all fall within the protection scope of the present invention; the technology not related to the utility model can be realized by the prior art.

Claims

1. A beam shaping mechanism for a radio frequency carbon dioxide laser is characterized in that: the beam shaping mechanism comprises a first reflector (1), a second reflector (2), a spatial filter (3), a third reflector (4), a fourth reflector (5) and a spherical lens (6), wherein the first reflector (1) is arranged on the outer side of a laser resonant cavity (7) and sequentially arranged along a light path, the first reflector (1) is used for changing the transmission direction of a rectangular laser beam output by a laser output mirror of the laser resonant cavity (7), the second reflector (2) is used for compressing the divergence angle of the rectangular laser beam and changing the transmission direction of the laser beam for two times, the spatial filter (3) is used for filtering out side lobes at the edge of the laser beam, the third reflector (4) is used for compressing the divergence angle of the laser beam perpendicular to the generatrix direction of the third reflector and changing the transmission direction of the laser beam for three times, the fourth reflector (5) is used for changing the transmission direction of the laser beam for four times, and the laser beam can enable the shape of the laser beam to be round and form a round collimated beam which is approximately Gaussian distribution after passing through the spherical lens (6).

2. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in claim 1, wherein: the first reflector (1) and the second reflector (2) are arranged on the outer side of a laser output mirror at the end part of a laser resonant cavity (7), a third reflector (4), a fourth reflector (5) and a spherical lens (6) are arranged on the outer side of the other end of the laser resonant cavity (7), and a spatial filter (3) arranged beside the laser resonant cavity (7) is positioned between the second reflector (2) and the third reflector (4) and is adjacent to the third reflector (4); the rectangular laser beam generated by the laser resonant cavity (7) is horizontally output by the laser output mirror, then is reflected by the first reflector (1) and the second reflector (2) in sequence, then is reversely and horizontally incident to the spatial filter (3), and after the side lobe of the edge of the laser beam is eliminated by the spatial filter (3), is reflected by the third reflector (4) in sequence in a shaping way and the fourth reflector (5) in sequence, then is incident to the spherical lens (6), and finally the shaped circular laser beam is output by the spherical lens (6).

3. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in claim 2, wherein: the first reflector (1) and the second reflector (2) are positioned on a first straight line, the second reflector (2), the spatial filter (3) and the third reflector (4) are positioned on a second straight line, the third reflector (4) and the fourth reflector (5) are positioned on a third straight line, and the first straight line and the third straight line which are parallel to each other are perpendicular to the second straight line; and the fourth reflector (5) is positioned between the spherical lens (6) and the laser resonant cavity (7).

4. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in claim 1, wherein: the central axis of the first reflector (1) is arranged at an angle of 45 degrees relative to the central axis of the laser output mirror, the central axis of the second reflector (2) is arranged at an angle of 90 degrees relative to the central axis of the first reflector (1), and the central axis of the second reflector (2) is arranged at an angle of 45 degrees relative to the central axis of the spatial filter (3), so that the conveying direction of rectangular laser beams horizontally output by the laser output mirror and reflected twice by the first reflector (1) and the second reflector (2) is changed by 180 degrees; the central axis of the third reflector (4) is arranged at an angle of 45 degrees relative to the central axis of the spatial filter (3), and the central axis of the third reflector (4) is parallel to the central axis of the fourth reflector (5), so that the laser beam passing through the spatial filter (3) is reflected by the third reflector (4) for 90 degrees and the laser beam passing through the spatial filter (3) is reflected by the fourth reflector (5) for 90 degrees, and then the transmission path is changed, but the transmission direction is not changed.

5. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in claim 1, wherein: the distance between the geometric center of the first reflecting mirror (1) and the laser output mirror is 110mm, the distance between the geometric center of the first reflecting mirror (1) and the geometric center of the second reflecting mirror (2) is 86mm, the distance between the geometric center of the second reflecting mirror (2) and the spatial filter (3) is 550mm, the distance between the spatial filter (3) and the third reflecting mirror (4) is 350mm, the distance between the geometric center of the third reflecting mirror (4) and the geometric center of the fourth reflecting mirror (5) is 50mm, and the distance between the geometric center of the fourth reflecting mirror (5) and the geometric center of the spherical lens (6) is 100 mm.

6. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in any one of claims 1 to 5, wherein: the spatial filter (3) is arranged at the focus position of the laser beam, a slit with uniform slit width is arranged on the spatial filter (3), and the long edge of the slit is vertical to an electrode plate in the laser resonant cavity (7); the width of the slit is 1.2-1.5 mm.

7. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in claim 6, wherein: and the generatrix of the third reflector (4) is vertical to the long side of the slit of the spatial filter (3).

8. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in any one of claims 1 to 5, wherein: the first reflector (1) and the fourth reflector (5) are plane reflectors, silicon-based total reflectors are selected for the plane reflectors, and gold films capable of improving laser reflectivity are plated on the surfaces of the reflectors.

9. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in any one of claims 1 to 5, wherein: the second reflector (2) adopts a concave spherical reflector, and the curvature radius of the concave spherical reflector is 800 mm; the third reflector (4) adopts a concave cylindrical reflector, and the curvature radius of the concave cylindrical reflector is 700 mm.

10. The beam shaping mechanism for a radio frequency carbon dioxide laser as claimed in any one of claims 1 to 5, wherein: one side of the spherical lens (6) is a plane, the other side of the spherical lens is a spherical surface, and the laser beams reflected by the fourth reflecting mirror (5) are input from the plane side and output from the spherical side of the spherical lens (6).