CN217062029U - Novel nitrogen blowing plate - Google Patents
Novel nitrogen blowing plate Download PDFInfo
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- CN217062029U CN217062029U CN202220865516.2U CN202220865516U CN217062029U CN 217062029 U CN217062029 U CN 217062029U CN 202220865516 U CN202220865516 U CN 202220865516U CN 217062029 U CN217062029 U CN 217062029U
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Abstract
The utility model discloses a novel nitrogen-blowing plate, which comprises a nitrogen-blowing plate main body, a transverse air inlet, a longitudinal air inlet, a transverse flat through hole, a longitudinal flat through hole, a transverse exhaust hole and a longitudinal exhaust hole, wherein the transverse air inlet is arranged in the transverse direction of the nitrogen-blowing plate main body and is connected with the transverse flat through hole, and the transverse exhaust hole is arranged on the transverse flat through hole; the longitudinal direction of the nitrogen blowing plate main body is provided with a longitudinal air inlet and is connected with a longitudinal flat through hole, and the longitudinal flat through hole is provided with a longitudinal exhaust hole. The utility model discloses can guarantee completely that the homogeneity of solution temperature and the problem of solving chip surface and getting rid of the bubble in the corrosion process improve technology yield to can gain good economic benefits. The utility model discloses at present be applied to in the actual technology production process, the yield is high, practice thrift cost, respond well.
Description
Technical Field
The utility model relates to a semiconductor device manufacturing technical field's a novel drum nitrogen board of improvement technology yield.
Background
At present, the corrosion process cannot be separated in the production and manufacturing of semiconductor devices at home and abroad, and the nitrogen-bulging plate is a key accessory in the production equipment of the corrosion process and is generally carried by the corrosion equipment, but the nitrogen-bulging plate is a conventional product, so that the nitrogen-bulging plate has strong applicability but insufficient specialty. Two problems have been prone to occur during previous etching processes: 1. the problem of solution temperature uniformity 2 and the problem of bubble adhesion to the chip surface. Particularly, in a metal corrosion process, the corrosive liquid needs to be heated to a certain temperature, a large amount of bubbles are generated by the reaction of metal and the corrosive liquid and are attached to the surface of a chip, if the temperature of the corrosive liquid is uneven and the bubbles on the surface of the chip are not removed, a large amount of defective products are generated, and the rate of finished products is greatly reduced. Most of the existing nitrogen blowing plates are of single-air-inlet and inverted-V-shaped structures, and round air outlets, so that the actual technological requirements are difficult to meet no matter the strength of the air output or the density (nitrogen blowing area) of air outlet holes, and the problems are difficult to solve.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a novel drum nitrogen board.
The utility model adopts the technical proposal that: a novel nitrogen blowing plate comprises a nitrogen blowing plate main body, a transverse air inlet, a longitudinal air inlet, a transverse flat through hole, a longitudinal flat through hole, a transverse exhaust hole and a longitudinal exhaust hole, wherein the transverse air inlet is arranged in the transverse direction of the nitrogen blowing plate main body and connected with the transverse flat through hole, and the transverse exhaust hole is arranged on the transverse flat through hole; the longitudinal direction of the nitrogen blowing plate main body is provided with a longitudinal air inlet and is connected with a longitudinal flat through hole, and the longitudinal flat through hole is provided with a longitudinal exhaust hole.
The nitrogen-blowing plate main body is of a grid-shaped structure.
The number of the transverse air inlets and the number of the longitudinal air inlets are 1-4.
The transverse flat through hole is an independent transverse nitrogen passage, the longitudinal flat through hole is a longitudinal nitrogen passage and is of a structure in a shape like a Chinese character 'shan', and the longitudinal flat through hole and the transverse flat through hole are divided into an upper layer and a lower layer to prevent the transverse flat through hole from being communicated with the longitudinal flat through hole nitrogen passage.
The utility model discloses can guarantee completely that the homogeneity of solution temperature and the problem of solving chip surface and getting rid of the bubble in the corrosion process improve technology yield to can gain good economic benefits. The utility model discloses in having been applied to actual technology production process at present, the yield is high, practice thrift cost, respond well.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The utility model provides a novel nitrogen plate of drum, includes nitrogen plate main part 1, horizontal air inlet 2, vertical air inlet 3, horizontal flat through-hole 4, vertical flat through-hole 5, horizontal exhaust hole 6, vertical exhaust hole 7 of drum. A transverse air inlet 2 is arranged in the transverse direction of the nitrogen blowing plate main body 1 and is connected with a transverse flat through hole 4, and a transverse exhaust hole 6 is arranged on the transverse flat through hole 4; the nitrogen blowing plate main body 1 is provided with a longitudinal air inlet 3 in the longitudinal direction and is connected with a longitudinal flat through hole 5, and the longitudinal flat through hole 5 is provided with a longitudinal exhaust hole 7.
1. The utility model discloses a design point:
(1) drum nitrogen plate main body 1: the material is polytetrafluoroethylene, and is specially designed into a grid-shaped structure for increasing the nitrogen area of the drum.
(2) The transverse air inlets 2 supply nitrogen to the transverse flat through holes 4, and 2 transverse air inlets 2 are specially designed for increasing air quantity. 2 horizontal air inlets correspond to 2 horizontal flat through-holes 4.
(3) The longitudinal air inlets 3 supply nitrogen to the longitudinal flat through holes 5, and 2 longitudinal air inlets 3 are specially designed for increasing air quantity.
(4) The transverse flat through hole 4 is 2 independent transverse nitrogen passages. Reasons for selecting the flat hole: on one hand, the device is used for increasing the pressure of the discharged gas, and on the other hand, the device is used for reducing the thickness of the nitrogen blowing plate and saving materials.
(5) The longitudinal flat through hole 5 is a longitudinal nitrogen passage which is in a structure like a Chinese character 'shan' and is designed with an upper layer and a lower layer of the transverse flat through hole 4 to prevent the transverse flat through hole from being communicated with the longitudinal flat through hole nitrogen passage.
(6) The transverse exhaust holes 6: for nitrogen venting and bubbling.
(7) Longitudinal exhaust holes 7: for nitrogen venting and bubbling.
2. Actual effect
The utility model discloses in having been applied to actual technology production process at present, owing to adopt 4 air inlets, flat hole to increase drum nitrogen intensity, through field style of calligraphy structure increase drum nitrogen area simultaneously, solved the problem that solution temperature homogeneity and bubble adhere to the chip surface, improve the yield greatly, gain good economic benefits, respond well.
3. Conclusion
The utility model provides a two problems that appear in the corrosion process before: 1. the problem of solution temperature uniformity and the problem of bubble adhesion on the surface of a chip. The utility model discloses at present be applied to in the actual technology production process, safe and reliable, practice thrift the cost, respond well.
Claims (4)
1. The utility model provides a novel drum nitrogen board, includes drum nitrogen board main part (1), horizontal air inlet (2), vertical air inlet (3), horizontal flat through-hole (4), vertical flat through-hole (5), horizontal exhaust hole (6), vertical exhaust hole (7), its characterized in that: a transverse air inlet (2) is arranged in the transverse direction of the nitrogen blowing plate main body (1) and is connected with a transverse flat through hole (4), and a transverse exhaust hole (6) is arranged on the transverse flat through hole (4); a longitudinal air inlet (3) is formed in the longitudinal direction of the nitrogen blowing plate main body (1) and connected with a longitudinal flat through hole (5), and a longitudinal exhaust hole (7) is formed in the longitudinal flat through hole (5).
2. The novel nitrogen drum plate as claimed in claim 1, wherein: the nitrogen-blowing plate main body (1) is of a grid-shaped structure.
3. The novel nitrogen drum plate as claimed in claim 1, wherein: the number of the transverse air inlets (2) and the number of the longitudinal air inlets (3) are 1-4.
4. The novel drum nitrogen plate as claimed in claim 1, wherein: the transverse flat through hole (4) is an independent transverse nitrogen passage, the longitudinal flat through hole (5) is a longitudinal nitrogen passage and is of a structure in the shape of a Chinese character 'shan', and the longitudinal flat through hole (5) and the transverse flat through hole (4) are divided into an upper layer and a lower layer to prevent the transverse flat through hole from being communicated with the longitudinal flat through hole nitrogen passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220865516.2U CN217062029U (en) | 2022-04-15 | 2022-04-15 | Novel nitrogen blowing plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220865516.2U CN217062029U (en) | 2022-04-15 | 2022-04-15 | Novel nitrogen blowing plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217062029U true CN217062029U (en) | 2022-07-26 |
Family
ID=82471316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220865516.2U Active CN217062029U (en) | 2022-04-15 | 2022-04-15 | Novel nitrogen blowing plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217062029U (en) |
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2022
- 2022-04-15 CN CN202220865516.2U patent/CN217062029U/en active Active
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