CN217615400U - Oxidation furnace uniform spraying device - Google Patents
Oxidation furnace uniform spraying device Download PDFInfo
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- CN217615400U CN217615400U CN202220608789.9U CN202220608789U CN217615400U CN 217615400 U CN217615400 U CN 217615400U CN 202220608789 U CN202220608789 U CN 202220608789U CN 217615400 U CN217615400 U CN 217615400U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses an oxidation furnace evenly sprays device, it includes: the gas mixing cylinder comprises a gas mixing cylinder body, a pipe joint, a first gas distribution pipe and a second gas distribution pipe, wherein the first gas distribution pipe and the second gas distribution pipe are arranged in the gas mixing cylinder body in parallel, a first cover plate is arranged at the front end of the gas mixing cylinder body, a second cover plate is arranged at the tail end of the gas mixing cylinder body, a first gas supply pipe penetrating through the first cover plate is arranged between the pipe joint and the front end of the first gas distribution pipe, a second gas supply pipe penetrating through the second cover plate is arranged between the pipe joint and the tail end of the second gas distribution pipe, gas distribution holes are formed in the first gas distribution pipe and the second gas distribution pipe at intervals, and at least one row of spraying holes are formed in the bottom of the gas mixing cylinder at intervals. Oxidation furnace spray header, first gas distribution pipe and second gas distribution pipe have designed very much, offset the difference of giving vent to anger of gas distribution hole to utilize the gas mixing cylinder to mix gas, ensure the atmospheric pressure homogeneity, spout through spraying the hole at last.
Description
Technical Field
The utility model relates to an oxidation furnace equipment field especially relates to an oxidation furnace evenly sprays device.
Background
In order to protect the memory devices on the semiconductor wafer, an oxidation furnace may be used to form an oxide layer on the semiconductor wafer through an oxidation process.
In order to improve the safety of the oxidation furnace during operation, inert gas, such as argon, can be introduced for protection. In the prior art, a spray pipe is installed in the oxidation furnace, and the inert gas is distributed through the spray pipe. The utility model discloses an application number 2017209024458's utility model discloses an evenly spray's quartzy diffusion furnace of photovoltaic silicon chip, the pipe wall of shower is opened has a plurality of holes that spray, and the diameter of spraying the hole nearer apart from quartzy diffusion furnace head is greater than the diameter of spraying the hole nearer apart from quartzy diffusion furnace afterbody, solves the shower and sprays inhomogeneous problem, but in fact, the diameter change that sprays the hole is difficult to calculate, sprays inhomogeneous problem and is difficult to solve.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an oxidation furnace evenly spray set need not the diameter change that sprays the hole, reduces the processing degree of difficulty, promotes the homogeneity that sprays of protective gas.
To achieve the purpose, the utility model adopts the following technical proposal:
an oxidation furnace uniform spray device comprises: the gas mixing cylinder comprises a gas mixing cylinder body, a pipe joint, a first gas distribution pipe and a second gas distribution pipe, wherein the first gas distribution pipe and the second gas distribution pipe are arranged in the gas mixing cylinder body in parallel, a first cover plate is arranged at the front end of the gas mixing cylinder body, a second cover plate is arranged at the tail end of the gas mixing cylinder body, a first gas supply pipe penetrating through the first cover plate is arranged between the pipe joint and the front end of the first gas distribution pipe, a second gas supply pipe penetrating through the second cover plate is arranged between the pipe joint and the tail end of the second gas distribution pipe, gas distribution holes are formed in the first gas distribution pipe and the second gas distribution pipe at intervals, and at least one row of spraying holes are formed in the bottom of the gas mixing cylinder at intervals.
Wherein, the pipe joint adopts a three-way pipe joint.
Wherein, the air distribution hole is positioned at the top of the first air distribution pipe and the second air distribution pipe.
The first air distribution pipe and the second air distribution pipe are located between the first cover plate and the second cover plate.
Wherein, the cross section of the gas mixing cylinder adopts a waist hole-shaped structure.
The first gas distribution pipe and the second gas distribution pipe are horizontally arranged in the gas mixing cylinder at intervals.
The utility model has the advantages that: the utility model provides an oxidation furnace spray header, the specially designed first gas distribution pipe and second gas distribution pipe to utilize first air supply pipe and second air supply pipe to carry out the air feed from the difference end of first gas distribution pipe and second gas distribution pipe respectively, offset the difference of giving vent to anger of gas distribution hole, and utilize the gas mixing cylinder to mix the gas, ensure the homogeneity, spout through spraying the hole at last, promoted protective gas's the homogeneity that sprays.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a sectional view of the gas mixing cylinder of fig. 1.
Detailed Description
The technical solution of the present invention is further explained by the specific embodiment with reference to fig. 1 to fig. 2.
The uniform spraying device of the oxidation furnace shown in fig. 1 and fig. 2 comprises: gas mixing cylinder 3, coupling 8, first gas distribution pipe 1 and second gas distribution pipe 2 parallel arrangement are in gas mixing cylinder 3, in this embodiment, gas mixing cylinder 3 cross-section adopts waist hole shape structure, makes horizontal interval sets up in gas mixing cylinder 3 about first gas distribution pipe 1 and the second gas distribution pipe 2.
The front end of the gas mixing cylinder 3 is provided with a first cover plate 9, and the tail end of the gas mixing cylinder 3 is provided with a second cover plate 10 for welding and sealing. In this embodiment, the first air distribution pipe 1 and the second air distribution pipe 2 are located between the first cover plate 9 and the second cover plate 10, the first air distribution pipe 1, the second air distribution pipe 2 and the air mixing cylinder 3 have the same length, and the first cover plate 9 and the second cover plate 10 can be used for plugging two ends of the first air distribution pipe 1 and the second air distribution pipe 2.
A first air supply pipe 6 penetrating through a first cover plate 9 is arranged between the pipe joint 8 and the front end of the first air distribution pipe 1, a second air supply pipe 7 penetrating through a second cover plate 10 is arranged between the pipe joint 8 and the tail end of the second air distribution pipe 1, and in the embodiment, the diameters and the length specifications of the first air supply pipe 6 and the second air supply pipe 7 are the same, so that the same air supply pressure of the first air distribution pipe 1 and the second air distribution pipe 2 is favorably ensured.
In this embodiment, the pipe joint 8 is a three-way pipe joint, which is externally connected with a protective gas supply pipeline and sends the protective gas into the first gas distribution pipe 1 and the second gas distribution pipe 2.
The air distribution holes 4 are formed in the first air distribution pipe 1 and the second air distribution pipe 2 at intervals, the intervals and the diameters of the air distribution holes 4 are the same, the diameter does not need to be changed, and the processing is convenient. The first air supply pipe 6 and the second air supply pipe 7 are used for supplying air from different ends of the first air distribution pipe 1 and the second air distribution pipe 2, so that the problem of air outlet difference of the far-end air distribution hole 4 and the near-end air distribution hole 4 is solved.
In the embodiment, the gas distribution holes 4 are located at the top of the first gas distribution pipe 1 and the second gas distribution pipe 2, which is beneficial for the protective gas discharged from the gas distribution holes 4 of the first gas distribution pipe 1 and the second gas distribution pipe 2 to be fully mixed in the gas mixing cylinder 3, so as to ensure the uniformity of the gas pressure.
At least one row of spraying holes 5 are formed in the bottom of the gas mixing cylinder 3 at intervals, in the embodiment, 2 rows of spraying holes 5 are adopted for uniformly spraying the protective gas, the coverage area is large, and the gas mixing cylinder is installed in an oxidation furnace and is beneficial to the safe operation of the oxidation furnace.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (6)
1. The utility model provides an oxidation furnace spray header, its characterized in that includes: the gas mixing cylinder comprises a gas mixing cylinder body, a pipe joint, a first gas distribution pipe and a second gas distribution pipe, wherein the first gas distribution pipe and the second gas distribution pipe are arranged in the gas mixing cylinder body in parallel, a first cover plate is arranged at the front end of the gas mixing cylinder body, a second cover plate is arranged at the tail end of the gas mixing cylinder body, a first gas supply pipe penetrating through the first cover plate is arranged between the pipe joint and the front end of the first gas distribution pipe, a second gas supply pipe penetrating through the second cover plate is arranged between the pipe joint and the tail end of the second gas distribution pipe, gas distribution holes are formed in the first gas distribution pipe and the second gas distribution pipe at intervals, and at least one row of spraying holes are formed in the bottom of the gas mixing cylinder at intervals.
2. The oxidation oven sparger assembly of claim 1 wherein said pipe connection comprises a three-way pipe connection.
3. The oxidation furnace sprinkling apparatus according to claim 1, wherein the air distribution holes are located at the top of the first air distribution pipe and the second air distribution pipe.
4. The oxidation furnace sparger device as set forth in claim 1, wherein the first and second gas distribution pipes are located between the first and second cover plates.
5. The oxidation furnace uniform spraying device according to claim 1, wherein the cross section of the gas mixing cylinder adopts a kidney-shaped structure.
6. The oxidation furnace sprinkling apparatus according to claim 1, wherein the first gas distribution pipe and the second gas distribution pipe are horizontally spaced apart from each other in the gas mixture cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220608789.9U CN217615400U (en) | 2022-03-21 | 2022-03-21 | Oxidation furnace uniform spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220608789.9U CN217615400U (en) | 2022-03-21 | 2022-03-21 | Oxidation furnace uniform spraying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217615400U true CN217615400U (en) | 2022-10-21 |
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ID=83645275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220608789.9U Active CN217615400U (en) | 2022-03-21 | 2022-03-21 | Oxidation furnace uniform spraying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217615400U (en) |
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2022
- 2022-03-21 CN CN202220608789.9U patent/CN217615400U/en active Active
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