CN217060263U - Vacuum sample transfer vehicle and vacuum system - Google Patents

Abstract

The utility model provides a vacuum sample transmission car and vacuum system, include: a vehicle body; the sliding assembly is connected with the vehicle body and is used for enabling the vehicle body to move along the rail; the transmission assembly is connected with the vehicle body and is used for driving the vehicle body to move along the track; one or more carry the appearance platform, set up on the automobile body, carry the appearance platform and include: the platform body is arranged on the vehicle body; and one or more brackets provided on the stage body in a circumferential direction of the stage body for carrying the sample such that at least a portion of the sample extends outward from the stage side.

Description

Vacuum sample transfer vehicle and vacuum system

Technical Field

The disclosure relates to the technical field of vacuum sample transmission, in particular to a vacuum sample transmission vehicle and a vacuum system.

Background

The vacuum sample transmission technology is widely applied to the fields of vacuum, ultrahigh vacuum, surface science, aerospace, semiconductors and the like. Vacuum sample transfer is mainly to interconnect different vacuum systems, so that a sample can be transferred to different processing systems or analysis systems under a vacuum environment. The interconnected vacuum systems have large structures, and generally, after a sample is processed or analyzed at one device or instrument, the sample needs to be transferred to another device or instrument for further processing or analysis, and the sample can only be transferred by the sample transfer vehicle passing through the vacuum pipeline.

In the prior art, a vacuum sample transfer vehicle bears a sample through a circular or hexagonal tray, and the sample is clamped with the tray together in a flat state by matching with the shape of the tray. After the sample conveying vehicle reaches the designated position, the sample conveying vehicle needs to be matched with the grabbing device and the lifting device, sample transfer is completed through at least six steps, the steps are complicated, the operation is inconvenient, and the sample falling risk is increased.

SUMMERY OF THE UTILITY MODEL

The present disclosure provides a vacuum sample transfer vehicle, comprising: a vehicle body; the sliding assembly is connected with the vehicle body and is used for enabling the vehicle body to move along the rail; the transmission assembly is connected with the vehicle body and is used for driving the vehicle body to move along the track; one or more carry the appearance platform, set up on the automobile body, carry the appearance platform and include: the platform body is arranged on the vehicle body; and one or more brackets provided on the stage body along a circumferential direction of the stage body, for supporting the sample such that at least a portion of the sample extends outward from the side surface of the stage body.

In some embodiments, one or more sample platforms are rotatably mounted to the vehicle body.

In some embodiments, the sample stage further comprises: the rotating shaft is fixedly connected with the platform body and is rotatably arranged on the vehicle body.

In some embodiments, the vacuum sampling car further comprises: and a rotating bearing which is arranged on the vehicle body and enables the rotating shaft to be arranged on the vehicle body in a rotating way.

In some embodiments, the vacuum sampling car further comprises: and a rotation bearing which is arranged on the vehicle body and connected with the rotation shaft to enable the rotation shaft to be arranged on the vehicle body in a rotating mode.

In some embodiments, the vacuum sampling car further comprises: the mount pad sets up on the automobile body, and during the mount pad was worn to establish in the bottom of rotation axis, the bottom of rotation axis included a plurality of positioning depression, the mount pad include with a plurality of positioning depression complex protruding.

In some embodiments, the mount further comprises: and the elastic mechanism is connected with the bulge so that the bulge elastically protrudes from the inner surface of the mounting seat.

In some embodiments, the rotating shaft comprises: and the adjusting structure is arranged at the top of the rotating shaft or the table body and used for rotating the rotating shaft.

In some embodiments, the stage includes: a through hole for receiving the rotation shaft; and one or more mounting waist holes for fixedly connecting with the rotating shaft.

In some embodiments, the one or more stages comprise: the cross section is at least one of a cylinder with a circle, an ellipse, a triangle, a rectangle and a polygon, and the one or more brackets comprise a plurality of brackets extending outwards along the radial direction of the table body and/or a plurality of grooves extending along the radial direction of the table body.

In some embodiments, the bracket comprises a U-shaped frame, and both sides of the U-shaped frame are provided with grooves matched with the sample.

In some embodiments, the carrier further comprises: and the support frame is sleeved outside the U-shaped frame and used for supporting the U-shaped frame.

In some embodiments, the slide assembly comprises: the multiunit movable pulley sets up in the automobile body below, and/or transmission assembly includes: the mounting frame is arranged on the vehicle body; and the transmission magnetic assembly is arranged at the bottom of the mounting frame.

The present disclosure provides a vacuum system comprising: the vacuum cavity and the track are arranged in the vacuum cavity; the vacuum sample transferring vehicle is arranged on the track; and the driving assembly is arranged outside the vacuum cavity, is coupled with the transmission assembly of the vacuum sample transmission vehicle and is used for driving the vacuum sample transmission vehicle to move along the track.

The vacuum sample transfer vehicle according to some embodiments of the present disclosure can bring beneficial technical effects. For example, according to this sample car is passed in vacuum of some embodiments of this disclosure can solve and pass the problem such as the appearance step is loaded down with trivial details, the sample risk height that falls in the sample transportation among the conventional technology, can realize stably passing appearance, the convenient technological effect of sample.

A vacuum system according to some embodiments of the present disclosure can bring about beneficial technical effects. For example, according to the vacuum system of some embodiments of this disclosure, can solve in the conventional art that to pass a kind step loaded down with trivial details, in the sample transportation process fall kind risk high, pass kind inefficiency, cause production or experimental inefficiency scheduling problem then, can realize passing kind simple, sample transportation is steady, reduce the technological effect of falling kind risk.

Drawings

In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present disclosure, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 illustrates a schematic structural view of a vacuum proofing vehicle according to some embodiments of the present disclosure;

FIG. 2 illustrates a side exploded view of a vacuum proofing vehicle according to some embodiments of the present disclosure;

FIG. 3 illustrates a schematic structural view of a sample stage according to some embodiments of the present disclosure;

figure 4 illustrates an exploded view of a configuration of a sample carrier according to some embodiments of the present disclosure;

FIG. 5 illustrates a schematic structural view of a rotating shaft according to some embodiments of the present disclosure;

fig. 6 illustrates a schematic structural view of a vacuum system according to some embodiments of the present disclosure.

In the above drawings, the respective reference numerals denote:

100 vacuum sample transferring vehicle

10 vehicle body

20 sliding assembly

21. 21a, 21b slide wheel

30 drive assembly

31. 31a, 31b mounting bracket

32. 32a, 32b driving magnet assembly

40 sample loading platform

41 table body

411 through hole

412. 412a, 412b, 412c waist-mounting holes

42. 42a, 42b, 42c, 42d bracket

421a, 421b, 421c, 421d U type frame

422a, 422b, 422c, 422d support frame

43 rotating shaft

431. 431a, 431b positioning recess

432 adjustment structure

50 rotating bearing

60 mounting seat

61 elastic mechanism

200 vacuum chamber

300 orbit

400 drive assembly

Detailed Description

Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the disclosure and are not exhaustive.

In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly and may be, for example, a fixed connection or a removable connection; can be mechanically or electrically connected; the connection can be direct connection or indirect connection through an intermediate medium; there may be communication between the interiors of the two elements. The specific meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.

Fig. 1 illustrates a schematic structural view of a vacuum sampling cart 100 according to some embodiments of the present disclosure. Fig. 2 illustrates a side exploded view of the vacuum proofing vehicle 100 according to some embodiments of the present disclosure.

As shown in fig. 1 and 2, the vacuum proofing vehicle 100 may include a vehicle body 10, a slide assembly 20, a drive assembly 30, and one or more sample stages 40. The slide assembly 20 is coupled to the vehicle body 10 and can be used to move the vehicle body 10 along a track 300 (shown in fig. 6). The transmission assembly 30 is connected to the vehicle body 10 and can be used for driving the vehicle body 10 to move along a track. One or more sample stages 40 are provided on the vehicle body 10. The sample stage 40 may include a stage body 41 and one or more carriages 42 (e.g., carriages 42a, 42b, 42c, 42 d). Table body 41 is provided on vehicle body 10, and one or more brackets 42 (e.g., brackets 42a, 42b, 42c, 42d), which are provided on table body 41 (e.g., a side surface of table body 41) in the circumferential direction of table body 41, are used to carry a sample (e.g., sample 500) such that at least a portion of the sample extends outward from the side surface of table body 41.

Fig. 3 illustrates a schematic structural view of a sample stage 40 according to some embodiments of the present disclosure. Fig. 4 illustrates an exploded view of a configuration of a sample stage 40 according to some embodiments of the present disclosure.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, one or more sample platforms 40 are rotatably disposed on the vehicle body 10. The sample stage 40 is capable of rotating relative to the vehicle body 10 to align any one of the brackets 42 (e.g., brackets 42a, 42b, 42c, 42d) with the sampling device to facilitate sampling.

It will be understood by those skilled in the art that although only one sample stage 40 is shown in fig. 1 and 2, the number of sample stages 40 may be more than one, and the arrangement may be set according to specific requirements.

Fig. 5 illustrates a schematic structural view of the rotating shaft 43 according to some embodiments of the present disclosure.

As shown in fig. 2 and 5, in some embodiments of the disclosure, the sample stage 40 may further include a rotating shaft 43 fixedly connected to the stage body 41 and rotatably disposed on the vehicle body 10.

As shown in fig. 5, a rotary shaft 43 is inserted into the table body 41, and the table body 41 is rotated relative to the vehicle body 10 by the rotary shaft 43.

It will be understood by those skilled in the art that although the rotating shaft 43 is shown in fig. 1 and 2 as being inserted into the table body 41, the table body 41 is also fixedly disposed on top of the rotating shaft 43.

As shown in fig. 2, in some embodiments of the present disclosure, the vacuum proof cart 100 may further include a rotation bearing 50 disposed on the cart body 10 and connected to the rotation shaft 43 such that the rotation shaft 43 is rotatably disposed on the cart body 10.

As shown in fig. 2, the pivot bearing 50 may be embedded in the vehicle body 10. For example, the upper surface of the rotation bearing 50 and the upper surface of the vehicle body 10 may be located on the same horizontal plane. In some embodiments of the present disclosure, the rotation bearing 50 may be provided on the upper surface of the vehicle body 10. The lower end of the rotating shaft 43 is inserted into the pivot bearing 50, and can be engaged with the pivot bearing 50 to pivot the rotating shaft 43 relative to the vehicle body 10, thereby rotating the table body 41 relative to the vehicle body 10.

As shown in fig. 2, in some embodiments of the present disclosure, the vacuum sampling vehicle 100 may further include a mounting seat 60 disposed on the vehicle body 10, and the bottom of the rotating shaft 43 is inserted into the mounting seat 60. As shown in fig. 5, the bottom of the rotation shaft 43 may include a plurality of positioning recesses 431 (e.g., positioning recesses 431a and 431b), and the mount 60 includes a protrusion (not shown) to be fitted with the plurality of positioning recesses 431.

As shown in fig. 2 and 5, the mounting seat 60 may be detachably coupled to the vehicle body 10 by a fixing bolt, and the lower end of the rotation shaft 43 is inserted into the rotation bearing 50 through the mounting seat 60. The positioning recesses 431a and 431b of the rotation shaft 43 cooperate with the protrusions on the inner wall of the mount to position the rotation position of the rotation shaft 43 for easy sampling.

The rotation position is a position which is preset according to actual needs and is reached after rotating for a fixed angle. Further, it will be understood by those skilled in the art that although only two positioning depressions 431a and 431b are illustrated in fig. 5, the number of the positioning depressions 431a and 431b may be less than two or greater than two.

As shown in fig. 1 and 2, in some embodiments of the present disclosure, the mount 60 may further include a resilient mechanism 61 coupled to the protrusion such that the protrusion resiliently protrudes from an inner surface of the mount 60.

The elastic means 61 may comprise a spring, which is arranged through the mounting seat 60 and connected with a protrusion (e.g. a ball). When the rotating shaft 43 rotates the table body 41 to a predetermined rotation position, the elastic mechanism 61 pushes the protrusion to elastically protrude from the inner surface of the mounting seat 60 to be fitted into the positioning recesses 431a, 431b to position the rotation position.

As shown in fig. 5, in some embodiments of the present disclosure, the rotating shaft 43 may include an adjustment structure 432 disposed on top of the rotating shaft 43 for rotating the rotating shaft 43.

As shown in fig. 5, the adjustment structure 432 is a cross-shaped recess that can be engaged by an adjustment mechanism (e.g., a phillips screwdriver) having a corresponding protrusion to rotate the shaft 43.

It will be understood by those skilled in the art that although the adjustment structure 432 is shown in fig. 5 as a cross-shaped recess, the adjustment structure 432 may also be a linear protrusion, a linear recess, a cross-shaped protrusion, a linear recess, a linear protrusion, a hexagonal recess, etc.

It will be understood by those skilled in the art that although adjustment structure 432 is shown in fig. 5 as being disposed on top of rotation shaft 43, the top of rotation shaft 43 may be connected to table body 41, and adjustment structure 432 may also be disposed on top of table body 41.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, the table body 41 may include a through-hole 411 and one or more mounting waist holes 412 (e.g., mounting waist holes 412a, 412b, 412 c). The through hole 411 can be used to accommodate the rotation shaft 43. One or more mounting waist holes 412 (e.g., mounting waist holes 412a, 412b, 412c) can be used to fixedly connect with the rotating shaft 43.

The rotary shaft 43 is inserted into the through hole 411 and detachably connected to the table body 41 by bolts inserted through the waist mounting holes 412a, 412b, and 412 c. By adjusting the positions of the bolts in the waist-mounting holes 412a, 412b, 412c, the distance between the table body 41 and the vehicle body 10 can be adjusted.

It will be understood by those skilled in the art that the rotating shaft 43 and the table body 41 may be connected by other means, such as a screw connection, or may be integrally formed.

It will be understood by those skilled in the art that although table body 41 is illustrated in fig. 1 and 2 as a body having a hexagonal cross-section, one or more table bodies 41 may include a cylinder having at least one of a circular, oval, triangular, rectangular, and polygonal cross-section. The plurality of stage bodies 41 may include bodies having the same or different sectional shapes.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, one or more of the brackets 42 (e.g., brackets 42a, 42b, 42c, 42d) include a plurality of brackets 42a, 42b, 42c, 42d extending radially outward of the table body and/or a plurality of grooves extending radially of the table body 41. The brackets 42a, 42b, 42c, 42d may be combined with grooves.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, the brackets 42a, 42b, 42c, 42d include U-shaped brackets 421a, 421b, 421c, 421 d. Two sides of the U-shaped frames 421a, 421b, 421c, 421d are opened with grooves matching with the sample 500. U-shaped frames 421a, 421b, 421c, 421d can be fixed on the side of table body 41 by bolts, with the opening facing outward.

As shown in fig. 3 and 4, in some embodiments of the present disclosure, the brackets 42a, 42b, 42c, and 42d may further include supporting frames 422a, 422b, 422c, and 422d, which are sleeved outside the U-shaped frames 421a, 421b, 421c, and 421d and are used for supporting the U-shaped frames 421a, 421b, 421c, and 421 d.

The U-shaped holders 421a, 421b, 421c, 421d may have suitable elasticity (e.g., spring) to facilitate better engagement with the sample 500. The supporting frames 422a, 422b, 422c, 422d may be spring pieces having elasticity, and may press the openings of the U-shaped frames 421a, 421b, 421c, 421d, so that the sample 500 is stably set on the brackets 42a, 42b, 42c, 42 d.

It will be appreciated by those skilled in the art that the sample 500 in the embodiments of the present disclosure is to be construed broadly, as being a single sample or including a sample holder carrying a sample.

As shown in fig. 1 and 2, in some embodiments of the present disclosure, the skid assembly 20 may include a plurality of sets of skid wheels 21 (e.g., skid wheels 21a, 21b) disposed under the vehicle body 10.

As shown in fig. 1 and 2, slide wheels 21a and 21b are provided on both sides of the sample stage 40, respectively, for sliding the vehicle body 10 on the rail 300.

It will be understood by those skilled in the art that although only two sets of sliding wheels 21a, 21b are shown in fig. 1 and 2, the number of sliding wheels 21 may be greater than two.

As shown in fig. 1 and 2, drive assembly 30 may include a mounting bracket 31 (e.g., mounting brackets 31a, 31b) and a drive magnet assembly 32 (e.g., drive magnet assemblies 32a, 32 b). The mount 31 (e.g., mounts 31a, 31b) may be an L-shaped mount, provided on the vehicle body 10. The driving magnet assemblies (e.g., driving magnet assemblies 32a, 32b) are disposed at the bottom of the mounting frame 31 (e.g., mounting frames 31a, 31 b).

It will be appreciated by those skilled in the art that although the mounts 31 shown in fig. 1 and 2 are L-shaped mounts, the mounts 31 may be C-shaped mounts or other suitable shapes.

Fig. 6 illustrates a schematic structural view of a vacuum system 1000 according to some embodiments of the present disclosure.

As shown in fig. 6, the vacuum system 1000 may include a vacuum chamber 200, a track 300, a vacuum sampling car 100, and a drive assembly 400. The rail 300 is disposed in the vacuum chamber 200, and the vacuum sample transfer vehicle 100 is disposed on the rail 300. The driving assembly 400 is disposed outside the vacuum chamber 200, coupled to the driving assembly 30 of the vacuum sample transfer car 100, and can be used for driving the vacuum sample transfer car 100 to move along the rail 300. For example, the drive assembly 400 may include a drive magnet assembly that is magnetically coupled to the drive magnet assembly 32 (e.g., drive magnet assemblies 32a, 32b) of the vacuum sampling cart 100 to move the vacuum sampling cart 100 along the track 300.

The vacuum specimen transport vehicle 100 moves along the rail 300 in the vacuum chamber 200 by the driving unit 400, reaches a predetermined position, and then rotates the specimen support 40 to reach a predetermined rotational position, thereby sampling the specimen 500. The vacuum system 1000 of the present disclosure has simple sample transferring steps and high sample transferring efficiency. The bracket 42 of the vacuum sample transferring vehicle 100 can compress the sample 500, so that the sample falling risk is greatly reduced, and the sample 500 is arranged in a radial manner by taking the platform body 41 as the center, so that the sampling is easier, and the overall sample transferring efficiency is improved.

It should be understood that the above-described embodiments are merely exemplary embodiments of the present disclosure, and are not intended to limit the present disclosure, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present disclosure should be included in the scope of protection of the present disclosure.

Claims (13)

1. A vacuum transfer cart, comprising:

a vehicle body;

the sliding assembly is connected with the vehicle body and is used for enabling the vehicle body to move along a track;

the transmission assembly is connected with the vehicle body and is used for driving the vehicle body to move along a track;

one or more sample loading platforms arranged on the vehicle body,

the sample loading platform comprises:

a table body provided on the vehicle body; and

one or more brackets disposed on the stage along a circumferential direction of the stage for supporting a sample such that at least a portion of the sample extends outwardly from a side of the stage.

2. The vacuum sampling car of claim 1, characterized in that, the one or more sample loading platforms are rotatably arranged on the car body.

3. The vacuum sample transfer vehicle of claim 2, wherein the sample carrier further comprises: and the rotating shaft is fixedly connected with the platform body and is rotatably arranged on the vehicle body.

4. The vacuum sampling vehicle of claim 3, further comprising:

and the rotating bearing is arranged on the vehicle body and is connected with the rotating shaft so that the rotating shaft is rotatably arranged on the vehicle body.

5. The vacuum sampling vehicle of claim 3, further comprising:

the mounting seat is arranged on the vehicle body, the bottom of the rotating shaft penetrates through the mounting seat,

the bottom of rotation axis includes a plurality of positioning recess, the mount pad includes with a plurality of positioning recess complex arch.

6. The vacuum sampling car of claim 5, wherein the mount further comprises:

and the elastic mechanism is connected with the bulge so that the bulge elastically protrudes from the inner surface of the mounting seat.

7. The vacuum sampling car of claim 5, wherein the rotation axis comprises:

and the adjusting structure is arranged at the top of the rotating shaft or the table body and is used for rotating the rotating shaft.

8. The vacuum sampling vehicle according to any one of claims 3 to 7,

the stage body includes:

a through hole for receiving the rotating shaft; and

one or more mounting waist holes for fixedly connecting with the rotating shaft.

9. The vacuum sampling car of any one of claims 1-7, wherein the one or more tables comprise:

the section of the cylinder is at least one of a cylinder with a round, an oval, a triangle, a rectangle and a polygon,

the one or more brackets include a plurality of brackets extending radially outward of the table body and/or a plurality of grooves extending radially of the table body.

10. The vacuum sample transfer vehicle of claim 9, wherein the cradle comprises a U-shaped frame, and the U-shaped frame is provided with slots on both sides thereof for engaging with the sample.

11. The vacuum sampling car of claim 10, wherein the cradle further comprises: and the support frame is sleeved outside the U-shaped frame and used for supporting the U-shaped frame.

12. The vacuum sampling vehicle of any one of claims 1-7,

the sliding assembly includes:

multiple sets of sliding wheels arranged below the vehicle body, and/or

The transmission assembly includes:

the mounting frame is arranged on the vehicle body; and

and the transmission magnetic assembly is arranged at the bottom of the mounting rack.

13. A vacuum system, comprising:

a vacuum chamber is arranged in the vacuum chamber,

a rail disposed within the vacuum chamber;

the vacuum sample transfer vehicle of any of claims 1-12, disposed on the track;

and the driving component is arranged outside the vacuum cavity, is coupled with the transmission component of the vacuum sample transmission vehicle and is used for driving the vacuum sample transmission vehicle to move along the track.

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